Abstract: Measurement technique and apparatus for examining a region of a patterned surface such as an integrated circuit (IC). Excitation x-ray, neutron, particle-beam or gamma ray radiation is directed toward a two-dimensional sample area of the IC. Emissions (e.g., x-ray fluorescence—XRF) from the sample area are detected. A mask is placed in a planar radiation path formed by the source, detector and the sample area, and in one embodiment moveable relative to the sample area. The mask includes an elongate aperture to substantially confine the excitation radiation directed to the sample area, and the emissions from the sample area, to the planar radiation path when arranged parallel to a first axis of the two-dimensional sample area. The invention allows predictive measurement of feature characteristics in active circuit regions of the IC, using sample areas outside of these regions.

Abstract: Devices for improving the capturing and utilization of high-energy electromagnetic radiation, for example, x-rays, gamma rays, and neutrons, for use in physical, medical, and industrial analysis and control applications are disclosed. The devices include optics having a plurality of optical crystals, for example, doubly-curved silicon or germanium crystals, arranged to optimize the capture and redirection of divergent radiation via Bragg diffraction. In one aspect, a plurality of optic crystals having varying atomic diffraction plane orientations are used to capture and focus divergent x-rays upon a target. In another aspect, a two- or three-dimensional matrix of crystals is positioned relative to an x-ray source to capture and focus divergent x-rays in three dimensions.

Abstract: X-ray fluorescence (XRF) spectroscopy systems and methods are provided. One system includes a source of x-ray radiation and an excitation optic disposed between the x-ray radiation source and the sample for collecting x-ray radiation from the source and focusing the x-ray radiation to a focal point on the sample to incite at least one analyte in the sample to fluoresce. The system further includes an x-ray fluorescence detector and a collection optic comprising a doubly curved diffracting optic disposed between the sample and the x-ray fluorescence detector for collecting x-ray fluorescence from the focal point on the sample and focusing the fluorescent x-rays towards the x-ray fluorescence detector.

Abstract: A diagnostic technique for an x-ray source. A system monitors existing conditions (e.g., tube current Y) in the source to track degradation of certain components to anticipate failure. Storage of past characteristics and reference characteristics is also provided for predicting failure and other operating conditions of the source. Communication techniques are provided for the monitoring and warning functions.

Abstract: An x-ray fluorescence technique for detecting the level of arsenic in a sample of water or body fluid. Arsenic and lead are expected to fluoresce in a first energy band and lead is expected to also fluoresce separately in a second energy band. An excitation path directs x-rays toward the sample; a first detection path detects x-ray fluorescence of the first energy band from the sample; and a second detection path detects x-ray fluorescence of the second energy band from the sample. The level of arsenic can be obtained by analyzing the x-ray fluorescence from both detection paths, and using a constant which relates the level of lead in the second energy band to the level of lead in the first energy band. The excitation path and each detection path may each include a monochromating optic to transmit the desired x-ray energy band, e.g., a doubly curved optic.

Abstract: A measurement and processing technique enabling x-ray analysis systems to handle dynamically changing samples and other conditions resulting in both significant and insignificant measurement changes. A stream of input values related to measured compositional information of the sample is received, and a stream of output compositional values is produced. The current output value y[n] is set as a function of the received input value x[n] if the received input value x[n] differs from x[n?1] by more than an intensity-dependent deviation limit; and alternatively the current output y[n] is set as a function of the previous output y[n?1] and the received input value x[n] if the received input value x[n] differs from x[n?1] by less than the intensity-dependent deviation limit. The intensity-dependent deviation limit is maintained as a function of the intensity of the measured compositional information.

Abstract: An x-ray source assembly (2700) and method of operation are provided having enhanced output stability. The assembly includes an anode (2125) having a source spot upon which electrons (2120) impinge and a control system (2715/2720) for controlling position of the anode source spot relative to an output structure. The control system can maintain the anode source spot location relative to the output structure (2710) notwithstanding a change in one or more operating conditions of the x-ray source assembly. One aspect of the disclosed invention is most amenable to the analysis of sulfur in petroleum-based fuels.

