Patents Examined by David P. Porta
  • Patent number: 11815402
    Abstract: Disclosed is a wavefront sensor for measuring a tilt of a wavefront at an array of locations across a beam of radiation, wherein said wavefront sensor comprises a film, for example of Zirconium, having an indent array comprising an indent at each of said array of locations, such that each indent of the indent array is operable to perform focusing of said radiation. Also disclosed is a radiation source and inspection apparatus comprising such a wavefront sensor.
    Type: Grant
    Filed: December 19, 2019
    Date of Patent: November 14, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Sietse Thijmen Van Der Post, Peter Danny Van Voorst
  • Patent number: 11815452
    Abstract: A gas sensor device (100) is configured to measure a predetermined gas of interest and comprises an enclosure (101) comprising a semiconductor substrate (102) and defining a first cavity (124), an optically transmissive second closed cavity (126) and a third cavity (128). The second cavity (126) is interposed between the first and third cavities (124, 128). The first cavity (124) comprises an inlet port (130) for receiving a gas under test, an outlet port (132) for venting the gas under test. The first cavity (124) also comprises an optical source (112) and a measurement sensor (114). The second cavity (126) is configured as a gaseous filter comprising a volume of the gas of interest sealingly disposed in the second cavity (126), and the third cavity (128) comprises a reference measurement sensor (116) disposed therein.
    Type: Grant
    Filed: October 7, 2020
    Date of Patent: November 14, 2023
    Assignee: MELEXIS TECHNOLOGIES NV
    Inventors: Wouter Leten, Joris Roels, Xiaoning Jia, Roeland Baets, Gunther Roelkens
  • Patent number: 11815347
    Abstract: Systems and methods are provided which utilize optical microcavity probes to map wafer topography by near-field interactions therebetween in a manner which complies with high volume metrology requirements. The optical microcavity probes detect features on a wafer by shifts in an interference signal between reference radiation and near-field interactions of radiation in the microcavities and wafer features, such as device features and metrology target features. Various illumination and detection configurations provide quick and sensitive signals which are used to enhance optical metrology measurements with respect to their accuracy and sensitivity. The optical microcavity probes may be scanned at a controlled height and position with respect to the wafer and provide information concerning the spatial relations between device and target features.
    Type: Grant
    Filed: May 19, 2017
    Date of Patent: November 14, 2023
    Assignee: KLA-Tencor Corporation
    Inventors: Yuri Paskover, Amnon Manassen, Vladimir Levinski
  • Patent number: 11815456
    Abstract: Systems and methods for analyzing samples, such as tissue samples, and measuring the emissions when these samples are exposed to light are disclosed. Embodiments include illuminating multiple target locations on a sample with laser light, which may first be manipulated by a scanner, and receiving decaying emissions from the target location. At least some embodiments include the emissions traveling backwards along a substantial portion of the laser light pathway and being received by a detector. Additional embodiments include converting the received emissions into streak lines of position versus time, converting the streak lines to plots of signal strength versus time, and curve fitting the plots to determine representative decay times. In some embodiments, the decay times are presented as plots of position on the surface of the sample versus emission strength, which may be color coded. Some embodiment dwell on each target location for multiple scans of the laser.
    Type: Grant
    Filed: August 25, 2021
    Date of Patent: November 14, 2023
    Assignee: PURDUE RESEARCH FOUNDATION
    Inventor: Meng Cui
  • Patent number: 11815646
    Abstract: A method for making natural gamma ray measurements of a subterranean formation includes causing a natural gamma ray sensor on an LWD tool to acquire a spectral gamma ray measurement while a neutron source emits neutrons. The measurements are evaluated to compute first and second drilling fluid activation corrections using corresponding first and second correction methodologies. The first and second corrections are processed to compute a third drilling fluid activation correction which is applied to the gamma ray measurements to compute a corrected total natural gamma ray measurement.
