Patents Examined by Mark V. Prenty
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Patent number: 11527713Abstract: The present disclosure, in some embodiments, relates to a memory device. The memory device includes a bottom electrode disposed over a lower interconnect within a lower inter-level dielectric (ILD) layer over a substrate. A data storage structure is over the bottom electrode. A first top electrode layer is disposed over the data storage structure, and a second top electrode layer is on the first top electrode layer. The second top electrode layer is less susceptible to oxidation than the first top electrode layer. A top electrode via is over and electrically coupled to the second top electrode layer.Type: GrantFiled: July 6, 2020Date of Patent: December 13, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Bi-Shen Lee, Hai-Dang Trinh, Hsun-Chung Kuang, Tzu-Chung Tsai, Yao-Wen Chang
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Patent number: 11527638Abstract: A method for fabricating semiconductor device includes: forming a fin-shaped structure on a substrate, wherein the fin-shaped structure is extending along a first direction; forming a gate layer on the fin-shaped structure; removing part of the gate layer and part of the fin-shaped structure to form a first trench for dividing the fin-shaped structure into a first portion and a second portion, wherein the first trench is extending along a second direction; forming a patterned mask on the gate layer and into the first trench; removing part of the gate layer to form a second trench, wherein the second trench is extending along the first direction; and filling a dielectric layer in the first trench and the second trench.Type: GrantFiled: January 29, 2021Date of Patent: December 13, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chun-Hao Lin, Hsin-Yu Chen, Shou-Wei Hsieh
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Patent number: 11527670Abstract: A photon avalanche diode includes a semiconductor body having a first side and a second side opposite the first side, a primary doped region of a first conductivity type at the first side of the semiconductor body, a primary doped region of a second conductivity type opposite the first conductivity type at the second side of the semiconductor body, an enhancement region of the second conductivity type below and adjoining the primary doped region of the first conductivity type, the enhancement region forming an active pn-junction with the primary doped region of the first conductivity type, and a collection region of the first conductivity type interposed between the enhancement region and the primary doped region of the second conductivity type and configured to transport a photocarrier generated in the collection region or the primary doped region of the second conductivity type towards the enhancement region.Type: GrantFiled: February 13, 2020Date of Patent: December 13, 2022Assignee: Infineon Technologies Dresden GmbH & Co. KGInventor: Henning Feick
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Patent number: 11527717Abstract: Various embodiments of the present disclosure are directed towards a memory cell including a co-doped data storage structure. A bottom electrode overlies a substrate and a top electrode overlies the bottom electrode. The data storage structure is disposed between the top and bottom electrodes. The data storage structure comprises a dielectric material doped with a first dopant and a second dopant.Type: GrantFiled: March 3, 2020Date of Patent: December 13, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hai-Dang Trinh, Chii-Ming Wu, Hsing-Lien Lin, Tzu-Chung Tsai, Fa-Shen Jiang, Bi-Shen Lee
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Patent number: 11522131Abstract: An illustrative device disclosed herein includes a bottom electrode, a conformal switching layer positioned above the bottom electrode and a top electrode positioned above the conformal switching layer. The top electrode includes a conformal layer of conductive material positioned above the conformal switching layer and a conductive material positioned above the conformal layer of conductive material.Type: GrantFiled: July 31, 2020Date of Patent: December 6, 2022Assignee: GLOBALFOUNDRIES SINGAPORE PTE LTDInventors: Curtis Chun-I Hsieh, Wanbing Yi, Benfu Lin, Cing Gie Lim, Wei-Hui Hsu, Juan Boon Tan
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Patent number: 11505452Abstract: A semiconductor device may include a first substrate, a first electrical component, a lid, a second substrate, and a second electrical component. The first substrate may include an upper surface, a lower surface, and an upper cavity in the upper surface. The first electrical component may reside in the upper cavity of the first substrate. The lid may cover the upper cavity and may include a port that permits fluid to flow between an environment external to the semiconductor device and the upper cavity. The second substrate may include the second electrical component mounted to an upper surface of the second substrate. The lower surface of the first substrate and the upper surface of the second substrate may fluidically seal the second electrical component from the upper cavity.Type: GrantFiled: October 30, 2020Date of Patent: November 22, 2022Assignee: AMKOR TECHNOLOGY SINGAPORE HOLDING PTE. LTD.Inventors: Lawrence Prestousa Natan, Adrian Arcedera, Roveluz Lledo-Reyes, Sarah Christine-Sanchez Torrefranca
