Abstract: A metering apparatus has a metering chamber which has at least one boundary surface in the form of a flexible diaphragm. The diaphragm is operatively connected to an actuating device so that the volume of the chamber for metering and deliveirng the substance can be varied. An inlet opening and an outlet opening in the metering chamber can preferably be closed off directly by the diaphragm, more specifically by means of closure devices arranged in the region of those openings. The metering apparatus is particularly suitable for die bonders for the delivery of a bonding agent onto a substrate which is then equipped with electronic components.