    Type: Grant
    Filed: July 8, 2019
    Date of Patent: November 14, 2023
    Assignee: SCHLUMBERGER TECHNOLOGY CORPORATION
    Inventors: Marie-Laure Mauborgne, Christian Stoller
  • Patent number: 11817335
    Abstract: A system configured to inspect a processing apparatus includes a temperature adjusting device configured to adjust a temperature of a component within a processing chamber of the processing apparatus; a light source configured to emit measurement light; multiple optical elements configured to output the measurement light emitted from the light source to the component within the processing chamber of the processing apparatus as output light and configured to receive reflected light from the component during a temperature adjustment of the component by the temperature adjusting device; and a controller configured to measure temperatures of the component at measurement points respectively corresponding to the multiple optical elements based on the reflected light, and make a determination upon abnormality of the processing apparatus based on comparisons of the temperatures of the component at the respective measurement points.
    Type: Grant
    Filed: September 3, 2020
    Date of Patent: November 14, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kippei Sugita, Kenji Nagai
  • Patent number: 11813101
    Abstract: A spectral computed tomography imaging system (102) includes a radiation source (112) configured to emit x-ray radiation and a detector array (114) configured to detect x-ray radiation and generate spectral data. The spectral imaging system further includes a memory (134) configured to store a virtual non-contrast image enhancing module (136) that includes computer executable instructions including a neural network trained to produce image quality enhanced virtual non-contrast images. The neural network is trained with training spectral data and training non-contrast-enhanced images generated from a non-contrast-enhanced scan. The spectral imaging system further includes a processor (132) configured to process the spectral data with the trained neural network to produce the image quality enhanced virtual non-contrast images.
    Type: Grant
    Filed: January 30, 2019
    Date of Patent: November 14, 2023
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: Hao Dang, Shiyu Xu, Chuanyong Bai, Hui Wang, Douglas B. McKnight
  • Patent number: 11808698
    Abstract: A device for the detection of analytes comprises a substrate (10) with nano-antennas (11,12). The nano-antennas (11,12) comprise an antenna material (11m, 12m) for forming resonant antenna structures which receive and resonantly interact with source light (L0) to form respective resonance peaks (R1,R2) over a resonant wavelength range (A1,A2) overlapping respective signature wavelength (?1,?2) of a target analyte (A). The resonant interaction causes a locally concentrated field (Ec) of the source light (L0) in the resonant wavelength range (?1,?2). The concentrated intensity (Ic) is localized around a respective target location (T1,T2) which is provided with a sorption material (11s, 12s) that sorbs the target analyte (A). This provides a locally increased analyte concentration (Ac) of the target analyte (A) coinciding with the locally concentrated field (Ec) of the source light (L0). Accordingly, the interaction of the source light (L0) with the target analyte (A) is enhanced.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: November 7, 2023
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Beniamino Sciacca, Arjen Boersma
  • Patent number: 11808716
    Abstract: A flexible and/or deformable mechanical element may comprise one or more radiographic markers. The one or more radiographic markers may have a radiopacity greater than a radiopacity of a parent material forming a body of the mechanical element. A radiographic image of a portion of an assembly into which the mechanical element has been installed may include a representation of the one or more radiographic markers that indicates a condition of the mechanical element.
    Type: Grant
    Filed: August 13, 2021
    Date of Patent: November 7, 2023
    Assignee: Science Applications International Corporation
    Inventor: Theodore W. Eastes
  • Patent number: 11808718
    Abstract: An X-ray analyzer has a configuration including an X-ray source, an X-ray detector configured to detect an X-ray irradiated from the X-ray source, a rotary stage (stage) disposed between the X-ray source and the X-ray detector, and configured to hold an imaging target, and a light irradiation mechanism configured to irradiate light coaxially with an X-ray optical axis of the X-ray irradiated from the X-ray source to project a shadow of the imaging target onto a position of the X-ray detector.
