Abstract: Provided herein are photoresist compositions and methods for fabricating semiconductor devices using the same. A photoresist composition may include an organometallic material, a fluorine-containing material, and an organic solvent.
Abstract: A radiation-sensitive resin composition contains: a polymer that includes a structural unit including an acid-labile group; and a radiation-sensitive acid generating agent. The radiation-sensitive acid generating agent includes a sulfonate anion and a radiation-sensitive cation. The sulfonate anion includes two or more rings, and an iodine atom and a monovalent group having 0 to 10 carbon atoms which includes at least one of an oxygen atom and a nitrogen atom bond to at least one of the two or more rings. The ring is preferably an aromatic ring. The radiation-sensitive acid generating agent is preferably a compound represented by formula (1). In the formula (1), A1 represents a group obtained from a compound which includes a ring having 3 to 20 ring atoms by removing (p+q+r+1) hydrogen atoms on the ring.
Type:
Grant
Filed:
March 11, 2020
Date of Patent:
February 28, 2023
Assignee:
JSR CORPORATION
Inventors:
Kazuya Kiriyama, Katsuaki Nishikori, Takuhiro Taniguchi, Ken Maruyama
Abstract: A method of correcting error of hydrogen pressure sensor of vehicle fuel cell system, may checking, whether an opening ratio of a hydrogen pressure regulation valve is in a normal range by use of data map; checking whether a hydrogen purge valve is opened when the opening ratio of the hydrogen pressure valve is not within the normal range; changing the opening ratio of the hydrogen pressure regulation valve at least one time when the hydrogen purge valve is determined as being opened, and detecting two or more measurement values of the hydrogen pressure sensor at two or more different opening ratios of the hydrogen pressure regulation valve; and comparing, the two or more measurement values of the hydrogen pressure sensor detected at the two more opening ratios, respectively with predetermined pressure values corresponding to the opening ratios, and correcting errors between the measurement values and the predetermined pressure values.
Type:
Grant
Filed:
April 29, 2019
Date of Patent:
February 21, 2023
Assignees:
Hyundai Motor Company, Kia Motors Corporation
Abstract: Disclosed are a photoresist composition, a pixel definition structure and a manufacturing method thereof, and a display panel. The photoresist composition includes an organic film-forming resin, a superhydrophobic polymerizable monomer, a polyfunctional crosslinkable polymerizable monomer, a photoinitiator, an additive and a solvent.
Abstract: A positive resist composition is provided comprising two onium salts, a base polymer comprising acid labile group-containing recurring units, and an organic solvent. The positive resist composition forms a pattern having PED stability and improved properties including DOF, LWR, and controlled footing profile.
Abstract: Provided is a method of producing a quaternary alkyl ammonium hypochlorite solution with an excellent storage stability. Specifically, provided is a method of producing a quaternary alkyl ammonium hypochlorite solution, the method including: a preparation step in which a quaternary alkyl ammonium hydroxide solution is prepared and the concentration of amines in the quaternary alkyl ammonium hydroxide solution is set to 20 ppm by mass or less; and a reaction step in which the quaternary alkyl ammonium hydroxide solution is brought into contact with chlorine gas, wherein the concentration of carbon dioxide of a gas phase in the reaction step is 100 ppm by volume or less and the pH of a liquid phase in the reaction step is 10.5 or more.
Abstract: A method for forming a photoresist relief image including applying a layer of a coating composition on a substrate; and disposing a layer of a photoresist composition on the layer of the coating composition, wherein the coating composition comprises an amine-containing polymer comprising a hydrocarbon-substituted amino group and having nitrogen atoms in an amount from 3 to 47 weight percent, based on a total weight of the amine-containing polymer.
Type:
Grant
Filed:
October 15, 2019
Date of Patent:
January 31, 2023
Assignees:
ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD., ROHM AND HAAS ELECTRONIC MATERIALS LLC
Inventors:
Hye-Won Lee, Min Kyung Jang, Soo Jung Leem, Jae Hwan Sim, Emad Aqad
Abstract: Articles and methods including additives in electrochemical cells, are generally provided. As described herein, such electrochemical cells may comprise an anode, a cathode, an electrolyte, and optionally a separator. In some embodiments, at least one of the anode, the cathode, the electrolyte, and/or the optional separator may comprise an additive and/or additive precursor. For instance, in some cases, the electrochemical cell comprises an electrolyte and an additive and/or additive precursor that is soluble with and/or is present in the electrolyte. In some embodiments, the additive precursor comprises a disulfide bond. In certain embodiments, the additive is a carbon disulfide salt. In some cases, the electrolyte may comprise a nitrate.
