Patents Examined by Felisa Hiteshew
  • Patent number: 7361219
    Abstract: The present invention are a method for producing a silicon wafer having a crystal orientation <110> from a silicon single crystal ingot grown by a Floating Zone method (FZ method), wherein, at least, an FZ silicon single crystal ingot is grown by being made to be dislocation-free by Dash Necking method using a seed crystal having its crystal axis inclined at a specified angle from a crystal orientation <110>, and the grown FZ silicon single crystal ingot is sliced at the just angle of a crystal orientation <110> to produce a silicon wafer having a crystal orientation <110>, and a silicon wafer produced by the method. Thereby, there are provided a method for producing a silicon wafer having a crystal orientation <110> from a silicon single crystal ingot made to be dislocation-free at a high success rate by using Dash Necking method by FZ method, and a silicon wafer having an crystal orientation <110>.
    Type: Grant
    Filed: July 12, 2004
    Date of Patent: April 22, 2008
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventor: Ken Yoshizawa
  • Patent number: 7361217
    Abstract: Method for crystallizing a melamine melt to form melamine particles with a D90 of at most 2 mm by cooling a melamine melt to below the crystallization temperature of the melamine, comprising the formation of a suspension of melamine particles in the cooling medium by spraying the melamine melt with at most 10 wt % of CO2 relative to the sprayed quantity of melamine melt in a space in which a layer of a liquid cooling medium is present that has a temperature below the crystallization temperature of the melamine and under cooling conditions at which at least 50 wt % of the sprayed melamine melt directly turns into suspended melamine particles. Method for the production of melamine from urea in a preferably continuous, high-pressure process, with application of the present method for the crystallization.
    Type: Grant
    Filed: January 28, 2004
    Date of Patent: April 22, 2008
    Assignee: DSM IP Assets B.V.
    Inventor: Tjay Tjien M. Tjioe
  • Patent number: 7357839
    Abstract: The present invention provides an SOI wafer having at least an SOI layer, in which a plain orientation of the SOI layer is off-angled from {110} only in a direction to <100>, and an off-angle is from 5 minutes to 2 degrees, and a method of producing an SOI wafer comprising at least bonding a base wafer and a bond wafer consisting of a silicon single crystal, and forming an SOI layer by thinning the bond wafer, wherein the bond wafer is used where a plain orientation thereof is off-angled from {110} only in a direction to <100>, and an off-angle is from 5 minutes to 2 degrees. Thereby, there can be provided an SOI wafer having both high uniformity of film thickness and good micro-roughness to be suitable for fabricating high speed devices, and provided a method of producing the SOI wafer.
    Type: Grant
    Filed: May 7, 2004
    Date of Patent: April 15, 2008
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Kiyotaka Takano, Hitoshi Tsunoda
  • Patent number: 7344689
    Abstract: A silicon wafer for an IGBT is produced by forming an ingot having an interstitial oxygen concentration [Oi] of not more than 7.0×1017 atoms/cm3 by the Czochralski method; doping phosphorus in the ingot by neutron beam irradiation to the ingot; slicing a wafer from the ingot; performing annealing of the wafer in an oxidizing atmosphere containing at least oxygen at a temperature satisfying a predetermined formula; and forming a polysilicon layer or a strained layer on one side of the wafer.
    Type: Grant
    Filed: June 7, 2006
    Date of Patent: March 18, 2008
    Assignee: Sumco Corporation
    Inventors: Shigeru Umeno, Yasuhiro Oura, Koji Kato
  • Patent number: 7344597
    Abstract: A vapor-phase growth apparatus includes: at least a reaction furnace which is hermetically closable, a wafer container which is disposed in the reaction furnace, for disposing a wafer at a predetermined position, a gas supply member for supplying a source gas toward the wafer, and a heating member for heating the wafer, wherein the apparatus is designed to form a grown film on a front surface of the wafer by supplying the source gas in a high temperature state while the heating member heats the wafer in the reaction furnace through the wafer container. The wafer container is made of a single material or a single member, and has a ratio R2/R1, which is not less than 0.4 to not more than 1.0, where R1 is a heat resistance for a heat transfer route from a rear surface of the wafer container toward the front surface of the wafer, and R2 is a heat resistance for a heat transfer route from the rear surface of the wafer container toward a front surface of the wafer container.
