Patents Examined by Brett Feeney
  • Patent number: 9432024
    Abstract: A device includes a housing, at least two qubits disposed in the housing and a resonator disposed in the housing and coupled to the at least two qubits, wherein the at least two qubits are maintained at a fixed frequency and are statically coupled to one another via the resonator, wherein energy levels |03> and |12> are closely aligned, wherein a tuned microwave signal applied to the qubit activates a two-qubit phase interaction.
    Type: Grant
    Filed: September 2, 2014
    Date of Patent: August 30, 2016
    Assignee: International Business Machines Corporation
    Inventors: Jerry M. Chow, Jay M. Gambetta, Seth T. Merkel, Chad T. Rigetti, Matthias Steffen
  • Patent number: 9431512
    Abstract: A method of forming a nanowire device includes forming semiconductor material layers above a semiconductor substrate, forming a gate structure above the semiconductor material layers, forming a first sidewall spacer adjacent to the gate structure and forming a second sidewall spacer adjacent to the first sidewall spacer. The method further includes patterning the semiconductor material layers such that each layer has first and second exposed end surfaces. The gate structure, the first sidewall spacer, and the second sidewall spacer are used in combination as an etch mask during the patterning process. The method further includes removing the first and second sidewall spacers, thereby exposing at least a portion of the patterned semiconductor material layers. The method further includes forming doped extension regions in at least the exposed portions of the patterned semiconductor material layers after removing the first and second sidewall spacers.
    Type: Grant
    Filed: June 18, 2014
    Date of Patent: August 30, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Shao-Ming Koh, Guillaume Bouche, Jing Wan, Andy C. Wei
  • Patent number: 9419155
    Abstract: This description relates to a sensing product formed using a substrate with a plurality of epi-layers. At least a first epi-layer has a different composition than the composition of a second epi-layer. The sensing product optionally includes at least one radiation sensing element in the second epi-layer and optionally an interconnect structure over the second epi-layer. The sensing product is formed by removing the substrate and all epi-layers other than the second epi-layer. A light incident surface of the second epi-layer has a total thickness variation of less than about 0.15 ?m.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: August 16, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Chieh Chang, Yu-Ku Lin, Ying-Lang Wang
  • Patent number: 9418877
    Abstract: Some novel features pertain to an integrated device (e.g., integrated package) that includes a base portion for the integrated device, a first die (e.g., first wafer level die), and a second die (e.g., second wafer level die). The base portion includes a first inorganic dielectric layer, a first set of interconnects located in the first inorganic dielectric layer, a second dielectric layer different from the first inorganic dielectric layer, and a set of redistribution metal layers in the second dielectric layer. The first die is coupled to a first surface of the base portion. The second die is coupled to the first surface of the base portion, the second die is electrically coupled to the first die through the first set of interconnects.
    Type: Grant
    Filed: July 4, 2014
    Date of Patent: August 16, 2016
    Assignee: QUALCOMM Incorporated
    Inventors: Shiqun Gu, Ratibor Radojcic, Dong Wook Kim, Jae Sik Lee
  • Patent number: 9412785
    Abstract: A method of manufacturing a semiconductor apparatus comprising forming an electrode on a structure provided on a substrate, the structure including a wiring pattern and an interlayer insulation film, forming a first film covering the electrode and the structure, forming an opening in a portion of the first film inside an outer edge of a convex portion formed by steps between upper faces of the electrode and the structure so as to expose a first portion as a portion of the upper face of the electrode, forming a second film covering the first film and the first portion, forming a protective film covering the first portion, the convex portion, and a periphery of the convex portion by patterning the second film, and forming a third film on the first film and the protective film by spin coating.
    Type: Grant
    Filed: July 22, 2014
    Date of Patent: August 9, 2016
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Masaki Kurihara
  • Patent number: 9412837
    Abstract: In a method of manufacturing a semiconductor device, the method comprises: forming a dummy gate pattern on a substrate; and forming first spacers at side surfaces of the dummy gate pattern to expose upper portions of the side surfaces of the dummy gate pattern. Sacrificial film patterns are formed on regions of the upper portions of the side surfaces of the dummy gate pattern which are exposed by the first spacers. Second spacers are formed on the first spacers and the sacrificial film patterns. An interlayer insulating film is formed to cover the substrate, the second spacers and the dummy gate pattern. A top surface of the dummy gate pattern is exposed by planarizing the interlayer insulating film, and a trench is formed by removing the dummy gate pattern and the sacrificial film patterns.
    Type: Grant
    Filed: February 8, 2012
    Date of Patent: August 9, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: In-Joon Yeo
  • Patent number: 9397004
    Abstract: A method for fabricating a finFET integrated circuit includes providing a finFET integrated circuit structure including a fin structure, a replacement metal gate structure having a silicon nitride cap disposed over and in contact with the fin structure, a contact structure including a tungsten material also disposed over and in contact with the fin structure, and an insulating layer disposed over the replacement metal gate structure and the contact structure. The method further includes forming a first opening in the insulating layer over the replacement gate structure and a second opening in the insulating layer over the contact structure. Forming the first and second openings includes exposing the FinFET integrated circuit structure to a single extreme ultraviolet lithography patterning. Still further, the method includes removing a portion of the silicon nitride material of the replacement metal gate structure and forming a metal fill material in the first and second openings.
