Patents Examined by Hoai V. Pham
  • Patent number: 11968850
    Abstract: A reliable light-emitting element with low driving voltage is provided. The light-emitting element includes an electron-injection layer between a cathode and a light-emitting layer. The electron-injection layer is a mixed film of a transition metal and an organic compound having an unshared electron pair. An atom of the transition metal and the organic compound form SOMO.
    Type: Grant
    Filed: February 17, 2023
    Date of Patent: April 23, 2024
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Nobuharu Ohsawa, Satoshi Seo
  • Patent number: 11955531
    Abstract: An integrated circuit device includes a fin-type active region protruding from a top surface of a substrate and extending in a first direction parallel to the top surface of the substrate, a gate structure intersecting with the fin-type active region and extending on the substrate in a second direction perpendicular to the first direction, a source/drain region on a first side of the gate structure, a first contact structure on the source/drain region, and a contact capping layer on the first contact structure. A top surface of the first contact structure has a first width in the first direction, a bottom surface of the contact capping layer has a second width greater than the first width stated above in the first direction, and the contact capping layer includes a protruding portion extending outward from a sidewall of the first contact structure.
    Type: Grant
    Filed: February 27, 2023
    Date of Patent: April 9, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dae-young Kwak, Ji-ye Kim, Jung-hwan Chun, Min-chan Gwak, Dong-hyun Roh, Jin-wook Lee, Sang-jin Hyun
  • Patent number: 11943913
    Abstract: A semiconductor structure includes a substrate and a buried gate structure in the substrate. The buried gate structure includes a gate dielectric layer formed on the sidewall and the bottom surface of a trench in the substrate, a barrier layer formed in the trench and on the sidewall and the bottom surface of the gate dielectric layer, a first work function layer formed in the trench and including a main portion and a protruding portion, a second work function layer formed at opposite sides of the protruding portion, and an insulating layer formed in the trench and on the protruding portion of the first work function layer and the second work function layer. The barrier layer surrounds the main portion of the first work function layer. The area of the top surface of the protruding portion is less than the area of the bottom surface of the protruding portion.
    Type: Grant
    Filed: April 17, 2023
    Date of Patent: March 26, 2024
    Assignee: WINBOND ELECTRONICS CORP.
    Inventors: Te-Hsuan Peng, Kai Jen, Mei-Yuan Chou
  • Patent number: 11943964
    Abstract: A light-emitting device includes a light-transmitting substrate, a light-transmitting interconnect located over the substrate, an insulating layer located over the substrate and the interconnect, and an intermediate layer formed in at least a region of a lateral side of the interconnect that overlaps the insulating layer.
    Type: Grant
    Filed: December 16, 2022
    Date of Patent: March 26, 2024
    Assignees: PIONEER CORPORATION, TOHOKU PIONEER CORPORATION
    Inventors: Junji Taguchi, Hiroki Tan, Noriaki Waki, Masaki Takahashi
  • Patent number: 11943914
    Abstract: A method of manufacturing a memory structure is provided. The method includes forming a first gate structure, a second gate structure, and a plurality of source/drain regions in a substrate, in which the plurality of source/drain regions are disposed on opposite sides of the first gate structure and the second gate structures; performing a dry etching process to form a trench between the first gate structure and the second gate structure; performing a wet etching process to expand the trench, in which the expanded trench has a hexagonal shaped cross section profile; and forming a bit line contact in the expanded trench.
