Abstract: An exposure apparatus for lithographically transferring a pattern of a mask onto a workpiece coated with a radiation sensitive material includes a first filter made the same material as of the substrate of the mask, a second filter formed by a base member made of the same material as the mask substrate and being coated with a radiation sensitive material, an illuminometer for measuring illuminance of light passed through the first and second filters, respectively, and a control device for determining an exposure time for lithographic transfer of the pattern of the mask onto the wafer, on the basis of a difference between a measured value as measured through the first filter and a measured value as measured through the second filter.

Abstract: An electron beam lithography apparatus comprising an upper aperture, a lower aperture, a deflector disposed between the upper aperture and the lower aperture, an optical lens for converging the electron beam passed through the lower aperture onto a specimen, and means for measuring an electron reflected from a position mark installed on a stage when the electron beam scans the position mark, calculating a correction value of the section and the measured reflectional electron and controlling the deflector according to the correction value. As the shapes of the electron beam are corrected by detecting the reflectional electron from the position mark and measuring the positional error of the sectional shape of the electron beam corresponding to the set sectional shapes, the sectional shapes are corrected in high accuracy.

Abstract: A detector for detecting z-axis position in the plane of the fan beam of a computed tomography machine with respect to the detector array employs a pair of slotted masks over independent detector cells, the slots creating exposed widths that decrease and increase along their length. The intensity signals from the two detector cells so masked are subtracted to produce a z-axis position signal eliminating the effect of dark currents. Multiple cells may be ganged to reduce the effects of sensitivity variations among pairs of detector cells. The z-axis position signal may be used to control the z-axis position of the fan beam with respect to the detector array and to reduce the effect of the detector cell's variations in sensitivity.

Abstract: A gamma radiation compensated radon measurement system includes a housing and cooperating tube assembly that define a first, larger sensing volume and second, smaller sensing volume, each of which includes an electrically charged electret. When in its operative configuration, the first and second volumes are in communication with one another so that both volumes are exposed to the same radon concentration as well as the same gamma radiation. A partition separates the two sensing volumes so that ions formed in one sensing volume do not enter the other sensing volume. The two electrets are exposed to their respective sensing volumes to accumulate ions at different rates determined by the design characteristics of the two sensing volumes. The response characteristic of each electret/sensing volume combination is mathematically modelled and the radon and/or gamma concentration is be determined by simultaneously solving the characteristic equations for each electret/sensing volume combination.

Abstract: The method is for measurement of pressure applied to a sensing element comprising a cholesteric liquid crystal being connected to multimode optical fibers for communication with a light source and a device for measurement of light intensity. The method resides in guiding a light beam of predetermined wavelength generated by the light source toward a layer of the cholesteric liquid crystal using one of the multimode optical fibers. The light beam reflected by the layer is collected using another of the multimode optical fibers being connected to the device for measurement of light intensity. This device measures then the intensity of the reflected light beam, such that a value indicative of the pressure as a function of the measured intensity can be carried out. This method is particularly well adapted for measuring pressure up to 100 MPa with a good linear response and sensitivity for specific ranges of pressure useful in industrial applications.

Abstract: A microprocessor based device for monitoring a location and recording the time and date of each event involving the presence of an object such as a deer at the monitored location. A transmitter of an infrared beam may be mounted on a tree on one side of a trail in alignment with an infrared receiver mounted on a tree on the opposite side of the trail. When an object breaks the beam, the time and date of the event are recorded in memory, and the time and date of each event may be retrieved from memory and displayed in chronological order on an LCD display on the face panel of the receiver. Alternatively, a portable printer may be used to obtain a printed record of recorded events. Optionally, a camera may be aimed at the monitored location and automatically activated to photograph the animals present at the monitored location. The electronics incorporates various power conserving features to provide long life for the batteries so that extended operation is possible in remote areas.

Abstract: A film cassette designed to receive photosensitive film in a light protective envelope and maintain lighttight integrity while removing the protective envelope includes means for bringing a light emitting enhancer screen into intimate contact with the photosensitive film during exposure to x-ray photography. The back of the photosensitive film may be brought into intimate contact with a film or sheet of specimen-containing radioactive or radiation generating material.

Abstract: An X-ray tube for greatly enhancing the output of photons relative to a standard tube includes a source of an electron beam focused on a target at an angle of approximately 10.degree. to produce high energy photons emitted at an angle along their centerline of 5.degree. to 15.degree., both angles referring to the surface of the target. Reduction of impurgement of scattered electrons on the tube window is affected in various ways such as use of a magnet to deflect electrons from the photon stream or locating the window out of alignment with the most intense scattered electrons. Scattered electrons are also absorbed by an essentially zero albedo shield disposed in the path of the majority of the scattered electrons not directed at the window.

Abstract: An X-ray exposure system for exposing a semiconductor wafer to a mask with X-rays contained in synchrotron radiation, is disclosed. In this system, the mask and the wafer are held on a main frame so that their surfaces extend substantially parallel to a vertical axis. The main frame suspends from a supporting frame through a plurality of air mounts, each being vertically displaceable. The supporting frame is placed on the same reference surface as that of an SOR ring that produces synchrotron radiation. By using these air mounts, any tilt of the mask and the wafer relative to the irradiation region of the synchrotron radiation, as well as the position of the mask and the wafer in the vertical direction, with respect to the irradiation region, can be controlled and maintained constant. Thus, accurate pattern printing is ensured.

