Patents Examined by Molly K Reida
  • Patent number: 11856749
    Abstract: Embodiments of the present application provide a memory and a method for forming the memory. The method includes: providing a substrate, and forming a bit line structure on the substrate and a first protective layer; forming a dielectric layer with which a gap between the adjacent bit line structures is filled; forming a second protective layer to cover a top surface of the first protective layer and a top surface of the dielectric layer; removing part of the dielectric layer and part of the second protective layer to form a capacitor contact hole, and exposing the first protective layer between two adjacent ones of the capacitor contact holes; forming a conductive layer with which the capacitor contact hole is filled and the top surface of the exposed first protective layer is covered, and etching part of the conductive layer to form a separate capacitor contact structure.
    Type: Grant
    Filed: November 18, 2021
    Date of Patent: December 26, 2023
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Ran Li
  • Patent number: 11842932
    Abstract: A method includes providing a substrate having a channel region, forming a gate stack layer over the channel region, forming a patterned hard mask over the gate stack layer, etching a top portion of the gate stack layer through openings in the patterned hard mask with a first etchant, etching a middle portion and a bottom portion of the gate stack layer with a second etchant that includes a passivating gas. A gate stack is formed with a passivation layer deposited on sidewalls of the gate stack. The method also includes etching the gate stack with a third etchant, thereby removing a bottom portion of the passivation layer and recessing a bottom portion of the gate stack.
    Type: Grant
    Filed: May 9, 2022
    Date of Patent: December 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Chang-Yin Chen, Che-Cheng Chang, Chih-Han Lin
  • Patent number: 11837683
    Abstract: Exemplary processing methods of forming a semiconductor structure may include forming a nucleation layer on a semiconductor substrate. The methods may further include forming first, second, and third, gallium-and-nitrogen-containing regions on the nucleation layer. The first gallium-and-nitrogen-containing region may be porosified, without porosifying the second and third gallium-and-nitrogen containing regions. The methods may still further include forming a first active region on the porosified first gallium-and-nitrogen-containing region, and a second active region on the unporosified second gallium-and-nitrogen-containing region. The methods may yet also include forming a third active region on the unporosified third gallium-and-nitrogen-containing region.
    Type: Grant
    Filed: March 10, 2021
    Date of Patent: December 5, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Michael Chudzik, Michel Khoury, Max Batres
  • Patent number: 11832462
    Abstract: A photosensitive device including a microlens substrate, a photosensitive element substrate, and an optical glue is provided. The microlens substrate includes a first substrate and microlenses. The first substrate has a first side and a second side opposite to the first side. The microlenses are located on the first side of the first substrate. The photosensitive element substrate includes a second substrate, active components, first electrodes, a second electrode, and an organic photosensitive material layer. The second substrate has a third side and a fourth side opposite to the third side. The second side of the first substrate faces the third side of the second substrate. The active components are located on the fourth side of the second substrate. The first electrodes are respectively electrically connected to the active components. The organic photosensitive material layer is located between the first electrodes and the second electrode.
    Type: Grant
    Filed: June 18, 2021
    Date of Patent: November 28, 2023
    Assignee: Au Optronics Corporation
    Inventors: Yi-Huan Liao, Chun Chang, Hsin-Hsuan Lee
  • Patent number: 11830774
    Abstract: Embodiments of the present invention are directed to fabrication methods and resulting structures that provide buried contacts in the fin-to-fin space of vertical transport field effect transistors (VFETs) that connect the bottom S/D of the transistors to a buried power rail. In a non-limiting embodiment of the invention, a buried power rail is encapsulated in a buried oxide layer of a first wafer. First and second semiconductor fins are formed on a second wafer. The first wafer to the second wafer and a surface of the buried power rail in a fin-to-fin space is exposed. A buried via is formed on the exposed surface of the buried power rail. The buried via electrically couples the buried power rail to a bottom source or drain region of the first semiconductor fin.
    Type: Grant
    Filed: September 23, 2021
    Date of Patent: November 28, 2023
    Assignee: International Business Machines Corporation
    Inventors: Junli Wang, Brent Anderson
  • Patent number: 11832538
    Abstract: Structures for a resistive memory element and methods of forming a structure for a resistive memory element. A resistive memory element has a first electrode, a second electrode partially embedded in the first electrode, a third electrode, and a switching layer positioned between the first electrode and the third electrode. The second electrode includes a tip positioned in the first electrode adjacent to the switching layer and a sidewall that tapers to the tip.
    Type: Grant
    Filed: September 7, 2021
    Date of Patent: November 28, 2023
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Curtis Chun-I Hsieh, Juan Boon Tan, Calvin Lee
  • Patent number: 11818880
    Abstract: A semiconductor structure includes a substrate having first and second bottom electrodes disposed thereon. The first bottom electrode includes a first sidewall and a second sidewall. An upper portion of the first sidewall comprises a slope profile. The second bottom electrode includes a third sidewall and a fourth sidewall. The second sidewall is opposite to the third sidewall. An upper supporting layer extends laterally between and the first bottom electrode and the second bottom electrode and directly contacts the second sidewall and the third sidewall. A lower end of the slope profile is not lower than a lower surface of the upper supporting layer. A cavity extends laterally between the substrate and the upper supporting layer. A capacitor dielectric layer is formed along the first bottom electrode and the second bottom electrode. A conductive material is formed on the capacitor dielectric layer and fills the cavity.
