Abstract: A linear position array detector system is provided which imparts light energy to a surface of a specimen, such as a semiconductor wafer, receives light energy from the specimen surface and monitors deviation of the retro or reflected beam from that expected to map the contours on the specimen surface. The retro beam will, with ideal optical alignment, return along the same path as the incident beam if and only if the surface is normal to the beam. The system has a measurement device or sensor within the path of the retro or reflected beam to measure deviation of the retro beam from expected. The sensor is preferably a multiple element array of detector-diodes aligned in a linear fashion. A unique weighting and summing scheme is provided which increases the mechanical dynamic range while preserving sensitivity.

Abstract: A method and apparatus of classifying repetitive defects on a substrate is provided. Defects of dies on the substrate are sequentially compared with a predetermined reference die. Sets of coordinates are marked on the reference die which are corresponding to the position of the defects on the dies on the substrate. Then, repetitive defects are classified which are repeatedly marked in a specified region on the reference die.

Abstract: Methods for grading gemstones, apparatus for grading gemstones, and systems that utilize such methods and apparatus, specifically methods which trace rays through a computer representation of a gemstone wherein the rays enter the gemstone though the gemstone crown and allow a grade to be assigned to the gemstone represented based on the ray paths through the representation.

Abstract: A complex conjugate ambiguity can be resolved in an Optical Coherence Tomography (OCT) interferogram. A reference light signal is propagated along a reference path. A sample light signal is impinged on a sample reflector. The reference light signal is frequency shifted with respect to the sample light signal to thereby separate a positive and a negative displacement of a complex conjugate component of the OCT interferogram.

Abstract: This invention relates to a method for detecting the photosynthesis-inhibitory activity of substances by providing cells or cell parts with an intact photosystem, introducing the cells or cell parts into a planar layer, applying the test substance to the planar layer or into the planar layer, excitation of the luminescence of the cells or cell parts in the planar layer by an excitation light source, measuring the luminescence of the cells or the cell parts in the planar layer by means of a detector, and associating the detector signal with the degree of photosynthesis inhibition.

Abstract: In order to precisely determine a stable measuring region appropriate for a measurement of biological information, and to measure a concentration of a specific component, i.e. biological information, without inconsistency, a biological information measuring device is provided with, a measuring region determining means for determining a measuring region in between an eponychium and a distal interphalangeal joint; an information detector for applying a light to measuring region; a light source for entering a light to information detector; a light detector for detecting a light which exits from the information detector; and a processor for measuring specific component based on information obtained from light detector.

Abstract: An evaluation apparatus which evaluates a sample having a porous layer. The apparatus includes a light source which irradiates the sample with light, an imaging spectrometer which spectroscopically measures light reflected by the sample and senses an image, a first calculator which obtains amplitude information on an amplitude of a spectral reflectance of the sample based on the image sensed by the imaging spectrometer, a memory which holds in advance relationship information representing a relationship between amplitude information of spectral reflectance of a member having a porous layer and an absorption coefficient of the porous layer of the member, and a second calculator which obtains an absorption coefficient of the sample based on the amplitude information obtained by the first calculator and the relationship information held in the memory.

Abstract: The principles of the present invention relate to aligning optical components with three degrees of translational freedom. A lens pin, a lens base, and a molded package are aligned in a first direction, a second direction, and a third direction such that the signal strength of optical signals transferred between a lens included in the lens pin and the molded package is optimized. The lens pin is mechanically coupled to the lens base to fix the position of the lens relative to the molded package in the first direction. Subsequently, the lens base and the molded package are realigned in the second and third directions such that the signal strength is again optimized. The lens base is mechanically coupled to the molded package to fix the position of the lens base relative to the molded package in the second and third directions.

Abstract: In a defect inspecting apparatus, having contrast, brightness and appearance of a target for inspection and detection sensitivity of a defect changed depending on optical system conditions, and adapted to perform inspection by selecting an optimal test condition, even an unskilled user can easily select an optimal optical condition by quantitatively displaying evaluation values side by side when optical system conditions are changed. Moreover, by selecting an evaluation item having highest satisfaction based on a result of a series of test inspection, an optimal test condition can be automatically selected.

Abstract: Method and apparatus for analyzing radiation using analyzers and encoders employing the spatial modulation of radiation dispersed by wavelength or imaged along a line.

Abstract: One embodiment of the present invention is a method for suppressing artifacts in frequency-domain OCT images, which method includes (a) providing sample and reference paths with a significant difference in their chromatic dispersion (b) correcting for the effects of the mismatch in chromatic dispersion, for the purpose of making artifacts in the OCT image readily distinguishable from the desired image.