Abstract: A method for capturing and displaying radiographic images. More particularly, the present invention uses a unique microcapacitor matrix structure to hold varying electrical charges representing a latent radiographic image which are subsequently rendered visible through toning.

Abstract: A diffractor for energetic electromagnetic radiation has diffracting planes oriented parallel to the surface of steps which have a doubly curved surface. The steps are configured so that the resulting diffractor approximates the Johansson geometric conditions in the plane of the focal circle of radius r. The steps are additionally curved in a direction perpendicular to the focal circle in order to provide for satisfying Bragg's law for diffraction over the maximum area of the diffractor. The curvature of the planes perpendicular to the focal circle corresponds to rotating the stepped approximation to the Johansson geometry about an axis passing through the source and image points.

Abstract: An object replicator that replicates the physical form of an object in a polymer or the like by employing a Computed Tomography scanner or a Magnetic Resonance Imaging system, to digitize the physical features of the object to be copied. This data is used to form an electronic three-dimensional representation of the object. The electronic representation is then sectioned and provided to a three-dimensional printer to replicate a copy of those features by sequentially forming and joining laminae corresponding to the sections, to build up a physical replication of the object in a step-wise fashion whereby the three dimensional object is auto-matically formed from a composite of laminae.

Abstract: A dental x-ray patient identification marking device for use in conjunction with an identification camera to permanently imprint preselected patient identification indicia onto each small dental x-ray before developing. A thin aperture plate, which may be removable, is positioned atop the working surface of the identification camera having a light-emitting area there within. The aperture plate includes an elongated hole near one end of structure for properly aligning the dental x-ray so that the hole is in alignment and registry with a particular portion of the x-ray. A thin indicia card having the preselected patient identification indicia written or typed thereon in a specified region of the card, is positionable between the aperture plate and the light-emitting area in alignment with the hole which produces an exposure of the preselected patient identification indicia at one end of the x-ray in response to light passing through the card.

Abstract: An improved shape of a small rectangular dental x-ray, including a jacket for containing each unexposed dental x-ray and a mount for viewably retaining a complete set of expoded such dental x-rays. The improved dental x-ray shape includes three conventional, rounded corners and a notched or diagonally cut fourth corner which provides viewable indicia of orientation. The jacket includes orienting lines extending along two adjacent margins from the corner corresponding to the notched corner of the unexposed dental x-ray contained therein. The mount, formed of thin, pliable transparent sheet plastic material, includes a plurality of transparent pouches or pockets arranged thereon, each of which is similarly notched, shaped and structured to viewably receive and retain one such exposed improved dental x-ray. These pockets are divided into left, right and center regions corresponding to the regions of patients' teeth.

Abstract: Tomographic imaging is implemented by providing a source of penetrating radiation, means for forming a pencil beam and sweeping the pencil beam over a line in space, a radiation detector and a beam length collimator. The beam length collimator lies outside of the sweep plane defined by the sweeping motion of the pencil beam and has a plane of symmetry which intersects the sweep plane at an angle which may or may not be a right angle. The beam length collimator defines a sensitive volume which has a dimension along the length of the pencil beam where the selected slice is defined by (or partly by) a dimension of the pencil beam. The combination of the beam length collimator and the pencil beam define a sensitive volume from which scattered energy can pass the collimator and be detected. The beam length collimator preferentially detects energy scattered by the sensitive volume.

Abstract: A sample holder for use with X-ray diffractometers with the capability to rotate the sample, as well as to adjust the position of the sample in the x, y, and z directions. Adjustment in the x direction is accomplished through loosening set screws, moving a platform, and retightening the set screws. Motion translators are used for adjustment in the y and z directions. An electric motor rotates the sample, and receives power from the diffractometer.

Abstract: A multi-directional x-ray imager for use with an isocentric therapy x-ray machine having a rotatable x-ray source. The imager has a fluorescence screen which emits light when excited by x-rays from the source and an imaging camera which images the light emission. A rotational joint rotates and aligns the screen relative to a different rotated position of the source relative to the patient. The camera is positioned out of the straight line path of the x-rays passing through the screen, amd a deflecting mirror deflects the emitted light to the camera. The mirror includes a thin sheet of reflective material, such as aluminized plastic, to prevent the x-rays impinging thereon from scattering to the (solid state video) camera.

Abstract: An electrical image signal is generated by providing a toner image on a support, scanning the toner image through a liquid layer in contact with the toner image to produce an optical response and photoelectrically detecting the optical response to produce an electrical image signal.

Abstract: In an x-ray tube of the beam deflection type for a radiology apparatus, the stair-steps of the focusing device of the electron beam are extended by metallic deflecting electrodes placed in parallel relation to said stair-steps and electrically insulated from these latter by means of insulating layers. Said electrodes are brought to different potentials, the polarities and values of which depend on the direction and amplitude of deflection to be obtained.

Abstract: An exposure apparatus for exposing a substrate with X-rays is disclosed. The apparatus includes a radiation source for providing X-rays; and a convex mirror for reflecting the X-rays from the radiation source toward the substrate to expose a zone of the substrate with the X-rays; wherein the convex mirror and the substrate are so interrelated that a peak position of intensity distribution of the X-rays upon the zone deviates from the center of the zone.