Patents Examined by Isiaka O. Akanbi
  • Patent number: 11448595
    Abstract: The prism-coupling systems and methods include using a prism-coupling system to collect a 2D digital mode spectrum of an IOX article. The mode line and critical angle positions and orientations are found by performing a weighted fit to mode line and critical angle images and are used to define a compensated mode spectrum. If mode line tilt is found, it is removed from the 2D digital mode spectrum to define the compensated mode spectrum. The compensated mode spectrum is then processed using techniques known in the art to provide a more accurate estimate of stress-related characteristics of the IOX sample versus using the uncompensated mode spectrum. Derivative-based methods of accurately establishing positions of intensity transitions in a mode spectrum of an IOX sample using a derivative spectrum and curve fitting are also disclosed.
    Type: Grant
    Filed: October 30, 2020
    Date of Patent: September 20, 2022
    Inventors: Ryan Claude Andrews, Rostislav Vatchev Roussev, Antons Treikalis, Ming Yang
  • Patent number: 11422059
    Abstract: An optical inspection device includes: a wafer support unit configured to support a wafer in which a plurality of Fabry-Perot interference filter portions are formed, each of the plurality of filter portions in which a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force, the wafer support unit configured to support the wafer such that a direction in which the first mirror portion and the second mirror portion face each other follows along a reference line; a light emission unit configured to emit light to be incident on each of the plurality of filter portions along the reference line; and a light detection unit configured to detect light transmitted through each of the plurality of filter portions along the reference line. The wafer support unit has a light passage region that allows light to pass along the reference line.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: August 23, 2022
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 11413720
    Abstract: There is disclosed a polishing apparatus which allows for easy replacement of a light source with another type of light source. The light-source assembly includes: a base fixed to a polishing table and coupled to a light-emitting transmission line; and a light-source module having a lamp for emitting light. The light-source module is removably attached to the base. The base is a common base which is adapted to any of a plurality of light-source modules of different types including the light-source module. The base includes a positioning structure which achieves positioning of the light-source module relative to the base.
    Type: Grant
    Filed: October 16, 2018
    Date of Patent: August 16, 2022
    Inventors: Nobuyuki Takahashi, Toshifumi Kimba, Masaki Kinoshita
  • Patent number: 11415510
    Abstract: According to one embodiment, an optical inspection apparatus includes a first illuminator, an image-forming optical system, a scattering light selector, and an imaging element. The first illuminator is configured to emit a first light beam. The first light beam reflected by an object is incident on the image-forming optical system. The scattering light selector is configured to emit passing light beams of at least two mutually different wavelength regions, at the same time as the first light beam passes, a wavelength spectrum of at least one of the passing light beams being different from a wavelength spectrum of the reflected first light beam. The passing light beams simultaneously form an image on the imaging element.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: August 16, 2022
    Inventors: Hiroshi Ohno, Hiroya Kano, Hideaki Okano, Takahiro Kamikawa
  • Patent number: 11408827
    Abstract: A method for evaluating the pH of an aqueous solution by utilizing the optical properties of a pH sensing material comprised of plurality of optically active nanoparticles dispersed in matrix material. The optically active nanoparticles have an electronic conductivity greater than about 10?1 S/cm and generally have an average nanoparticle diameter of less that about 500 nanometers, and the matrix material is a material which experiences a change in surface charge density over a pH range from 2.0 to 12.0 of at least 1%. The method comprises contacting the pH sensing material and the aqueous solution, illuminating the pH sensing material, and monitoring an optical signal generated through comparison of incident light and exiting light to determine the optical transmission, absorption, reflection, and/or scattering of the pH sensitive material. The optical signal of the pH sensitive material varies in response to the pH of the aqueous solution.