Abstract: A method and apparatus for analyzing fluids by means of x-ray fluorescence. The method and apparatus are applicable to any fluid, including liquids and gases, having at least one component that emits x-ray fluorescence when exposed to x-rays. The apparatus includes an x-ray source (82) including an x-ray tube (64) having improved heat dissipating properties due to the thermal coupling of the x-ray tube with a thermally-conductive, dielectric material (70, 1150). The x-ray tube also includes means for aligning (100, 2150, 2715) the x-ray tube with the x-ray source housing whereby the orientation of the x-ray beam produced by the x-ray source can be optimized, and stabilized various over operating conditions. The method and apparatus may also include an x-ray detector having a small-area, for example, a PIN-diode type semiconductor x-ray detector (120), that can provide effective x-ray detection at room temperature.

Abstract: Measurement technique and apparatus for examining a region of a patterned surface such as an integrated circuit (IC). Excitation x-ray, neutron, particle-beam or gamma ray radiation is directed toward a two-dimensional sample area of the IC. Emissions (e.g., x-ray fluorescence—XRF) from the sample area are detected. A mask is placed in a planar radiation path formed by the source, detector and the sample area, and in one embodiment moveable relative to the sample area. The mask includes an elongate aperture to substantially confine the excitation radiation directed to the sample area, and the emissions from the sample area, to the planar radiation path when arranged parallel to a first axis of the two-dimensional sample area. The invention allows predictive measurement of feature characteristics in active circuit regions of the IC, using sample areas outside of these regions.

Abstract: A method and apparatus for analyzing fluids by means of x-ray fluorescence. The method and apparatus are applicable to any fluid, including liquids and gases, having at least one component that emits x-ray fluorescence when exposed to x-rays. The apparatus includes an x-ray source (82) including an x-ray tube (64) having improved heat dissipating properties due to the thermal coupling of the x-ray tube with a thermally-conductive, dielectric material (70, 1150). The x-ray tube also includes means for aligning (100, 2150, 2715) the x-ray tube with the x-ray source housing whereby the orientation of the x-ray beam produced by the x-ray source can be optimized, and stabilized various over operating conditions. The method and apparatus may also include an x-ray detector having a small-area, for example, a PIN-diode type semiconductor x-ray detector (120), that can provide effective x-ray detection at room temperature.

Abstract: An x-ray diffraction measurement apparatus for measuring a sample, having an x-ray source and detector coupled together in a combination for coordinated rotation around the sample, such that x-ray diffraction data can be taken at multiple phi angles. The apparatus may provide a pole figure representation of crystal orientation of the sample, wherein the pole figure represents the crystal alignment, and a full width half maximum value is calculated from the pole figure for crystal alignment quantification. Data may be taken at discrete positions along a length of the sample, and the sample is in a fixed position during measuring; or data may be taken continuously along a length of the article, as the sample continuously moves along its length in a movement path between the source and detector. The sample may be in the form of a tape, linearly passing through a measurement zone.

Abstract: An improved total-reflection x-ray fluorescence (TXRF) apparatus using a doubly-curved optic is presented for use in detecting foreign matter on surfaces, for example, semiconductor wafers. The apparatus includes an x-ray source, a doubly-curved x-ray optic for diffracting and focusing the x-rays, a surface onto which at least some of the diffracted x-rays are directed, and an x-ray detector for detecting resultant x-ray fluorescence emitted by any foreign matter present on the surface One or more apertures may be provided for limiting the dispersion angle of the x-rays. The crystal or multi-layer doubly-curved optic typically adheres to Bragg's law of x-ray diffraction may be curved to a toroidal, ellipsoidal, spherical, parabolic, hyperbolic, or other doubly-curved shape. An apparatus for diffracting x-rays is also presented.

Abstract: A method and device for cooling and electrically-insulating a high-voltage, heat-generating component, for example, an x-ray tube (1105) for analyzing fluids by means of x-ray fluorescence. The device includes an x-ray source (1100) including an x-ray tube (1105) having improved heat-dissipating properties due to the thermal coupling of the x-ray tube with a thermally-conductive, dielectric material (1150). The device may include a base assembly (1135) mounted to the component for conducting heat away from the component while electrically isolating the component. In one aspect of the invention, the base assembly includes two copper plates (1140, 1145) separated by a dielectric plate (1150). The dielectric plate minimizes or prevents the leakage of current through the base assembly (1135). One aspect of the disclosed invention is most amenable to the analysis of sulfur in petroleum-based fuels.

