Patents Examined by Mark V. Prenty
-
Patent number: 10916514Abstract: Metal-free frame designs for silicon bridges for semiconductor packages and the resulting silicon bridges and semiconductor packages are described. In an example, a semiconductor structure includes a substrate having an insulating layer disposed thereon, the substrate having a perimeter. A metallization structure is disposed on the insulating layer, the metallization structure including conductive routing disposed in a dielectric material stack. A first metal guard ring is disposed in the dielectric material stack and surrounds the conductive routing. A second metal guard ring is disposed in the dielectric material stack and surrounds the first metal guard ring. A metal-free region of the dielectric material stack surrounds the second metal guard ring. The metal-free region is disposed adjacent to the second metal guard ring and adjacent to the perimeter of the substrate.Type: GrantFiled: September 19, 2019Date of Patent: February 9, 2021Assignee: Intel CorporationInventors: Dae-Woo Kim, Sujit Sharan, Sairam Agraharam
-
Patent number: 10910367Abstract: A semiconductor device includes a substrate including a first region and a second region, an active gate structure on the substrate in the first region, a dummy gate structure on the substrate in the second region, a source/drain on the substrate in the first region at each of opposite sides of the active gate structure, a plurality of first conductive contacts respectively connected to the active gate structure and the source/drain, a resistive structure on the dummy gate structure in the second region, a plurality of second conductive contacts respectively connected to the plurality of first conductive contacts and the resistive structure, and an etch stop layer between the dummy gate structure and the resistive structure. The etch stop layer includes a lower etch stop layer and an upper etch stop layer, which are formed of different materials.Type: GrantFiled: January 25, 2019Date of Patent: February 2, 2021Assignee: Samsung Electronics Co., Ltd.Inventors: Seul-ki Hong, Hwi-chan Jun, Hyun-soo Kim, Dae-chul Ahn, Myung Yang
-
Patent number: 10903359Abstract: A semiconductor device includes: a semiconductor layer that includes principal surfaces; a metal layer that includes principal surfaces, is disposed with the principal surface in contact with the principal surface, is thicker than the semiconductor layer, and comprises a first metal material; a metal layer that includes principal surfaces, is disposed with the principal surface in contact with the principal surface, and comprises a metal material having a Young's modulus greater than that of the first metal material; and transistors. The transistor includes a source electrode and a gate electrode on a side facing the principal surface. The transistor includes a source electrode and a gate electrode on a side facing the principal surface.Type: GrantFiled: January 17, 2019Date of Patent: January 26, 2021Assignee: PANASONIC SEMICONDUCTOR SOLUTIONS CO., LTD.Inventors: Chie Fujioka, Hiroshi Yoshida, Yoshihiro Matsushima, Hideki Mizuhara, Masao Hamasaki, Mitsuaki Sakamoto
-
Patent number: 10896872Abstract: The present invention addresses the problem of providing a connecting structure or similar that can minimize a decrease in a wireable region of a substrate while reducing the effect of stubs of a pair of vias on the output of a capacitor that is connected to said vias. In order to solve this problem, this connecting structure comprises: a first conductor that passes through a substrate and is provided with a first input/output section; a second conductor that passes through the substrate and is provided with a second input/output section; a first capacitor, one terminal of which being connected to a terminal of the first conductor that is on a first surface of the substrate, the other terminal of which being connected to a terminal of the second conductor that is on the first surface of the substrate; and a second capacitor or a resistor.Type: GrantFiled: September 15, 2017Date of Patent: January 19, 2021Assignee: NEC CORPORATIONInventors: Ayako Uemura, Kazuhiro Kashiwakura
-
Patent number: 10896853Abstract: The present disclosure generally relates to semiconductor device fabrication and integrated circuits. More particularly, the present disclosure relates to replacement metal gate processes and structures for transistor devices having a short channel and a long channel component. The present disclosure also relates to processes and structures for multi-gates with dissimilar threshold voltages.Type: GrantFiled: April 29, 2019Date of Patent: January 19, 2021Assignee: GLOBALFOUNDRIES Inc.Inventors: Jiehui Shu, Rinus Tek Po Lee, Wei Hong, Hui Zang, Hong Yu
