Patents Examined by Herve-Louis Y Assouman
  • Patent number: 11888014
    Abstract: Disclosed is a low temperature method of fabrication of short-wave infrared (SWIR) detector arrays (FPA) including a readout wafer and absorption layer connected for improved performances. The absorber layer includes a SWIR conversion layer with a GeSn or SiGeSn alloy. A first series of process steps realizes a CMOS processed readout wafer. A buffer layer is transferred on the readout wafer and annealed at temperatures compatible with the CMOS substrate, achieving a high quality crystalline buffer layer. The method assures a temperature profile between the light entrance surface of the buffer layer, and the readout electronics so the annealing temperature remains compatible with the CMOS. The buffer layer is used for further growth of a GeSn or SiGeSn structure to create the conversion layer and achieve the final structure of the SWIR FPA. Also disclosed is a SWIR FPA detector as realized by such method, and SWIR FPA applications.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: January 30, 2024
    Assignee: ZEDEL SÀRL
    Inventor: Claude Meylan
  • Patent number: 11889775
    Abstract: One aspect of the invention relates to a multi-terminal memtransistor. The memtransistor includes a substrate having a first surface and an opposite, second surface, a polycrystalline monolayer film formed of an atomically thin material on the first surface of the substrate, an electrode array having a plurality of electrodes spatial-apart formed on the polycrystalline monolayer film such that each pair of electrodes defines a channel in the polycrystalline monolayer film therebetween, and a gate electrode formed on the second surface of the substrate and capacitively coupled with the channel. The polycrystalline monolayer film contains grains defining a plurality of grain boundaries thereof. The multi-terminal memtransistor operates much like a neuron by performing both memory and information processing, and can be a foundational circuit element for new forms of neuromorphic computing.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: January 30, 2024
    Assignee: NORTHWESTERN UNIVERSITY
    Inventors: Vinod K. Sangwan, Hong-Sub Lee, Mark C. Hersam
  • Patent number: 11881455
    Abstract: Provided is a semiconductor architecture including a wafer, a first semiconductor device provided on a first surface of the wafer, the first semiconductor device being configured to route signals, a second semiconductor device provided on a second surface of the wafer opposite to the first surface of the wafer, the second semiconductor device being configured to supply power, and a buried power rail (BPR) included inside of the wafer and extending from the first surface of the wafer to the second surface of the wafer, the BPR being configured to deliver the power from the second semiconductor device to the first semiconductor device.
    Type: Grant
    Filed: July 30, 2021
    Date of Patent: January 23, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Saehan Park, Hoonseok Seo, Gil Hwan Son, Byounghak Hong, Kang Ill Seo
  • Patent number: 11881440
    Abstract: Microelectronic devices, assemblies, and systems include a microelectronic die and composite material to conduct heat from the microelectronic die such that the composite material includes polymer chains chemically bonded to fill particles having a hexagonal lattice of carbon atoms such as graphene sheet fill particles and/or carbon nanotube fill particles.
    Type: Grant
    Filed: February 21, 2020
    Date of Patent: January 23, 2024
    Assignee: Intel Corporation
    Inventors: Marely E. Tejeda Ferrari, Taylor Gaines, Elah Bozorg-Grayeli, James C. Matayabas, Jr.
  • Patent number: 11881516
    Abstract: Provided herein is: a SiC substrate having a front surface on which a GaN layer is stacked; a source electrode formed on a front surface of the GaN layer; a MIM capacitor formed on a front surface of the source electrode; and a via hole extending from a rear surface of the SiC substrate to reach the source electrode; wherein a barrier metal layer is included in the source electrode, and wherein the depth end of the via hole is placed between a rear surface of the source electrode and a rear surface of the barrier metal layer. Accordingly, intrusion of a halogen element, in particular, Br, into an insulating film that is placed in the MIM capacitor, is suppressed over a long term.