    Type: Grant
    Filed: October 16, 2002
    Date of Patent: March 18, 2008
    Assignee: Nippon Mining & Metals Co., Ltd.
    Inventors: Eiichi Shimizu, Nobuhito Makino
  • Patent number: 7344594
    Abstract: A method of charging a crystal forming apparatus with molten source material is provided. The method includes the steps of positioning a melter assembly relative to the crystal forming apparatus for delivering molten silicon to a crucible of the apparatus. An upper heating coil in the melter assembly is operated to melt source material in a melting crucible. A lower heating coil in the melter assembly is operated to allow molten source material to flow through an orifice of the melter assembly to deliver a stream of molten source material to the crucible of the crystal forming apparatus. The invention is also directed to a method of charging a crystal puller with molten silicon including the step of removing an upper housing of the crystal puller defining a pulling chamber from a lower housing of the crystal puller defining a growth chamber and attaching the lower housing in place of the upper housing.
    Type: Grant
    Filed: June 17, 2005
    Date of Patent: March 18, 2008
    Assignee: MEMC Electronic Materials, Inc.
    Inventor: John Davis Holder
  • Patent number: 7335256
    Abstract: A silicon single crystal which, over an ingot length of over 10 percent of the total ingot length, has a uniform defect picture and narrow radial dopant and oxygen variations. The process in accordance with the Czochralski method involves bringing about a temperature distribution in the melt in the region of the solidification interface which deviates from rotational symmetry.
    Type: Grant
    Filed: July 17, 2006
    Date of Patent: February 26, 2008
    Assignee: Siltronic AG
    Inventors: Martin Weber, Wilfried von Ammon, Herbert Schmidt, Janis Virbulis, Yuri Gelfgat, Leonid Gorbunov
  • Patent number: 7335260
    Abstract: A laser annealing apparatus for sequential lateral solidification (SLS) to uniformly crystallize silicon on an entire silicon substrate by minimizing the dislocation of the silicon substrate during laser beam irradiation is disclosed. During the laser annealing, a vacuum chuck holds the silicon substrate on a movable stage. The device includes a laser source, an optical system patterning the shape and energy of a laser beam irradiated from the laser source, a vacuum chuck supporting a silicon substrate, and a movable stage supporting the vacuum chuck as well as transferring the vacuum chuck in a predetermined direction. Accordingly, the apparatus improves the degree of crystallization because it is able to uniformly carry out SLS on an entire surface of the silicon substrate.
    Type: Grant
    Filed: July 8, 2004
    Date of Patent: February 26, 2008
    Assignee: LG.Philips LCD Co., Ltd.
    Inventor: Yun-Ho Jung
  • Patent number: 7335257
    Abstract: An apparatus is provided for manufacturing a single crystal rod from a poly crystal feed rod including a closed chamber at which chamber the feed rod is located. The chamber has an annular energy supply arranged around the feed rod for melting off the one end of the rod for providing single crystals. Actuators are provided, for axial movement of the feed rod and for a rotating relative movement between the feed rod and the annular energy supply The apparatus further includes components for recording and regulating the distance between the surface of the feed rod and an annular inwardly radially facing reference face associated with the energy supply The resulting apparatus and method that enable use of irregular feed rods that assume other shapes than the optimal cylindrical shape and also enable use of curved cylindrical and elliptical rods with irregular surfaces.
    Type: Grant
    Filed: February 6, 2004
    Date of Patent: February 26, 2008
    Assignee: Topsil Semiconductor Materials A/S
    Inventors: Leif Jensen, Jan Eyving Petersen, Per Vabengard
  • Patent number: 7335262
    Abstract: An apparatus includes an autoclave for preparing a supercritical solvent, a convection controller for establishing a convection flow, a dissolution zone where a feedstock is located above the convection controller and a crystallization zone where a seed is located below the convection controller are formed. A convection flow rate of the supercritical solution between the dissolution zone and the crystallization zone is determined by the degree of opening of the convection controller and the temperature difference between the dissolution zone and the crystallization zone. Accordingly, the supercritical solution, in which the nitride has a negative temperature coefficient of solubility, is supplied from the dissolution zone to the crystallization zone in which a seed is located through the convection controller so that nitride crystal is selectively grown on the seed by maintaining supersaturation of the supercritical solution with respect to the seed at a raised temperature.