Abstract: Methods and devices for aligning an x-ray optic with a source of x-rays and methods and devices for determining a focusing characteristic of an x-ray optic are provided. The methods and devices simplify the process of aligning an x-ray optic device (for example, a polycapillary x-ray optic) to an x-ray source or for measuring a focusing characteristic, for example, the focal length or beam shape, of an x-ray optic. In one aspect, the device includes a housing having a first aperture adapted for receiving an x-ray optic and a surface having an x-ray flourescent material from which visual fluorescence occurs when impinged by x-rays. The size and shape of fluorescence from the surface may be varied by moving the surface to determine, for example, the focal length of the x-ray optic.

Abstract: X-ray fluorescence (XRF) spectroscopy systems and methods are provided. One system includes a source of x-ray radiation and an excitation optic disposed between the x-ray radiation source and the sample for collecting x-ray radiation from the source and focusing the x-ray radiation to a focal point on the sample to incite at least one analyte in the sample to fluoresce. The system further includes an x-ray fluorescence detector and a collection optic comprising a doubly curved diffracting optic disposed between the sample and the x-ray fluorescence detector for collecting x-ray fluorescence from the focal point on the sample and focusing the fluorescent x-rays towards the x-ray fluorescence detector.

Abstract: A unitary support device for a polycapillary optic is provided wherein a housing has a central opening therethrough and at least two locating structures, such as positioning shoulders, formed therein. Each locating structure is sized and positioned to accommodate a different polycapillary positioning component within the housing. Each polycapillary positioning component has at least one opening for holding at least one polycapillary of the polycapillary optic. One or more coaxial bores can define the central opening of the housing and the locating shoulders in one continuous fabrication operation. Depending upon the polycapillary positioning components employed, i.e., location of the openings therein for accommodating the polycapillaries, the positioning components can be oriented within the housing such that radiation from one of a divergent beam, a focused beam, or a parallel beam is collected by the optic, and such that the optic can output one of a collimated beam, a focused beam or a divergent beam.

Abstract: An x-ray apparatus and method are presented for controlling x-rays to analyze combinatorial libraries for the rapid screening of different materials and different conditions. The apparatus includes a laboratory x-ray source, one or more x-ray optics, a combinatorial library, and a detector such as an x-ray detector or an electron energy detector. The apparatus can be used to perform analytical measurements on individual members of the library, where the measurements may comprise x-ray fluorescence, x-ray diffraction, total reflection x-ray fluorescent spectrometry, and/or extended x-ray absorption fine structure.

Abstract: An electrical connector for a cable, a sleeve for a cable, and a method for fabricating an electrical connection. The connector, sleeve, and the method can all used for high-voltage electrical devices, for example, x-ray generating devices. In particular, the invention may be used for high-voltage electrical devices fabricated with an encapsulant, for example, a silicone potting material. In one aspect of the invention, the connector provides a high-voltage electrical connection having an integral bond between the high-voltage cable and the encapsulant with little or no air gaps. The connector includes a high-voltage cable having a sheath made from a first material, for example, polyethylene, and a sleeve made from a second material, for example, a silicone-based material, that is compatible with the encapsulant. Other aspects of the invention include a method for fabricating the connector and the sleeve used in the connector.

Abstract: An optically curved device is presented for use in focusing or imaging x-rays from a divergent source. The device includes a plurality of curved atomic reflection planes, at least some of which are separated by a spacing d which varies in at least one direction across the optically curved device. A doubly curved optical surface is disposed over the plurality of curved reflection planes. The spacing d varies continuously in the at least one direction for enhanced matching of incident angles of x-rays from a divergent source impinging on the optical surface with the Bragg angles on at least some points of the optical surface. The doubly curved optical surface can have an elliptic, parabolic, spheric or aspheric profile.

Abstract: An optically curved device and method of fabrication are presented wherein a flexible layer is bonded to a thick epoxy layer which functions to conform the flexible layer to a desired shape. The thick epoxy layer undergoes high viscosity flow under pressure and conforms the flexible layer to a curved surface of a mold. The pressure on the epoxy can be created by squeezing the epoxy using a backing plate. As long as the optically smooth surface of the flexible layer has good contact with the curved surface of the mold under pressure of the epoxy flow, irregularities in the flexible layer optical surface are eliminated and the shape of the flexible layer is maintained when the epoxy is cured and the mold removed. Materials other than epoxies, such as thermal plastics can also be used for bonding and conforming the flexible layer.