    Type: Grant
    Filed: May 11, 2022
    Date of Patent: November 14, 2023
    Assignee: Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Yu-Cheng Tung, Janbo Zhang
  • Patent number: 11818875
    Abstract: A method for forming a memory includes: providing a substrate, a plurality of discrete bit line structures being located on the substrate, and an area surrounded by the adjacent bit line structures and the substrate and having a central axis; forming, on the substrate, a first conductive film filling an area between the adjacent bit line structures; etching the first conductive film by a first etching process to form a first conductive layer; forming a second conductive film on the top surface of the first conductive layer; and etching the second conductive film and the first conductive layer by a second etching process, the remaining second conductive film and the first conductive layer forming a capacitive contact window.
    Type: Grant
    Filed: April 1, 2021
    Date of Patent: November 14, 2023
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Xiao Zhu, Yi-Hsiang Chen, Lihui Yang, Hung-I Lin, Yun-Chieh Mi, Jinfeng Gong
  • Patent number: 11804567
    Abstract: Provided are a III-nitride semiconductor light-emitting device that can reduce change in the light output power with time and has more excellent light output power, and a method of producing the same. A III-nitride semiconductor light-emitting device 100 has an emission wavelength of 200 nm to 350 nm, and includes an n-type layer 30, a light emitting layer 40, an electron blocking layer 60, and a p-type contact layer 70 in this order. The electron blocking layer 60 has a co-doped region layer 60c, the p-type contact layer 60 is made of p-type AlxGa1-xN (0?x?0.1), and the p-type contact layer 60 has a thickness of 300 nm or more.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: October 31, 2023
    Assignee: DOWA Electronics Materials Co., Ltd.
    Inventor: Yasuhiro Watanabe
  • Patent number: 11800700
    Abstract: Embodiments of the present disclosure provide a memory and its manufacturing method. The memory includes: a substrate with a plurality of mutually discrete bitlines, the bitline including a bitline conductive layer and a bitline insulating layer which are stacked in sequence; and an insulating layer and capacitor contact holes, the insulating layer being located on sidewalls of the bitline conductive layers and sidewalls of the bitline insulating layers, the capacitor contact holes being located between adjacent ones of the bitline conductive layers, sidewalls of the capacitor contact holes exposing the insulating layer, an opening size of the capacitor contact hole gradually increasing in a direction along the substrate and towards the insulating layer.
    Type: Grant
    Filed: September 16, 2021
    Date of Patent: October 24, 2023
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Jingwen Lu
  • Patent number: 11798977
    Abstract: A light emitting device includes a substrate, a plurality of light sources disposed on the substrate, and a plurality of light reflecting members disposed on the substrate. The light reflecting members respectively include wall parts each surrounding each of the light sources individually or two or more of the light sources in groups. Two adjacent ones of the light reflecting members are joined to each other such that outer surfaces of the wall parts of the two adjacent ones of the light reflecting members are bonded to each other via an adhesive agent.
    Type: Grant
    Filed: July 28, 2022
    Date of Patent: October 24, 2023
    Assignee: NICHIA CORPORATION
    Inventors: Shimpei Bando, Koki Shibai
  • Patent number: 11785853
    Abstract: Stack assembly for radio-frequency applications. In some embodiments, a radio-frequency (RF) module can include a packaging substrate configured to receive a plurality of components, and an electro-acoustic device mounted on the packaging substrate. The RF module can further include a die having an integrated circuit and mounted over the electro-acoustic device to form a stack assembly. The electro-acoustic device can be, for example, a filter device such as a surface acoustic wave filter. The die can be, for example an amplifier die such as a low-noise amplifier implemented on a silicon die.
    Type: Grant
    Filed: June 13, 2021
    Date of Patent: October 10, 2023
    Assignee: Skyworks Solutions, Inc.
    Inventors: Hardik Bhupendra Modi, Adarsh Karan Jaiswal, Anil K. Agarwal, Engin Ibrahim Pehlivanoglu
  • Patent number: 11778809
    Abstract: A method of forming a capacitor structure includes following operations. A first electrode is formed. A hafnium-zirconium oxide (HZO) layer is formed over the first electrode under a first temperature. An interface dielectric layer is formed over the HZO layer under a second temperature greater than the first temperature. A second electrode is formed over the interface dielectric layer. The HZO layer and the interface dielectric layer are annealed.