Type:
Grant
Filed:
July 2, 2021
Date of Patent:
January 31, 2023
Assignee:
Sion Power Corporation
Inventors:
Yuriy V. Mikhaylik, Igor P. Kovalev, Thomas Weiss
Abstract: A polymer comprising a first repeating unit including an amino group protected by an alkoxycarbonyl group; a second repeating unit including a nucleophilic group; and a third repeating unit including a crosslinkable group, wherein the first repeating unit, the second repeating unit, and the third repeating unit are different from each other.
Type:
Grant
Filed:
April 17, 2020
Date of Patent:
January 31, 2023
Assignee:
ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.
Inventors:
Jung June Lee, Suwoong Kim, Min Kyung Jang, Jin Hong Park, Jae Hwan Sim, Jae Bong Lim
Abstract: Provided is a light-emitting element with high emission efficiency including a fluorescent material as a light-emitting substance. In a light-emitting element including a pair of electrodes and an EL layer between the pair of electrodes, a delayed fluorescence component due to triplet-triplet annihilation accounts for 20% or more of light emitted from the EL layer, and the light has at least one emission spectrum peak in the blue wavelength range. The EL layer includes an organic compound in which an energy difference between the lowest singlet excited energy level and the lowest triplet excited energy level is 0.5 eV or more. The EL layer includes a benzo[a]anthracene compound.
Type:
Grant
Filed:
December 4, 2020
Date of Patent:
January 24, 2023
Inventors:
Hiroshi Kadoma, Kaori Ogita, Tsunenori Suzuki, Satoshi Seo
Abstract: A novel onium salt of formula (1) and a chemically amplified resist composition comprising the same as a PAG are provided. When processed by photolithography using KrF or ArF excimer laser, EB or EUV, the resist composition has a high sensitivity and reduced acid diffusion and is improved in exposure latitude, MEF, and LWR.
Abstract: A surface treatment composition and methods for improving adhesion of an organic layer on a titanium-containing hardmask includes forming a self-assembled monolayer on a surface of the titanium-containing hardmask prior to depositing the organic layer. The self-assembled monolayer is formed from a blend of alkyl phosphonic acids of formula (I): X(CH2)nPOOH2 (I), wherein n is 6 to 16 and X is either CH3 or COOH, wherein a ratio of the methyl terminated (CH3) alkyl phosphonic acid to the carboxyl terminated (COOH) alkyl phosphonic acid ranges from 25:75 to 75:25.
Type:
Grant
Filed:
December 2, 2019
Date of Patent:
January 17, 2023
Assignee:
International Business Machines Corporation
Inventors:
Ekmini A. De Silva, Dario Goldfarb, Indira Seshadri
Abstract: Disclosed are a compound represented by formula (I), a resin including a structural unit derived from the compound, and a resist composition: wherein R1 represents an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom; A1 represents a single bond or *-A2-CO—O—; A2 and A3 represent an alkanediyl group; W represents a divalent monocyclic saturated alicyclic hydrocarbon group; R2 and R3 each represent a hydrogen atom or a hydrocarbon group which may have a fluorine atom, etc., R4 represents a hydrogen atom, —CH2— in the group may be replaced by —O—, —S—, etc., R2 and R3, or R2, R3 and R4 may be bonded each other to form a ring which may have a fluorine atom or an alkyl group.
