Patents Examined by Omar Nixon
  • Patent number: 10156438
    Abstract: An image acquisition unit for obtaining data to generate at least one three-dimensional representation of at least one underwater structure is disclosed. The image acquisition unit includes a unit body, a plurality of cameras, a first laser light device, and a second laser light device. The first laser light device can operate based on a first illumination setting. The second laser light device can operate based a second illumination setting. The first and second cameras can be configured to capture light during the first illumination setting and generate a first set of data representative of the first laser projecting on the at least one underwater structure at a predetermined scan rate. The third and fourth cameras can be configured to capture light during the second illumination setting and generate a second set of data representative of the second laser projecting on the at least one underwater structure at the predetermined scan rate.
    Type: Grant
    Filed: August 17, 2015
    Date of Patent: December 18, 2018
    Assignee: Fugro N.V.
    Inventors: Olaf Booij, Evert Schippers, Hendrik Wouters, Fatemeh Karimi Nejadasl, Pawel Michalak
  • Patent number: 10151986
    Abstract: Methods and systems for estimating values of parameters of interest of actual device structures based on optical measurements of nearby metrology targets are presented herein. High throughput, inline metrology techniques are employed to measure metrology targets located near actual device structures. Measurement data collected from the metrology targets is provided to a trained signal response metrology (SRM) model. The trained SRM model estimates the value of one or more parameters of interest of the actual device structure based on the measurements of the metrology target. The SRM model is trained to establish a functional relationship between actual device parameters measured by a reference metrology system and corresponding optical measurements of at least one nearby metrology target. In a further aspect, the trained SRM is employed to determine corrections of process parameters to bring measured device parameter values within specification.
    Type: Grant
    Filed: July 2, 2015
    Date of Patent: December 11, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Andrei V. Shchegrov, Thaddeus Gerard Dziura, Stilian Ivanov Pandev, Leonid Poslavsky
  • Patent number: 10151667
    Abstract: In the field of monitoring the aging of parts subjected to a rotary movement and, more precisely, of monitoring the deformation to which a peripheral surface of a rotating part is possibly subject, an improved method is provided. The method includes: a step of emitting a light signal at a first end of an optical fiber at least one section of which runs between two points of the surface of the part; a step of measuring a characteristic of the light signal received at a second end of the optical fiber, the characteristic varying as a function of the length of the optical fiber between its ends; and a step of comparing the characteristic of the light signal to a reference signal.
    Type: Grant
    Filed: March 21, 2013
    Date of Patent: December 11, 2018
    Assignee: OSMOS SA
    Inventor: Bernard Hodac
  • Patent number: 10151910
    Abstract: An observation apparatus according to the present technology includes a microscope optical system, an imaging unit, a spectroscopic unit, and a detection unit. The imaging unit captures an image via the microscope optical system. The spectroscopic unit acquires an absorption spectrum or a Raman spectrum in an ultraviolet, visible, or infrared area via the microscope optical system. The detection unit detect an observation target object in an observed sample by using the absorption spectrum or the Raman spectrum.
    Type: Grant
    Filed: January 21, 2013
    Date of Patent: December 11, 2018
    Inventors: Suguru Dowaki, Eriko Matsui, Hirokazu Tatsuta, Masanobu Tamai, Kazuhiro Nakagawa
  • Patent number: 10145672
    Abstract: A method and apparatus in which retroreflective materials and surfaces are used for determining the position, orientation and scale of work pieces in order to accurately place process beams thereon for the purpose of surface patterning or treatment.
    Type: Grant
    Filed: January 24, 2017
    Date of Patent: December 4, 2018
    Assignee: Lithoptek LLC
    Inventors: Mark Schattenburg, Rudolf Hendel, Paul Glenn, John Glenn
  • Patent number: 10132760
    Abstract: Disclosed are methods and apparatus for optimizing a mode of an inspection tool. A first image or signal for each of a plurality of first apertures of the inspection tool is obtained, and each first image or signal pertains to a defect area. For each of a plurality of combinations of the first apertures and their first images or signals, a composite image or signal is obtained. Each composite image or signal is analyzed to determine an optimum one of the combinations of the first apertures based on a defect detection characteristic of each composite image. In one aspect, determining an optimum one of the combinations of the first apertures includes selecting a set of one or more individual apertures that result in the highest signal to noise ratio for the defect area, and the method includes setting the optimum combination of the first apertures on the inspection tool and inspecting a sample using such optimum combination of the first apertures.
    Type: Grant
    Filed: July 6, 2017
    Date of Patent: November 20, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Pavel Kolchin, Richard Wallingford, Lisheng Gao, Grace H. Chen, Markus B. Huber, Robert M. Danen
  • Patent number: 10132684
    Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: November 20, 2018
    Assignee: J.A. WOOLAM CO., INC.