    Type: Grant
    Filed: January 27, 2014
    Date of Patent: July 19, 2016
    Assignee: GLOBALFOUNDRIES, INC.
    Inventors: Guillaume Bouche, Erik Geiss, Scott Beasor, Andy Wei, Deniz Elizabeth Civay
  • Patent number: 9391140
    Abstract: A method of fabricating raised fin structures is provided, the fabricating including: providing a substrate and at least one dielectric layer over the substrate; forming a trench in the at least one dielectric layer, the trench having a lower portion, a lateral portion, and an upper portion, the upper portion being at least partially laterally offset from the lower portion and being joined to the lower portion by the lateral portion; and, growing a material in the trench to form the raised fin structure, wherein the trench is formed to ensure that any growth defect in the lower portion of the trench terminates either in the lower portion or the lateral portion of the trench and does not extend into the upper portion of the trench.
    Type: Grant
    Filed: June 20, 2014
    Date of Patent: July 12, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Yi Qi, Xunyuan Zhang, Catherine B. Labelle
  • Patent number: 9391005
    Abstract: A power semiconductor package has an ultra thin chip with front side molding to reduce substrate resistance; a lead frame unit with grooves located on both side leads provides precise positioning for connecting numerous bridge-shaped metal clips to the front side of the side leads. The bridge-shaped metal clips are provided with bridge structure and half or fully etched through holes for relieving superfluous solder during manufacturing process.
    Type: Grant
    Filed: September 20, 2013
    Date of Patent: July 12, 2016
    Assignee: ALPHA AND OMEGA SEMICONDUCTOR INCORPORATED
    Inventors: Yan Xun Xue, Yueh-Se Ho, Hamza Yilmaz, Jun Lu, Lei Shi, Liang Zhao, Ping Huang
  • Patent number: 9391200
    Abstract: Techniques and structures for controlling etch-back of a finFET fin are described. One or more layers may be deposited over the fin and etched. Etch-back of a planarization layer may be used to determine a self-limited etch height of one or more layers adjacent the fin and a self-limited etch height of the fin. Strain-inducing material may be formed at regions of the etched fin to induce strain in the channel of a finFET.
    Type: Grant
    Filed: June 18, 2014
    Date of Patent: July 12, 2016
    Assignees: STMicroelectronics, Inc., International Business Machines Corporation, GLOBALFOUNDRIES Inc.
    Inventors: Qing Liu, Xiuyu Cai, Ruilong Xie, Chun-chen Yeh
  • Patent number: 9379236
    Abstract: A lateral double-diffused MOS (LDMOS) bulk finFET device for high-voltage operation includes a first-well region and two or more second-well regions formed on a substrate material and one or more non-well regions including substrate material. The non-well regions are configured to separate well regions of the second-well regions. A source structure is disposed on a first fin that is partially formed on the first-well region. A drain structure is disposed on a second fin that is formed on a last one of the second-well regions. One or more dummy regions are formed on the one or more non-well regions. The dummy regions are configured to provide additional depletion region flow paths including vertical flow paths for charge carriers to enable the high-voltage operation.
    Type: Grant
    Filed: June 19, 2014
    Date of Patent: June 28, 2016
    Assignee: Broadcom Corporation
    Inventors: Shom Surendran Ponoth, Akira Ito
  • Patent number: 9373782
    Abstract: A memory device may comprise a magnetic tunnel junction (MTJ) stack, a bottom electrode (BE) layer, and a contact layer. The MTJ stack may include a free layer, a barrier, and a pinned layer. The BE layer may be coupled to the MTJ stack, and encapsulated in a planarized layer. The BE layer may also have a substantial common axis with the MTJ stack. The contact layer may be embedded in the BE layer, and form an interface between the BE layer and the MTJ stack.
    Type: Grant
    Filed: October 20, 2014
    Date of Patent: June 21, 2016
    Assignee: QUALCOMM Incorporated
    Inventors: Xia Li, Seung Hyuk Kang, Matthew Michael Nowak
  • Patent number: 9368356
    Abstract: Devices and methods based on disclosed technology include, among others, an electronic device including silicide layers capable of effectively reducing contact resistance in the electronic device including buried gates and a method for fabricating the electronic device. Specifically, an electronic device in one implementation includes a plurality of buried gates formed in a substrate and silicide layers formed over the substrate between the buried gates and protruding upwardly from the buried gates.
    Type: Grant
    Filed: January 2, 2014
    Date of Patent: June 14, 2016
    Assignee: SK hynix Inc.
    Inventor: Jung-Nam Kim
  • Patent number: 9368341
    Abstract: A method of manufacturing a silicon oxide film by using a film deposition apparatus is provided. The apparatus includes a turntable including a substrate receiving part on its upper surface, a first gas supply part to supply a first gas to the turntable in a first process area, and a second gas supply part arranged in a second process area apart from the first process area to supply a second gas. In the method, a silicon-containing gas is supplied from the first gas supply part as the first gas. A hydrogen gas and an oxidation gas are supplied from the second gas supply part as the second gas. The first gas is caused to adsorb on the substrate in the first process area, and the second gas is caused to react with the first gas adsorbed on the substrate in the second process area while rotating the turntable.
