Patents Examined by Kenneth Parker
  • Patent number: 10950554
    Abstract: Semiconductor packages and methods of forming the same are provided. a semiconductor package includes a sub-package, a second die and a second molding layer. The sub-package includes a first die, a first molding layer aside the first die and a first redistribution layer structure disposed over the first die and the first molding layer and electrically connected to the first die. The second die is disposed over the sub-package, wherein the first die and the second die are disposed on opposite surfaces of the first redistribution layer structure. The second molding layer encapsulates the sub-package and the second die.
    Type: Grant
    Filed: July 16, 2018
    Date of Patent: March 16, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Kuo-Chung Yee, Chun-Hui Yu
  • Patent number: 10950718
    Abstract: A power semiconductor device has a semiconductor body coupled to first and second load terminal structures, the semiconductor body configured to conduct a load current during a conducting state of the device and having a drift region. The power semiconductor device includes a plurality of cells, each cell having: a first mesa in a first cell portion, the first mesa including: a first port region, and a first channel region, the first mesa exhibiting a total extension of less than 100 nm in a lateral direction, and a second mesa in a second cell portion including: a second port region, and a second channel region. A trench structure includes a control electrode structure configured to control the load current by inversion or accumulation. A guidance zone of the second conductivity type is below the second channel region and is displaced from the first and the second channel regions.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: March 16, 2021
    Assignee: Infineon Technologies Dresden GmbH & Co. KG
    Inventors: Anton Mauder, Thomas Kuenzig, Franz-Josef Niedernostheide, Christian Philipp Sandow
  • Patent number: 10937718
    Abstract: Package structures and methods of forming package structures are described. A method includes placing a first package within a recess of a first substrate. The first package includes a first die. The method further includes attaching a first sensor to the first package and the first substrate. The first sensor is electrically coupled to the first package and the first substrate.
    Type: Grant
    Filed: January 29, 2018
    Date of Patent: March 2, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Chih-Hua Chen, Hao-Yi Tsai, Yu-Feng Chen
  • Patent number: 10930667
    Abstract: A semiconductor device includes a substrate including a cell region and a peripheral region, a cell stacked structure stacked on the substrate in the cell region, a channel layer in one structure penetrating the cell stacked structure, a driving transistor formed in the peripheral region, and a plug structure coupled to the driving transistor and including a stacking structure of at least two contact plugs shorter than the channel layer, wherein each of the contact plugs is arranged at a same height as a part of the cell stacked structure.
    Type: Grant
    Filed: March 15, 2018
    Date of Patent: February 23, 2021
    Assignee: SK hynix Inc.
    Inventor: Jung Ryul Ahn
  • Patent number: 10930666
    Abstract: A semiconductor device may include a first cell structure, a second cell structure, a pad structure, a circuit, and one or more openings. The pad structure may be disposed between the first cell structure and the second cell structure, and may be electrically coupled to the first and second cell structures. The pad structure may have a plurality of stepped structures. The circuit may be disposed under the pad structure. The one or more openings may pass through the pad structure, and may expose the circuit. The one or more openings may be disposed between the plurality of stepped structures.
    Type: Grant
    Filed: November 14, 2017
    Date of Patent: February 23, 2021
    Assignee: SK hynix Inc.
    Inventor: Nam Jae Lee
  • Patent number: 10926288
    Abstract: A coating sequence includes supplying a resist liquid onto a wafer under a condition that a liquid puddle of the resist liquid is formed at a central portion thereof; supplying, while rotating the wafer at a first rotation speed where the liquid puddle stays at an inner side than an edge of the wafer, a diluting liquid and moving a supply position of the diluting liquid from an outside of the liquid puddle to an edge portion thereof; moving, after the moving of the supply position from the outside to the edge portion, the supply position from the edge portion to the outside while continuously rotating the wafer at the first rotation speed; and rotating, after the moving of the supply position from the edge portion to the outside, the wafer at a rotation speed higher than the first rotation speed to diffuse the resist liquid toward the edge.
