Abstract: A tin trap device may include a housing including a gas inlet port into which gas containing tin flows from a chamber device, an internal space which communicates with the gas inlet port, and a gas exhaust port which exhausts the gas while communicating with the internal space; a multiple tube including a plurality of tube members, arranged on a flow path of the gas traveling to the gas exhaust port from the gas inlet port through the internal space, and having a temperature at which the tin deposited from the gas adheres to the tube member; and a gas travel direction changing member configured to change a travel direction of at least fastest gas of the gas traveling from the gas inlet port to the multiple tube.

Abstract: A light source device of the present disclosure includes a light emitting device, a first optical element having a first area and a second area, a second optical element converting a first light output from the first area into a second light, a diffuser element into which the second light is entered, and a wavelength conversion element into which the first light output from the second area is entered. The light output from the diffuser element and entered into the second optical element is converted into a third light, the third light output from the second optical element and entered into the first area is output from the first area, the light output from the diffuser element and entered into the second area is output from the second area, and a fourth light is output through the first area and the second area.

Abstract: An extreme ultraviolet light generation system includes: a chamber; a target generation unit; a laser system configured to output a first pre-pulse laser beam, a second pre-pulse laser beam, and a main pulse laser beam so that fluence of the first pre-pulse laser beam is 1.5 J/cm2 to 16 J/cm2 inclusive at a position where a target is irradiated with the first pre-pulse laser beam; and a control unit configured to control the laser system so that a first delay time from a timing of irradiation of the target with the first pre-pulse laser beam to a timing of irradiation with the second pre-pulse laser beam and a second delay time from the timing of irradiation of the target with the second pre-pulse laser beam to a timing of irradiation with the main pulse laser beam have a following relation: the first delay time<the second delay time.

Abstract: A light source device of the present disclosure includes a light emitting device that outputs a first light having a first wavelength in a first polarization direction, a first optical element having a first area and a second area, a second optical element into which the first light reflected by the first area is entered, converting the first light into a circularly-polarized second light having the first wavelength, and a diffuser element into which the second light is entered. The second light entering the second optical element is converted into a third light having the first wavelength in a second polarization direction, the third light is transmitted through the first area, the second light is transmitted through the second area, and a fourth light output from the diffuser element and entered into the first area and the second area is transmitted through the first area and the second area.

Abstract: An information processing apparatus determines a plurality of sampling points in a range of a target object's silhouette having different specular reflectances in polarization images in a plurality of azimuths, extracts polarization luminance at the sampling points in question, and derives change in luminance relative to the polarization azimuth, thus acquiring, as a phase angle, the azimuth that provides the highest luminance. Then, the information processing apparatus evaluates a characteristic of the change in phase angle relative to the change in the specular reflectance, thus identifying a subject's surface roughness. Further, the information processing apparatus generates data to be output by performing a process according to the surface roughness and outputs the generated data.

Abstract: Methods and systems that include the generation of a map of modulation values for a spatial light modulator. In which a map representative of a desired curing region is received. Receiving, for each pixel of a spatial light modulator, spatial information representative of an intensity distribution of actinic radiation at a plane of formable material under a template that is guided from the spatial light modulator to the plane of the formable material for curing the formable material under the template. Receiving a dose threshold for the formable material. Generating a map of modulation values for each pixel in the spatial light modulator based on: the dose threshold; the spatial information for all of the pixels; and the map representative of the desired curing region.

Abstract: A wavelength conversion device includes a driver, a substrate and a support. The support is disposed between the driver and the substrate. The support is connected to the substrate and the driver. The driver drives the support and the substrate to rotate about a central axis. The support includes at least one through hole. The invention also provides a projection device including a light source system, the aforementioned wavelength conversion device, a light valve, and a projection lens.

Abstract: A non-contact operating apparatus, for a vehicle, includes a generating unit, a projecting device, a detecting device, and a setting unit. The generating unit is configured to generate and update an image containing an image object. The image object is operable by an occupant present within a vehicle compartment of the vehicle. The projecting device is configured to project the image in a predetermined display region within the vehicle compartment of the vehicle. The detecting device is configured to detect a riding state of the occupant who is present in the vehicle compartment of the vehicle. The setting unit is configured to instruct the projecting device or the generating unit to project the image at a position at which the image object is operable by the occupant who is in the riding state detected by the detecting device.

Abstract: The present invention is directed to adjusting a light intensity distribution on an irradiation target surface into a desired distribution with use of a light source apparatus including a light emitting diode (LED) array. A light source apparatus includes an LED array including a plurality of LED chips, and a controller configured to control the plurality of LED chips. A light intensity distribution acquired from each of the plurality of LED chips is superimposed on a light intensity distribution oriented in a different direction from each other on a predetermined surface. The controller controls an output of at least one of the plurality of LED chips, thereby changing the light intensity distribution that the plurality of LED chips forms on the predetermined surface.

Abstract: A target supply device may include a first container configured to contain a target substance, a second container configured to contain the target substance supplied from the first container, a first valve disposed between the first container and the second container, a first pipe connected to the second container and configured to supply pressurized gas to the second container, a third container configured to contain the target substance supplied from the second container, a second valve disposed between the second container and the third container, a second pipe connected to the third container and configured to supply pressurized gas to the third container, and a nozzle configured to output the target substance supplied from the third container.