    Type: Grant
    Filed: March 20, 2023
    Date of Patent: March 26, 2024
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yu-Ying Lin
  • Patent number: 11942372
    Abstract: In some embodiments, the present disclosure relates to a method for manufacturing an integrated chip. The method includes forming a transistor structure over a substrate. The transistor structure comprises a pair of source/drain regions and a gate electrode between the source/drain regions. A lower inter-level dielectric (ILD) layer is formed over the pair of source/drain regions and around the gate electrode. A gate capping layer is formed over the gate electrode. A selective etch and deposition process is performed to form a dielectric protection layer on the gate capping layer while forming a contact opening within the lower ILD layer. A lower source/drain contact is formed within the contact opening.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: March 26, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuan-Da Huang, Hao-Heng Liu, Li-Te Lin
  • Patent number: 11936178
    Abstract: An overvoltage protection device includes first and second semiconductor devices arranged in an anti-serial configuration with a conductive link connected between the first and second semiconductor devices at a central node of the overvoltage protection device, a first terminal connection to a terminal of the first semiconductor device that is opposite from the central node, a second terminal connection to a terminal of the second semiconductor device that is opposite from the central node. A total capacitance of elements in a first transmission path that is between the first terminal connection and the central node substantially matches a total capacitance of elements in a second transmission path that is between the second terminal connection and the central node. The total capacitance of elements in the second transmission path includes a self-capacitance of the conductive link.
    Type: Grant
    Filed: September 21, 2020
    Date of Patent: March 19, 2024
    Assignee: Infineon Technologies AG
    Inventors: Egle Tylaite, Joost Adriaan Willemen
  • Patent number: 11929385
    Abstract: A method for forming a pixelated optoelectronic stack comprises forming a stacked layer structure that comprises a bottom electrode layer, an optoelectronic layer over the bottom electrode layer, and a patterned hard-mask comprising a pattern over the optoelectronic layer. The method comprises replicating the pattern into the optoelectronic layer and the bottom electrode layer, thereby forming a first intermediate pixelated stack comprising at least two islands of stack separated from one another by stack-free areas; providing an electrically insulating layer on the first intermediate pixelated stack; removing a top portion of the electrically insulating layer and removing any remaining hard-mask so that a top surface of the electrically insulating layer is coplanar with an exposed top surface of the first intermediate pixelated stack, yielding a second intermediate pixelated stack; and forming a top transparent electrode layer over the second intermediate pixelated stack.
    Type: Grant
    Filed: July 2, 2021
    Date of Patent: March 12, 2024
    Assignee: Imec vzw
    Inventors: Yunlong Li, Stefano Guerrieri, Ming Mao, Luis Moreno Hagelsieb
  • Patent number: 11929410
    Abstract: A method for fabricating a semiconductor device includes: providing a substrate having a front surface and a rear surface opposite to the front surface; forming a trench in the front surface of the substrate; forming a gate dielectric layer over the trench; forming a gate electrode that fills a bottom portion of the trench over the gate dielectric layer; forming a sealing layer that includes a first portion covering the gate electrode, the gate dielectric layer, and the front surface of the substrate, and a second portion covering the rear surface of the substrate; selectively removing the second portion of the sealing layer; and performing an annealing process to form a hydrogen treated surface on an interface between the trench and the gate dielectric layer.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: March 12, 2024
    Assignee: SK hynix Inc.
    Inventor: Jin Woong Kim
  • Patent number: 11916131
    Abstract: According to an exemplary embodiment, a method of forming a vertical device is provided. The method includes: providing a protrusion over a substrate; forming an etch stop layer over the protrusion; laterally etching a sidewall of the etch stop layer; forming an insulating layer over the etch stop layer; forming a film layer over the insulating layer and the etch stop layer; performing chemical mechanical polishing on the film layer and exposing the etch stop layer; etching a portion of the etch stop layer to expose a top surface of the protrusion; forming an oxide layer over the protrusion and the film layer; and performing chemical mechanical polishing on the oxide layer and exposing the film layer.
    Type: Grant
    Filed: November 4, 2020
    Date of Patent: February 27, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: De-Fang Chen, Teng-Chun Tsai, Cheng-Tung Lin, Li-Ting Wang, Chun-Hung Lee, Ming-Ching Chang, Huan-Just Lin
  • Patent number: 11917866
    Abstract: An organic light-emitting display apparatus includes: first and second pixel electrodes on a substrate, and spaced from each other; a pixel-defining film surrounding edges of the first and second pixel electrodes; a first intermediate layer on the first pixel electrode; a second intermediate layer on the second pixel electrode, spaced from the first intermediate layer; a first counter electrode on the first intermediate layer; a second counter electrode on the second intermediate layer, spaced from the first counter electrode; a first passivation layer on the first counter electrode; a second passivation layer on the second counter electrode, spaced from the first passivation layer; a first bank around the first passivation layer and protruding from the pixel-defining film to extend in a direction away from the substrate; and a second bank around the second passivation layer and protruding from the pixel-defining film to extend in the direction away from the substrate.
