Abstract: The reliability of a transistor including an oxide semiconductor can be improved by suppressing a change in electrical characteristics. A transistor included in a semiconductor device includes a first oxide semiconductor film over a first insulating film, a gate insulating film over the first oxide semiconductor film, a second oxide semiconductor film over the gate insulating film, and a second insulating film over the first oxide semiconductor film and the second oxide semiconductor film. The first oxide semiconductor film includes a channel region in contact with the gate insulating film, a source region in contact with the second insulating film, and a drain region in contact with the second insulating film. The second oxide semiconductor film has a higher carrier density than the first oxide semiconductor film.
Type:
Grant
Filed:
December 8, 2020
Date of Patent:
July 4, 2023
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
Abstract: A method of fabricating a semiconductor device including providing a substrate; forming first and second lower conductive patterns, the and second lower conductive patterns being buried in an interlayer dielectric layer; forming a capping layer on the interlayer dielectric layer and a dummy layer on the capping layer; etching an exposed upper portion of the first lower conductive pattern to form a trench; forming a metal layer that covers the interlayer dielectric layer and the dummy layer such that the metal layer fills the trench; forming a magnetic tunnel junction layer on the metal layer; performing a patterning process to form a memory cell; and forming a first protective layer that covers a lateral surface of the memory cell, wherein, in the patterning process, the metal layer on the top surface of the interlayer dielectric layer is etched to form a first bottom electrode in the trench.
Abstract: An illustrative memory cell disclosed herein includes a bottom electrode, a top electrode positioned above the bottom electrode and an MTJ (Magnetic Tunnel Junction) structure positioned above the bottom electrode and below the top electrode. In this example, the MTJ structure includes a first ferromagnetic material layer positioned above the bottom electrode, a non-magnetic insulation layer positioned above the first ferromagnetic material layer and a second ferromagnetic material layer positioned on the non-magnetic insulation layer, wherein there is a curved, non-planar interface between the non-magnetic insulation layer and the ferromagnetic material layer.
Abstract: A method for manufacturing an electronic device includes forming a first source layer including a trench, forming a first sacrificial layer in the trench, forming a first structure over the first source layer, wherein the first structure includes first material layers and second material layers which are alternately stacked over the each other, forming first openings passing through the first structure and extending to the first sacrificial layer, forming first channel layers in the first openings, forming a slit passing through the first structure and extending to the first sacrificial layer, forming a second opening by removing the first sacrificial layer through the slit, and forming a second source layer in the second opening, wherein the second source layer is coupled to the first channel layers.
Type:
Grant
Filed:
January 18, 2021
Date of Patent:
June 13, 2023
Assignee:
SK hynix Inc.
Inventors:
Ki Hong Lee, Ji Yeon Baek, Seung Ho Pyi
Abstract: A semiconductor device including pixels arranged in a matrix of n rows and m columns, in which the pixels in the m-th column are shielded from light, is provided.
Abstract: A magnetic memory device includes a reference magnetic structure, a free magnetic structure, and a tunnel barrier pattern therebetween. The reference magnetic structure includes a first pinned pattern, a second pinned pattern between the first pinned pattern and the tunnel barrier pattern, and an exchange coupling pattern between the first pinned pattern and the second pinned pattern. The second pinned pattern includes magnetic patterns and non-magnetic patterns, which are alternately stacked. The first pinned pattern is a ferromagnetic pattern consisted of a ferromagnetic element.
Type:
Grant
Filed:
February 27, 2020
Date of Patent:
June 6, 2023
Assignee:
Samsung Electronics Co., Ltd.
Inventors:
Sang Hwan Park, Jae Hoon Kim, Younghyun Kim
Abstract: A magnetic element is disclosed wherein a composite seed layer such as TaN/Mg enhances perpendicular magnetic anisotropy (PMA) in an overlying magnetic layer that may be a reference layer, free layer, or dipole layer. The first seed layer is selected from one or more of Ta, Zr, Nb, TaN, ZrN, NbN, and Ru. The second seed layer is selected from one or more of Mg, Sr, Ti, Al, V, Hf, B, and Si. A growth promoting layer made of NiCr or an alloy thereof is inserted between the seed layer and magnetic layer. In some embodiments, a first composite seed layer/NiCr stack is formed below the reference layer, and a second composite seed layer/NiCr stack is formed between the free layer and a dipole layer. The magnetic element has thermal stability to at least 400° C.