Abstract: In accordance with some embodiments, a method of controlling an extreme ultraviolet (EUV) radiation in lithography system is provided. The method includes generating a plurality of target droplets. The method also includes generating a pre-pulse and a main pulse from an excitation laser module to generate EUV light and reflecting the EUV light by a collector mirror. The method further includes measuring a separation between a pre-pulse and a main pulse. Moreover, the method includes determining whether the separation between the pre-pulse and the main pulse in the y-axis is changed, if not adjusting a configurable parameter of the excitation laser module to set the variation in the energy of the EUV light within an acceptable range.

Abstract: A lighting system and a projection device with enhanced functionality includes a light source in the lighting system for emitting first light, a first wavelength selection structure, and a second wavelength selection structure. The first wavelength selection structure includes a wavelength selection portion for transmitting the first light in a first target wavelength and a first light-transmitting portion for transmitting the first light. The light emitted then from the first wavelength selection structure is defined as second light. The second wavelength selection structure receives the second light and applies a supplementary portion for transmitting the second light in a second target wavelength and a second light-transmitting portion for transmitting the light. The light emitted from the second wavelength selection structure is adjustable as to colors, as to low or high color saturation, and as to low or high brightness of the projection image.

Abstract: The present disclosure provides a time-of-flight camera, comprising a light-emitting module and a light-receiving module. The light-emitting module comprises a light source component, a light-reflecting component, and a light-diffusing component. The light source component emits a first light in a first direction. The light-reflecting component and the light-diffusing component are disposed on the light path of the first light. A second light formed by the first light passes through the light-reflecting component and the light-diffusing component. The second light travels toward a second direction to an object to be measured. The object to be measured reflects the second light. The first direction is intersecting with the second direction. The light-receiving module receives the reflected second light and performs the function of sensing.

Abstract: A display apparatus includes an image forming device and a light guide. The light guide includes an incident portion and an emission portion including a plurality of mirrors. In the light guide, the total reflection surface is disposed to be inclined with respect to a virtual plane perpendicular to a visual axis, and the mirrors are disposed to be inclined with respect to the total reflection surface. The mirror angle is set such that the light guide angle, the mirror angle, the light angle, the limit incidence angle, and the refractive index of the light guide satisfy the predetermined relationship.

Abstract: A method for operating an optical apparatus (100A, 100B, 200), having a structural element (201) which is arranged in a residual gas atmosphere (RGA) of the apparatus and which is formed at least partly from an element material subjected to a chemical reduction process and/or an etching process with a plasma component (PK) present in the residual gas atmosphere includes: feeding (S2) a gas component (GK) that at least partly suppresses the reduction process depending on a detected suppression extent (UM) for a suppression of the etching process and/or reduction process by the suppressing gas component in the residual gas atmosphere; and detecting (S1) the suppression extent with a sensor unit (208) arranged in the residual gas atmosphere. The sensor unit includes a sensor material section (211) composed of a sensor material and exhibiting a sensor section property that is measurable under the influence of the suppressing gas component.

Abstract: A laser illumination device and a projection system including the same. The laser illumination device includes a laser source, a light combining assembly, a micro-lens assembly, and a plurality of cylindrical lens assemblies; the plurality of cylindrical lens assemblies are provided in a light transmission path of the laser source; the micro-lens assembly is mounted at one side of the light combining assembly; each cylindrical lens assembly includes a first cylindrical lens array and a second cylindrical lens array; and the first cylindrical lens array and the second cylindrical lens array form a preset angle.

Abstract: A dual mode virtual reality (VR) and augmented reality (AR) headset includes a head-attachment, a main frame coupled to the head-attachment, and a pivot frame. The pivot frame includes a holder configured to accommodate an electronic device having a display screen, and a reflective screen configured to reflect content shown on the display screen. The pivot frame pivotally coupled to the main frame. In the first pivot frame position, the reflective screen at least partially intersects a field of view (?) of a user wearing the headset, and in the second pivot frame position the display screen at least partially intersects the ? when the electronic device is accommodated in the holder.

Abstract: A target supply device may include a first container configured to contain a solid target substance; a second container including a first connection port connected to the first container, a second connection port connected to a first pressurized gas supply line, and a third connection port connected to a target substance lead-out path; a moving body including a first recessed portion configured to contain the solid target substance supplied from the first container and move the first recessed portion inside the second container to cause an opening of the first recessed portion to be overlapped sequentially with the first to third connection ports; a third container connected to both a second pressurized gas supply line and the target substance lead-out path and configured to melt the solid target substance supplied from the third connection port; and a nozzle configured to output the melted target substance supplied from the third container.

Abstract: A projector includes a light source, an optical element, a wheel-type optical assembly, a light valve, and a projection lens. The wheel-type optical assembly includes a frame, a driving unit, a rotating wheel, an optical sensing element, and a light shielding structure. The driving unit is arranged on the frame and connected to the rotating wheel. The driving unit drives the rotating wheel to rotate about a rotation axis. The optical sensing element arranged on the frame senses a rotation speed of the rotating wheel. The light shielding structure connected to the frame surrounds the optical sensing element. An orthographic projection of the light shielding structure on a reference plane partially overlaps an orthographic projection of the rotation axis on the reference plane. A normal line of the reference plane is parallel to a shortest connection line between an optical axis of the optical element and the rotation axis.

Abstract: The present disclosure provides a mobile terminal and a system for controlling a laser projector. The system includes a first drive circuit, a second drive circuit, a microprocessor coupled to the first drive circuit, and an application processor. The first drive circuit is configured to output an electrical signal to the laser projector. The second drive circuit is configured to supply power to the first drive circuit. The application processor is configured to, read a preset signal from the microprocessor, and power off the second drive circuit to power off the first drive circuit and the laser projector, or send a reset signal for restarting the microprocessor to the microprocessor, in response to that the application processor cannot read the preset signal.