Patents Assigned to TREK HOLDING CO., LTD.
  • Dielectric layer for electrostatic chuck and electrostatic chuck
    Patent number: 9120704
    Abstract: A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (?·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.
    Type: Grant
    Filed: October 15, 2013
    Date of Patent: September 1, 2015
    Assignees: Nippon Tungsten Co., Ltd., Shinko Electric Industries Co., Ltd., Trek Holding Co., Ltd., Japan Fine Ceramics Center
    Inventors: Kouta Tsutsumi, Mitsuyoshi Nagano, Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa, Miki Saito, Toshio Uehara, Hideaki Matsubara, Tetsushi Matsuda
  • DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
    Publication number: 20140103612
    Abstract: A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (?·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.
    Type: Application
    Filed: October 15, 2013
    Publication date: April 17, 2014
    Applicants: NIPPON TUNGSTEN CO., LTD., JAPAN FINE CERAMICS CENTER, TREK HOLDING CO., LTD., SHINKO ELECTRIC INDUSTRIES CO., LTD.
    Inventors: Kouta Tsutsumi, Mitsuyoshi Nagano, Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa, Miki Saito, Toshio Uehara, Hideaki Matsubara, Tetsushi Matsuda