Patents Examined by Mary Wilczewski
  • Patent number: 11715777
    Abstract: A semiconductor device including source/drain contacts extending into source/drain regions, below topmost surfaces of the source/drain regions, and methods of forming the same are disclosed. In an embodiment, a semiconductor device includes a semiconductor substrate; a first channel region over the semiconductor substrate; a first gate stack over the semiconductor substrate and surrounding four sides of the first channel region; a first epitaxial source/drain region adjacent the first gate stack and the first channel region; and a first source/drain contact coupled to the first epitaxial source/drain region, a bottommost surface of the first source/drain contact extending below a topmost surface of the first channel region.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: August 1, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Guan-Ren Wang, Yun-Min Chang, Yu-Lien Huang, Ching-Feng Fu
  • Patent number: 11713241
    Abstract: The present disclosure provides a packaging method, including: providing a first semiconductor substrate; forming a bonding region on the first semiconductor substrate, wherein the bonding region of the first semiconductor substrate includes a first bonding metal layer and a second bonding metal layer; providing a second semiconductor substrate having a bonding region, wherein the bonding region of the second semiconductor substrate includes a third bonding layer; and bonding the first semiconductor substrate to the second semiconductor substrate by bringing the bonding region of the first semiconductor substrate in contact with the bonding region of the second semiconductor substrate; wherein the first and third bonding metal layers include copper (Cu), and the second bonding metal layer includes Tin (Sn). An associated packaging structure is also disclosed.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: August 1, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chih-Ming Chen, Yuan-Chih Hsieh, Chung-Yi Yu
  • Patent number: 11715684
    Abstract: A semiconductor device includes lower circuit patterns on a lower substrate; lower bonding patterns on the lower circuit patterns, the lower bonding patterns including a conductive material and being electrically connected to the lower circuit patterns; upper bonding patterns on and contacting the lower bonding patterns, and including a conductive material; a passive device on the upper bonding patterns, and including a conductive material and contacting one of the upper bonding patterns; a gate electrode structure on the passive device, and including gate electrodes spaced apart from each other in a first direction, each of which extends in a second direction, and extension lengths in the second direction of the gate electrodes increasing from a lowermost level toward an uppermost level in a stepwise manner; a channel extending through at least a portion of the gate electrode structure; and an upper substrate on the channel.
    Type: Grant
    Filed: July 15, 2021
    Date of Patent: August 1, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sungmin Hwang, Jiwon Kim, Jaeho Ahn, Joonsung Lim, Sukkang Sung
  • Patent number: 11715785
    Abstract: A semiconductor device includes a gate structure located on a substrate; and a raised source/drain region adjacent to the gate structure. An interface is between the gate structure and the substrate. The raised source/drain region includes a stressor layer providing strain to a channel under the gate structure; and a silicide layer in the stressor layer. The silicide layer extends from a top surface of the raised source/drain region and ends below the interface by a predetermined depth. The predetermined depth allows the stressor layer to maintain the strain of the channel.
    Type: Grant
    Filed: April 22, 2021
    Date of Patent: August 1, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Shin-Jiun Kuang, Yi-Han Wang, Tsung-Hsing Yu, Yi-Ming Sheu
  • Patent number: 11716847
    Abstract: A semiconductor device is provided. The semiconductor device includes word line layers and insulating layers that are alternatingly stacked along a vertical direction perpendicular to a substrate of the semiconductor device. The semiconductor device includes a channel structure that extends along the vertical direction through the word line layers and the insulating layers. A cross-section of the channel structure that is perpendicular to the vertical axis includes channel layer sections that are spaced apart from one another.