    Type: Grant
    Filed: December 27, 2018
    Date of Patent: January 23, 2024
    Assignee: Mitsubishi Electric Corporation
    Inventors: Kohei Miki, Shinichi Miyakuni, Kohei Nishiguchi
  • Patent number: 11877498
    Abstract: A method of manufacturing a display apparatus includes preparing a panel with a panel layer displaying images, a first protection film on a first surface of the panel layer with a first adhesion layer, and a second protection film on a second surface of the panel layer with a second adhesion layer, disposing the panel on a stage, cutting the panel on the stage along a closed-curve line to a predetermined depth extending from the second protection film to at least a portion of the first adhesion layer, and separating a first portion of the panel inside the closed-curve line from a second portion of the panel outside the closed-curve line, such that the second portion is removed simultaneously with the entire first protection film according to a first boundary by the line and a second boundary between the panel layer and the first protection film.
    Type: Grant
    Filed: May 20, 2022
    Date of Patent: January 16, 2024
    Assignee: Samsung Display Co., Ltd.
    Inventor: Kwangnyun Kim
  • Patent number: 11869890
    Abstract: An apparatus is provided which comprises: a first transistor comprising a source region and a drain region with a channel region therebetween, a first dielectric layer over the first transistor, a second transistor comprising a source region and a drain region with a channel region therebetween, wherein the second transistor is over the first dielectric layer, a second dielectric layer over the second transistor, and a contact coupled to the source region or the drain region of the first transistor, wherein the contact comprises a metal having a straight sidewall that extends from through both the first and second dielectric layers. Other embodiments are also disclosed and claimed.
    Type: Grant
    Filed: December 26, 2017
    Date of Patent: January 9, 2024
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Willy Rachmady, Gilbert Dewey, Rishabh Mehandru, Jack T. Kavalieros
  • Patent number: 11869882
    Abstract: An electronic device is disclosed. The electronic device includes a substrate, a first electrode and a second electrode disposed on the substrate, a plurality of electronic units comprising a first electronic unit corresponding to a sub-pixel, a second electronic unit corresponding to another sub-pixel, wherein the first electrode and the second electrode are electrically connected to the first electronic unit and the second electronic unit, and the second electrode is electrically insulated from the first electrode.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: January 9, 2024
    Assignee: InnoLux Corporation
    Inventors: Jui-Jen Yueh, Kuan-Feng Lee
  • Patent number: 11871583
    Abstract: A pocket integration for high density memory and logic applications and methods of fabrication are described. While various embodiments are described with reference to FeRAM, capacitive structures formed herein can be used for any application where a capacitor is desired. For example, the capacitive structure can be used for fabricating ferroelectric based or paraelectric based majority gate, minority gate, and/or threshold gate.
    Type: Grant
    Filed: September 17, 2021
    Date of Patent: January 9, 2024
    Assignee: KEPLER COMPUTING INC.
    Inventors: Noriyuki Sato, Tanay Gosavi, Niloy Mukherjee, Amrita Mathuriya, Rajeev Kumar Dokania, Sasikanth Manipatruni
  • Patent number: 11869828
    Abstract: A semiconductor package includes a first die. The first die includes a semiconductor substrate. The semiconductor substrate has a first surface, a second surface opposite to the first surface, and a through hole between the first surface and the second surface and having an inner wall. The inner wall has a first lever arm. A length of the first lever arm is less than a thickness of the semiconductor substrate.