    Type: Grant
    Filed: January 30, 2023
    Date of Patent: February 27, 2024
    Assignee: Samsung Display Co., Ltd.
    Inventors: Yonghoon Yang, Minsuk Ko
  • Patent number: 11915982
    Abstract: Vertical field-effect transistor (VFET) devices and methods of forming the same are provided. The methods may include forming a lower structure on a substrate. The lower structure may include first and second VFETs, a preliminary isolation structure between the first and second VFETs, and a gate liner on opposing sides of the preliminary isolation structure and between the preliminary isolation structure and the substrate. Each of the first and second VFETs may include a bottom source/drain region, a channel region and a top source/drain region sequentially stacked, and a gate structure on a side surface of the channel region. The preliminary isolation structure may include a sacrificial layer and a gap capping layer sequentially stacked. The methods may also include forming a top capping layer on the lower structure and then forming a cavity between the first and second VFETs by removing the sacrificial layer.
    Type: Grant
    Filed: February 11, 2022
    Date of Patent: February 27, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hwi Chan Jun, Min Gyu Kim
  • Patent number: 11916151
    Abstract: Present disclosure provides a semiconductor structure, including a semiconductor fin having a first portion and a second portion over the first portion, a first conductive region abutting a first lateral surface of the first portion and a first lateral surface of the second portion, a metal gate having a bottom portion and an upper portion, the bottom portion being between the first portion and the second portion of the semiconductor fin, and the upper portion being over the second portion of the semiconductor fin, and a first spacer between the bottom portion of the metal gate and the first conductive region. A method for manufacturing the semiconductor structure described herein is also provided.
    Type: Grant
    Filed: June 25, 2021
    Date of Patent: February 27, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chia-Ming Hsu, Yi-Jing Li, Chih-Hsin Ko, Kuang-Hsin Chen, Da-Wen Lin, Clement Hsingjen Wann
  • Patent number: 11910656
    Abstract: A display device includes: a base substrate; a first pixel electrode, a second pixel electrode, and a third pixel electrode arranged on the base substrate to be spaced apart from each other; a pixel defining film on the first pixel electrode, the second pixel electrode, and the third pixel electrode and including a first opening exposing the first pixel electrode, a second opening exposing the second pixel electrode and spaced apart from the first opening, and a third opening exposing the third pixel electrode and spaced apart from the first opening and the second opening; a first organic layer on the first pixel electrode exposed by the first opening; a second organic layer on the second pixel electrode exposed by the second opening; and a third organic layer on the third pixel electrode exposed by the third opening.
    Type: Grant
    Filed: November 4, 2022
    Date of Patent: February 20, 2024
    Assignee: Samsung Display Co., Ltd.
    Inventors: Sang Shin Lee, Joon Young Park, Min Goo Kang, Jung Woo Ko, Jong Sung Park, Hong Kyun Ahn, Sang Min Yi, Sang Woo Jo, Young Eun Ryu, Yoon Seo Lee
  • Patent number: 11908697
    Abstract: An interconnect structure and a method of forming an interconnect structure are disclosed. The interconnect structure includes a conductive plug over a substrate; a conductive feature over the conductive plug, wherein the conductive feature has a first sidewall, a second sidewall facing the first sidewall, and a bottom surface; and a carbon-containing barrier layer having a first portion along the first sidewall of the conductive feature, a second portion along the second sidewall of the conductive feature, and a third portion along the bottom surface of the conductive feature.
    Type: Grant
    Filed: December 12, 2022
    Date of Patent: February 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
    Inventors: Rueijer Lin, Ya-Lien Lee, Chun-Chieh Lin, Hung-Wen Su
  • Patent number: 11910688
    Abstract: An organic light emitting diode display substrate includes a light emitting unit layer, a first band gap layer and a color conversion layer. The first band gap layer and the color conversion layer are on a light exit path of the light emitting unit layer. The light emitting unit layer includes first, second and third light emitting units periodically arranged on a driving substrate and emitting light of a first color. The color conversion layer converts a part of the light of the first color into light of a second color and a third color. The first band gap layer is between the light emitting unit layer and the color conversion layer. The first band gap layer transmits the light of the first color in a light exit direction, and reflects the light of the second color and the light of the third color.