    Type: Grant
    Filed: December 7, 2020
    Date of Patent: August 1, 2023
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Tingting Gao, Lei Xue, Xiaoxin Liu, Wanbo Geng
  • Patent number: 11710695
    Abstract: A semiconductor device has a substrate, a first circuit, a first inductor, a second circuit and a second inductor IND2. The substrate includes a first region and a second region, which are regions different from each other. The first circuit is formed on the first region. The first inductor is electrically connected with the first circuit. The second circuit is formed on the second regions. The second inductor is electrically connected with the second circuit and formed to face the first inductor. A penetrating portion is formed in the substrate. The penetrating portion is formed such that the penetrating portion surrounds one or both of the first circuit and the second circuit in plan view.
    Type: Grant
    Filed: May 12, 2020
    Date of Patent: July 25, 2023
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventor: Yasutaka Nakashiba
  • Patent number: 11711919
    Abstract: A semiconductor memory device comprises: a plurality of first conductive layers arranged separated from each other in a first direction; a plurality of second conductive layers arranged, electrically insulated from the plurality of first conductive layers, at a different position in a second direction intersecting the first direction with respect to the first conductive layers; a plurality of memory structures; and a source structure. Respective one ends of the plurality of memory structures and one end of the source structure are electrically connected. The respective other ends of the plurality of memory structures are respectively electrically connected to different first wirings of a plurality of first wirings formed in the same layer in the first direction. The other end of the source structure is electrically connected to a second wiring formed in a different layer from the plurality of first wirings in the first direction.
    Type: Grant
    Filed: September 14, 2020
    Date of Patent: July 25, 2023
    Assignee: Kioxia Corporation
    Inventor: Daigo Ichinose
  • Patent number: 11710660
    Abstract: A laser irradiation method of irradiating, with a pulse laser beam, an irradiation object in which an impurity source film is formed on a semiconductor substrate includes: reading fluence per pulse of the pulse laser beam with which a rectangular irradiation region set on the irradiation object is irradiated and the number of irradiation pulses the irradiation region is irradiated, the fluence being equal to or larger than a threshold at or beyond which ablation potentially occurs to the impurity source film when the irradiation object is irradiated with pulses of the pulse laser beam in the irradiation pulse number and smaller than a threshold at or beyond which damage potentially occurs to the surface of the semiconductor substrate; calculating a scanning speed Vdx; and moving the irradiation object at the scanning speed Vdx relative to the irradiation region while irradiating the irradiation region with the pulse laser beam at the repetition frequency f.
    Type: Grant
    Filed: April 22, 2020
    Date of Patent: July 25, 2023
    Assignees: Gigaphoton Inc., KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION
    Inventors: Hiroshi Ikenoue, Osamu Wakabayashi, Hiroaki Oizumi, Akira Suwa
  • Patent number: 11694920
    Abstract: A substrate support device relating to technology disclosed in the description of the present application includes: a holding plate for opposing a substrate bowable by being heated by irradiation with flash light; and a plurality of substrate support pins provided on the holding plate and being for supporting the substrate, wherein the plurality of substrate support pins are arranged at locations where a volume of a space between the holding plate and the substrate in an unbowed state and a volume of a space between the holding plate and the substrate in a bowed state are equal to each other. Breakage of the substrate can be suppressed in a case where the substrate is bowed by flash light.
    Type: Grant
    Filed: October 26, 2020
    Date of Patent: July 4, 2023
    Assignee: SCREEN Holdings Co., Ltd.
    Inventor: Scott Prengle
  • Patent number: 11688615
    Abstract: A semiconductor process system includes a wafer support and a control system. The wafer support includes a plurality of heating elements and a plurality of temperature sensors. The heating elements heat a semiconductor wafer supported by the support system. The temperature sensors generate sensor signals indicative of a temperature. The control system selectively controls the heating elements responsive to the sensor signals.