    Type: Grant
    Filed: November 8, 2021
    Date of Patent: November 7, 2023
    Assignee: Shimadzu Corporation
    Inventors: Daisuke Harada, Yasuyuki Keyaki
  • Patent number: 11810987
    Abstract: This disclosure relates to a radiation sensor element comprising a semiconductor substrate, having a bulk refractive index; a front surface; a back surface, extending substantially along a base plane; and a plurality of pixel portions. Each pixel portion comprises a collection region on the back surface and a textured region on the front surface. The textured regions comprise high aspect ratio nanostructures, extending substantially along a thickness direction perpendicular to the base plane and forming an optical conversion layer, having an effective refractive index gradually changing towards the bulk refractive index to reduce reflection of light incident on said pixel portion from the front side of the semiconductor substrate.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: November 7, 2023
    Assignee: ELFYS OY
    Inventors: Antti Haarahiltunen, Juha Heinonen, Mikko Juntunen, Chiara Modanese, Toni Pasanen, Hele Savin, Ville Vähänissi
  • Patent number: 11806179
    Abstract: Methods, apparatuses and systems for surview scans are provided. In one aspect, a method includes: collecting an image for a subject on a scan bed of a computed tomography system when the scan bed is stationary; determining a scan beginning position for a surview scan in the image, where graduation patterns are marked on the scan bed, and a relative position between the graduation patterns and the scan bed remains unchanged; obtaining a first distance between the scan beginning position and a surview collection plane perpendicular to the scanning bed according to the graduation patterns in the image; controlling the scan bed to move toward the surview collection plane; and in response to determining that a scan bed moving distance reaches the first distance, starting the surview scan to obtain a surview image.
    Type: Grant
    Filed: March 18, 2022
    Date of Patent: November 7, 2023
    Assignee: Neusoft Medical Systems Co., Ltd.
    Inventors: Shuangxue Li, Jun Yu, Wei Li
  • Patent number: 11808626
    Abstract: A sensor for discriminating between wavelength regions in an electromagnetic spectrum is disclosed. The sensor comprising a substrate, a sensing element supported on a surface of the substrate, and at least one pair of terminal electrodes disposed on the substrate surface in mutually spaced apart and opposing relation, and in electrical contact with the sensing element, wherein the sensing element is responsive to electromagnetic radiation to yield a change in photocurrent measured between the terminal electrodes as a function of an intensity of the electromagnetic radiation impinging thereon, wherein a positive dependency on the intensity corresponds to a first wavelength region and a negative dependency on the intensity corresponds to a second wavelength region.
    Type: Grant
    Filed: June 26, 2019
    Date of Patent: November 7, 2023
    Assignee: Royal Melbourne Institute of Technology
    Inventors: Taimur Ahmed, Sumeet Walia, Madhu Bhaskaran, Sharath Sriram
  • Patent number: 11808721
    Abstract: Provided is an X-ray analysis apparatus including: a goniometer; a sample stage provided at a rotation center of the goniometer; an X-ray source configured to irradiate a sample with an X-ray, the sample being fixed on the sample stage; an X-ray detector configured to detect the X-ray diffracted by the sample; and an opening/closing mechanism configured to vary a width of a slit, which is formed between a pair of shielding members, by opening/closing the pair of shielding members, the opening/closing mechanism including an asymmetric control unit configured to control aperture widths of the pair of shielding members asymmetrically for one of the pair of shielding members on one side and another one of the pair of shielding members on another side depending on a rotation angle of the goniometer.
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: November 7, 2023
    Assignee: RIGAKU CORPORATION
    Inventor: Takeshi Osakabe
  • Patent number: 11808902
    Abstract: An imaging system includes a first mask unit having a hollow cavity surrounding a rotational axis. The first mask unit is characterized by a first pattern encoded on its surface. The first pattern defines a height along an axial direction and includes a respective plurality of elements with at least one open element and at least one blocking element in each of the axial direction and the circumferential direction. A detector is configured to receive radiation data from at least one source such that one of the detector and the source is located inside the hollow cavity and another is located outside the hollow cavity. The first mask unit is configured to move relative to the rotational axis in at least one of the axial and circumferential direction until the first pattern is recorded in 360 degrees. A second mask unit may be positioned around the first mask unit.
    Type: Grant
    Filed: February 10, 2021
    Date of Patent: November 7, 2023
    Inventors: Steven Brown, Kevin Moran
  • Patent number: 11808706
    Abstract: The disclosed technology generally relates to characterization of semiconductor structures, and more particularly to optical characterization of high-k dielectric materials. A method includes providing a semiconductor structure comprising a semiconductor and a high-k dielectric layer formed over the semiconductor, wherein the dielectric layer has electron traps formed therein. The method additionally includes at least partially transmitting an incident light having an incident energy through the high-k dielectric layer and at least partially absorbing the incident light in the semiconductor. The method additionally includes measuring a nonlinear optical spectrum resulting from the light having the energy different from the incident energy, the nonlinear optical spectrum having a first region and a second region, wherein the first region changes at a different rate in intensity compared to the second region.