    Type: Grant
    Filed: December 11, 2002
    Date of Patent: February 26, 2008
    Assignees: Ammono Sp. z o.o., Nichia Corporation
    Inventors: Robert Dwilinski, Roman Doradzinski, Jerzy Garczynski, Leszek P. Sierzputowski, Yasuo Kanbara
  • Patent number: 7332029
    Abstract: A crystal forming apparatus and method for using the apparatus, the method including depositing a precipitant solution in a site, incubating the site, during which time volatile vapor evaporates from the precipitant solution and accumulates in the site, and pumping the accumulated volatile vapor away from the site. An exemplary apparatus includes a sealed site except for a vent on the sealed site. In one embodiment, the vent is a passive vent that inhibits vapor diffusion out of the site. In another embodiment, the vent is an active vent that opens in response to a pressure differential. The present invention accelerates and controls the crystal growth process by pumping volatile vapor away from the sealed site.
    Type: Grant
    Filed: August 10, 2004
    Date of Patent: February 19, 2008
    Assignee: Neuro Probe Incorporated
    Inventor: Richard H. Goodwin, Jr.
  • Patent number: 7332028
    Abstract: The invention relates to the handling of a composition comprising a rare-earth halide, especially within the context of the growth of crystals from said composition, said crystals generally being of formula AeLnfX(3f+e) in which Ln represents one or more rare earths, X represents one or more halogen atoms chosen from Cl, Br or I, and A represents one or more alkaline metals such as K, Li, Na, Rb or Cs, e and f representing values such that e, which may be zero, is less than or equal to 2f and f is greater than or equal to 1. It is possible in this way to grow single crystals exhibiting remarkable scintillation properties.
    Type: Grant
    Filed: June 11, 2003
    Date of Patent: February 19, 2008
    Assignee: Saint-Gobain Cristaux et Detecteurs
    Inventors: Alain Iltis, Vladimir Ouspenski
  • Patent number: 7332027
    Abstract: A method for manufacturing an aluminum nitride single crystal is provided, including the steps of preparing a raw material composition containing aluminum oxide and/or an aluminum oxide precursor which is converted into aluminum oxide by heating, and aluminum nitride and/or an aluminum nitride precursor which is converted into aluminum nitride by heating, heating the raw material composition at 1600 to 2400° C. to synthesize aluminum nitride, and causing crystal growth of the aluminum nitride to obtain an aluminum nitride single crystal.
    Type: Grant
    Filed: June 30, 2005
    Date of Patent: February 19, 2008
    Assignee: NGK Insulators, Ltd.
    Inventors: Yoshimasa Kobayashi, Toru Hayase, Naohito Yamada
  • Patent number: 7329318
    Abstract: Crystals of paroxetine hydrochloride ½-hydrate are allowed to separate out by adding water to a solution or suspension comprising paroxetine hydrochloride and a polar organic solvent which contains no water or at most 60% by weight of water to adjust the water content to at least 70% by weight when crystals of paroxetine hydrochloride ½-hydrate are allowed to separate out in a water-containing polar organic solvent. Crystals of paroxetine hydrochloride ½-hydrate being not colored in pink can be allowed to separate out in the presence of hydrogen chloride when crystals of paroxetine hydrochloride ½-hydrate are allowed to separate out in water or a water-containing polar organic solvent.
    Type: Grant
    Filed: September 17, 2003
    Date of Patent: February 12, 2008
    Assignee: Sumitomo Chemical Company, Limited
    Inventors: Shigeya Yamazaki, Taichi Yoshikawa
  • Patent number: 7326395
    Abstract: The present invention is a method for producing a single crystal in accordance with Czochralski method by flowing an inert gas downward in a chamber 1 of a single crystal-pulling apparatus 11 and surrounding a single crystal 3 pulled from a raw material melt 2 with a gas flow-guide cylinder 4, wherein when a single crystal within N region outside OSF region generated in a ring shape in the radial direction of the single crystal is pulled, the single crystal within N region is pulled in a condition that flow amount of the inert gas between the single crystal and the gas flow-guide cylinder is 0.6 D(L/min) or more and pressure in the chamber is 0.6 D(hPa) or less, in which D (mm) is a diameter of the single crystal to be pulled. It is preferable that there is used the gas flow-guide cylinder that Fe concentration is 0.05 ppm or less, at least, in a surface thereof.