    Type: Grant
    Filed: August 19, 2020
    Date of Patent: June 27, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Hao Cheng, Hsuan-Chih Chu, Yen-Yu Chen
  • Patent number: 11688685
    Abstract: Among other things, a method of fabricating an integrated electronic device package is described. First trace portions of an electrically conductive trace are formed on an electrically insulating layer of a package structure, and vias of the conductive trace are formed in a sacrificial layer disposed on the electrically insulating layer. The sacrificial layer is removed, and a die is placed above the electrically insulating layer. Molding material is formed around exposed surfaces of the die and exposed surfaces of the vias, and a magnetic structure is formed within the layer of molding material. Second trace portions of the electrically conductive trace are formed above the molding material and the magnetic structure. The electrically conductive trace and the magnetic structure form an inductor. The electrically conductive trace may have a coil shape surrounding the magnetic structure. The die may be positioned between portions of the inductor.
    Type: Grant
    Filed: February 4, 2021
    Date of Patent: June 27, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Wen-Shiang Liao, Chih-Hang Tung, Chen-Hua Yu, Chewn-Pu Jou, Feng Wei Kuo
  • Patent number: 11669213
    Abstract: An organic electroluminescent device with a touch sensor including: a first substrate; a second substrate arranged opposite to the first substrate; an organic EL element layer arranged above the first substrate; a first scaling film arranged toward the second substrate of the organic EL element layer, covering the organic EL element layer, and including a first inorganic layer; plural first detection electrodes extending in one direction, and arranged in parallel toward the second substrate of the first sealing film; a second sealing film arranged toward the second substrate of the first detection electrodes, and including a second inorganic layer; plural second detection electrodes extending in another direction different from the one direction, and arranged in parallel toward the second substrate of the second sealing film; and a touch sensor control unit controlling a potential to detect a touch with a display surface.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: June 6, 2023
    Assignee: Japan Display Inc.
    Inventors: Toshihiro Sato, Ryoichi Ito
  • Patent number: 11670551
    Abstract: The present disclosure provides methods of fabricating a semiconductor device. A method according to one embodiment includes forming, on a substrate, a first fin formed of a first semiconductor material and a second fin formed of a second semiconductor material different from the first semiconductor material, forming a semiconductor cap layer over the first fin and the second fin, and annealing the semiconductor cap layer at a first temperature while at least a portion of the semiconductor cap layer is exposed.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Szu-Chi Yang, Allen Chien, Cheng-Ting Ding, Chien-Chih Lin, Chien-Chih Lee, Shih-Hao Lin, Tsung-Hung Lee, Chih Chieh Yeh, Po-Kai Hsiao, Tsai-Yu Huang
  • Patent number: 11672119
    Abstract: A vertical memory device includes a gate electrode structure, channels, a charge storage structure, and a division pattern. The gate electrode includes gate electrodes spaced apart from each other in a first direction. The channel extends through the gate electrode structure, and includes a first portion and a second portion on and contacting the first portion. The second portion includes a lower surface having a width less than that of an upper surface of the first portion. The charge storage structure covers an outer sidewall of the channel. The division pattern extends between the channels in a second direction, and includes a first dummy channel and a first dummy charge storage structure covering a sidewall and a lower surface thereof. The first dummy channel includes the same material as that the channel, and the first dummy charge storage structure includes the same material as the charge storage structure.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: June 6, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jisung Cheon, Jiye Noh, Byunggon Park, Jinsoo Lim
  • Patent number: 11658155
    Abstract: A semiconductor storage device includes a substrate, a plurality of conductive layers arranged in a first direction intersecting a surface of the substrate, and a semiconductor layer extending in the first direction and penetrating the plurality of conductive layers. The plurality of conductive layers includes a first conductive layer and a second conductive layer that are adjacent to each other, a third conductive layer and a fourth conductive layer that are adjacent to each other, and a fifth conductive layer and a sixth conductive layer that are adjacent to each other.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: May 23, 2023
    Assignee: KIOXIA CORPORATION
    Inventors: Masashi Yamaoka, Kazuhiro Tomishige, Naoki Yamamoto
  • Patent number: 11653556
    Abstract: A flex-tolerant structure includes a flexible and foldable substrate and traces on the substrate. Each trace includes a stretch-resistant layer and a metal layer covering the stretch-resistant layer, electrical flow can persist through these layers even if the traces are fractured. A display panel is also disclosed.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: May 16, 2023
    Assignees: Interface Technology (ChengDu) Co, Ltd., INTERFACE OPTOELECTRONICS (SHENZHEN) CO, LTD., GENERAL INTERFACE SOLUTION LIMITED
    Inventor: Po-Ching Lin
  • Patent number: 11631692
    Abstract: A semiconductor memory device includes a peripheral logic structure including peripheral circuits on a substrate, a horizontal semiconductor layer extending along a top surface of the peripheral logic structure, a plurality of stack structures arranged on the horizontal semiconductor layer along a first direction, and a plurality of electrode separation regions in each of the plurality of stack structures to extend in a second direction, which is different from the first direction, wherein each of the plurality of stack structures includes a first electrode pad and a second electrode pad on the first electrode pad, the first electrode pad protruding in the first direction beyond the second electrode pad by a first width, and the first electrode pad protrudes in the second direction beyond the second electrode pad by a second width, which is different from the first width.