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Patent number: 11502131Abstract: A resistive random access memory (RRAM) device and a manufacturing method are provided. The RRAM device includes bottom electrodes, a resistance switching layer, insulating patterns, a channel layer and top electrodes. The resistance switching layer blanketly covers the bottom electrodes. The insulating patterns are disposed on the resistance layer and located in corresponding to locations of the bottom electrodes. The channel layer conformally covers the resistance switching layer and the insulating patterns. The channel layer has a plurality of channel regions. The channel regions are located on the resistance switching layer, and cover sidewalls of the insulating patterns. The top electrodes respectively cover at least two of the channel regions, and respectively located in corresponding to one of the insulating patterns, such that the at least two of the channel regions are located between one of the bottom electrodes and one of the top electrodes.Type: GrantFiled: November 19, 2020Date of Patent: November 15, 2022Assignee: Winbond Electronics Corp.Inventors: Chia-Wen Cheng, Ping-Kun Wang, Yi-Hsiu Chen, He-Hsuan Chao
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Patent number: 11502254Abstract: A memory device structure includes a first electrode, a second electrode, a switching layer between the first electrode and the second electrode, where the switching layer is to transition between first and second resistive states at a voltage threshold. The memory device further includes an oxygen exchange layer between the switching layer and the second electrode, where the oxygen exchange layer includes a metal and a sidewall oxide in contact with a sidewall of the oxygen exchange layer. The sidewall oxide includes the metal of the oxygen exchange layer and oxygen, and has a lateral thickness that exceed a thickness of the switching layer.Type: GrantFiled: September 28, 2018Date of Patent: November 15, 2022Assignee: Intel CorporationInventors: Nathan Strutt, Albert Chen, Oleg Golonzka
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Patent number: 11502130Abstract: A variable resistance memory device and a method of fabricating a variable resistance memory device, the device including first conductive lines extending in a first direction; second conductive lines extending in a second direction crossing the first direction; and memory cells at respective intersection points of the first conductive lines and the second conductive lines, wherein each of the memory cells includes a switching pattern, an intermediate electrode, a variable resistance pattern, and an upper electrode, which are between the first and second conductive lines and are connected in series; and a spacer structure including a first spacer and a second spacer, the first spacer being on a side surface of the upper electrode, and the second spacer covering the first spacer and a side surface of the variable resistance pattern such that the second spacer is in contact with the side surface of the variable resistance pattern.Type: GrantFiled: July 24, 2020Date of Patent: November 15, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Kyusul Park, Woohyun Park, Ilmok Park, Seulji Song
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Patent number: 11493667Abstract: Provided herein are methods of preparing three-dimensional photonic crystals having tunable optical properties and control over stopband location and width, the three-dimensional photonic crystals comprising nanoparticles and spacer groups.Type: GrantFiled: January 31, 2019Date of Patent: November 8, 2022Assignee: NORTHWESTERN UNIVERSITYInventors: Chad A. Mirkin, Lin Sun, Haixin Lin, George C. Schatz
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Patent number: 11495742Abstract: A resistive memory device is provided. The resistive memory device comprises a first electrode and a resistive layer over the first electrode, the resistive layer having a sidewall. A second electrode is over the resistive layer. An insulating liner is formed on the sidewall of the resistive layer. The insulating liner comprises two layers of different dielectric materials.Type: GrantFiled: April 17, 2020Date of Patent: November 8, 2022Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Jian Xun Sun, Juan Boon Tan, Tu Pei Chen
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Patent number: 11489116Abstract: Thermal field controlled electrical conductivity change devices and applications therefore are provided. In some embodiments, a thermal switch, comprises: a metal-insulator-transition (MIT) material; first and second terminals electrically coupled to the MIT material; and a heater disposed near the MIT material.Type: GrantFiled: February 13, 2020Date of Patent: November 1, 2022Assignee: Hefei Reliance Memory LimitedInventors: Liang Zhao, Zhichao Lu
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Patent number: 11476286Abstract: A solid-state image pickup device 1 according to the present invention includes a semiconductor substrate 2 on which a pixel 20 composed of a photodiode 3 and a transistor is formed. The transistor comprising the pixel 20 is formed on the surface of the semiconductor substrate, a pn junction portion formed between high concentration regions of the photodiode 3 is provided within the semiconductor substrate 2 and a part of the pn junction portion of the photodiode 3 is extended to a lower portion of the transistor formed on the surface of the semiconductor substrate 2. According to the present invention, there is provided a solid-state image pickup device in which a pixel size can be microminiaturized without lowering a saturated electric charge amount (Qs) and sensitivity.Type: GrantFiled: October 9, 2020Date of Patent: October 18, 2022Assignee: Sony Group CorporationInventors: Takayuki Ezaki, Teruo Hirayama