    Type: Grant
    Filed: January 12, 2021
    Date of Patent: November 7, 2023
    Assignee: California Institute of Technology
    Inventors: Philippe C. Adell, Harry A. Atwater
  • Patent number: 11808702
    Abstract: A multi-photon imaging system includes a laser module having a first channel for outputting a two-photon excitation laser pulse and a second channel for outputting a three-photon excitation laser pulse. The system further includes a first optical path for guiding the two-photon laser pulse from the first channel of the laser module and a second optical path for guiding the three-photon laser pulse from the second channel of the laser module. A microscope is also provided for simultaneously receiving the two-photon laser pulse from the first optical path and the three-photon laser pulse from the second optical path, and simultaneously, or with well controllable delays, delivering the two-photon laser pulse and the three-photon pulse to a target volume. The system further includes a photodetector configured to collect photons generated within the target volume in response to simultaneous excitation of the target volume by both the two-photon laser pulse and the three-photon laser pulse.
    Type: Grant
    Filed: January 30, 2020
    Date of Patent: November 7, 2023
    Assignee: The Rockefeller University
    Inventors: Alipasha Vaziri, Siegfried Weisenburger
  • Patent number: 11808697
    Abstract: Systems for protein quantitation using a Fabry-Perot interferometer. In one arrangement, a quantitation device includes an infrared source, a sample holder, and a Fabry-Perot interferometer positioned to receive infrared radiation from the source passing through a sample on the sample holder. A band pass optical filter sets the working range of the interferometer, and radiation exiting the interferometer falls on a detector that produces a signal indicating the intensity of the received radiation. A controller causes the interferometer to be tuned to a number of different resonance wavelengths and receives the intensity signals, for determination of an absorbance spectrum.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: November 7, 2023
    Assignee: Bio-Rad Laboratories, Inc.
    Inventors: Evan Thrush, Steven Swihart, William Strong, Trey Marlowe, Li Lu
  • Patent number: 11808703
    Abstract: The disclosed embodiments provide a system that images a tissue sample. During operation, the system receives the tissue sample, which has been stained using absorbing and fluorescently emitting stains. Next, the system illuminates the tissue sample with excitation light having a wavelength or wavelengths in a range that covers a portion of an absorption spectrum for both fluorescently emitting and absorbing stains, whereby the excitation light interacts with stained tissue located inside the tissue sample to both limit penetration depth and generate emitted dye fluorescence and tissue autofluorescence that provides a backlight, which is absorbed by features in stained tissue located on or near the surface of the tissue sample. Next, the system uses an imaging device to capture an image of emitted fluorescence that emanates from the surface of the tissue sample.
    Type: Grant
    Filed: October 2, 2020
    Date of Patent: November 7, 2023
    Assignee: The Regents of the University of California
    Inventors: Farzad Fereidouni, Richard M. Levenson
  • Patent number: 11808833
    Abstract: A method for increasing a detection distance of a surface of an object illuminated by near-IR electromagnetic radiation, including: (a) directing near-IR electromagnetic radiation from a near-IR electromagnetic radiation source towards an object at least partially coated with a near-IR reflective coating that increases a near-IR electromagnetic radiation detection distance by at least 15% as measured at a wavelength in a near-IR range as compared to the same object coated with a color matched coating which absorbs more of the same near-IR radiation, where the color matched coating has a ?E color matched value of 1.5 or less when compared to the near-IR reflective coating; and (b) detecting reflected near-IR electromagnetic radiation reflected from the near-IR reflective coating. A system for detecting proximity of vehicles is also disclosed.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: November 7, 2023
    Assignee: PPG Industries Ohio, Inc.
    Inventors: Eldon L. Decker, Kristen Kruszewski, Luann Holsing, Stephen G. McQuown, Stuart D. Hellring, Michael Andrew Zalich