    Type: Grant
    Filed: June 10, 2021
    Date of Patent: January 9, 2024
    Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
    Inventors: Yi-Chi Chen, Ming-Han Wang
  • Patent number: 11869827
    Abstract: The invention pertains to the technical field of semiconductor devices, and specifically relates to a three-dimensional capacitor-inductor based on a high-functional-density through silicon via structure and a manufacturing method, The three-dimensional capacitor-inductor of the present invention includes: a substrate formed with a through silicon via; a three-dimensional capacitor, formed on a sidewall of the through silicon via, and sequentially including a first metal layer, a second insulating layer; and a second metal layer; and a three-dimensional inductor, composed of center-filled metal of the through silicon via and planar thick metal rewiring, wherein a first insulating layer is provided between the sidewall of the through silicon via and the three-dimensional capacitor, and a third insulating layer is provided between the three-dimensional capacitor and the three-dimensional inductor, The invention can effectively increase the values of capacitance and inductance in an integrated system, and at the
    Type: Grant
    Filed: July 2, 2020
    Date of Patent: January 9, 2024
    Assignee: Shanghai Integrated Circuit Manufacturing Innovation Center Co., Ltd.
    Inventors: Wei Zhang, Ziyu Liu, Lin Chen, Qingqing Sun
  • Patent number: 11862714
    Abstract: In a method of manufacturing a semiconductor device, a fin structure having a bottom part and an upper part on the bottom part is formed over a substrate. The bottom part is trimmed so that a width of an uppermost portion of the bottom part is smaller than a width of the upper part. Bottom end corners of the upper part are trimmed to reduce a width of the upper part at a bottom of the upper part. An isolation insulating layer is formed so that the upper part protrudes from the isolation insulating layer. A dummy gate structure is formed. A source/drain structure is formed. An interlayer dielectric layer is formed over the dummy gate structure and the source/drain structure. The dummy gate structure is replaced with a metal gate structure.
    Type: Grant
    Filed: August 9, 2021
    Date of Patent: January 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jiun Shiung Wu, Guan-Jie Shen
  • Patent number: 11862740
    Abstract: In an illuminance sensor, a slow axis of a first portion comprises a relation of +45° or ?45° in regard to a first polarization direction that is a polarization direction of the a linear polarization plate, a relation of a slow axis of a second portion in regard to the first polarization direction is ?45° or +45° that is opposite in sign to the relation of the slow axis of the first portion in regard to the first polarization direction, and a slow axis of a second quarter-wave plate comprises a relation of +45° or ?45° in regard to a second polarization direction that is a polarization direction of a second linear polarization plate, wherein the relation of the slow axis of the second quarter-wave plate in regard to the second polarization direction is the same with the relation of the slow axis of the first portion in regard to the first polarization direction.
    Type: Grant
    Filed: December 15, 2022
    Date of Patent: January 2, 2024
    Assignee: ROHM CO., LTD.
    Inventor: Yoshitsugu Uedaira
  • Patent number: 11864466
    Abstract: In a method of manufacturing a semiconductor device, a magnetic random access memory (MRAM) cell structure is formed. The MRAM cell structure includes a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode. A first insulating cover layer is formed over the MRAM cell structure. A second insulating cover layer is formed over the first insulating cover layer. An interlayer dielectric (ILD) layer is formed. A contact opening in the ILD layer is formed, thereby exposing the second insulating cover layer. A part of the second insulating cover layer and a part of the first insulating cover layer are removed, thereby exposing the top electrode. A conductive layer is formed in the opening contacting the top electrode. The second insulating cover layer has an oxygen getter property.
    Type: Grant
    Filed: July 26, 2021
    Date of Patent: January 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shy-Jay Lin, Chwen Yu, William J. Gallagher
  • Patent number: 11862612
    Abstract: Various embodiments of the present disclosure are directed towards a three-dimensional (3D) trench capacitor, as well as methods for forming the same. In some embodiments, a first substrate overlies a second substrate so a front side of the first substrate faces a front side of the second substrate. A first trench capacitor and a second trench capacitor extend respectively into the front sides of the first and second substrates. A plurality of wires and a plurality of vias are stacked between and electrically coupled to the first and second trench capacitors. A first through substrate via (TSV) extends through the first substrate from a back side of the first substrate, and the wires and the vias electrically couple the first TSV to the first and second trench capacitors. The first and second trench capacitors and the electrical coupling therebetween collectively define the 3D trench capacitor.
