Abstract: A MEMS device includes a first MEMS sensor associated with a first spatial plane and a second MEMS sensor is associated with a spatial second plane not co-planar with the first spatial plane, wherein the first MEMS sensor is configured to provide a first interrupt and a first data in response to a physical perturbation, wherein the second MEMS sensor is configured to provide a second interrupt and second data in response to the physical perturbation, and a controller configured to receive the first interrupt at a first time and the second interrupt at a second time different from the first time, wherein the controller is configured to determine a latency between the first time and the second time, and wherein the controller is configured to determine motion data in response to the first data, to the second data, and to the latency.

Abstract: An inertia detection device includes one set of gyro sensors for detecting an angular velocity of a detection target object along a same direction, the gyro sensors arranged in a same physical quantity range, in which sensor movement is detectable as a same physical quantity. When an abnormality affecting an output signal of one of the gyro sensors is caused, based on an observation that a difference of magnitudes of the output signals from normal and abnormal gyro sensors is different from a difference of magnitudes of the output signals from two normal gyro sensors, such an abnormality of one of the gyro sensors is determinable by a comparison between the output signals, without using an estimated value thereof.

Abstract: A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

Abstract: A motion sensor with sigma-delta analog-to-digital converter (ADC) having improved bias instability is presented herein. Differential outputs of a differential amplifier of the sigma-delta ADC are electrically coupled, via respective capacitances, to differential inputs of the differential amplifier. To minimize bias instability corresponding to flicker noise that has been injected into the differential inputs, the differential inputs are electrically coupled, via respective pairs of electronic switches, to feedback resistances based on a pair of switch control signals. In this regard, a first feedback resistance of the feedback resistances is electrically coupled to a first defined voltage, and a second feedback resistance of the feedback resistances is electrically coupled to a second defined reference voltage.

Abstract: The invention provides an acceleration sensor, including a sensing unit, a sensing unit includes a ring-shaped outer coupling unit; seesaw structures, including at least two and arranged on an inner side of the outer coupling unit; an inner coupling unit, including an inner coupling elastic beam connecting two adjacent seesaw structures; proof mass blocks fixed on the outer coupling unit or the inner coupling unit or the seesaw structures; an in-plane coupling elastic member elastically connecting the seesaw structures to the outer coupling unit; in-plane displacement detection devices arranged on the proof mass blocks and configured to detect movements of the proof mass blocks along the first direction and/or along the second direction; and out-of-plane displacement detection devices arranged on the outer coupling unit and/or the seesaw structures and/or the inner coupling unit configured to detect movements of the seesaw structures along the third direction.

Abstract: A signal processing unit configured to: cause a first ultrasound emitter, when attached to a wall of a vessel, to emit a first ultrasound test signal; receive, from at least one ultrasound receiver, when attached to the wall of the vessel, the first ultrasound test signal; detect a time of flight of the received first ultrasound test signal; and determine that an acoustic coupling of the first ultrasound emitter and a first ultrasound receiver of the at least one ultrasound receiver to the wall of the vessel is intact if the detected time of flight corresponds to a length of a path in the wall of the vessel from the first ultrasound emitter to the at least one ultrasound receiver.

Abstract: The design invention comprises a geometric configuration of an ionic polymer metal composite (IPMC) three dimensional deformation and dynamics sensor capable of sensing any complex deformation, twisting rolling and acceleration measurements by using plated electrodes.

Abstract: An acceleration detection device includes a board including first and second surfaces, an acceleration detector on the first surface of the board, first circuit components on the second surface of the board, a seal including a first sealing portion covering the acceleration detector on the first surface of the board and a second sealing portion covering the first circuit components on the second surface of the board, the second sealing portion including an inner surface facing the board and an outer surface on a side opposite to the inner surface, the seal being made of a resin, and a high-rigidity body extending in a direction in which the outer surface and the second surface of the board are connected to each other within the second sealing portion, the high-rigidity body having higher rigidity than the seal.

Abstract: An optomechanical inertial reference mirror combines an optomechanical resonator with a reflector that serves as an inertial reference for an atom interferometer. The optomechanical resonator is optically monitored to obtain a first inertial measurement of the reflector that features high bandwidth and high dynamic range. The atom interferometer generates a second inertial measurement of the reflector that features high accuracy and stability. The second inertial measurement corrects for drift of the first inertial measurement, thereby resulting in a single inertial measurement of the reflector having high bandwidth, high dynamic range, excellent long-term stability, and high accuracy. The reflector may be bonded to the resonator, or formed directly onto a test mass of the resonator. With a volume of less than one cubic centimeter, the optomechanical inertial reference mirror is particularly advantageous for portable atomic-based sensors and systems.

