Patents Examined by Karen Kusumakar
  • Patent number: 11830770
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises an interlayer dielectric (ILD) layer disposed over a substrate; a first conductive feature at least partially embedded in the ILD layer; a dielectric layer disposed over and aligned with the ILD layer, wherein a top surface of the dielectric layer is above a top surface of the first conductive feature; an etch stop layer (ESL) disposed over the dielectric layer and over the first conductive feature; and a second conductive feature disposed on the first conductive feature, wherein the second conductive feature includes a first portion having a first bottom surface contacting a top surface of the first conductive feature and a second portion having a second bottom surface contacting a top surface of the dielectric layer.
    Type: Grant
    Filed: May 20, 2022
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Hsiu-Wen Hsueh, Cai-Ling Wu, Ya-Ching Tseng, Chii-Ping Chen, Neng-Jye Yang
  • Patent number: 11830949
    Abstract: An operation method and an electronic device are provided. A phone call is established while a display of the electronic device is activated. A proximity sensor of the electronic device is turned on. A supply of power to the proximity sensor is controlled to emit light through a plurality of pixels in a portion of the display corresponding to a position of the proximity sensor and the light emitted by the proximity sensor and reflected by an object is received to identify a distance between the electronic device and the object, if the plurality of the pixels in the position corresponding to the proximity sensor are deactivated during the phone call. The supply of power to the proximity sensor is blocked if the plurality of pixels in the portion of the display corresponding to the proximity sensor are activated during the phone call.
    Type: Grant
    Filed: July 7, 2022
    Date of Patent: November 28, 2023
    Inventors: Seunggoo Kang, Jung-Hoon Park, Bokyung Sim, Jeong Gyu Jo, Dong-Il Son
  • Patent number: 11830768
    Abstract: Integrated circuit (IC) interconnect lines having line breaks and line bridges within one interconnect level that are based on a single lithographic mask pattern. Multi-patterning may be employed to define a grating structure of a desired pitch in a first mask layer. Breaks and bridges between the grating structures may be derived from a second mask layer through a process-based selective occlusion of openings defined in the second mask layer that are below a threshold minimum lateral width. Portions of the grating structure underlying openings defined in the second mask layer that exceed the threshold minimum lateral width are removed. Trenches in an underlayer may then be etched based on a union of the remainder of the grating structure and the occluded openings in the second mask layer. The trenches may then be backfilled to form the interconnect lines.
    Type: Grant
    Filed: November 19, 2021
    Date of Patent: November 28, 2023
    Assignee: Intel Corporation
    Inventors: Kevin Lin, Christopher J. Jezewski
  • Patent number: 11830806
    Abstract: A semiconductor structure and method of manufacturing a semiconductor structure are provided. The semiconductor structure includes a package structure. The package structure includes a passivation layer formed over an interconnect structure; an electrically-conductive structure formed on the passivation layer and extending through the passivation layer to electrically contact the interconnect structure; a dielectric structure formed over the passivation layer and surrounding the electrically-conductive structure to expose at least a portion of a top surface of the electrically-conductive structure; and a metallic protection structure formed on the top surface of the electrically-conductive structure exposed from the dielectric structure. The top surface of the metallic protection structure is aligned with or lower than a top surface of the dielectric structure.
    Type: Grant
    Filed: April 29, 2021
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chun-Wei Chang, Hsuan-Ming Huang, Jian-Hong Lin, Ming-Hong Hsieh, Mingni Chang, Ming-Yih Wang
  • Patent number: 11828721
    Abstract: A pH sensor obtains the concentration of measurement ions by being provided in a measurement target containing the measurement ions and non-measurement ions. The pH sensor includes: a measurement target power supply that controls a measurement target voltage of the measurement target; a measurement ISFET that includes a measurement ion sensitive membrane selectively trapping the measurement ions to generate a pH-dependent voltage corresponding to the number of trapped measurement ions; a measurement membrane power supply that controls a membrane control voltage of the measurement ion sensitive membrane; and a power supply control unit that controls the size of a voltage to be output from each of the measurement target power supply and the measurement membrane power supply.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: November 28, 2023
    Inventor: Masato Futagawa
  • Patent number: 11824059
    Abstract: A semiconductor device includes first and second active patterns respectively on the first and second active regions of a substrate, a gate electrode on the first and second channel patterns, active contacts electrically connected to at least one of the first and second source/drain patterns, a gate contact electrically connected to the gate electrode, a first metal layer on the active and gate contacts and including a first and second power line, and first and second gate cutting patterns below the first and second power lines. The first active pattern may include first channel pattern between a pair of first source/drain patterns. The second active pattern may include a second channel pattern between a pair of second source/drain patterns. The first and second gate cutting patterns may cover the outermost side surfaces of the first and second channel patterns, respectively.