Abstract: A sol of inorganic oxide particles is stably dispersed in a hydrophilic organic solvent containing a hydrocarbon such as a paraffinic hydrocarbon or a naphthenic hydrocarbon. The sol contains a dispersion medium containing an organic solvent containing a C6-18 paraffinic hydrocarbon, a C6-18 naphthenic hydrocarbon, or a mixture of these, a C4-8 alcohol having a carbon chain with a carbon-carbon bond in the molecule in an amount of 0.1 to 5% by mass in the entire dispersion medium, and inorganic oxide particles having an average particle diameter of 5 to 200 nm as measured by dynamic light scattering as a dispersoid, wherein the inorganic oxide particles contain a C1-3 alkyl group bonded to a silicon atom and a C4-18 alkyl group. The paraffinic hydrocarbon is a normal paraffinic hydrocarbon or an isoparaffinic hydrocarbon. The naphthenic hydrocarbon is a saturated aliphatic cyclic hydrocarbon substitutable with a C1-10 alkyl group.
Abstract: A film-forming powder containing a rare earth oxyfluoride has an average particle size D50 of 0.6-15 ?m, a total volume of ?10 ?m pores of 0.51-1.5 cm3/g as measured by mercury porosimetry, and a BET surface area of 3-50 m2/g is suitable for forming a dense film in high yields or deposition rates and high productivity. The film-forming powder having a greater pore volume can be prepared by forming a rare earth ammonium fluoride complex salt on surfaces of rare earth oxide particles to provide precursor particles, and heat treating the precursor particles at a temperature of 350 to 700° C.
Abstract: Methods and systems are provided for a rebalancing reactor of a flow battery system. In one example, a pH of a battery electrolyte may be maintained by the rebalancing reactor by applying a negative potential to a catalyst bed of the rebalancing reactor. A performance of the rebalancing reactor may further be maintained by treating the catalyst bed with deionized water.
Type:
Grant
Filed:
April 19, 2021
Date of Patent:
January 3, 2023
Assignee:
ESSTECH, INC.
Inventors:
Yang Song, Timothy J. McDonald, Alexandria Behr
Abstract: An all-solid-state battery, wherein on a first side surface of an all-solid-state battery laminate, a first electrode current collector layer includes a first electrode current collector protruding part, which protrudes in a surface direction, and a second electrode current collector layer includes a second electrode current collector protruding part, which protrudes in a surface direction, a surface direction area of a second electrode-solid electrolyte laminate is larger than a surface direction area of a first electrode laminate, the first electrode laminate is laminated on the inside of the second electrode-solid electrolyte laminate when viewed from the lamination direction, and on the first side surface, an edge of the second electrode-solid electrolyte laminate in the surface direction is at least partially covered with a resin layer so that the first electrode current collector protruding part does not directly contact the edge in the surface direction of the second electrode-solid electrolyte laminat
Abstract: A nonaqueous electrolyte battery includes: a positive electrode containing a positive electrode active material made of a compound represented by a compositional formula of LiMn1-x-yFexAyPO4 (wherein A is at least one selected from the group consisting of Mg, Ca, Al, Ti, Zn and Zr, 0?x?0.3, and 0?y?0.1); a negative electrode containing a negative electrode active material made from a titanium composite oxide; and a nonaqueous electrolyte, wherein a ratio (IP—F/IP—O) of a peak intensity (IP—F) of a P—F bond to a peak intensity (IP—O) of a P—O bond on the surface of the positive electrode, which are measured by X-ray photoelectron spectroscopic analysis, is 0.4 or more and 0.8 or less.
Abstract: An electrode including an electrode active material including lithium (Li) and a polymer layer coating at least a portion of the electrode active material is provided. The polymer layer includes a polymerization product of a monomer having Formula I: where R1 and R2 are independently an aryl or a branched or unbranched C1-C10 alkyl and X1 and X2 are independently chlorine (Cl), bromine (Br), or iodine (I).
Abstract: A fuel cell recovery control system and method are provided to supply hydrogen to the cathode of a fuel cell stack to remove an oxide film formed on a platinum surface of the cathode. The performance of the fuel cell stack is recovered in accordance with the oxide film removal. In addition, electric power generated during the performance recovery of the fuel cell stack is consumed in an inverter and, as such, overcharge of a battery is prevented.
Type:
Grant
Filed:
October 25, 2019
Date of Patent:
November 29, 2022
Assignees:
Hyundai Motor Company, Kia Corporation
Inventors:
Hyun Bae Dong, Won Jung Kim, Yong Doo Son