Abstract: A semiconductor device comprising first and second unit cells, the first unit cell comprising a first fin pattern extending in a first direction, a first gate pattern extending in a second direction, and a first contact disposed on a side of the first gate pattern contacting the first fin pattern, the second unit cell comprising a second fin pattern extending in the first direction, a second gate pattern extending in the second direction, and a second contact disposed on a side of the second gate pattern contacting the second fin pattern, wherein the first and second gate patterns are spaced apart and lie on a first straight line extending in the second direction, the first and second contacts are spaced apart and lie on a second straight line extending in the second direction, and a first middle contact is disposed on and connects the first and second contacts.
Type:
Grant
Filed:
April 1, 2020
Date of Patent:
January 17, 2023
Assignee:
SAMSUNG ELECTRONICS CO., LTD.
Inventors:
Jeong-Lim Kim, Myung Soo Noh, No Young Chung, Seok Yun Jeong, Young Han Kim
Abstract: A manufacturing process of an element chip comprises a preparing step for preparing a substrate having first and second sides opposed to each other, the substrate containing a semiconductor layer, a wiring layer and a resin layer formed on the first side, and the substrate including a plurality of dicing regions and element regions defined by the dicing regions. Also, the manufacturing process comprises a laser grooving step for irradiating a laser beam onto the dicing regions to form grooves so as to expose the semiconductor layer along the dicing regions. Further, the manufacturing process comprises a dicing step for plasma-etching the semiconductor layer along the dicing regions through the second side to divide the substrate into a plurality of the element chips. The laser grooving step includes a melting step for melting a surface of the semiconductor layer exposed along the dicing regions.
Abstract: A metal oxide semiconductor field effect transistor preferably fabricated with a silicon-on-insulator process has a first semiconductor region and a second semiconductor region in a spaced relationship thereto A body structure is defined by a channel segment between the first semiconductor region and the second semiconductor region, and a first extension segment structurally contiguous with the channel segment. A shallow trench isolation structure surrounds the first semiconductor region, the second semiconductor region, and the body structure, with a first extension interface being defined between the shallow trench isolation structure and the first extension segment of the body structure to reduce leakage current flowing from the second semiconductor region to the first semiconductor region through a parasitic path of the body structure.
Type:
Grant
Filed:
March 1, 2021
Date of Patent:
January 10, 2023
Assignee:
SKYWORKS SOLUTIONS, INC.
Inventors:
Oleksandr Gorbachov, Lisette L. Zhang, Lothar Musiol
Abstract: An array, such as an MRAM (Magnetic Random Access Memory) array formed of a multiplicity of layered thin film devices, such as MTJ (Magnetic Tunnel Junction) devices, can be simultaneously formed in a multiplicity of horizontal widths in the 60 nm range while all having top electrodes with substantially equal thicknesses and coplanar upper surfaces. This allows such a multiplicity of devices to be electrically connected by a common conductor without the possibility of electrical opens and with a resulting high yield.
Abstract: Provided is a read-only memory (ROM) device. The ROM device comprises a substrate that has a plurality of vertical transport field effect transistors (VFETs). The ROM device further comprises an un-activated semiconductor layer provided on each VFET. The un-activated semiconductor layer includes implanted dopants that have not been substantially activated.
Type:
Grant
Filed:
October 6, 2020
Date of Patent:
January 3, 2023
Assignee:
International Business Machines Corporation
Abstract: A method of processing and passivating an implanted workpiece is disclosed, wherein, after passivation, the fugitive emissions of the workpiece are reduced to acceptably low levels. This may be especially beneficial when phosphorus, arsine, germane or another toxic species is the dopant being implanted into the workpiece. In one embodiment, a sputtering process is performed after the implantation process. This sputtering process is used to sputter the dopant at the surface of the workpiece, effectively lowering the dopant concentration at the top surface of the workpiece. In another embodiment, a chemical etching process is performed to lower the dopant concentration at the top surface. After this sputtering or chemical etching process, a traditional passivation process can be performed.
Type:
Grant
Filed:
August 19, 2021
Date of Patent:
January 3, 2023
Assignee:
Applied Materials, Inc.
Inventors:
Cuiyang Wang, Timothy J. Miller, Jun Seok Lee, Il-Woong Koo, Deven Raj Mittal, Peter G. Ryan, Jr.