    Type: Grant
    Filed: April 24, 2015
    Date of Patent: August 9, 2022
    Assignee: U.S. Department of Energy
    Inventors: Paul R. Ohodnicki, Jr., Congjun Wang, Thomas D. Brown, Barbara Kutchko
  • Patent number: 11408032
    Abstract: Imaging systems and methods comprising imaging a first interior surface and a second interior surface of a flow cell are described. In some embodiments, the imaging systems may comprise: a) an objective lens; b) at least one image sensor; and c) at least one tube lens disposed in an optical path between the objective lens and the at least one image sensor; wherein the at least one tube lens is configured to correct imaging performance such that images of the first interior surface of the flow cell and the second interior surface of the flow cell have substantially the same optical resolution.
    Type: Grant
    Filed: September 9, 2020
    Date of Patent: August 9, 2022
    Inventors: Steve Xiangling Chen, Minghao Guo, Michael Previte, Chunhong Zhou, Derek Fuller
  • Patent number: 11409123
    Abstract: A system for providing two spaced-apart parallel light beams wherein the space between the two spaced-apart parallel light beams is adjustable, the system including a first beam splitter configured for reflecting a light beam from a light source to create a first light beam; a second light reflecting device configured for reflecting a transmitted light beam from the light beam from the light source to create a second light beam; an optical flat including a first surface and second surface facing away from the first surface, the optical flat disposed in a manner with the first surface facing the first light beam and the second light beam, the first surface configured to reflect and transmit the first light beam and the second light beam; and a mirror.
    Type: Grant
    Filed: February 28, 2022
    Date of Patent: August 9, 2022
    Assignee: MLOptic Corp.
    Inventors: Pengfei Wu, Wei Zhou
  • Patent number: 11400666
    Abstract: A laser projection method and device for drape-molding a part on a mold includes encoders to determine the theoretical position of calibration patterns according to a displacement of the mold such that a laser projector is automatically recalibrated when the mold is repositioned during the drape-molding operation.
    Type: Grant
    Filed: June 26, 2019
    Date of Patent: August 2, 2022
    Assignee: Safran Nacelles
    Inventors: Franck Maze, Maxime Coin, Fran├žois Le Houerou
  • Patent number: 11402358
    Abstract: An apparatus includes a flow cell body, a plurality of electrodes, an imaging assembly, and one or more barrier features. The flow cell body defines one or more flow channels and a plurality of wells defined as recesses in the floor of each flow channel. Each well is fluidically coupled with the corresponding flow channel. The flow cell body further defines interstitial surfaces between adjacent wells. Each well defines a corresponding depth. Each electrode is positioned in a corresponding well of the plurality of wells. The electrodes are to effect writing of polynucleotides in the wells. The imaging assembly is to capture images of polynucleotides written in the wells. The one or more barrier features are positioned in the wells, between the wells, or above the wells. The one or more barrier features contain reactions in each well, reduce diffusion between the wells, or reduce optical cross-talk between the wells.
    Type: Grant
    Filed: September 20, 2021
    Date of Patent: August 2, 2022
    Assignee: ILLUMINA, INC.
    Inventors: Tarun Khurana, Ali Agah, Aathavan Karunakaran, Stanley Hong, Merek Siu, Arvin Emadi, Craig Ciesla
  • Patent number: 11401049
    Abstract: Proposed are a system and method for checking out a passenger hand-luggage in an airport. The system for checking out a passenger hand-luggage in an airport includes: a platform configured to load a passenger hand-luggage thereon; a weight measurer configured to measure a weight of the passenger hand-luggage loaded onto the platform; a size measurer configured to measure a size of the passenger hand-luggage loaded onto the platform; an allowance-information provider configured to provide allowance information based on the loaded passenger hand-luggage; and a regulation-based determiner configured to compare the weight and size of the passenger hand-luggage measured by the weight measurer and the size measurer with an allowance allowed for the loaded passenger hand-luggage, and provide check-out information about whether the passenger hand-luggage loaded onto the platform is within the allowance.
