Patents Examined by Hanway Chang
  • Patent number: 11031209
    Abstract: Systems and methods of observing a sample in a multi-beam apparatus are disclosed. A multi-beam apparatus may comprise an array of deflectors configured to steer individual beamlets of multiple beamlets, each deflector of the array of deflectors having a corresponding driver configured to receive a signal for steering a corresponding individual beamlet. The apparatus may further include a controller having circuitry to acquire profile data of a sample and to control each deflector by providing the signal to the corresponding driver based on the acquired profile data, and a steering circuitry comprising the corresponding driver configured to generate a driving signal, a corresponding compensator configured to receive the driving signal and a set of driving signals from other adjacent drivers associated with adjacent deflectors and to generate a compensation signal to compensate a corresponding deflector based on the driving signal and the set of driving signals.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: June 8, 2021
    Assignee: ASML Netherlands B.V.
    Inventor: Jan-Gerard Cornelis Van Der Toorn
  • Patent number: 11020503
    Abstract: A disinfecting system includes a housing. An ultraviolet light (UV) source is secured to the housing and configured to emit UV light for disinfection of a target. A processor is secured to the housing in communication with the UV light source. The processor is configured to activate the UV light source for a selected amount of time suitable for disinfection of the target.
    Type: Grant
    Filed: February 3, 2021
    Date of Patent: June 1, 2021
    Assignee: P Tech, LLC
    Inventors: Peter M. Bonutti, Justin Beyers, Tonya M. Bierman
  • Patent number: 11024494
    Abstract: An interference in a first MRM transition measurement for a compound of interest is determined by using a second MRM transition that includes an isotope of the precursor ion in the first MRM transition. Both transitions include the same product ion. A first intensity is measured for the first MRM transition and a second intensity is measured for the second MRM transition. A ratio of the first intensity to the second intensity is calculated. A theoretical ratio of the quantity of first precursor ion to the second precursor ion is calculated according to their isotopic relationship. A difference between the ratio and the theoretical ratio is calculated and compared to a threshold value. If the difference is less than the threshold value, the first intensity of the first MRM transition is identified as including an interference for the compound of interest.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: June 1, 2021
    Assignee: DH Technologies Development Pte. Ltd.
    Inventor: Yves Le Blanc
  • Patent number: 11004654
    Abstract: Systems and methods are disclosed that remove noise from roughness measurements to determine roughness of a feature in a pattern structure. In one embodiment, a method for determining roughness of a feature in a pattern structure includes generating, using an imaging device, a set of one or more images, each including measured linescan information that includes noise. The method also includes detecting edges of the features within the pattern structure of each image without filtering the images, generating a biased power spectral density (PSD) dataset representing feature geometry information corresponding to the edge detection measurements, evaluating a high-frequency portion of the biased PSD dataset to determine a noise model for predicting noise over all frequencies of the biased PSD dataset, and subtracting the noise predicted by the determined noise model from a biased roughness measure to obtain an unbiased roughness measure.
    Type: Grant
    Filed: December 30, 2019
    Date of Patent: May 11, 2021
    Assignee: Fractilia, LLC
    Inventor: Chris Mack
  • Patent number: 11002744
    Abstract: A system and method is described for characterizing glycopeptides which includes a first quadrupole mass filter, a multipole rod set of an ion guide, a lens electrode, an ExD device and a mass analyzer. The multipole rod set is adapted to receive a radial radio frequency (RF) trapping voltage and a radial dipole direct current (DC) voltage The lens electrode is adapted to receive an axial trapping alternating current (AC) voltage and a DC voltage. The ExD device performs electron capture dissociation or electron transfer dissociation, the ExD device being positioned so that an entrance of the ExD device is disposed on the other side of the lens electrode opposite the multipole rod set. The mass analyzer is positioned at an exit of the ExD device for receiving ions from the ExD device.
    Type: Grant
    Filed: June 28, 2018
    Date of Patent: May 11, 2021
    Assignee: DH Technologies Development Pte. Ltd.
    Inventors: Takashi Baba, Yves Le Blanc
  • Patent number: 11004653
    Abstract: An edge detection system is provided that generates a scanning electron microscope (SEM) linescan image of a pattern structure including a feature with edges that require detection. The edge detection system includes an inverse linescan model tool that receives measured linescan information for the feature from the SEM. In response, the inverse linescan model tool provides feature geometry information that includes the position of the detected edges of the feature.
    Type: Grant
    Filed: December 16, 2019
    Date of Patent: May 11, 2021
    Assignee: Fractilia, LLC
    Inventor: Chris Mack
  • Patent number: 11002689
    Abstract: The method is for quantification of purity of sub-visible particle samples. A sample to be analyzed is place in an electron microscope to obtain an electron microscopy image of the sample. The sample contains objects. The objects that have sizes being different from a size range of primary particles and sizes being within the size range of primary particles are enhanced. The objects are detected as being primary particles or debris. The detected primary particles are excluded from the objects so that the objects contain debris but no primary particles. A first total area (T1) of the detected debris is measured. A second total area (T2) of the detected primary particles is measured.
