Abstract: An object of the invention is to provide a method of controlling a gate valve that operates the gate valve in a short time while suppressing vibration of the valve body. A method of controlling a gate valve provided on an opening of a chamber, wherein the gate valve includes a valve body that opens and closes so as to close the opening of a chamber, a valve seat provided on the edge of the opening to which the valve body is pressed, and a sealing material for sealing between the valve body and the valve seat. The invented method is characterized in that, in moving the valve body to the open position from the closed position where the valve body is pressed against the valve seat with the sealing material compressed, the valve body is made to stop temporarily for a predetermined time at the position immediately before the compressed sealing material is pulled apart or immediately after pulled apart in the opening movement of the valve body.

Abstract: A method of controlling a vacuum valve includes instructing an actuator to reduce an operating speed so that an amplitude falls within the first threshold value when the amplitude obtained from a vibration sensor exceeds a first threshold value and a second threshold value. The method also includes instructing the actuator to return to the operating speed when the amplitude obtained from the vibration sensor is below the second threshold value.

Abstract: Particle scattering is suppressed only by controlling the gate valve in opening the gate valve with the internal pressure of the chamber being matched to the atmospheric pressure.

Abstract: {Problem} In combining the master valve and the groups of slave valves, the configuration of the combination is made not for performing simply a uniform control, but is made to be such a form as capable of corresponding to the size and the inside configuration of the processing apparatus, or customer's requirements, which thereby allows a prompt adaptation to variety of demands. {Solution to Problem} In combining the master controller and the slave controller, the operation mode is set, and it is made possible to transmit the generated valve opening degree common signal and the generated valve opening degree individual signal from the master controller, corresponding to the operation mode, to the slave controllers that are connected in the sequential daisy-chain style, thereby the slave valves are opening-degree-controlled by any of such generated valve opening degree signals.

Abstract: {Technical Problem} To provide a gate valve that can control the amount of squeeze of sealing material according to each of situations, that is, under the in-manufacturing or during vacuum-maintaining state; thereby, the invented gate valve is capable of suppressing deterioration of its sealing material and lengthening the service life of the sealing material used therein. {Solution to Problem} The gate valve 100 of the embodiment has the control device 11, which is comprised of the equipment control unit 12 that transmits an instruction either an in-manufacturing CLOSE instruction or a FULL CLOSE instruction and the storage means 13 that stores position date that corresponds to each of such instructions. The control device 11 receives either of such instructions and generates the position signal referring to the corresponding position data.

Abstract: {Summary} {Technical Problem} To provide a gate valve that can control the amount of squeeze of sealing material according to each of situations, that is, under the in-manufacturing or during vacuum-maintaining state; thereby, the invented gate valve is capable of suppressing deterioration of its sealing material and lengthening the service life of the sealing material used therein. {Solution to Problem} The gate valve 100 of the embodiment has the control device 11, which is comprised of the equipment control unit 12 that transmits an instruction either an in-manufacturing CLOSE instruction or a FULL CLOSE instruction and the storage means 13 that stores position date that corresponds to each of such instructions. The control device 11 receives either of such instructions and generates the position signal referring to the corresponding position data.

Abstract: To reduce invasion and adhesion of foreign matters into and onto the gating-member retreat room in the transition from the gate-open state to the gate-close state including retreat and on-shutting-movement of the gating-member. The shutter, being moved in the shuttering movement room, shuts the entrance aperture by making the shutter sealing contact with the stationary seal by such movement of the shutter itself when the gating-member is accommodated in the gating-member retreat room, and, also being moved in the shuttering movement room, shuts the entrance aperture by making the shutter sealing contact with the second gate seal by such movement of the shutter itself when the gating-member, being moved in the shuttering movement room, shuts the exhaust port by making the first gate seal contact with the stationary seal by such movement of the gating-member itself.