    Type: Grant
    Filed: April 15, 2019
    Date of Patent: August 2, 2022
    Assignee: CAS Corporation
    Inventors: Kyung Min Kim, Kwan Ho Tho, Yun Ju Choi, Dong Jin Kim
  • Patent number: 11397148
    Abstract: The method of analyzing absorbance of one or more liquid samples arranged in the wells of a microplate includes the steps of setting a desired wavelength falling within the wavelength range of 380 nm-750 nm for absorbance measurement, illuminating the samples using electromagnetic radiation having a bandwidth of at most 20 nm around the set wavelength, measuring radiant flux transmitted through each sample, on the basis of measured radiant flux values, determining an absorbance value for each sample, and visualizing the absorbance values on a display as a matrix comprising a plurality of cells, each cell corresponding to a well of the microplate. The set wavelength is used as an input for determining the visual properties of the cells.
    Type: Grant
    Filed: June 27, 2018
    Date of Patent: July 26, 2022
    Inventors: Adyary Fallarero, Marika J. Raitio, Tommi Suvanto, Katja Eklin
  • Patent number: 11397128
    Abstract: A level correction system includes a first adjustment device, a chuck device provided on the first adjustment device, a first reflective device provided on the chuck device, a second adjustment device, a carrying table provided on the second adjustment device, a second reflective device provided on the carrying table, a laser emitter configured to emit incident laser light, a laser receiver, and a controller. The first reflective device and the second reflective device are used to reflect the incident laser light to form a reflected laser light. The laser receiver is used to receive the reflected laser light. The controller is used to determine a height of the chuck device or the carrying table and whether a center point of a reflected light spot formed by the reflected laser light is offset from a center point of an incident light spot formed by the incident laser light.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: July 26, 2022
    Inventor: Cong Zhu
  • Patent number: 11398393
    Abstract: A multi-shield plate includes a plate having a substantially flat upper surface and a substantially flat lower surface, a plurality of first windows formed in the plate and extending through the plate from the upper surface to the lower surface, and a plurality of vapor shields mounted to the plate, each vapor shield of the plurality of vapor shields configured to prevent passage of a vapor through a corresponding window of the plurality of windows. The multi-shield plate includes an aperture formed in the plate, the aperture aligned with a first window of the plurality of windows along an axis corresponding to the upper surface.
    Type: Grant
    Filed: October 19, 2020
    Date of Patent: July 26, 2022
    Inventors: Ping-Tse Lin, Chun-Chih Lin, Wen-Cheng Lien, Monica Ho
  • Patent number: 11391871
    Abstract: Easy and accurate mating of a groove interval of a groove pattern of a diffraction grating with a position on a convex fixing substrate is enabled. For this purpose, a concave diffraction grating is fabricated by: transferring a groove pattern formed on a plane diffraction grating and having unequal groove intervals onto a metal thin film; forming a first alignment mark on a convex surface of a fixing substrate having the convex surface to fix the metal thin film; mating a second alignment mark formed on an adhesive surface of the metal thin film with the first alignment mark to perform alignment; bonding the adhesive surface of the metal thin film and the convex surface of the fixing substrate to each other to fabricate a master; and transferring a groove pattern of a metal thin film of the master.
    Type: Grant
    Filed: November 7, 2018
    Date of Patent: July 19, 2022
    Inventors: Kenta Yaegashi, Yoshisada Ebata, Takanori Aono
  • Patent number: 11393084
    Abstract: An object of the present invention is to provide a technique that allows automatically generating a processing recipe from an inspection image even when the inspection image varies by being affected by an imaging condition of a processing device. A processing recipe generation device according to the present invention generates a converted image in which components relying on the imaging condition of the inspection image are reduced and generates a processing recipe using a target image generated using a conversion condition same as that of the converted image (see FIG. 2).
    Type: Grant
    Filed: April 10, 2018
    Date of Patent: July 19, 2022
    Assignee: Hitachi, Ltd.