    Type: Grant
    Filed: December 20, 2021
    Date of Patent: January 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Xin-Hua Huang, Chung-Yi Yu, Yeong-Jyh Lin, Rei-Lin Chu
  • Patent number: 11855099
    Abstract: A method includes forming a first dielectric layer over the substrate and covering first, second, third, fourth, fifth and sixth protrusion regions; forming first, second, and third gate conductors over the first, fourth, and fifth protrusion regions, respectively; performing a first implantation process to form a second source region and a second drain region in the fourth protrusion region; performing a second implantation process to form a first source region and a first drain region in the first protrusion region, and to form a third source region and a third drain region in the fifth protrusion region; forming a metal layer over the third protrusion region; patterning the metal layer to form an inner circular electrode and an outer ring electrode encircling the inner circular electrode; forming a word line; and forming a bit line.
    Type: Grant
    Filed: January 24, 2022
    Date of Patent: December 26, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Jenn-Gwo Hwu, Ting-Hao Hsu
  • Patent number: 11854811
    Abstract: A finFET device and methods of forming are provided. The method includes etching recesses in a substrate on opposite sides of a gate stack. The method also includes epitaxially growing a source/drain region in each recess, where each of the source/drain regions includes a capping layer along a top surface of the respective source/drain region, and where a concentration of a first material in each source/drain region is highest at an interface of the capping layer and an underlying epitaxy layer. The method also includes depositing a plurality of metal layers overlying and contacting each of the source/drain regions. The method also includes performing an anneal, where after the anneal a metal silicide region is formed in each of the source/drain regions, where each metal silicide region extends through the capping layer and terminates at the interface of the capping layer and the underlying epitaxy layer.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yi-Min Huang, Huai-Tei Yang, Shih-Chieh Chang
  • Patent number: 11848281
    Abstract: A microelectronic device can include a polymer, a semiconductor, and a matching layer. The polymer can include a first coefficient of thermal expansion. The semiconductor can be coupled to the polymer layer. The matching layer can be adjacent the semiconductor, and the matching layer can include a second coefficient of thermal expansion that is about the same as the first coefficient of thermal expansion.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: December 19, 2023
    Assignee: Intel Corporation
    Inventors: Yong She, Bin Liu, Zhicheng Ding, Aiping Tan
  • Patent number: 11848326
    Abstract: Examples of an integrated circuit with gate cut features and a method for forming the integrated circuit are provided herein. In some examples, a workpiece is received that includes a substrate and a plurality of fins extending from the substrate. A first layer is formed on a side surface of each of the plurality of fins such that a trench bounded by the first layer extends between the plurality of fins. A cut feature is formed in the trench. A first gate structure is formed on a first fin of the plurality of fins, and a second gate structure is formed on a second fin of the plurality of fins such that the cut feature is disposed between the first gate structure and the second gate structure.
    Type: Grant
    Filed: December 22, 2020
    Date of Patent: December 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Zhi-Chang Lin, Wei-Hao Wu, Jia-Ni Yu, Chih-Hao Wang, Kuo-Cheng Ching
  • Patent number: 11842975
    Abstract: An electronic device with a multi-layer contact and a system is disclosed. In an embodiment, a semiconductor device includes a semiconductor substrate having a first electrode terminal located on a first surface and a second surface electrode terminal located on a second surface, the first surface being opposite to the second surface, an electrical contact layer disposed directly on the first electrode terminal, a functional layer directly disposed on the electrical contact layer, an adhesion layer directly disposed on the functional layer, a solder layer directly disposed on the adhesion layer; and a protection layer directly disposed on the solder layer, wherein the semiconductor device is a power semiconductor device configured to provide a vertical current flow.
    Type: Grant
    Filed: November 11, 2019
    Date of Patent: December 12, 2023
    Assignee: Infineon Technologies AG
    Inventors: Alexander Heinrich, Michael Juerss, Konrad Roesl, Oliver Eichinger, Kok Chai Goh, Tobias Schmidt