    Type: Grant
    Filed: June 25, 2018
    Date of Patent: February 23, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Teppei Takahashi
  • Patent number: 10923399
    Abstract: A method for making a tri-gate FinFET and a dual-gate FinFET includes providing a semiconductor on insulator (SOI) wafer having a semiconductor layer over an insulator layer. The method further includes forming a hard mask on the semiconductor layer and patterning the hard mask to form first and second cap portions. The method also includes etching the semiconductor layer to form first and second fins using the first and second cap portions as an etch mask. The method also includes removing the second cap portion to expose the top surface of the second fin and forming a gate dielectric layer on the first and second fins. The method further includes forming a conductive layer over the gate dielectric layer, selectively etching the conductive layer to form first and second gate structures, forming an interlayer dielectric layer over the gate structures, and planarizing the interlayer dielectric layer using the first cap portion as a polish stop.
    Type: Grant
    Filed: January 31, 2018
    Date of Patent: February 16, 2021
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Deyuan Xiao, Guo Qing Chen, Roger Lee
  • Patent number: 10923454
    Abstract: The present disclosure provides a method of creating a bond between a first object and a second object. For example, creating a joint or die attach between a semiconductor chip and an electronic substrate, especially for harsh and high temperature environments. The method may include a step of filling a space between the first object and the second object with a filler material. Further, the method may include a step of heating the filler material to facilitate formation of a plurality of inter-diffusion layers. Accordingly, a first inter-diffusion layer may be formed between the filler material and the first object. Further, a second inter-diffusion layer may be formed between the filler material and the second object. Furthermore, in some embodiments, the first inter-diffusion layer may be contiguous with the second inter-diffusion layer.
    Type: Grant
    Filed: June 8, 2016
    Date of Patent: February 16, 2021
    Inventor: Seyed Amir Paknejad
  • Patent number: 10916724
    Abstract: The present specification relates to an organic light emitting device.
    Type: Grant
    Filed: March 17, 2017
    Date of Patent: February 9, 2021
    Inventors: Hyungjin Lee, Dongheon Kim, Nansra Heo, Dong Hoon Lee, Wonjoon Heo, Min Woo Jung
  • Patent number: 10910261
    Abstract: A semiconductor device includes bit line structures on a substrate, the bit line structures extending along a first direction and being spaced apart from each other along a second direction perpendicular to the first direction, contact plugs spaced apart from each other along the first direction and being on active regions of the substrate between adjacent bit line structures, a linear spacer on each longitudinal sidewall of a bit line structure, landing pads on the contact plugs, respectively, the landing pads being electrically connected to the contact plugs, respectively, and landing pads that are adjacent to each other along the first direction being offset with respect to each other along the second direction, as viewed in a top view, a conductive pad between each of the contact plugs and a corresponding active region, a vertical axes of the conductive pad and corresponding active region being horizontally offset.
    Type: Grant
    Filed: September 20, 2019
    Date of Patent: February 2, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Byoungdeog Choi, JungWoo Seo, Sangyeon Han, Hyun-Woo Chung, Hongrae Kim, Yoosang Hwang
  • Patent number: 10903347
    Abstract: A power semiconductor device has a semiconductor body coupled to first and second load terminal structures, the semiconductor body configured to conduct a load current during a conducting state of the device and having a drift region. The power semiconductor device includes a plurality of cells, each cell having: a first mesa in a first cell portion, the first mesa including: a first port region, and a first channel region, the first mesa exhibiting a total extension of less than 100 nm in a lateral direction, and a second mesa in a second cell portion including: a second port region, and a second channel region. A trench structure includes a control electrode structure configured to control the load current by inversion or accumulation. A guidance zone of the second conductivity type is below the second channel region and is displaced from the first and the second channel regions.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: January 26, 2021
    Assignee: Infineon Technologies Dresden GmbH & Co. KG
    Inventors: Anton Mauder, Thomas Kuenzig, Franz-Josef Niedernostheide, Christian Philipp Sandow
  • Patent number: 10896985
    Abstract: Some embodiments relate to an integrated circuit (IC) disposed on a silicon substrate, which includes a well region having a first conductivity type. A dielectric layer is arranged over an upper surface of the silicon substrate, and extends over outer edges of the well region and includes an opening that leaves an inner portion of the well region exposed. An epitaxial pillar of SiGe or Ge extends upward from the inner portion of the well region. The epitaxial pillar includes a lower epitaxial region having the first conductivity type and an upper epitaxial region having a second conductivity type, which is opposite the first conductivity type. A dielectric sidewall structure surrounds the epitaxial pillar and has a bottom surface that rests on an upper surface of the dielectric layer.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: January 19, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Ming Chen, Lee-Chuan Tseng, Ming Chyi Liu, Po-Chun Liu
  • Patent number: 10886337
    Abstract: A display device of the disclosure includes a first substrate that includes light emitting elements and color elements for respective pixels, in which the color elements are provided over the light emitting elements. The color elements include: a color element of one color including a first edge face; a color element of another color including a second edge face, in which the second edge face is adjacent to the first edge face, and at least the first edge face and the second edge face each have inclination; and a reflector structure provided in a gap formed by the inclination.
