Patents Examined by Alexander G. Gmyka
  • Patent number: 6383948
    Abstract: A coating area of wafer W is divided into, for example, three regions. The wafer W and/or a supply nozzle are driven in a predetermined coating direction and/or a coating direction such that coating start positions of the adjacent divided regions are not next to each other and/or the coating is not continuously performed in order of a coating end position and a coating start position when the coating end position of one region of the adjacent divided regions and the coating start position of the other region are adjacent to each other, whereby forming a liquid film of a resist liquid for each divided region of the surface of wafer W. As a result, a phenomenon, in which the resist liquid is drawn to the coating start position, so as to increase the film thickness of this portion, occurs in only the corresponding region. Resultantly, uniformity of an inner surface of the film thickness can be improved.
    Type: Grant
    Filed: December 13, 2000
    Date of Patent: May 7, 2002
    Assignee: Tokyo Electron Limited
    Inventors: Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita, Hirofumi Ookuma, Masami Akimoto
  • Patent number: 6071850
    Abstract: A method for producing by electrophoretic deposition multi-layer, polyfunctional, catalyst members for use in catalytic converters having a plurality of suitably porous and adherent catalyst support coatings of substantially uniform thickness, a plurality of non-identical catalytic agents imbued therein/on, and a flexible metal substrate, are disclosed. Such process involves maintaining electrical interaction between a metal substrate previously coated with catalyst-catalyst support material, the power source, and the electrodes disposed in the electrophoretic deposition ("EPD") cell containing a slurry of a second catalyst support material and a second catalyst composition non-identical to that found in the first catalytically-active layer.
    Type: Grant
    Filed: April 17, 1998
    Date of Patent: June 6, 2000
    Assignee: Engelhard Corporation
    Inventors: Semyon D. Friedman, Martin B. Sherwin, Rasto Brezny, Poovatholil F. Francis
  • Patent number: 5948377
    Abstract: A catalyst composition comprising at least one first supports, at least one first precious metal component, at least one second supports, and at least one second precious metal component. The total amount of the first precious metal component comprises from 1 to 99 weight percent based on the total of the first and second precious metal components. The surface area of the at least one first support is greater than the surface area of the at least one second support. Optionally or alternatively, the average particle size of the at least one first supports is greater than the average particle size of the at least one second supports. The present invention includes a method to prepare the catalyst composition and a method to use the catalyst composition as a three-way catalyst.
    Type: Grant
    Filed: April 7, 1997
    Date of Patent: September 7, 1999
    Assignee: Engelhard Corporation
    Inventor: Shiang Sung
  • Patent number: 5866502
    Abstract: A method of preparing a V.sub.a Sb.sub.b M.sub.m N.sub.n O.sub.x catalyst useful in the ammoxidation of a C.sub.2 -C.sub.5 hydrocarbon to its corresponding .alpha., .beta. unsaturated nitrile comprising heating an aqueous mixture comprising V.sub.2 O.sub.5 and Sb.sub.2 O.sub.3 at a temperature above about to C., preferably to C., most preferably to C., under autogenous pressure with agitation to form a catalyst precursor, drying the catalyst precursor and calcining the catalyst precursor to form the finished catalyst.
    Type: Grant
    Filed: March 27, 1997
    Date of Patent: February 2, 1999
    Assignee: The Standard Oil Co.
    Inventors: Larry Michael Cirjak, Marc Anthony Pepera
  • Patent number: 5750460
    Abstract: A catalyst and a process for producing the catalyst are provided. For the catalytic reduction of NO.sub.x and for the oxidation of hydrocarbons, the catalyst contains a spinel containing the metals copper, zinc and aluminum.
    Type: Grant
    Filed: June 16, 1995
    Date of Patent: May 12, 1998
    Assignees: Daimler-Benz AG, BASF Aktiengesellschaft
    Inventors: Martin Hartweg, Martina Heinau, Andrea Seibold, Leonhard Walz, Thomas Fetzer, Bernd Morsbach, Wolfgang Buechele
  • Patent number: 5674797
    Abstract: The invention relates to a method for regenerating a hydrogenation catalyst employed in the production of hydrogen peroxide, being characterized in that the catalyst to be regenerated is treated with an oxidized working solution used in the production of hydrogen peroxide.
    Type: Grant
    Filed: February 22, 1995
    Date of Patent: October 7, 1997
    Assignee: Finnish Chemicals Oy
    Inventors: Reijo Seppanen, Vesa Jokinen
  • Patent number: 5672558
    Abstract: A process is disclosed for the preparation of formed Group IVB metal oxide compositions suitable for use as catalyst supports which comprises: A) preparing a paste comprising (i) one or more calcined Group IVB metal oxides, (ii) at least one solvent and (iii) at least one acid; B) forming a shaped particle from said paste; and C) drying and calcining said shaped particle. Also disclosed are formed compositions prepared by the foregoing process and catalysts where the formed compositions incorporate therein or have supported thereon catalytically active materials.
    Type: Grant
    Filed: May 6, 1996
    Date of Patent: September 30, 1997
    Assignee: Engelhard Corporation
    Inventors: James F. White, Jeffrey J. Ramler
  • Patent number: 5668076
    Abstract: A photocatalyst comprises, on the surface, a zinc oxide film which comprises zinc oxide fine particles formed by anodic oxidation of zinc and having a particle size of not more than 0.2 .mu.m and a method for preparing a photocatalyst comprises the step of anodically oxidizing the surface of a zinc metal substance or a substance mainly comprising zinc metal to form, on the surface, a zinc oxide film which comprises zinc oxide fine particles having a particle size of not more than 0.2 .mu.m. The photocatalyst permits quite efficient decomposition or destruction of gases or bacterial cells to be treated, can easily be adhered to faces to which the photocatalytic function is to be imparted to thus impart sterilization and/or deodorization functions thereto and can easily be fitted to various apparatuses to which a film has conventionally been applied with great difficulty.
    Type: Grant
    Filed: April 26, 1995
    Date of Patent: September 16, 1997
    Assignee: Mitsui Mining Smelting Co., Ltd. et al.
    Inventors: Yasuhide Yamagushi, Masatoshi Yamazaki, Akira Fujishima, Kazuhito Hashimoto