Abstract: A method for providing a magnetic device and the magnetic device so provided are described. The magnetic device includes a magnetic layer having a surface. In some aspects, the magnetic layer is a free layer, a reference layer, or a top layer thereof. A tunneling barrier layer is deposited on the magnetic layer. At least a portion of the tunneling barrier layer adjacent to the magnetic layer is deposited at a deposition angle of at least thirty degrees from a normal to the surface of the magnetic layer. In some aspects, the deposition angle is at least fifty degrees.
Type:
Grant
Filed:
April 3, 2020
Date of Patent:
May 30, 2023
Assignee:
Samsung Electronics Co., Ltd.
Inventors:
Jaewoo Jeong, Mahesh G. Samant, Yari Ferrante, Panagiotis Charilaos Filippou, Chirag Garg, Stuart Stephen Papworth Parkin
Abstract: An apparatus is provided which comprises: a bit-line; a first word-line; a second word-line; and a source-line; a magnetic junction comprising a free magnet; an interconnect comprising spin orbit material, wherein the interconnect is adjacent to the free magnet of the magnetic junction; and a first device (e.g., a selector device) coupled at one end of the interconnect and to the second word-line; and a second device coupled to the magnetic junction, the first word-line and the source-line.
Type:
Grant
Filed:
June 19, 2018
Date of Patent:
May 30, 2023
Assignee:
Intel Corporation
Inventors:
Tanay Gosavi, Chia-Ching Lin, Sasikanth Manipatruni, Ian Young
Abstract: Methods are provided for selective film deposition. One method includes providing a substrate containing a dielectric material and a metal layer, the metal layer having an oxidized metal layer thereon, coating the substrate with a metal-containing catalyst layer, treating the substrate with an alcohol solution that removes the oxidized metal layer from the metal layer along with the metal-containing catalyst layer on the oxidized metal layer, and exposing the substrate to a process gas containing a silanol gas for a time period that selectively deposits a SiO2 film on the metal-containing catalyst layer on the dielectric material.
Abstract: In a method of manufacturing an MRAM device, first and second lower electrodes may be formed on first and second regions, respectively, of a substrate. First and second MTJ structures having different switching current densities from each other may be formed on the first and second lower electrodes, respectively. First and second upper electrodes may be formed on the first and second MTJ structures, respectively.
Type:
Grant
Filed:
August 27, 2020
Date of Patent:
May 23, 2023
Assignee:
SAMSUNG ELECTRONICS CO., LTD.
Inventors:
Dae-Shik Kim, Jeong-Heon Park, Gwan-Hyeob Koh
Abstract: Described implementations provide wireless, surface mounting of at least two semiconductor die on die attach pads (DAPs) of the semiconductor package, where the at least two semiconductor die are electrically connected by a clip. A stress buffer layer may be provided on the clip, and a heatsink may be provided on the stress buffer layer. The heatsink may be secured with an external mold material.
Abstract: Methods and devices are provided that include a magnetic tunneling junction (MTJ) element. A first spacer layer abuts sidewalls of the MTJ element. The first spacer layer has a low-dielectric constant (low-k) oxide composition. A second spacer layer is disposed on the first spacer layer and has a low-k nitride composition.
Abstract: An organic light emitting display device includes a substrate having a display area and a peripheral area; a pad disposed on the substrate in the peripheral area; a first conductive pattern disposed on one side of the display area in the peripheral area and electrically connected to the pad; a second conductive pattern disposed on the substrate in the peripheral area and disposed on an opposite side of the first conductive pattern; a first connection electrode disposed on the first conductive pattern in the peripheral area and electrically connected to the first conductive pattern; and a second connection electrode disposed on the second conductive pattern in the peripheral area and electrically connected to the second conductive pattern. A cathode electrode of a light emitting diode is disposed on the first and second connection electrodes and electrically connected to the first and second connection electrodes.