    Type: Grant
    Filed: August 23, 2019
    Date of Patent: May 11, 2021
    Assignee: INTELLIGENT VIRUS IMAGING INC.
    Inventors: Ida-Maria Sintorn, Martin Ryner, Gustaf Kylberg, Josefina Nilsson
  • Patent number: 10998166
    Abstract: A charged-particle beam (CPB) is aligned to a primary axis of a CPB microscope by determining a first beam deflection drive to a beam deflector for directing the CPB passing a reference location displaced from the primary axis. The beam deflector is provided with a second beam deflection drive during the working mode of the CPB microscope to propagate the beam along the primary axis. The second beam deflection drive is determined based on the first beam deflection drive.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: May 4, 2021
    Assignee: FEI Company
    Inventors: Branislav Straka, Radek Smolka, Lukas Kral, Jan Skalicky
  • Patent number: 10998175
    Abstract: Disclosed herein is a device for characterizing a biological sample or an airborne sample. According to embodiments of the present disclosure, the device comprises an electrospray source, a mass analyzer, a charge detector, and optionally, an ion guide. The present device is useful in analyzing the particle population in the biological or airborne sample based on the mass to charge (m/z) ratio and the charge (z) of each particle. Also disclosed herein are the methods of making a diagnosis of cancer by use of the present device, and methods of determining the mass distribution of particles in an airborne sample.
    Type: Grant
    Filed: November 17, 2019
    Date of Patent: May 4, 2021
    Assignee: ACADEMIA SINICA
    Inventors: Abdil Ozdemir, Jung-Lee Lin, Chung-Hsuan Chen
  • Patent number: 10996393
    Abstract: Disclosed embodiments include an energy directing device having one or more energy relay elements configured to direct energy from one or more energy locations through the device. In an embodiment, surfaces of the one or more energy relay elements may form a singular seamless energy surface where a separation between adjacent energy relay element surfaces is less than a minimum perceptible contour. In disclosed embodiments, energy is produced at energy locations having an active energy surface and a mechanical envelope. In an embodiment, the energy directing device is configured to relay energy from the energy locations through the singular seamless energy surface while minimizing separation between energy locations due to their mechanical envelope. In embodiments, the energy relay elements may comprise energy relays utilizing transverse Anderson localization phenomena.
    Type: Grant
    Filed: November 25, 2019
    Date of Patent: May 4, 2021
    Assignee: Light Field Lab, Inc.
    Inventors: Jonathan Sean Karafin, Brendan Elwood Bevensee
  • Patent number: 10991567
    Abstract: A method of operating a quadrupole device is disclosed that comprises operating the quadrupole device in a first mode of operation, passing ions into the quadrupole device while the quadrupole device is operated in the first mode of operation, and then operating the quadrupole device in a second mode of operation. Operating the quadrupole device in the second mode of operation comprises applying one or more drive voltages to the quadrupole device, and operating the quadrupole device in the first mode of operation comprises applying one or more reduced drive voltages or not applying one or more drive voltages to the quadrupole device.
    Type: Grant
    Filed: September 6, 2017
    Date of Patent: April 27, 2021
    Assignee: MICROMASS UK LIMITED
    Inventors: David J. Langridge, Martin Raymond Green
  • Patent number: 10991559
    Abstract: The present invention provides a method enabling a quantitative analysis of a polymer by MALDI mass spectrometry, and a method for manufacturing a sample for MALDI mass spectrometry for a quantitative analysis of a polymer. To that end, the methods can increase reproducibility of a MALDI spectrum by making uniform the thickness of a sample affecting the pattern in a polymer MALDI spectrum. The sample according to the present invention is applicable also to a commercial MALDI-TOF instrument, and, thus, can quantitatively analyze a polymer in a more efficient and faster manner.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: April 27, 2021
    Inventors: Yongjin Bae, Jong Chan Kim, Yeu Young Youn, Young Hee Lim, Hye Sung Cho
  • Patent number: 10980911
    Abstract: A flexible ion generator device that includes a dielectric layer having a first end, a second end, a first side, a second side, a top side, and a bottom side, at least one trace positioned on the dielectric layer and having a plurality of emitters engaged to the at least one trace. A plurality of lights disposed on the dielectric layer.
    Type: Grant
    Filed: February 10, 2020
    Date of Patent: April 20, 2021
    Assignee: Global Plasma Solutions, Inc.
    Inventor: Charles Houston Waddell
  • Patent number: 10983142
    Abstract: Methods, devices, and systems for forming atomically precise structures are provided. In some embodiments, the methods, devices, and systems of the present disclosure utilize a scanning tunneling microscope (STM) system to receive a sample having a surface to be patterned. The system positions a conductive tip over a pixel region of the surface. While the conductive tip remains laterally fixed relative to the surface, the system applies a bias voltage between the conductive tip and the surface such that a current between the conductive tip and the surface removes at least one atom from the pixel region. The system stops applying the voltage and current when it senses the removal of the at least one atom. The system then verifies that the at least one atom has been removed from the pixel region.