Abstract: The disclosure discloses an array substrate, a method for manufacturing the same, a display panel and a display device. The array substrate includes a base substrate; a plurality of data lines and a plurality of dummy leads, wherein the plurality of data lines and the plurality of dummy leads are in the same layer on the base substrate, and the plurality of data lines and the plurality of dummy leads extend along the first direction; and at least one dummy lead includes a plurality of wires which extend in the first direction and are disconnected with one another.
Abstract: An electroluminescent device comprising a first electrode and a second electrode facing each other, an emission layer disposed between the first electrode and the second electrode and including at least two light emitting particles, a hole transport layer disposed between the first electrode and the emission layer, and an electron transport layer disposed between the emission layer and the second electrode, wherein the electron transport layer comprises an inorganic layer disposed on the emission layer, the inorganic layer comprising a plurality of inorganic nanoparticles; and an organic layer directly disposed on at least a portion of the inorganic layer on a side opposite the emission layer, wherein a work function of the organic layer is greater than a work function of the inorganic layer.
Type:
Grant
Filed:
December 23, 2020
Date of Patent:
December 27, 2022
Assignee:
SAMSUNG ELECTRONICS CO., LTD.
Inventors:
Tae Ho Kim, Sung Woo Kim, Eun Joo Jang, Dae Young Chung
Abstract: A photodetector device is provided that includes a ROIC having a top surface with a plurality of electrically conductive first electrodes within a pattern of surface areas on the top surface each surface area having a border, and an electrically conductive electrode grid having a portion on the border of each of the surface areas; and a photodetector film overlying the surface area. The electrode grid can be configured to surround each surface area to define the borders of the surface areas as pixels. The photodetector film can be a colloidal quantum dot film. The ROIC has circuit elements signal-connected to the plurality of first electrodes. Methods for forming the photodetector device include photolithography and deposition methods.
Type:
Grant
Filed:
December 23, 2019
Date of Patent:
December 13, 2022
Assignee:
Sivananthan Laboratories, Inc.
Inventors:
Richard Edward Pimpinella, Anthony Joseph Ciani, Christoph H. Grein
Abstract: A semiconductor device includes: a metal-oxide semiconductor (MOS) transistor on a substrate; a deep trench isolation structure in the substrate and around the MOS transistor; and a trap rich isolation structure in the substrate and surrounding the deep trench isolation structure. Preferably, the deep trench isolation structure includes a liner in the substrate and an insulating layer on the liner, in which the top surfaces of the liner and the insulating layer are coplanar. The trap rich isolation structure is made of undoped polysilicon and the trap rich isolation structure includes a ring surrounding the deep trench isolation structure according to a top view.
Type:
Grant
Filed:
June 6, 2021
Date of Patent:
December 6, 2022
Assignee:
UNITED MICROELECTRONICS CORP.
Inventors:
Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang
Abstract: A system includes a pixel including a diffusion layer in contact with an absorption layer. The diffusion layer and absorption layer are in contact with one another along an interface that is inside of a mesa. A trench is defined in the absorption layer surrounding the mesa. An overflow contact is seated in the trench.
Type:
Grant
Filed:
February 7, 2020
Date of Patent:
November 8, 2022
Assignee:
Sensors Unlimited, Inc.
Inventors:
Wei Huang, Douglas Stewart Malchow, Michael J. Evans, John Liobe, Wei Zhang
Abstract: Disclosed is an electroluminescence display having a structure in which the current leakage between neighboring pixels is prevented. The electroluminescence display comprises a first pixel defined for representing a first color on a substrate, a second pixel defined for representing a second color on the substrate, a first anode electrode disposed at the first pixel, a second anode electrode disposed at the second pixel, and a depletion electrode forming a depletion area between the first anode electrode and the second anode electrode.
Type:
Grant
Filed:
April 30, 2019
Date of Patent:
November 1, 2022
Assignee:
LG Display Co., Ltd.
Inventors:
JuhnSuk Yoo, HoYoung Lee, Neunghee Lee, Kyuri Kim
Abstract: A semiconductor device including: a silicon layer including a single crystal silicon layer and a plurality of first transistors; a first metal layer disposed over the first silicon layer; a second metal layer disposed over the first metal layer; a third metal layer disposed over the second metal layer; a second level including a plurality of second transistors, the second level disposed over the third metal layer; a fourth metal layer disposed over the second level; a fifth metal layer disposed over the fourth metal layer; and a via disposed through the second level and has a diameter of less than 450 nm, where the second level thickness is less than four microns, where the fifth metal layer includes a global power distribution grid, and where a typical thickness of the fifth metal layer is greater than a typical thickness of the second metal layer by at least 50%.