-
Patent number: 10879288Abstract: Various embodiments of the present application are directed towards an image sensor having a reflector. In some embodiments, the image sensor comprises a substrate, an interlayer dielectric (ILD) structure, an etch stop layer, a wire, and the reflector. The substrate comprises a photodetector. The ILD structure is over the substrate, and the etch stop layer is over the ILD structure. The wire is in the etch stop layer. The reflector is directly over the photodetector and is in the etch stop layer. An upper surface of the wire is elevated above an upper surface of the reflector. By forming the reflector directly over the photodetector, the reflector may reflect radiation that passes through the photodetector without being absorbed back to the photodetector. This gives the photodetector a second chance to absorb the radiation and enhances the quantum efficiency (QE) of the photodetector.Type: GrantFiled: September 5, 2018Date of Patent: December 29, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Hui Huang, Cheng-Hsien Chou, Cheng-Yuan Tsai, Kuo-Ming Wu, Sheng-Chan Li
-
Patent number: 10868000Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a first epitaxial structure and a second epitaxial structure over a semiconductor substrate. The method includes forming a dielectric layer over the first epitaxial structure, the second epitaxial structure, and the semiconductor substrate. The method includes forming a first mask layer over the dielectric layer and between the first epitaxial structure and the second epitaxial structure. The method includes forming a second mask layer over the dielectric layer and the first mask layer. The method includes partially removing the dielectric layer covering the first epitaxial structure and the second epitaxial structure. The method includes removing the first mask layer. The method includes forming a first conductive layer and a second conductive layer respectively in the first recess and the second recess.Type: GrantFiled: January 25, 2019Date of Patent: December 15, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Li-Zhen Yu, Tien-Lu Lin, Jia-Chuan You, Chia-Hao Chang, Yu-Ming Lin, Chih-Hao Wang
-
Patent number: 10861965Abstract: The present embodiments provide a region of a semiconductor device comprising a plurality of power transistor cells configured as trench MOSFETs in a semiconductor substrate. At least one active power transistor cell further includes a trenched source region wherein a trench bottom surface of the trenched source contact is covered with an insulation layer and layer of a conductive material on top of the insulation layer, to function as an integrated pseudo Schottky barrier diode in the active power transistor cell.Type: GrantFiled: April 26, 2019Date of Patent: December 8, 2020Assignee: Renesas Electronics America Inc.Inventor: Shengling Deng
-
Patent number: 10854765Abstract: A photosensitive device that includes a conductive electrode, a dielectric layer, a sensing electrode composed of a two-dimensional layered material, and a photoactive layer which can be configured to absorb electromagnetic radiation. The photosensitive device also includes a single-ended measurement electrode for determining the electric potential of the sensing electrode.Type: GrantFiled: January 25, 2019Date of Patent: December 1, 2020Assignee: EMBERION OYInventors: Mark Allen, Alexander Bessonov, Tapani Ryhänen
-
Patent number: 10854624Abstract: Provided is a semiconductor memory device including a substrate, an isolation structure, a first gate dielectric layer, a first conductive layer, a second gate dielectric layer, a second conductive layer, and a protective layer. The substrate has an array region and a periphery region. The isolation structure is disposed in the substrate between the array and periphery regions. The first gate dielectric layer is disposed on the substrate in the array region. The first conductive layer is disposed on the first gate dielectric layer. The second gate dielectric layer is disposed on the substrate in the periphery region. The second conductive layer is disposed on the second dielectric layer. The second conductive layer extends to cover a portion of a top surface of the isolation structure. The protective layer is disposed between the second conductive layer and the isolation structure.Type: GrantFiled: March 20, 2019Date of Patent: December 1, 2020Assignee: Winbond Electronics Corp.Inventors: Wen Hung, Yu-Kai Liao, Chiang-Hung Chen
-