Abstract: A MEMS gyroscope includes a driven mass that moves in response to a drive force. A drive amplitude sense electrode is included as a feature of the drive mass and extends in a direction perpendicular to the drive direction. A change in capacitance is measured based on the relative location of the drive amplitude sense electrode to a known fixed position, which in turn is used to accurately determine a location of the driven mass.

Abstract: A micromechanical structure including a substrate, a moveable seismic mass, a detection structure, and a main spring. The seismic mass is connected to the substrate using the main spring. A first direction and a second direction perpendicular thereto define a main extension plane of the substrate. The detection structure detects a deflection of the seismic mass and includes first electrodes mounted at the seismic mass and second electrodes mounted at the substrate. The first electrodes and second electrodes have a two-dimensional extension in the first and second directions. The micromechanical structure has a graduated stop structure including a first spring stop, a second spring stop, and a fixed stop.

Abstract: A micromechanical structure, including a substrate, a seismic mass movable with respect to the substrate, and first and second detectors. A first direction and a second direction perpendicular to the first direction define a main extension plane of the substrate. The first and second detectors respectively detect a translatory deflection, and a rotatory deflection. The seismic mass is connected to the substrate via an anchoring element and four torsion spring sections. The first detector include an electrode structure, including first electrodes attached at the seismic mass and second electrodes attached at the substrate. The first and second electrodes have a two-dimensional extension in the second direction and in a third direction perpendicular to the main extension plane. The anchoring element includes first and second sections with a gap between them. A connecting element connects two first electrodes and is guided through the gap.

Abstract: An acceleration detection device includes a first acceleration acquisition unit configured to acquire a first acceleration from a mechanical acceleration sensor a second acceleration acquisition unit configured to acquire a second acceleration from a non-mechanical acceleration sensor and a correction value calculation unit configured to calculate a correction value for correcting the first acceleration using the second acceleration.

Abstract: An inertial measurement unit includes: a sensor unit having an inertial sensor; and a first holding unit holding the sensor unit. The first holding unit includes: a first substrate; a second substrate; a plurality of spacers coupling the sensor unit and the first substrate; a first elastic member and a second elastic member provided on both sides of the first substrate via opening parts; a first fixing member penetrating, pressing and fixing the first substrate and the first elastic member to the second substrate; and a second fixing member penetrating, pressing and fixing the first substrate and the second elastic member to the second substrate.

Abstract: A tire device has a tire side device and a vehicle body side system, and determines a road surface condition and detects a tire wear state. The tire side device includes a vibration detection unit that outputs a detection signal according to a magnitude of a tire vibration, a control unit extracts a feature amount during one rotation of the tire, and a first data communication unit that transmits a road surface data including a feature amount. The vehicle body side system includes a second data communication unit that receives road surface data, a road surface determination part that determines a road surface condition based on the road surface data, an integral calculation part that calculates an integral value of the feature amount in a specific frequency band included in the road surface data, and a wear determination part that detects the tire wear state from the integral value.

Abstract: A control unit of a tire side device has a feature amount extraction part, a feature amount storage part, a change determination part, a vehicle speed estimation part, and an algorithm switching part. The change determination part determines whether or not there is a change in the road surface condition based on a present feature amount and a previous feature amount stored in the feature amount storage part, and transmits a road surface data including the present feature amount when there is a change in the road surface condition. The algorithm switching part switches based on the vehicle speed estimation by the vehicle speed estimation part whether to transmit the road surface data from the transmission unit when the road surface condition is changed, or to transmit the road surface data without determining whether or not the road surface condition is changed by the change determination part.

Abstract: The invention relates to an inertial measuring device, having an inertial measuring unit for determining a north direction and for determining position angles, having a battery, and having a wireless interface, which inertial measuring device has a housing, in which the inertial measuring unit, the battery and the interface are housed. A carrying handle is provided on the housing, which carrying handle is designed as a one-hand carrying handle such that the inertial measuring device can be carried with only one hand during normal use.

Abstract: A low heat-resistant sensor that has high chemical resistance, excellent drip-proof properties, and excellent dust-proof properties is provided. The low heat-resistant sensor includes a sensor body that includes a sensor unit that is disposed in a housing and a cable that is electrically connected to the sensor unit of the sensor body. The housing of the sensor body is composed of fluorine resin, the cable is covered by a tube composed of fluorine resin, a portion at which the housing and the tube are connected to each other is thermally bonded, and the housing and the tube are integrally formed.

Abstract: The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements.

Abstract: A vibration rectification error correction circuit includes a first correction circuit that obtains a digital value based on a signal to be measured output from a sensor element configured to measure a physical quantity and corrects a vibration rectification error of the digital value by a correction function based on a product of values obtained by biasing the digital value.