    Type: Grant
    Filed: October 22, 2019
    Date of Patent: April 20, 2021
    Assignee: ZYVEX LABS, LLC
    Inventors: John Randall, Ehud Fuchs, James H. G. Owen, Joseph Lake
  • Patent number: 10976283
    Abstract: Methods and apparatuses for ion peak compression and increasing resolution of ions are disclosed. Packets of ions are introduced into a device. A first electric field is applied for dispersing the ion packets temporally or spatially according to their mobilities. A second intermittent traveling wave is applied for regrouping or merging the dispersed ion packets into a lesser number of trapping regions with narrower peaks. The ions packets are compressed into the narrower peak regions by varying a duty cycle of the intermittent traveling wave.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: April 13, 2021
    Assignee: Battelle Memorial Institute
    Inventors: Yehia M. Ibrahim, Sandilya Garimella, Richard D. Smith
  • Patent number: 10978271
    Abstract: A transmission electron microscopy system for imaging a sample, comprising: a pulse generator for generating an initial electron pulse towards the sample, the initial electron pulse to be propagated through the sample to obtain a transmitted electron pulse; an encoding device for encoding the transmitted electron pulse according to a predefined pattern to obtain an encoded electron pulse; a shearing device for temporally shearing the encoded electron pulse in a given direction to obtain a given electron pulse; a detector for detecting the given electron pulse to obtain a single image of the sample; and a datacube generator for determining a spatiotemporal datacube from the single image using the predefined pattern, and outputting the spatiotemporal datacube.
    Type: Grant
    Filed: November 20, 2019
    Date of Patent: April 13, 2021
    Assignee: INSTITUT NATIONAL DE LA RECHERCHE SCIENTIFIQUE (INRS)
    Inventors: Jinyang Liang, Xianglei Liu, Aycan Yurtsever
  • Patent number: 10976344
    Abstract: A scanning tunneling microscopy based potentiometry system and method for the measurements of the local surface electric potential is presented. A voltage compensation circuit based on this potentiometry system and method is developed and employed to maintain a desired tunneling voltage independent of the bias current flow through the film. The application of this potentiometry system and method to the local sensing of the spin Hall effect is outlined herein, along with the experimental results obtained.
    Type: Grant
    Filed: December 6, 2019
    Date of Patent: April 13, 2021
    Assignees: University of Maryland, College Park, Government of the United States of America as Represented by the Director, National Security Agency
    Inventors: Ting Xie, Michael Dreyer, Isaak D. Mayergoyz, Robert E. Butera, Charles S. Krafft
  • Patent number: 10969404
    Abstract: A method of scanning a feature with a probe, the probe comprising a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever. An orientation of the probe is measured relative to a reference surface to generate a probe orientation measurement. The reference surface defines a reference surface axis which is normal to the reference surface and the probe tip has a reference tilt angle relative to the reference surface axis. A shape of the cantilever is changed in accordance with the probe orientation measurement so that the probe tip moves relative to the cantilever mount and the reference tilt angle decreases from a first reference tilt angle to a second reference tilt angle. A sample surface is scanned with the probe, wherein the sample surface defines a sample surface axis which is normal to the sample surface and the probe tip has a scanning tilt angle relative to the sample surface axis.
    Type: Grant
    Filed: April 6, 2018
    Date of Patent: April 6, 2021
    Assignee: INFINITESIMA LIMITED
    Inventor: Andrew Humphris
  • Patent number: 10971345
    Abstract: A mass spectrometer includes: a chamber; a support that, in a state in which, in a sample support body that includes a substrate in which a plurality of through-holes open in first and second surfaces are formed and a conductive layer that is at least provided on the first surface, the second surface thereof is in contact with a sample, supports the sample and the sample support body; a laser beam irradiation part that irradiates the first surface with a laser beam; a voltage application part that applies a voltage to the conductive layer; an ion detection part that, detects the ionized components of the sample in a space inside the chamber; a first light irradiation part that irradiates the sample with a first light from a side of the substrate; and an imaging part that obtains a reflected light image of the sample by the first light.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: April 6, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Masahiro Kotani, Takayuki Ohmura
  • Patent number: 10964510
    Abstract: A scanning electron microscope includes a first detector for detecting electrons, a second detector for detecting X-rays, and an image processor section for causing first markers indicative of imaging positions and second markers indicative of analysis positions to be displayed on a display device such that the first and second markers are placed on a whole image of a sample. The image processor section alters the magnification of the whole image based on instructions for altering the magnification of the whole image displayed on the display device. The image processor section displays new first markers of the same size as the first markers placed on the unaltered magnification whole image such that the new first markers are placed on the altered magnification whole image. The image processor section causes new second markers of the same size as the second markers placed on the unaltered magnification whole image to be placed on the altered magnification whole image.
    Type: Grant
    Filed: November 13, 2019
    Date of Patent: March 30, 2021
    Assignee: JEOL Ltd.
    Inventor: Akira Abe