Patent number: 10847714Abstract: MTJ material stacks, pSTTM devices employing such stacks, and computing platforms employing such pSTTM devices. In some embodiments, perpendicular MTJ material stacks include a multi-layered filter stack disposed between a fixed magnetic layer and an antiferromagnetic layer or synthetic antiferromagnetic (SAF) stack. In some embodiments, non-magnetic layers of the filter stack include at least one of Ta, Mo, Nb, W, or Hf. These transition metals may be in pure form or alloyed with other constituents.Type: GrantFiled: June 3, 2019Date of Patent: November 24, 2020Assignee: Intel CorporationInventors: Kaan Oguz, Kevin P. O'Brien, Christopher J. Wiegand, Md Tofizur Rahman, Brian S. Doyle, Mark L. Doczy, Oleg Golonzka, Tahir Ghani, Justin S. Brockman
-
Patent number: 10843918Abstract: A semiconductor device may include a first substrate, a first electrical component, a lid, a second substrate, and a second electrical component. The first substrate may include an upper surface, a lower surface, and an upper cavity in the upper surface. The first electrical component may reside in the upper cavity of the first substrate. The lid may cover the upper cavity and may include a port that permits fluid to flow between an environment external to the semiconductor device and the upper cavity. The second substrate may include the second electrical component mounted to an upper surface of the second substrate. The lower surface of the first substrate and the upper surface of the second substrate may fluidically seal the second electrical component from the upper cavity.Type: GrantFiled: March 4, 2019Date of Patent: November 24, 2020Assignee: AMKOR TECHNOLOGY SINGAPORE HOLDING PTE. LTD.Inventors: Lawrence Prestousa Natan, Adrian Arcedera, Roveluz Lledo-Reyes, Sarah Christine-Sanchez Torrefranca
-
Patent number: 10832971Abstract: A semiconductor structure and a method for fabricating the same. The semiconductor structure includes a gate cut mask having one cut window exposing one or more portions of multiple sacrificial gate structures of the at least one plurality of sacrificial gate structures. The multiple sacrificial gate structures having been formed over portions of in structures. The method comprises forming a gate cut mask a plurality of semiconductor fins and a plurality of sacrificial gate structures. The gate cut mask being formed with one cut window exposing one or more portions of multiple sacrificial gate structures of the plurality of sacrificial gate structures. At least the portion of multiple sacrificial gate structures and one or more portions of each semiconductor fin of the plurality of semiconductor fins underlying the one or more portions of one of the multiple sacrificial gate structures are removed.Type: GrantFiled: August 30, 2018Date of Patent: November 10, 2020Assignee: International Business Machines CorporationInventors: Rajasekhar Venigalla, Ravikumar Ramachandran, Albert Chu, Alan Thomas, Kafai Lai
-
Patent number: 10832983Abstract: A semiconductor device includes a substrate having a semiconductor layer. A trench is formed within the semiconductor layer. A filling insulating film is disposed within the trench. An insertion liner is disposed within the filling insulating film. The insertion liner is spaced apart from the semiconductor layer and extends along the bottom surface of the trench.Type: GrantFiled: August 9, 2017Date of Patent: November 10, 2020Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ji Min Choi, Dong Ryul Lee, Ho Ouk Lee, Ji Young Kim, Chang Hyun Cho
-
Patent number: 10833173Abstract: A semiconductor includes a semiconductor substrate having a bottom source/drain region and a vertical semiconductor fin having a bottom end that contacts the semiconductor substrate. The semiconductor device further includes a top source/drain region on a top end of the vertical semiconductor. The top source/drain region is separated from the semiconductor substrate by the vertical semiconductor fin. The semiconductor device further includes an electrically conductive cap on an outer surface of the top source/drain region.Type: GrantFiled: August 30, 2018Date of Patent: November 10, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Christopher J. Waskiewicz, Su Chen Fan, Hari Prasad Amanapu, Hemanth Jagannathan
-