    Type: Grant
    Filed: July 7, 2021
    Date of Patent: November 21, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Keun Hwi Cho, Sangdeok Kwon, Dae Sin Kim, Dongwon Kim, Yonghee Park, Hagju Cho
  • Patent number: 11823998
    Abstract: Embodiments of the present invention are directed to fabrication methods and resulting interconnect structures having a conductive thin metal layer on a top via that promotes the selective growth of the next level interconnect lines (the line above). In a non-limiting embodiment of the invention, a first conductive line is formed in a dielectric layer. A via is formed on the first conductive line and a seed layer is formed on the via and the dielectric layer. A surface of the seed layer is exposed and a second conductive line is deposited onto the exposed surface of the seed layer. In a non-limiting embodiment of the invention, the second conductive line is selectively grown from the seed layer.
    Type: Grant
    Filed: September 15, 2021
    Date of Patent: November 21, 2023
    Assignee: International Business Machines Corporation
    Inventors: Brent Anderson, Lawrence A. Clevenger, Christopher J. Penny, Nicholas Anthony Lanzillo, Kisik Choi, Robert Robison
  • Patent number: 11824097
    Abstract: Solid assemblies having a composite dielectric spacer and processes for fabricating the solid assemblies are provided. The composite dielectric spacer can include, in some embodiments, a first dielectric layer and a second dielectric layer having a mutual interface. The composite dielectric spacer can separate a contact member from a conductive interconnect member, thus reducing the capacitance between such members with respect to solid assemblies that include one of first dielectric layer or the second dielectric layer. The composite dielectric spacer can permit maintaining the real estate of an interface between the conductive interconnect and a trench contact member that has an interface with a carrier-doped epitaxial layer embodying or constituting a source contact region or a drain contact region of a field effect transistor. The trench contact member can form another interface with the conductive interconnect member, providing a satisfactory contact resistance therebetween.
    Type: Grant
    Filed: February 8, 2022
    Date of Patent: November 21, 2023
    Assignee: Intel Corporation
    Inventors: Rishabh Mehandru, Pratik A. Patel, Ralph T. Troeger, Szuya S. Liao
  • Patent number: 11820668
    Abstract: Methods for preparation of surfactant-free ultra-small spinel ternary metal oxide nanoparticles are provided. A method comprises dissolving first and second metal salts in deionized water in a specific mole ratio to form a solution comprising two different metal ions, applying a coprecipitation method and adding an alkaline solution to the solution to form a colloidal suspension, wherein a colloid of the colloidal suspension is a metal hydroxide, adjusting the amount and the addition rate of the alkaline solution to form a specific structure of metal hydroxide precipitate; washing and drying the metal hydroxide to form a structured metal hydroxide powder, and applying a calcination method to the structured metal hydroxide powder to form a surfactant-free spinel-type (AB2O4) ternary metal oxide, wherein A and B each respectively comprise a metal element.
    Type: Grant
    Filed: July 18, 2019
    Date of Patent: November 21, 2023
    Assignee: THE UNIVERSITY OF HONG KONG
    Inventors: Chik Ho Wallace Choy, Zhanfeng Huang, Yangdan Ou
  • Patent number: 11824146
    Abstract: Quantum dots and methods of making quantum dots are described. A method begins with forming quantum dots having a core-shell structure with a plurality of ligands on the shell structure. The method includes exchanging the plurality of ligands with a plurality of second ligands. The plurality of second ligands have a weaker binding affinity to the shell structure than the plurality of first ligands. The plurality of second ligands are then exchanged with hydrolyzed alkoxysilane to form a monolayer of hydrolyzed alkoxysilane on a surface of the shell structure. The method includes forming a barrier layer around the shell structure by using the hydrolyzed alkoxysilane as a nucleation center.