    Type: Grant
    Filed: July 22, 2020
    Date of Patent: April 18, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hae Min Lee, Shin Hwan Kang, Jee Hoon Han
  • Patent number: 11631791
    Abstract: A semiconductor light-emitting device includes: a package substrate having a mounting surface on which a first circuit pattern and a second circuit pattern are disposed; a semiconductor LED chip mounted on the mounting surface, having a first surface which faces the mounting surface and on which a first electrode and a second electrode are disposed, a second surface opposing the first surface, and side surfaces located between the first surface and the second surface, the first electrode and the second electrode being connected to the first circuit pattern and the second circuit pattern, respectively; a wavelength conversion film disposed on the second surface; and a side surface inclined portion disposed on the side surfaces of the semiconductor LED chip, providing inclined surfaces, and including a light-transmitting resin containing a wavelength conversion material.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: April 18, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Mi Jeong Yun, Jong Sup Song
  • Patent number: 11631783
    Abstract: In an embodiment a radiation-emitting semiconductor chip includes a semiconductor body having an active region configured to generate radiation, a first contact layer having a first contact area for external electrical contacting the radiation-emitting semiconductor chip and a first contact finger structure connected to the first contact area, a second contact layer having a second contact area for external electrical contacting the radiation-emitting semiconductor chip and a second contact finger structure connected to the second contact area, wherein the first contact finger structure and the second contact finger structure overlap in places in plan view of the radiation-emitting semiconductor chip, a current distribution layer electrically conductively connected to the first contact layer, a connection layer electrically conductively connected to the first contact layer via the current distribution layer and an insulation layer containing a dielectric material, wherein the insulation layer is arranged in p
    Type: Grant
    Filed: September 21, 2021
    Date of Patent: April 18, 2023
    Assignee: OSRAM OLED GMBH
    Inventors: Fabian Kopp, Attila Molnar, Bjoern Muermann, Franz Eberhard
  • Patent number: 11616108
    Abstract: An organic light emitting diode display includes a substrate, an overlap layer on the substrate, a semiconductor layer on the overlap layer, a first gate conductor on the semiconductor layer, a second gate conductor on the first gate conductor, a data conductor on the second gate conductor, a driving transistor on the overlap layer, and an organic light emitting diode connected with the driving transistor. The driving transistor includes, in the semiconductor layer, a first electrode, a second electrode, with a channel therebetween. A gate electrode of the first gate conductor overlaps the channel. The overlap layer overlaps the channel of the driving transistor and at least a portion of the first electrode. A storage line of the second gate conductor receives a driving voltage through a driving voltage line in the data conductor. The overlap layer receives a constant voltage.
    Type: Grant
    Filed: October 23, 2019
    Date of Patent: March 28, 2023
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Joon Woo Bae, Mee Jae Kang, Thanh Tien Nguyen, Kyoung Won Lee, Yong Su Lee, Jae Seob Lee, Gyoo Chul Jo, Myoung Geun Cha