    Inventors: Masayoshi Ishikawa, Takeshi Ohmori, Hyakka Nakada
  • Patent number: 11385539
    Abstract: Method for compensating at least one defect of a mask blank, wherein the method includes the following steps: (a) obtaining data in respect of a position of the at least one defect of the mask blank; (b) obtaining design data for pattern elements which should be produced on the mask blank; (c) determining whether the at least one defect is arranged relative to a pattern element to be produced in such a way that it has substantially no effect when exposing a wafer using the mask blank that is provided with the pattern element to be produced; and (d) otherwise, displacing the at least one defect on the mask blank in such a way that it has substantially no effect when exposing the wafer using the mask blank that is provided with the pattern element to be produced.
    Type: Grant
    Filed: January 21, 2020
    Date of Patent: July 12, 2022
    Assignee: Carl Zeiss SMS Ltd.
    Inventor: Joachim Welte
  • Patent number: 11378393
    Abstract: An apparatus and a relative method for measuring straightness errors of elongated-shape elements, such as bars, tubes and the like is presented. The measuring apparatus includes a supporting system for a bar, a first detecting system having one or more first sensors to detect the development of the longitudinal axis of the bar, and a central control unit. The measuring apparatus further includes a second detecting system provided with a plurality of second sensors to detect the forces the bar applies to the supporting system and acquiring means to acquire at least one physical parameter of the bar under measuring. The central control unit includes at least one data acquiring and processing module to acquire and process the data detected by said first and second detecting systems and acquired by said acquiring means, in order to determine the possible straightness error of the bar.
    Type: Grant
    Filed: October 26, 2018
    Date of Patent: July 5, 2022
    Assignee: Q-TECH S.R.L
    Inventors: Luca Fumagalli, Paolo Tomassini, Diego Tosi, Erika Gregorelli
  • Patent number: 11371931
    Abstract: Methods and instruments for measuring a liquid sample (S1) in a well plate (50) by means of an optical chip 10. The chip (10) comprises an optical sensor (13) that is accessible to the liquid sample (S1) at a sampling area (SA) of the chip. A free-space optical coupler (11,12) is accessible to receive input light (L1) and/or emit output light (L2) via a coupling area (CA) of the chip (10). The sampling area (SA) of the chip 10 is submerged in the liquid sample (S1) while keeping the liquid sample (S1) away from the coupling area (CA) for interrogating the optical coupler (11,12) via an optical path (P) that does not pass through the liquid sample (S1).
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: June 28, 2022
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Bart Michiel De Boer, Peter Johan Harmsma, Michiel Peter Oderwald, Teunis Cornelis Van Den Dool
  • Patent number: 11371092
    Abstract: An imaging system for exciting and measuring fluorescence on or in samples comprising fluorescent materials (e.g. fluorescent labels, dyes or pigments). In one embodiment, a device is used to detect fluorescent labels on nucleic acid. In a preferred embodiment, the device is configured such that fluorescent labels in a plurality of different DNA templates are simultaneously detected.
    Type: Grant
    Filed: September 2, 2016
    Date of Patent: June 28, 2022
    Inventors: Steven Gordon, Steven Auger, Alan Schinazi
  • Patent number: 11353390
    Abstract: A portable communication device includes one or more optical detectors to generate an analog signal in response to a change in an intra-cavity or an emitted optical power of a light source due to light backscattered from a particle and an application-specific integrated circuit (ASIC). The particle is illuminated via a light source. The ASIC includes an analog-to-digital converter (ADC) circuit, a digital delay circuit, a particle detector module and a processor. The ADC converts the analog signal to a digital signal. The digital delay circuit can store the digital signal for a predetermined or dynamically variable time interval. The particle detector module can analyze the digital signal and can generate an enable signal upon detecting a particle signature in the digital signal. The processor is coupled to the digital delay circuit and can start processing the digital signal in response to the enable signal.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: June 7, 2022
    Assignee: Apple Inc.
    Inventors: Miaolei Yan, Gregory B. Arndt, Mehmet Mutlu