Patents Examined by Dale E Page
  • Patent number: 11864381
    Abstract: In a method of manufacturing a semiconductor device, the semiconductor device includes a non-volatile memory formed in a memory cell area and a ring structure area surrounding the memory cell area. In the method, a protrusion of a substrate is formed in the ring structure area. The protrusion protrudes from an isolation insulating layer. A high-k dielectric film is formed, thereby covering the protrusion and the isolation insulating layer. A poly silicon film is formed over the high-k dielectric film. The poly silicon film and the high-k dielectric film are patterned. Insulating layers are formed over the patterned poly silicon film and high-k dielectric film, thereby sealing the patterned high-k dielectric film.
    Type: Grant
    Filed: January 3, 2022
    Date of Patent: January 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Meng-Han Lin, Chih-Ren Hsieh, Ching-Wen Chan
  • Patent number: 11862611
    Abstract: Several embodiments of the present technology are described with reference to a semiconductor apparatus. In some embodiments of the present technology, a semiconductor apparatus includes a stack of semiconductor dies attached to a thermal transfer structure. The thermal transfer structure conducts heat away from the stack of semiconductor dies. Additionally, the assembly can include molded walls to support the thermal transfer structure.
    Type: Grant
    Filed: December 8, 2021
    Date of Patent: January 2, 2024
    Assignee: Micron Technology, Inc.
    Inventor: Ed A. Schrock
  • Patent number: 11862597
    Abstract: An asymmetric stackup structure for an SoC package substrate is disclosed. The package substrate may include a substrate with one or more insulating material layers. A first recess may be formed in an upper surface of the substrate. The recess may be formed down to a conductive layer in the substrate. An integrated passive device may be positioned in the recess. A plurality of build-up layers may be formed on top of the substrate. At least one via path may be formed through the build-up layers and the substrate to connect contacts on the lower surface of the substrate to contacts on the upper surface of the build-up layers.
    Type: Grant
    Filed: September 23, 2021
    Date of Patent: January 2, 2024
    Assignee: Apple Inc.
    Inventors: Yikang Deng, Taegui Kim, Yifan Kao, Jun Chung Hsu
  • Patent number: 11860152
    Abstract: A semiconductor device includes a circuit layer and a nanopore layer. The nanopore layer is formed on the circuit layer and is formed with a pore therethrough. The circuit layer includes a circuit unit configured to drive a biomolecule through the pore and to detect a current associated with a resistance of the nanopore layer, whereby a characteristic of the biomolecule can be determined using the currents detected by the circuit unit.
    Type: Grant
    Filed: July 8, 2020
    Date of Patent: January 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Kun-Lung Chen, Tung-Tsun Chen, Cheng-Hsiang Hsieh, Yu-Jie Huang, Jui-Cheng Huang
  • Patent number: 11862481
    Abstract: Chip sealing designs to accommodate die-to-die communication are described. In an embodiment, a chip structure includes a split metallic seal structure including a lower metallic seal and an upper metallic seal with overlapping metallization layers, and a through seal interconnect navigating through the split metallic seal structure.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: January 2, 2024
    Assignee: Apple Inc.
    Inventors: Sanjay Dabral, Chi Nung Ni, Long Huang, SivaChandra Jangam
  • Patent number: 11854913
    Abstract: A method for detecting defects in a semiconductor device including singulating a die having a substrate including a circuit region and an outer border, a plurality of detecting devices disposed over the substrate and located between the circuit region and the outer border, a first probe pad and a second probe pad electrically connected to two ends of each detecting device, and a seal ring located between the outer border of the die and the detecting devices. The method further includes probing the first probe pad and the second probe pad to determine a connection status of the detecting device, and recognizing a defect when the connection status of the detecting device indicates an open circuit.
    Type: Grant
    Filed: August 9, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yang-Che Chen, Wei-Yu Chou, Hong-Seng Shue, Chen-Hua Lin, Huang-Wen Tseng, Victor Chiang Liang, Chwen-Ming Liu
  • Patent number: 11854961
    Abstract: A package substrate includes a substrate, an insulating protective layer and an interposer. The substrate has a first surface and a second surface opposing to the first surface. The substrate includes a plurality of first conductive pads embedded in the first surface. The insulating protective layer is disposed on the first surface of the substrate. The insulating protective layer has an opening for exposing the first conductive pads embedded in the first surface of the substrate. The interposer has a top surface and a bottom surface opposing to the top surface. The interposer includes a plurality of conductive vias and a plurality of second conductive pads located on the bottom surface. The interposer is located in a recess defined by the opening of the insulating protective layer and the first surface of the substrate. Each of the second conductive pads is electrically connected to corresponding first conductive pad.