    Type: Grant
    Filed: October 27, 2020
    Date of Patent: November 21, 2023
    Assignee: SHOEI CHEMICAL INC.
    Inventors: Shihai Kan, Jay Yamanaga, Charles Hotz, Jason Hartlove, Veeral Hardev, Jian Chen, Christian Ippen, Wenzhou Guo, Robert Wilson
  • Patent number: 11817500
    Abstract: In a method of manufacturing a semiconductor device, first and second fin structures are formed over a substrate, an isolation insulating layer is formed over the substrate, a gate structure is formed over channel regions of the first and second fin structures, source/drain regions of the first and second fin structure are recessed, and an epitaxial source/drain structure is formed over the recessed first and second fin structures. The epitaxial source/drain structure is a merged structure having a merger point, and a height of a bottom of the merger point from an upper surface of the isolation insulating layer is 50% or more of a height of the channel regions of the first and second fin structures from the upper surface of the isolation insulating layer.
    Type: Grant
    Filed: August 10, 2022
    Date of Patent: November 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shahaji B. More, Chandrashekhar Prakash Savant
  • Patent number: 11817349
    Abstract: A conductive route for an integrated circuit assembly may be formed using a sequence of etching and passivation steps through layers of conductive material, wherein the resulting structure may include a first route portion having a first surface, a second surface, and at least one side surface extending between the first surface and the second surface, an etch stop structure on the first route portion, a second route portion on the etch stop layer, wherein the second route portion has a first surface, a second surface, and at least one side surface extending between the first surface and the second surface, and a passivating layer abutting the at least one side surface of the second route portion.
    Type: Grant
    Filed: March 5, 2020
    Date of Patent: November 14, 2023
    Assignee: Intel Corporation
    Inventors: Jeremy Ecton, Brandon C. Marin, Leonel Arana, Matthew Tingey, Oscar Ojeda, Hsin-Wei Wang, Suddhasattwa Nad, Srinivas Pietambaram, Gang Duan
  • Patent number: 11817384
    Abstract: The present disclosure provides an interconnect structure and a method for forming an interconnect structure. The method for forming an interconnect structure includes forming a bottom metal line in a first interlayer dielectric layer, forming a second interlayer dielectric layer over the bottom metal line, exposing a top surface of the bottom metal line, increasing a total surface area of the exposed top surface of the bottom metal line, forming a conductive via over the bottom metal line, and forming a top metal line over the conductive via.
    Type: Grant
    Filed: January 3, 2022
    Date of Patent: November 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Shuen-Shin Liang, Ken-Yu Chang, Hung-Yi Huang, Chien Chang, Chi-Hung Chuang, Kai-Yi Chu, Chun-I Tsai, Chun-Hsien Huang, Chih-Wei Chang, Hsu-Kai Chang, Chia-Hung Chu, Keng-Chu Lin, Sung-Li Wang
  • Patent number: 11810859
    Abstract: Structures are described that include multi-layered adhesion promotion films over a conductive structure in a microelectronic package. The multi-layered aspect provides adhesion to surrounding dielectric material without a roughened surface of the conductive structure. Furthermore, the multi-layered aspect allows for materials with different dielectric constants to be used, the average of which can provide a closer match to the dielectric constant of the surrounding dielectric material. According to an embodiment, a first dielectric layer that includes at least one nitride material can provide good adhesion with the underlying conductive structure, while one or more subsequent dielectric layers that include at least one oxide material can provide different dielectric constant values (e.g., typically lower) compared to the first dielectric layer to bring the overall dielectric constant closer to that of a surrounding dielectric material.
    Type: Grant
    Filed: February 18, 2020
    Date of Patent: November 7, 2023
    Assignee: Intel Corporation
    Inventors: Srinivas V. Pietambaram, Rahul N. Manepalli, Cemil S. Geyik, Kemal Aygun
  • Patent number: 11810957
    Abstract: Disclosed is a semiconductor device including a substrate including first and second active regions, a device isolation layer on the substrate and defining first and second active patterns, first and second gate electrodes running across the first and second active regions and aligned with each other, first and second source/drain patterns on the first and second active patterns, a first active contact connecting the first and second source/drain patterns to each other, and a gate cutting pattern between the first and second gate electrodes. An upper portion of the first active contact includes first and second upper dielectric patterns. The first active contact has a minimum width at a portion between the first and second upper dielectric patterns. A minimum width of the gate cutting pattern is a second width. A ratio of the first width to the second width is in a range of 0.8 to 1.2.