    Type: Grant
    Filed: August 13, 2004
    Date of Patent: February 5, 2008
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Izumi Fusegawa, Nobuaki Mitamura, Takahiro Yanagimachi
  • Patent number: 7326297
    Abstract: The invention relates to a device for the production of crystal rods having a defined cross-section and a column-shaped polycrystalline structure by means of floating-zone continuous crystallization, comprising at least one crucible filled with crystalline material, provided with a central deviation for transporting the contents of the crucible to a growing crystal rod arranged below the crucible, whereby the central deviation plunges into the melt meniscus, also comprising means for continuously adjustable provision of crystalline material to the crucible, and means for simultaneously feeding the melt energy and adjusting the crystallization front.
    Type: Grant
    Filed: May 6, 2003
    Date of Patent: February 5, 2008
    Assignee: PV Silicon Forschungs- und Produktions AG.
    Inventors: Nikolai V. Abrosimov, Helge Riemann
  • Patent number: 7326292
    Abstract: The inventive quality evaluation method for a single crystal ingot generally includes a step of determining cropping and sampling positions and a step of evaluating a sample. The step of determining cropping and sampling positions includes: (a) inputting basic information on the decision of cropping, sampling and prime positions according to equipments and products, (b) predetermining the cropping, sampling and prime positions according to the basic information, (c) monitoring a growing process of a growing ingot and analyzing/storing X factors related with the growing process of the growing ingot, and (d) determining the cropping and sampling positions based on the X factors related with the growing process.
    Type: Grant
    Filed: June 14, 2006
    Date of Patent: February 5, 2008
    Assignee: Siltron Inc.
    Inventors: Jin Geun Kim, Hyon Jong Cho
  • Patent number: 7326295
    Abstract: The present invention relates to a fabrication method for polycrystalline silicon thin film in which amorphous silicon is crystallized by laser using a mask having a mixed structure of laser transmission pattern group and laser non-transmission pattern group, wherein the mask comprises two or more of dot pattern groups in which the non-transmission pattern group is perpendicular to a scan directional axis, and the dot pattern groups are formed in a certain shape and comprise first non-transmission patterns that are not respectively arranged in a row in an axis direction perpendicular to the scan directional axis, and second non-transmission patterns that are formed in the same arrangement as the first non-transmission patterns, but are positioned in such a manner that the second non-transmission patterns are parallel to the first non-transmission patterns and vertical axis of the scan directional axis.
    Type: Grant
    Filed: September 30, 2004
    Date of Patent: February 5, 2008
    Assignee: Samsung SDI Co., Ltd.
    Inventors: Ji-Yong Park, Hye-Hyang Park
  • Patent number: 7323047
    Abstract: In a method for manufacturing a granular silicon crystal by allowing silicon melt in a crucible to be granularly discharged and fallen from a nozzle part composed of silicon carbide or silicon nitride, and cooling and solidifying the granular silicon melt during falling, a carbon source is added when the nozzle part is composed of silicon carbide, and a nitrogen source is added when the nozzle part is composed of silicon nitride, to the silicon melt in the crucible. Thereby, melt droplets of uniform size can be generated, so that granular silicon crystals having narrow variations in particle size can be manufactured at high productivity and superior reproducibility.
    Type: Grant
    Filed: March 22, 2006
    Date of Patent: January 29, 2008
    Assignee: Kyocera Corporation
    Inventors: Shin Sugawara, Eigo Takahashi, Nobuyuki Kitahara, Yoshio Miura, Hisao Arimune
  • Patent number: 7323050
    Abstract: A method of producing a lithium-tantalate crystal, wherein at least a first material containing lithium tantalate, lithium niobate or hydrogen storage alloy storing hydrogen that is subjected to a heat treatment at a temperature of T1? that is Curie temperature or higher in a reducing atmosphere is superposed on a single-polarized lithium-tantalate crystal, and then the crystal is subjected to a heat treatment at a temperature of T2? that is lower than Curie temperature in a reducing atmosphere, thereby an electric conductivity of the single-polarized lithium-tantalate crystal is increased. There can be provided a method of producing a lithium-tantalate crystal wherein the surface charge generated by applying a temperature change to the lithium-tantalate crystal can be decayed quickly without accumulating by increasing the electric conductivity, and an effective piezoelectric property is exhibited by maintaining the single polarized structure.
    Type: Grant
    Filed: March 5, 2004
    Date of Patent: January 29, 2008
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventor: Yoshiyuki Shiono