Patent number: 10825814Abstract: A semiconductor device includes a semiconductor substrate, a first well region formed on the semiconductor substrate, a first fin integrally formed of the semiconductor substrate on the first well region and extended in a first direction in a plan view, a first electrode formed on the first fin via a first gate insulating film, and extended in a second direction crossing the first direction in the plan view, a tap region formed on the semiconductor substrate adjacent to the first well region in the second direction, and supplying a first potential to the first well region, a second fin integrally formed of the semiconductor substrate on the tap region and extended in the first direction in the plan view, and a first wiring layer formed on the second fin in a portion overlapping the tap region in the plan view.Type: GrantFiled: February 27, 2019Date of Patent: November 3, 2020Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Makoto Yabuuchi, Yuichiro Ishii
-
Patent number: 10819933Abstract: A sensing device including a semiconductor substrate, a filtering structure and a sensing structure is provided. The semiconductor substrate has a sample excitation region and an optical sensor region. The optical sensor region laterally encircles the sample excitation region. The filtering structure is embedded in the semiconductor substrate. The filtering structure is located in the sample excitation region and has a sample containing portion. The sample containing portion is adapted to contain a sample and receive an excitation beam. The sensing structure is embedded in the semiconductor substrate. At least a portion of the sensing structure is disposed in the optical sensor region and the sensing structure at least laterally encircles the filtering structure.Type: GrantFiled: April 29, 2019Date of Patent: October 27, 2020Assignee: GenOptics Precision Biotechnologies Inc.Inventor: Teng-Chien Yu
-
Patent number: 10818543Abstract: Source/drain contact spacers for improving integrated circuit device performance and methods of forming such are disclosed herein. An exemplary method includes etching an interlevel dielectric (ILD) layer to form a source/drain contact opening that exposes a contact etch stop layer (CESL) disposed over a source/drain feature, depositing a source/drain contact spacer layer that partially fills the source/drain contact opening and covers the ILD layer and the exposed CESL, and etching the source/drain contact spacer layer and the CESL to extend the source/drain contact opening to expose the source/drain feature. The etching forms source/drain contact spacers. The method further includes forming a source/drain contact to the exposed source/drain feature in the extended source/drain contact opening. The source/drain contact is formed over the source/drain contact spacers and fills the extended source/drain contact opening.Type: GrantFiled: December 12, 2018Date of Patent: October 27, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Xusheng Wu
-
Patent number: 10804231Abstract: An integrated circuit (IC) comprising an enhanced passivation scheme for pad openings and trenches is provided. In some embodiments, an interlayer dielectric (ILD) layer covers a substrate and at least partially defines a trench. The trench extends through the ILD layer from a top of the ILD layer to the substrate. A conductive pad overlies the ILD layer. A first passivation layer overlies the ILD layer and the conductive pad, and further defines a pad opening overlying the conductive pad. A second passivation layer overlies the ILD layer, the conductive pad, and the first passivation layer, and further lines sidewalls of the first passivation layer in the pad opening and sidewalls of the ILD layer in the trench. Further, the second passivation layer has a low permeability for moisture or vapor relative to the ILD layer.Type: GrantFiled: May 22, 2019Date of Patent: October 13, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ming-Hong Chang, Chun-Yi Yang, Kun-Ming Huang, Po-Tao Chu, Shen-Ping Wang, Chien-Li Kuo
-
Patent number: 10797224Abstract: The disclosed technology generally relates to magnetoresistive devices, and more particularly to a magnetic tunnel junction (MTJ) device formed in an interconnection structure, and to a method of integrating the (MTJ) device in the interconnection structure. According to an aspect, a device includes a first interconnection level including a first dielectric layer and a first set of conductive paths arranged in the first dielectric layer, a second interconnection level arranged on the first connection level and including a second dielectric layer and a second set of conductive paths arranged in the second dielectric layer, and a third interconnection level arranged on the second interconnection level and including a third dielectric layer and a third set of conductive paths arranged in the third dielectric layer.Type: GrantFiled: February 23, 2018Date of Patent: October 6, 2020Assignees: IMEC vzw, Katholieke Universiteit LeuvenInventors: Praveen Raghavan, Davide Francesco Crotti, Raf Appeltans