    Type: Grant
    Filed: July 10, 2015
    Date of Patent: January 5, 2021
    Assignee: SONY CORPORATION
    Inventor: Masaki Suzuki
  • Patent number: 10879082
    Abstract: An array of nanowires with a period smaller than 150 nm can be used for optoelectronics and semiconductor electronics applications. A hard nanomask is registered to a lithographically defined feature and can be used to manufacture such structures. This nanomask includes a substantially periodic array of substantially parallel elongated elements having a wavelike cross-section. The fabrication method of the nanomask may be contactless and uses ion beams.
    Type: Grant
    Filed: October 30, 2019
    Date of Patent: December 29, 2020
    Assignee: Wostec, Inc.
    Inventors: Valery K. Smirnov, Dmitry S. Kibalov
  • Patent number: 10879399
    Abstract: A semiconductor device includes a substrate, at least one source drain feature, a gate structure, and at least one gate spacer. The source/drain feature is present at least partially in the substrate. The gate structure is present on the substrate. The gate spacer is present on at least one sidewall of the gate structure. At least a bottom portion of the gate spacer has a plurality of dopants therein.
    Type: Grant
    Filed: September 19, 2018
    Date of Patent: December 29, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Wei-Yang Lo, Tung-Wen Cheng, Chia-Ling Chan, Mu-Tsang Lin
  • Patent number: 10872824
    Abstract: A device and method for manufacturing a Si-based high-mobility CMOS device is provided.
    Type: Grant
    Filed: February 20, 2019
    Date of Patent: December 22, 2020
    Assignee: IMEC VZW
    Inventors: Clement Merckling, Guillaume Boccardi
  • Patent number: 10861748
    Abstract: Provided are a semiconductor arrangement and a method for manufacturing the same. An example arrangement may comprise: a bulk semiconductor substrate; a fin formed on the substrate; a first FinFET and a second FinFET formed on the substrate, wherein the first FinFET comprises a first gate stack intersecting the fin and a first gate spacer disposed on sidewalls of the first gate stack, the second FinFET comprises a second gate stack intersecting the fin and a second gate spacer disposed on sidewalls of the second gate stack; a dummy gate spacer formed between the first FinFET and the second FinFET and intersecting the fin; a first isolation section self-aligned to a space defined by the dummy gate spacer, wherein the isolation section electrically isolates the first FinFET from the second FinFET; and a second isolation layer disposed under a bottom surface of the first isolation section.
    Type: Grant
    Filed: October 3, 2017
    Date of Patent: December 8, 2020
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 10852271
    Abstract: An on-chip heater in a concentric rings configuration having non-uniform spacing between heating elements provides improved radial temperature uniformity and low power consumption compared to circular or square heating elements. On-chip heaters are suitable for integration and use with on-chip sensors that require tight temperature control.
    Type: Grant
    Filed: December 14, 2016
    Date of Patent: December 1, 2020
    Inventors: Tung-Tsun Chen, Jui-Cheng Huang, Kun-Lung Chen, Cheng-Hsiang Hsieh
  • Patent number: 10854718
    Abstract: In one embodiment, a method of forming a HEM diode may comprise forming the HEM diode with high forward voltage that is greater than one of a gate-to-source threshold voltage of a HEMT or a forward voltage of a P-N diode.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: December 1, 2020
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventor: Woochul Jeon
  • Patent number: 10833124
    Abstract: A semiconductor device is provided including a base insulating layer on a substrate; a first conductive line that extends in a first direction on the base insulating layer; data storage structures on the first conductive line; selector structures on the data storage structures, each of the selector structures including a lower selector electrode, a selector, and an upper selector electrode; an insulating layer in a space between the selector structures; and a second conductive line disposed on the selector structures and the insulating layer and extended in a second direction intersecting the first direction. An upper surface of the insulating layer is higher than an upper surface of the upper selector electrode.
    Type: Grant
    Filed: April 16, 2018
    Date of Patent: November 10, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kyo Seop Kim, Chang Woo Sun, Gyu Hwan Oh, Joon Kim, Joon Youn Hwang