    Type: Grant
    Filed: September 9, 2014
    Date of Patent: June 14, 2016
    Assignee: Tokyo Electron Limited
    Inventors: Tatsuya Tamura, Takeshi Kumagai
  • Patent number: 9355951
    Abstract: Embodiments of the present disclosure provide an apparatus including an electronic device and a substrate to receive the electronic device, the electronic device being electrically coupled to the substrate using a plurality of interconnect structures, the interconnect structures being arranged on the electronic device based at least in part on a layout of the substrate. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: August 12, 2010
    Date of Patent: May 31, 2016
    Assignee: Marvell World Trade Ltd.
    Inventors: Huahung Kao, Shiann-Ming Liou
  • Patent number: 9318574
    Abstract: Sacrificial gate structures having an aspect ratio of greater than 5:1 are formed on a substrate. In some embodiments, each sacrificial gate structure straddles a portion of a semiconductor fin that is present on the substrate. An anchoring element is formed orthogonal to each sacrificial gate structure rendering the sacrificial gate structures mechanically stable. After formation of a planarization dielectric layer, each anchoring element can be removed and thereafter each sacrificial gate structure can be replaced with a functional gate structure.
    Type: Grant
    Filed: June 18, 2014
    Date of Patent: April 19, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Ryan O. Jung, Fee Li Lie, Jeffrey C. Shearer, John R. Sporre, Sean Teehan
  • Patent number: 9305978
    Abstract: A method of making organic light emitting diode array includes following steps. A base having a number of first electrodes on a surface of the base is provided. A first organic layer is located on the surface of the base to cover the number of first electrodes. A first organic light emitting layer is applied on the first organic layer. A template with a first patterned surface with a number of grooves with different depths is provided. The template is attached on the first organic light emitting layer and separated from each other, wherein a number of protruding structures with different heights is formed. A second organic light emitting layer is deposited on a part of the plurality of protruding structures. A second organic layer is located on the organic light emitting layer. A second electrode is applied to electrically connect to the second organic layer.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: April 5, 2016
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Jung-An Cheng, Liang-Neng Chien, Dong An, Zhen-Dong Zhu, Chang-Ting Lin, I-Wei Wu, Qun-Qing Li, Shou-Shan Fan
  • Patent number: 9293488
    Abstract: An image sensing device includes: a semiconductor substrate with a photo-sensing element; a passive layer disposed over the semiconductor substrate, having a first refractive index; a color pattern disposed over the passive layer, wherein the color pattern aligns to the photo-sensing element and has a color selected from the group consisting of red (R), green (G), blue (B), and white (W), and a second refractive index; and an electromagnetic wave guiding element disposed in at least one of the color pattern and the passive layer, having a third refractive index, and the third refractive index is greater than the first refractive index or the second refractive index, and a first difference between the third refractive index and the first refractive index is at least 0.2, and a second difference between the third refractive index and the second refractive index is at least 0.2.
    Type: Grant
    Filed: May 7, 2014
    Date of Patent: March 22, 2016
    Assignee: VisEra Technologies Company Limited
    Inventors: Zong-Ru Tu, Yu-Kun Hsiao
  • Patent number: 9293427
    Abstract: A semiconductor device includes an antenna functioning as a coil, a capacitor electrically connected to the antenna in parallel, a passive element forming a resonance circuit with the antenna and the capacitor by being electrically connected to the antenna and the capacitor in parallel, a first field effect transistor controlling whether the passive element is electrically connected to the antenna and the capacitor in parallel or not, and a memory circuit. The memory circuit includes a second field effect transistor which includes an oxide semiconductor layer where a channel is formed and in which a data signal is input to one of a source and a drain. The gate voltage of the first field effect transistor is set depending on the voltage of the other of the source and the drain of the second field effect transistor.
    Type: Grant
    Filed: January 9, 2014
    Date of Patent: March 22, 2016
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Seiichi Yoneda
  • Patent number: 9293687
    Abstract: A method of forming a piezoelectronic transistor (PET) device, the PET device, and a semiconductor including the PET device are described. The method includes forming a first metal layer, forming a layer of a piezoelectric (PE) element on the first metal layer, and forming a second metal layer on the PE element. The method also includes forming a well above the second metal layer, forming a piezoresistive (PR) material in the well and above the well, and forming a passivation layer and a top metal layer above the PR material at the diameter of the PR material above the well, wherein a cross sectional shape of the well, the PR material above the well, the passivation layer, and the top metal layer is a T-shaped structure. The method further includes forming a metal clamp layer as a top layer of the PET device.
    Type: Grant
    Filed: October 31, 2014
    Date of Patent: March 22, 2016
    Assignee: International Business Machines Corporation
    Inventors: Brian A. Bryce, Josephine B. Chang, Matthew W. Copel, Marcelo A. Kuroda