Abstract: Semiconductor devices may include a substrate and a backside-biased semiconductor die supported above the substrate. A backside surface of the backside-biased semiconductor die may be spaced from the substrate. The backside surface may be electrically connected to ground by wire bonds extending to the substrate. Methods of making semiconductor devices may involve supporting a backside-biased semiconductor die supported above a substrate, a backside surface of the backside-biased semiconductor die being spaced from the substrate. The backside surface may be electrically connected to ground by wire bonds extending to the substrate. Systems may include a sensor device, a nontransitory memory device, and at least one semiconductor device operatively connected thereto. The at least one semiconductor device may include a substrate and a backside-biased semiconductor die supported above the substrate.
Type:
Grant
Filed:
August 5, 2020
Date of Patent:
October 18, 2022
Assignee:
Microchip Technology Incorporated
Inventors:
Behrooz Mehr, Fernando Chen, Emmanuel de los Santos, Alex Kungo
Abstract: A semiconductor device includes: a first gate line and a second gate line extending only along a first direction, a third gate line and a fourth gate line extending along the first direction and between the first gate line and the second gate line, a fifth gate line and a sixth gate line extending along a second direction between the first gate line and the second gate line and intersecting the third gate line and the fourth gate line, and first contact plugs on the first gate line. Preferably, the first direction is perpendicular to the second direction and the first gate line and the second gate line are directly connected to the fifth gate line and the sixth gate line.
Type:
Grant
Filed:
January 5, 2020
Date of Patent:
October 18, 2022
Assignee:
UNITED MICROELECTRONICS CORP.
Inventors:
Purakh Raj Verma, Chia-Huei Lin, Kuo-Yuh Yang
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to photodetectors with buried airgap mirror reflectors. The structure includes a photodetector and at least one airgap in a substrate under the photodetector.
Type:
Grant
Filed:
April 7, 2020
Date of Patent:
October 18, 2022
Assignee:
GLOBALFOUNDRIES U.S. INC.
Inventors:
Siva P. Adusumilli, Vibhor Jain, Alvin J. Joseph, Steven M. Shank
Abstract: A method for forming a transfer gate includes (i) forming a dielectric pillar on a surface of a semiconductor substrate and (ii) growing an epitaxial layer on the semiconductor substrate and surrounding the dielectric pillar. The dielectric pillar has a pillar height that exceeds an epitaxial-layer height of the epitaxial layer relative to the surface. The method also includes removing the dielectric pillar to yield a trench in the epitaxial layer. A pixel includes a doped semiconductor substrate having a front surface opposite a back surface. The front surface forms a trench extending a depth zT with respect to the front surface within the doped semiconductor substrate along a direction z perpendicular to the front surface and the back surface. The pixel has a dopant concentration profile, a derivative thereof with respect to direction z being discontinuous at depth zT.
Abstract: A method for forming a chip package structure is provided. The method includes disposing a chip over a substrate. The method includes forming a heat-spreading wall structure over the substrate. The heat-spreading wall structure is adjacent to the chip, and there is a first gap between the chip and the heat-spreading wall structure. The method includes forming a first heat conductive layer in the first gap. The method includes forming a second heat conductive layer over the chip. The method includes disposing a heat-spreading lid over the substrate to cover the heat-spreading wall structure, the first heat conductive layer, the second heat conductive layer, and the chip. The heat-spreading lid is bonded to the substrate, the heat-spreading wall structure, the first heat conductive layer, and the second heat conductive layer.
Abstract: An embodiment of a method of forming a programming element using a III/V semiconductor material may include forming one or more recesses in a first portion of a gate material and forming a first conductor on the one or more recesses. In an embodiment, the method may include configuring a programming circuit to form a voltage across the one or more recesses that is greater than a breakdown voltage of the gate material underlying the one or more recesses.
Abstract: A method of forming a semiconductor device includes forming a gate structure over first and second fins over a substrate; forming an interlayer dielectric layer surrounding first and second fins; etching a first trench in the interlayer dielectric layer between the first and second fins uncovered by the gate structure; forming a helmet layer lining the first trench; and forming a dielectric feature in the first trench.