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Patent number: 11476346Abstract: Embodiments of the invention are directed to a method of forming a semiconductor device. A non-limiting example of the method includes forming a top spacer trench adjacent to an upper region of the channel fin. An oxygen-blocking layer is deposited within the top spacer trench and over the upper region of the channel fin. A top spacer is formed within the top spacer trench and over a portion of the oxygen-blocking layer that is within the top spacer trench. The oxygen-blocking layer includes an oxygen gettering material.Type: GrantFiled: June 24, 2020Date of Patent: October 18, 2022Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Chen Zhang, Christopher J. Waskiewicz, Shahab Siddiqui, Ruilong Xie
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Patent number: 11462684Abstract: An RRAM device is disclosed. The RRAM device includes a bottom electrode, a high-k material on the bottom electrode, a top electrode, a top contact on the top electrode and an encapsulating layer of Al2O3. The encapsulating layer encapsulates the bottom electrode, the high-k material, the top electrode and the top contact.Type: GrantFiled: December 19, 2018Date of Patent: October 4, 2022Assignee: Intel CorporationInventors: Albert Chen, Nathan Strutt, Oleg Golonzka, Pedro Quintero, Christopher J. Jezewski, Elijah V. Karpov
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Patent number: 11462642Abstract: The present disclosure describes a method that mitigates the formation of facets in source/drain silicon germanium (SiGe) epitaxial layers. The method includes forming an isolation region around a semiconductor layer and a gate structure partially over the semiconductor layer and the isolation region. Disposing first photoresist structures over the gate structure, a portion of the isolation region, and a portion of the semiconductor layer and doping, with germanium (Ge), exposed portions of the semiconductor layer and exposed portions of the isolation region to form Ge-doped regions that extend from the semiconductor layer to the isolation region. The method further includes disposing second photoresist structures over the isolation region and etching exposed Ge-doped regions in the semiconductor layer to form openings, where the openings include at least one common sidewall with the Ge-doped regions in the isolation region. Finally the method includes growing a SiGe epitaxial stack in the openings.Type: GrantFiled: September 24, 2020Date of Patent: October 4, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Gulbagh Singh, Hsin-Chi Chen, Kun-Tsang Chuang
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Patent number: 11462585Abstract: Disclosed is a resistive random access memory (RRAM). The RRAM includes a bottom electrode made of tungsten and a switching layer made of hafnium oxide disposed above the bottom electrode, wherein the switching layer includes a switchable filament. The RRAM further includes a resistive layer disposed above the switching layer and a bit line disposed above the resistive layer, wherein the resistive layer extends laterally to connect two or more memory cells along the bit line.Type: GrantFiled: August 17, 2020Date of Patent: October 4, 2022Assignee: Hefei Reliance Memory LimitedInventors: Zhichao Lu, Brent Steven Haukness
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Patent number: 11450712Abstract: A memristive device and mechanisms for providing and using the memristive device are described. The memristive device includes a nanowire, a plurality of memristive plugs and a plurality of electrodes. The nanowire has a conductive core and an insulator coating at least a portion of the conductive core. The insulator has a plurality of apertures therein. The memristive plugs are for the apertures. At least a portion of each of the memristive plugs resides in each of the apertures. The memristive plugs are between the conductive core and the electrodes.Type: GrantFiled: February 18, 2020Date of Patent: September 20, 2022Assignee: Rain Neuromorphics Inc.Inventors: Jack David Kendall, Suhas Kumar, Nikita Gaur
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Patent number: 11450756Abstract: A semiconductor chip includes a substrate and a transistor. The transistor is formed on the substrate and includes an insulation layer and a fin. The fin includes a base portion and a protrusion connected with the base portion, wherein the protrusion is projected with respect to an upper surface of the base portion and has a recess recessed with respect to the upper surface.Type: GrantFiled: August 25, 2020Date of Patent: September 20, 2022Assignee: MEDIATEK INC.Inventors: Cheng-Tien Wan, Yao-Tsung Huang, Yun-San Huang, Ming-Cheng Lee, Wei-Che Huang
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Patent number: 11444046Abstract: An integrated circuit (IC) comprising an enhanced passivation scheme for pad openings and trenches is provided. In some embodiments, an interlayer dielectric (ILD) layer covers a substrate and at least partially defines a trench. The trench extends through the ILD layer from a top of the ILD layer to the substrate. A conductive pad overlies the ILD layer. A first passivation layer overlies the ILD layer and the conductive pad, and further defines a pad opening overlying the conductive pad. A second passivation layer overlies the ILD layer, the conductive pad, and the first passivation layer, and further lines sidewalls of the first passivation layer in the pad opening and sidewalls of the ILD layer in the trench. Further, the second passivation layer has a low permeability for moisture or vapor relative to the ILD layer.Type: GrantFiled: August 27, 2020Date of Patent: September 13, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Hong Chang, Chun-Yi Yang, Kun-Ming Huang, Po-Tao Chu, Shen-Ping Wang, Chien-Li Kuo