    Type: Grant
    Filed: May 11, 2022
    Date of Patent: February 20, 2024
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Guang Yan, Changyen Wu, Li Sun, Juanjuan You, Chengyuan Luo, Ling Wang, Dongfang Yang
  • Patent number: 11894372
    Abstract: A device is disclosed. The device includes a first semiconductor fin, a first source-drain epitaxial region adjacent a first portion of the first semiconductor fin, a second source-drain epitaxial region adjacent a second portion of the first semiconductor fin, a first gate conductor above the first semiconductor fin, a gate spacer covering the sides of the gate conductor, a second semiconductor fin below the first semiconductor fin, a second gate conductor on a first side of the second semiconductor fin and a third gate conductor on a second side of the second semiconductor fin, a third source-drain epitaxial region adjacent a first portion of the second semiconductor fin, and a fourth source-drain epitaxial region adjacent a second portion of the second semiconductor fin. The device also includes a dielectric isolation structure below the first semiconductor fin and above the second semiconductor fin that separates the first semiconductor fin and the second semiconductor fin.
    Type: Grant
    Filed: January 11, 2023
    Date of Patent: February 6, 2024
    Assignee: Intel Corporation
    Inventors: Willy Rachmady, Cheng-Ying Huang, Gilbert Dewey, Aaron Lilak, Patrick Morrow, Anh Phan, Ehren Mannebach, Jack T. Kavalieros
  • Patent number: 11895829
    Abstract: The present disclosure provides a method of manufacturing a semiconductor structure. The method includes: providing a substrate; forming a bit line structure over the substrate; forming a spacer surrounding the bit line structure; forming a polysilicon layer covering the bit line structure and the spacer; performing a first etching operation on the polysilicon layer to obtain a first height of the polysilicon layer, wherein the first height is less than a height of the bit line structure or a height of the spacer; performing a second etching operation on a first portion of the spacer; and performing a third etching operation on the polysilicon layer to obtain a second height of the polysilicon layer, wherein the second height is less than the first height.
    Type: Grant
    Filed: June 10, 2022
    Date of Patent: February 6, 2024
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Pei-Rou Jiang, Chao-Wen Lay
  • Patent number: 11888097
    Abstract: An optoelectronic component (1) is specified, with at least one radiation-emitting semiconductor chip generating electromagnetic radiation during operation, a coating surrounding the at least one semiconductor chip in lateral directions, a magnetic structure covered by the coating, wherein the magnetic structure enables the component to be identified. Furthermore, a process for the manufacture of such an optoelectronic component is given.
    Type: Grant
    Filed: July 1, 2019
    Date of Patent: January 30, 2024
    Assignee: OSRAM OLED GmbH
    Inventors: Konrad Wagner, Daniel Richter, Gunnar Petersen, Nicole Berner, Michael Förster
  • Patent number: 11889681
    Abstract: An integrated circuit device includes a substrate having an active region and a word line trench therein. The word line trench includes a lower portion having a first width, and an upper portion, which extends between the lower portion and a surface of the substrate and has a second width that is greater than the first width. A word line is provided, which extends in and adjacent a bottom of the word line trench. A gate insulation layer is provided, which extends between the word line and sidewalls of the lower portion of the word line trench. An electrically insulating gate capping layer is provided in the upper portion of the word line trench. An insulation liner is provided, which extends between the gate capping layer and sidewalls of the upper portion of the word line trench. The gate insulation layer extends between the insulation liner and a portion of the gate capping layer, which extends within the upper portion of the word line trench.
    Type: Grant
    Filed: April 14, 2022
    Date of Patent: January 30, 2024
    Inventors: Taejin Park, Taehoon Kim, Kyujin Kim, Chulkwon Park, Sunghee Han, Yoosang Hwang