Abstract: A marker structure on a substrate for optical alignment of the substrate includes a plurality of first structural elements and a plurality of second structural elements. In use, the marker structure allows the optical alignment based upon providing at least one light beam directed on the marker structure, detecting light received from the marker structure at a sensor, and determining alignment information from the detected light, the alignment information comprising information relating a position of the substrate to the sensor.

Abstract: The invention concerns an apparatus for inspection of a wafer, encompassing at least two incident-light illumination devices that radiate a respective illuminating light beam which is incident obliquely onto the surface of a wafer to be inspected and respectively defines an illumination axis, an image capture device for capturing an image of the surface in a dark-field arrangement, and a wafer receiving device for receiving the wafer, on whose surface linearly extending features are configured, in a definable orientation. The apparatus is characterized in that the illumination axes are oriented perpendicular to one another, and the apparatus is designed in such a way that a projection of the respective illumination axis onto the surface of the wafer is oriented substantially perpendicular to respective linear features on the surface of the wafer. With the apparatus, macrodefects can be detected and the quality of the edge profile of features configured on the surface of the wafer can be assessed.

Abstract: An ellipsometric apparatus provides two impinging focused probe beams directed to reflect off the sample along two mutually distinct and preferably substantially perpendicular directions. A rotating stage rotates sections of the wafer into the travel area defined by two linear axes of two perpendicularly oriented linear stages. As a result, an entire wafer is accessed for measurement with the linear stages having a travel range of only half the wafer diameter. The reduced linear travel results in a small travel envelope occupied by the wafer and, consequently, a small footprint of the apparatus. The use of two perpendicularly directed probe beams permits measurement of periodic structures along a preferred direction while permitting the use of a reduced motion stage.

Abstract: A process photometer which includes an insulated and a non-insulated compartment. The insulated compartment is maintained at a relatively constant, elevated temperature. The radiation source, a rotatable filter wheel, a radiation detector, and a means for converting analog output to a digital signal are among the components within the insulated compartment. The non-insulated compartment houses a power supply.

Abstract: In accordance with embodiments of the present invention, a goniospectrophotometer is provided for quickly obtaining a goniospectrum using a goniospectrophotometer. In some embodiments, a parabolic reflector is used to optically transform the angular space of a source at the parabola focus into a linear space and facilitate the use of a single diffracting element and area camera to simultaneously measure the angular spectrum of the source. Spectra corresponding to zenith angles of light reflection by the parabolic reflector can be acquired by a detector and analyzed in a computer.

Abstract: A method for measuring a thickness of a coating of a constructional unit, in particular a heat-compatible coating on a component of a gas turbine, includes measuring coordinates of the constructional unit three-dimensionally with a measuring device, in particular an optical scanner, before and after the coating, a thermal distortion of the constructional unit being recorded during the coating and the thickness of the coating being determined from a comparison of the measured constructional unit coordinates before and after the coating. The thermal distortion of the constructional unit is taken into account in the thickness determination of the coating by a comparison with at least one reference point at an uncoated location.

Abstract: A circularizated semiconductor laser diode (CSLD), such as for example a vertical cavity surface emitting laser (VCSEL) may be used for optical measurements. The CSLD may be used in a cell density probe to perform cell density determination and/or turbidity determination, such as in a biotech, fermentation, or other optical absorbance application. The cell density probe may comprise a probe tip section made from a polytetrafluoroethylene material, which provides sealability, ease of manufacture, durability, cleanability, optical semi-transparency at visible and near infrared wavelengths, and other advantages. The probe tip advantageously provides an optical gap that allows for in situ measurements of optical measurements including but not limited to absorbance, scattering, and fluorescence.

Abstract: A chemical imaging system is provided which uses a near infrared radiation microscope. The system includes an illumination source which illuminates an area of a sample using light in the near infrared radiation wavelength and light in the visible wavelength. A multitude of spatially resolved spectra of transmitted, reflected, emitted or scattered near infrared wavelength radiation light from the illuminated area of the sample is collected and a collimated beam is produced therefrom. A near infrared imaging spectrometer is provided for selecting a near infrared radiation image of the collimated beam. The filtered images are collected by a detector for further processing. The visible wavelength light from the illuminated area of the sample is simultaneously detected providing for the simultaneous visible and near infrared chemical imaging analysis of the sample. Two efficient means for performing three dimensional near infrared chemical imaging microscopy are provided.

Abstract: An ellipsometer includes an optical component and a detector. The optical component has two birefringent parts in optical communication via a border surface. Light incident on the border surface is split into two reflected and two transmitted components. The detector is configured to measure a property of at least three out of the four components. Based on the measured properties, a state of polarization of the incident light may be determined.