    Type: Grant
    Filed: April 20, 2022
    Date of Patent: October 3, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Jyun-Hua Yang, Kai Hung Lin
  • Patent number: 11778820
    Abstract: A semiconductor storage device according to an embodiment includes a stacked body in which a conductive layer and an insulating layer are stacked alternately in a first direction, a plurality of columnar bodies that extend in the first direction inside the stacked body and each include a semiconductor body, a plurality of charge storage films that are disposed between at least one of a plurality of the conductive layers and each of a plurality of the semiconductor bodies, a plurality of bit lines that extend above the stacked body in a second direction intersecting the first direction, an interlayer insulating layer that is between the stacked body and the bit lines, and contacts each of which penetrates the interlayer insulating layer and is electrically connected to one of the plurality of bit lines, in which the contacts have a first contact that is connected to one of the columnar bodies and a second contact that is connected to a plurality of the columnar bodies.
    Type: Grant
    Filed: September 1, 2020
    Date of Patent: October 3, 2023
    Assignee: Kioxia Corporation
    Inventor: Go Oike
  • Patent number: 11778804
    Abstract: Embodiments disclose a capacitor array structure and a method for fabricating a capacitor array structure. The method includes: after forming a first capacitor hole, providing a bonded wafer including a second substrate, a second supporting layer and a second sacrificial layer stacked in sequence, and bonding the bonded wafer to a stacked structure, wherein a surface of the second sacrificial layer away from the second supporting layer is a bonding surface; forming a second capacitor hole, the second capacitor hole penetrating into the bonded wafer at least along a thickness direction to expose the first capacitor hole, such that the first capacitor hole is connected with the second capacitor hole.
    Type: Grant
    Filed: September 14, 2021
    Date of Patent: October 3, 2023
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Shuai Guo
  • Patent number: 11769818
    Abstract: The present disclosure describes a method includes forming a fin structure including a fin base portion and a stacked fin portion on a substrate. The stacked fin portion includes a first semiconductor layer on the fin base portion, a second semiconductor layer above the first semiconductor layer, and a sacrificial semiconductor layer between the first and second semiconductor layers. The method further includes replacing the sacrificial semiconductor layer with a negative capacitance (NC) layer and forming gate electrodes around the NC layer, the first semiconductor layer, and the second semiconductor layer. The NC layer includes an NC dielectric material.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: September 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chansyun David Yang, Chan-Lon Yang, Keh-Jeng Chang
  • Patent number: 11756836
    Abstract: Aspects of the present disclosure provide a method for forming a semiconductor structure having separated vertical channel structures. The method can include forming a layer stack on a substrate, the layer stack including alternating metal layers and dielectric layers. The method can further include forming vertically stacked lower and upper vertical channel structures vertically extending through the layer stack, the lower and upper vertical channel structures being separated by a sacrificial layer. The method can further include forming source, drain and gate connections to the lower and upper vertical channel structures, the source, drain and gate connections extending horizontally from the lower and upper vertical channel structures and then vertically to a location above the upper vertical channel structure.
    Type: Grant
    Filed: September 21, 2021
    Date of Patent: September 12, 2023
    Assignee: Tokyo Electron Limited
    Inventors: H. Jim Fulford, Mark I. Gardner, Partha Mukhopadhyay
  • Patent number: 11751381
    Abstract: A semiconductor device includes: a bit line structure formed over a substrate; a storage node contact plug spaced apart from the bit line structure; and a nitride spacer positioned between the bit line structure and the storage node contact plug, wherein the nitride spacer has a higher silicon content in a portion adjacent to the storage node contact plug than in a portion adjacent to the bit line structure.
    Type: Grant
    Filed: September 17, 2021
    Date of Patent: September 5, 2023
    Assignee: SK hynix Inc.
    Inventor: Seung Mi Lee
  • Patent number: 11751380
    Abstract: A semiconductor memory structure includes a semiconductor substrate, a bit line disposed on the semiconductor substrate, and a capacitor contact disposed on the side of the bit line. The capacitor contact includes a semiconductor plug disposed on the semiconductor substrate, a metal plug disposed on the semiconductor plug, a metal silicide liner extending along the sidewalls and bottom of the metal plug, and a nitride layer disposed on the metal silicide liner. The top surface of the metal silicide liner is lower than the top surface of the metal plug. The nitride layer surrounds the top portion of the metal plug.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: September 5, 2023
    Assignee: WINBOND ELECTRONICS CORP.
    Inventors: Hao-Chuan Chang, Jiun-Sheng Yang
  • Patent number: 11744078
    Abstract: A semiconductor device includes a substrate having a first region and a second region, gate electrodes stacked and spaced apart from each other in a first direction, perpendicular to an upper surface of the substrate in the first region and extending in different lengths along a second direction, perpendicular to the first direction in the second region, first separation regions penetrating the gate electrodes in the first and second regions, extending in the second direction, and spaced apart from each other in a third direction, perpendicular to the first and second directions, second separation regions penetrating the gate electrodes in the second region and spaced apart from each other in the second direction between the separation regions, and a first vertical structure penetrating the gate electrodes in the second region and closest to the first region, wherein a width of the second separation regions in the third direction is greater than a width of the first vertical structure, a first end point of th
    Type: Grant
    Filed: October 30, 2020
    Date of Patent: August 29, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dawoon Jeong, Youngwoo Kim, Jaesung Kim, Hyoungryeol In