Abstract: To reduce invasion and adhesion of foreign matters into and onto the gating-member retreat room in the transition from the gate-open state to the gate-close state including retreat and on-shutting-movement of the gating-member. The shutter, being moved in the shuttering movement room, shuts the entrance aperture by making the shutter sealing contact with the stationary seal by such movement of the shutter itself when the gating-member is accommodated in the gating-member retreat room, and, also being moved in the shuttering movement room, shuts the entrance aperture by making the shutter sealing contact with the second gate seal by such movement of the shutter itself when the gating-member, being moved in the shuttering movement room, shuts the exhaust port by making the first gate seal contact with the stationary seal by such movement of the gating-member itself.

Abstract: A pendulum gate valve incorporates an improved power transmission device for transmitting the movement of a pivot arm of the valve to a valve disk that selectively closes the valve. The power transmission device has a supporting plate and a valve disk support that is fixed to a tip end of the pivot arm and movable relative to the valve disk. First and second facing roller guide grooves, formed on the valve disk and on the valve disk support, respectively, extend obliquely downwardly so as to be separated from the valve disk. Third and fourth facing roller guide grooves, formed on the valve disk support and the supporting plate, respectively, extend obliquely downwardly so as to approach the valve disk. A first roller engages the first and second roller guide grooves, and a second roller engages the third and fourth roller guide grooves.

Abstract: A pendulum gate valve incorporates an improved power transmission device for transmitting the movement of a pivot arm of the valve to a valve disk that selectively closes the valve. The power transmission device has a supporting plate and a valve disk support that is fixed to a tip end of the pivot arm and movable relative to the valve disk. First and second facing roller guide grooves, formed on the valve disk and on the valve disk support, respectively, extend obliquely downwardly so as to be separated from the valve disk. Third and fourth facing roller guide grooves, formed on the valve disk support and the supporting plate, respectively, extend obliquely downwardly so as to approach the valve disk. A first roller engages the first and second roller guide grooves, and a second roller engages the third and fourth roller guide grooves.

Abstract: A gate valve including a valve disc for opening and closing an opening formed in a partition wall for separating a processing chamber from an other chamber, a valve seat formed on the wall around the opening, and a block provided on a side surface of the valve disc facing the processing chamber for filling up the opening. The valve disc is moved selectively brought into contact with the valve seat. When the opening is closed by the valve disc the block is positioned in the opening to close the opening, and when the opening is not closed by the valve disc the block is not positioned in the opening. A gate valve includes a valve disc for opening and closing one side of an opening formed in a partition wall for separating a processing chamber from an other chamber, a valve seat formed on one side surface of the wall around the opening, a closing member for opening and closing the other side of the opening, and a groove formed in the wall for receiving therein the closing member.

Abstract: A gate valve wherein a valve disc is moved to a position where the valve disc is brought into contact with a valve seat and a position where the valve disc is separated from the valve seat by a driving device provided outside of a valve housing through a valve rod projected from the inside to the outside of the valve housing. The valve disc is brought into contact under pressure with the valve seat in the valve housing when the valve rod is inclined at the end of the movement of the valve rod. A cylindrical bellows is provided at the outside of the valve housing, one end of the cylindrical bellows being sealingly secured to the valve housing and the other end of the cylindrical bellows being sealingly secured to the valve rod. The valve rod is inclined centering arround a center of the axial direction of said cylindrical bellows in the compressed state thereof.

Abstract: Provided is a gate valve for opening and closing an aperture formed in a body of a chamber and designed so that an object is loaded into or unloaded from the chamber, comprising a lift mechanism provided on a side portion of the chamber body, a supporting portion supported by a lift mechanism for up-and-down motion, a valve plate supported by the supporting portion and movable between a closed position such as to close the aperture of the chamber body and an open position such that the valve plate is separated from the aperture to leave the aperture open as the supporting portion is moved up and down by the lift mechanism, and a separating mechanism for allowing the valve plate to move to a position ahead of the aperture so that the valve plate is separated from the aperture.