    Type: Grant
    Filed: September 8, 2021
    Date of Patent: November 7, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Juhun Park, Deokhan Bae, Jin-Wook Kim, Yuri Lee, Inyeal Lee, Yoonyoung Jung
  • Patent number: 11810816
    Abstract: A semiconductor structure is provided. The semiconductor structure include a substrate and a first dielectric layer having at least one via over the substrate. The first dielectric layer includes a first portion having a first thickness and a second portion having a second thickness greater than the first thickness. The semiconductor structure further includes a second dielectric layer containing at least one first conductive line overlying the first portion of the first dielectric layer and at least one second conductive line overlying the second portion of the first dielectric layer. The at least one first conductive line includes a first conductive portion and a conductive cap, and the at least one second conductive line including a second conductive portion having a top surface coplanar with a top surface of the conductive cap.
    Type: Grant
    Filed: May 13, 2022
    Date of Patent: November 7, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shih-Kang Fu, Ming-Han Lee
  • Patent number: 11804408
    Abstract: A method includes forming a gate structure over fins protruding from a semiconductor substrate; forming an isolation region surrounding the fins; depositing a spacer layer over the gate structure and over the fins, wherein the spacer layer fills the regions extending between pairs of adjacent fins; performing a first etch on the spacer layer, wherein after performing the first etch, first remaining portions of the spacer layer that are within inner regions extending between pairs of adjacent fins have a first thickness and second remaining portions of the spacer layer that are not within the inner regions have a second thickness less than the first thickness; and forming an epitaxial source/drain region adjacent the gate structure and extending over the fins, wherein portions of the epitaxial source/drain region within the inner regions are separated from the first remaining portions of the spacer layer.
    Type: Grant
    Filed: May 27, 2022
    Date of Patent: October 31, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wei-Min Liu, Hsueh-Chang Sung, Yee-Chia Yeo
  • Patent number: 11798884
    Abstract: Semiconductor devices and methods of forming the same are provided. In one embodiment, a semiconductor device includes an active region including a channel region and a source/drain region and extending along a first direction, and a source/drain contact structure over the source/drain region. The source/drain contact structure includes a base portion extending lengthwise along a second direction perpendicular to the first direction, and a via portion over the base portion. The via portion tapers away from the base portion.
    Type: Grant
    Filed: February 28, 2022
    Date of Patent: October 24, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11791207
    Abstract: A method of forming a semiconductor device can comprise providing a first shift region in which to determine a first displacement. A second shift region may be provided in which to determine a second displacement. A unique electrically conductive structure may be formed comprising traces to account for the first displacement and the second displacement. The electrically conductive structure may comprise traces comprising a first portion within the first shift region and a second portion of traces in the second shift region laterally offset from the first portion of traces. A third portion of the traces may be provided in the routing area between the first shift region and the second shift region. A unique variable metal fill may be formed within the fill area. The variable metal fill may be electrically isolated from the unique electrically conductive structure.
    Type: Grant
    Filed: August 10, 2022
    Date of Patent: October 17, 2023
    Assignee: Deca Technologies USA, Inc.
    Inventors: David Ryan Bartling, Craig Bishop, Timothy L. Olson
  • Patent number: 11791436
    Abstract: A semiconductor light-emitting device comprises a substrate; a first adhesive layer on the substrate; multiple epitaxial units on the first adhesive layer; a second adhesive layer on the multiple epitaxial units; multiple first electrodes between the first adhesive layer and the multiple epitaxial units, and contacting the first adhesive layer and the multiple epitaxial units; and multiple second electrodes between the second adhesive layer and the multiple epitaxial units, and contacting the second adhesive layer and the multiple epitaxial units; wherein the multiple epitaxial units are totally separated.
    Type: Grant
    Filed: January 6, 2022
    Date of Patent: October 17, 2023
    Assignee: EPISTAR CORPORATION
    Inventors: Hsin-Chih Chiu, Chih-Chiang Lu, Chun-Yu Lin, Ching-Huai Ni, Yi-Ming Chen, Tzu-Chieh Hsu, Ching-Pei Lin