Type:
Grant
Filed:
December 8, 2020
Date of Patent:
May 16, 2023
Assignee:
Samsung Display Co., Ltd.
Inventors:
Sang Moo Choi, Mi Hae Kim, Sang Won Seok, Hwan Soo Jang, Su Jin Lee
Abstract: A 3-D package structure for isolated power module is discussed. The package structure has metal trace in a support layer (e.g. a substrate board), which is covered by two magnetic films from both sides, thus an effective transformer is formed. An IC die which contains a voltage regulator is stacked above the support layer, which significantly reduces the package size.
Abstract: In a method of manufacturing a semiconductor device, an underlying structure is formed over a substrate. A film is formed over the underlying structure. Surface topography of the film is measured and the surface topography is stored as topography data. A local etching is performed by using directional etching and scanning the substrate so that an entire surface of the film is subjected to the directional etching. A plasma beam intensity of the directional etching is adjusted according to the topography data.
Abstract: The present disclosure relates to a spin-orbit torque-based switching device and a method of fabricating the same. The spin-orbit torque-based switching device of the present disclosure includes a spin torque generating layer provided with a tungsten-vanadium alloy thin film exhibiting perpendicular magnetic anisotropy (PMA) characteristics and a magnetization free layer formed on the spin torque generating layer.
Type:
Grant
Filed:
October 8, 2020
Date of Patent:
May 2, 2023
Assignee:
Korea University Research and Business Foundation
Abstract: A semiconductor chip package is provided with improved connections between different components within the package. The semiconductor chip package may comprise a semiconductor chip disposed on a substrate. The semiconductor chip may have a first surface and a second surface. The first surface of the semiconductor chip may be connected to the substrate. The semiconductor chip package may comprise a leadframe that includes a first lead and a second lead. The first lead of the leadframe may be directly attached to the second surface of the semiconductor chip. The second lead of the leadframe may be directly attached to the substrate.
Abstract: A display apparatus includes a substrate including a display area, a peripheral area surrounding the display area, a function-adding area, of which at least a portion is surrounded by the display area, and a detour area disposed between tine display area and the function-adding area. The display apparatus includes a plurality of pixel circuits disposed in the display area. A plurality of driving lines are electrically connected to the pixel circuits and extend in a direction in the display area. A first detour line is disposed in the detour area and is electrically connected to a first driving line. A second detour line is disposed in the detour area. The second detour line is electrically connected to a second driving line and is disposed in a different layer from the first detour line.
Type:
Grant
Filed:
November 5, 2020
Date of Patent:
April 18, 2023
Assignee:
SAMSUNG DISPLAY CO., LTD.
Inventors:
Ji-Hyun Ka, Seung-Kyu Lee, Hwan-Soo Jang, Jin-Tae Jeong
Abstract: Embodiments of the present disclosure provide a semiconductor structure and a manufacturing method thereof, and a memory. The semiconductor structure may at least include: a plurality of transistors arranged in a staggered manner, wherein the transistors share one source plate, a channel of the transistor is located on the source plate, and a channel length direction of the transistor is perpendicular to a surface of the source plate, and a material of the channel includes an oxide semiconductor; a plurality of drain contact members, electrically connected to drains of the transistors, wherein an odd number of transistors share one drain contact member, and the transistors sharing the same drain contact member are driven by a same word line; and a plurality of magnetic tunnel junctions, located on the drain contact members, wherein the magnetic tunnel junctions are electrically connected to the drain contact members in a one-to-one corresponding manner.
Type:
Grant
Filed:
July 14, 2022
Date of Patent:
April 11, 2023
Assignees:
CHANGXIN MEMORY TECHNOLOGIES, INC., BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
Inventors:
Xiaoguang Wang, Dinggui Zeng, Huihui Li, Kanyu Cao