    Type: Grant
    Filed: November 12, 2020
    Date of Patent: December 26, 2023
    Assignees: Industrial Technology Research Institute, Unimicron Technology Corp.
    Inventors: Yu-Hua Chen, Wei-Chung Lo, Tao-Chih Chang, Yu-Min Lin, Sheng-Tsai Wu
  • Patent number: 11855035
    Abstract: A stack of electrical components has a first electrical component having a first surface, a second surface that is opposite to the first surface and a side surface that is located between the first surface and the second surface; a second electrical component having a third surface on which the first electrical component is mounted, the third surface facing the second surface and forming a corner portion between the third surface and the side surface; an adhesive layer that bonds the first electrical component to the second electrical component, the adhesive layer has a first portion that is located between the second and third surface and a second portion that is made of a same material as the first portion and that fills the corner portion; and a conductive layer that extends on a side of the side surface, curves along the second portion and extends to the third surface.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: December 26, 2023
    Assignee: TDK Corporation
    Inventors: Yohei Hirota, Hiroshi Yamazaki, Hitoshi Iwama, Yusuke Takahashi
  • Patent number: 11855144
    Abstract: A semiconductor device comprises a fin disposed on a substrate, a source/drain feature disposed over the fin, a silicide layer disposed over the source/drain feature, a seed metal layer disposed over the silicide layer and wrapping around the source/drain feature, and a metal layer disposed on the silicide layer, where the metal layer contacts the seed metal layer.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Chuan Chiu, Chia-Hao Chang, Jia-Chuan You, Tien-Lu Lin, Yu-Ming Lin, Chih-Hao Wang
  • Patent number: 11848285
    Abstract: A semiconductor chip, a semiconductor package including the same, and a method of fabricating the same, the semiconductor chip including a substrate that includes a device region and an edge region; a device layer and a wiring layer that are sequentially stacked on the substrate; a subsidiary pattern on the wiring layer on the edge region; a first capping layer that covers a sidewall of the subsidiary pattern, a top surface of the wiring layer, and a sidewall of the wiring layer, the first capping layer including an upper outer sidewall and a lower outer sidewall, the lower outer sidewall being offset from the upper outer sidewall; and a buried dielectric pattern in contact with the lower outer sidewall of the first capping layer and spaced apart from the upper outer sidewall of the first capping layer.
    Type: Grant
    Filed: February 15, 2022
    Date of Patent: December 19, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kwangwuk Park, Youngmin Lee, Inyoung Lee, Sungdong Cho
  • Patent number: 11848213
    Abstract: A power semiconductor module arrangement includes: a substrate arranged within a housing; at least one semiconductor body arranged on a top surface of the substrate; and a first layer arranged on a first surface within the housing. The first layer includes inorganic filler which is impermeable to corrosive gases and a casting material which fills spaces present in the inorganic filler.
    Type: Grant
    Filed: August 10, 2021
    Date of Patent: December 19, 2023
    Assignee: Infineon Technologies AG
    Inventors: Gopalakrishnan Trichy Rengarajan, Sebastian Michalski
  • Patent number: 11846024
    Abstract: Disclosed herein are laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof for suppressing background carbon incorporation.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: December 19, 2023
    Assignee: Ohio State Innovation Foundation
    Inventors: Hongping Zhao, Zhaoying Chen, Yuxuan Zhang
  • Patent number: 11848293
    Abstract: A semiconductor package includes a sequential stack of first and second semiconductor chips, and a first internal connection member that connects the first and second semiconductor chips to each other. The first semiconductor chip includes a first substrate that has a first top surface and a first bottom surface that are opposite to each other, and a first conductive pad on the first top surface. The second semiconductor chip includes a second substrate that has a second top surface and a second bottom surface that are opposite to each other, and a second conductive bump on the second bottom surface. The first internal connection member connects the first conductive pad to the second conductive bump. The first conductive pad has a first width in one direction. The second conductive bump has a second width in the one direction. The first width is smaller than the second width.
    Type: Grant
    Filed: July 15, 2021
    Date of Patent: December 19, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sunkyoung Seo, Teak Hoon Lee, Chajea Jo
  • Patent number: 11848363
    Abstract: A method of forming a semiconductor device includes forming a gate structure on a semiconductor substrate. A gate spacer is formed adjacent to the gate structure. The gate spacer includes a first dielectric layer and a second dielectric layer on the first dielectric layer. A plasma treatment is performed to the second dielectric layer. After performing the plasma treatment, at least a portion of the second dielectric layer is removed such that a sidewall of the first dielectric layer is exposed. A dielectric cap is formed on the gate spacer.
