Patents Examined by Chedyl Juska
  • Mask and exposure apparatus using the same
    Patent number: 5770335
    Abstract: A mask for use with radiation including one of X-rays and vacuum ultraviolet rays. The mask includes a transmissive member for supporting a pattern of a radiation absorptive material, and a phase shifter material provided on the transmissive member. The phase shifter material has a radiation absorptivity less than that of the radiation absorptive material. The thickness of the transmissive member at a portion where the phase shifter material is provided is less than that of another portion thereof.
    Type: Grant
    Filed: July 31, 1996
    Date of Patent: June 23, 1998
    Assignee: Canon Kabushiki Kaisha
    Inventors: Akira Miyake, Keiko Chiba