    Type: Grant
    Filed: August 7, 2020
    Date of Patent: December 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chung-Ting Li, Jen-Hsiang Lu, Chih-Hao Chang
  • Patent number: 11843057
    Abstract: The present invention disclosures an oxide semiconductor transistor and a method of fabricating the same. The oxide semiconductor transistor according to an embodiment of the present invention includes a first gate electrode formed on a substrate; a first gate insulating film formed using a solution process on the first gate electrode; a source electrode and a drain electrode separately formed on one surface of the first gate insulating film; an oxide semiconductor film formed using a solution process on the first gate insulating film and the source and drain electrodes; a second gate insulating film formed using a solution process on the oxide semiconductor film; pixel electrodes separately formed on one surface of the second gate insulating film and electrically connected to the source and drain electrodes, respectively; and a second gate electrode formed on the second gate insulating film.
    Type: Grant
    Filed: July 23, 2021
    Date of Patent: December 12, 2023
    Assignee: UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
    Inventors: Jin Jang, Tae Hun Kim
  • Patent number: 11842826
    Abstract: Cables, cable connectors, and support structures for cantilever package and/or cable attachment may be fabricated using additive processes, such as a coldspray technique, for integrated circuit assemblies. In one embodiment, cable connectors may be additively fabricated directly on an electronic substrate. In another embodiment, seam lines of cables and/or between cables and cable connectors may be additively fused. In a further embodiment, integrated circuit assembly attachment and/or cable attachment support structures may be additively formed on an integrated circuit assembly.
    Type: Grant
    Filed: June 23, 2020
    Date of Patent: December 12, 2023
    Assignee: Intel Corporation
    Inventors: Adel Elsherbini, Feras Eid, Johanna Swan, Georgios Dogiamis
  • Patent number: 11842899
    Abstract: In a method of cutting a fine pattern, a line structure is formed on a substrate. The line structure extends in a first direction, and includes a pattern and a first mask. The pattern and the first mask include different materials. A sacrificial layer is formed on the substrate to cover the line structure. The sacrificial layer is partially etched to form a first opening partially overlapping the line structure in a vertical direction. A portion of the first mask, an upper portion of the pattern and/or a portion of the sacrificial layer under the first opening are partially etched using an etching gas having no etching selectivity among the pattern, the first mask and the sacrificial layer. A lower portion of the pattern under the upper portion thereof is removed to divide the pattern into a plurality of pieces spaced apart from each other in the first direction.
    Type: Grant
    Filed: September 16, 2020
    Date of Patent: December 12, 2023
    Inventors: Sanggyo Chung, Jiseung Lee, Kyoungha Eom, Hyunchul Lee
  • Patent number: 11843027
    Abstract: A method of manufacturing a semiconductor device is disclosed. The method includes laminating a thermally decomposable organic material on a substrate by supplying a material gas into a container in which the substrate having a first recess and a second recess, which has a wider width than a width of the first recess, are formed, fluidizing the organic material laminated on the substrate by heating the substrate to a first temperature, and removing the organic material laminated in the second recess.
    Type: Grant
    Filed: April 22, 2021
    Date of Patent: December 12, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Tatsuya Yamaguchi, Syuji Nozawa
  • Patent number: 11837473
    Abstract: Methods for adjusting a work function of a structure in a substrate leverage near surface doping. In some embodiments, a method for adjusting a work function of a structure in a substrate may include growing an epitaxial layer on surfaces of the structure to form a homogeneous passivation region as part of a substrate material of the substrate and performing a dopant diffusion process to further embed the dopants into surfaces of the structure to adjust a work function of the structure, wherein the dopant diffusion process is performed at less than approximately 450 degrees Celsius.
    Type: Grant
    Filed: May 4, 2022
    Date of Patent: December 5, 2023
    Assignee: APPLIED MATERIALS, INC.
    Inventor: Taichou Papo Chen
  • Patent number: 11837568
    Abstract: A bonding structure is provided, wherein the bonding structure includes a first substrate, a second substrate, a first adhesive layer, a second adhesive layer, and a silver feature. The second substrate is disposed opposite to the first substrate. The first adhesive layer is disposed on the first substrate. The second adhesive layer is disposed on the second substrate and opposite the first adhesive layer. The silver feature is disposed between the first adhesive layer and the second adhesive layer. The silver feature includes a silver nano-twinned structure that includes twin boundaries that are arranged in parallel. The parallel-arranged twin boundaries include 90% or more [111] crystal orientation.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: December 5, 2023
    Assignee: AG MATERIALS TECHNOLOGY CO., LTD.
    Inventors: Tung-Han Chuang, Hsing-Hua Tsai