    Inventors: Jeremy A. Van Derslice, Martin M. Liphardt
  • Patent number: 10134622
    Abstract: A device for determining alignment errors of structures which are present on, or which have been applied to a substrate, comprising a substrate holder for accommodating the substrate with the structures and detection means for detecting X-Y positions of first markings on the substrate and/or second markings on the structures by moving the substrate or the detection means in a first coordinate system, wherein in a second coordinate system which is independent of the first coordinate system X?-Y? structure positions for the structures are given whose respective distance from the X-Y positions of the first markings and/or second markings can be determined by the device.
    Type: Grant
    Filed: June 6, 2012
    Date of Patent: November 20, 2018
    Assignee: EV Group E. Thallner GmbH
    Inventor: Thomas Wagenleitner
  • Patent number: 10126546
    Abstract: A drift-adjusted interferometer and optical trap are disclosed that employ two reference beams with an optical property that allows them to be separated from the two trapping beams. The reference and trapping beams are combined collinearly and optically inverted so that each reference beam overlays with the opposite trapping beam. Each pair of beams is then focused on a microsphere and the resulting four back-focal plane interferometry signals are monitored such that the relative motion between a given trapping beam with its overlaid reference beam provides a direct measurement of the physical drift occurring due to mechanical drift of the differential path components.
    Type: Grant
    Filed: July 27, 2015
    Date of Patent: November 13, 2018
    Inventors: Carlos J. Bustamante, Troy A. Lionberger, Yves Coello
  • Patent number: 10126171
    Abstract: A hand-held measurement device for appearance analyzes includes a measurement array which comprises a number of illumination means for applying illumination light to a measurement field in at least three illumination directions and a number of pick-up means for capturing the measurement light in at least one observation direction. The illumination directions and the observation directions lie in a common system plane. At least one pick-up means is embodied to spectrally gauge the measurement light in a locally integral way, and at least one imaging pick-up means is embodied to gauge the measurement light in terms of color in a locally resolved way. The spectral pick-up means and the locally resolving pick-up means are arranged such that they receive the measurement light reflected by the measurement field under the same observation conditions and in particular from the same observation direction.
    Type: Grant
    Filed: September 19, 2017
    Date of Patent: November 13, 2018
    Inventors: Peter Ehbets, Beat Frick, Mark Wegmüller, Jörg Hünkemeier, Guido Niederer
  • Patent number: 10113974
    Abstract: An arrangement for the spectrometric measurement of products, such as cereals, oleaginous products, or derived products, includes a mechanism for selective adjustment of the position of a light beam in vertical and horizontal planes, and a selective adjustment device for ensuring that rays of the light beam are parallel.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: October 30, 2018
    Assignee: CHAUVIN ARNOUX
    Inventors: Eric Lopez, Vincent Huret
  • Patent number: 10094782
    Abstract: The invention discloses an apparatus and method for use with Laser Induced Breakdown Spectroscopy (LIBS) systems that can be applied to the real time analysis of various materials. The invention, in one aspect, provides a layer-by-layer method to remove the undesired coating layer of a material in which a pulsed laser is coupled with high speed scanning optics. To prepare the surface for LIBS, (i) a pulsed laser beam is scanned over an area of the surface to ablate the surface coating layer; (ii) the laser parameters are changed (i.e. pulse duration is made smaller) and the area scanned again to polish the surface; and (iii) the laser parameters are changed again (i.e. pulse duration is made smaller yet again) and the area scanned again with spectrometric analysis of the plasma plume created by the laser (i.e. LIBS is performed).
    Type: Grant
    Filed: November 26, 2014
    Date of Patent: October 9, 2018
    Assignee: National Research Council of Canada
    Inventors: Francois Doucet, Mohamad Sabsabi, Lutfu-Celebi Ozcan, Jean-Francois Gravel, Francis Boismenu
  • Patent number: 10094538
    Abstract: The light projection assemblies and opacity monitors described in this specification have an integrating sphere with an input aperture, an output aperture, and a spherical-shaped internal chamber. An LED source is located external to the chamber at the input aperture. A light baffle is located within the chamber at the output aperture. A condenser lens is located external to the chamber at the output aperture.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: October 9, 2018
    Inventors: Edward A. Smiercik, Jr., Edward L. McCall
  • Patent number: 10094721
    Abstract: A control computation unit causes an optical modulator to change a polarization state to shift a phase of polarized light with which an object is irradiated, computes a spatial gradient of tomographic distribution of phase difference of an interference signal on the basis of phase differences of interference signals each obtained by each phase shift of the polarized light, and visually displays tomographic distribution of spatial gradient in association with tomographic distribution of stress on the display device. The control computation unit computes deformation rate vector distribution at cross-sectional positions of the object on the basis of optical interference signals, and further computes tomographic distribution of strain rate tensor.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: October 9, 2018
    Inventor: Souichi Saeki
  • Patent number: 10078898
    Abstract: Disclosed is a noncontact metrology probe including: a first camera including a first field of view; a second camera including a second field of view and arranged such that the second field of view overlaps the first field of view to form a prime focal volume; a third camera including a third field of view and arranged such that the third field of view overlaps the prime focal volume to form a probe focal volume; and a tracker including a tracker field of view to determine a location of the probe focal volume in the tracker field of view.
    Type: Grant
    Filed: November 3, 2015
    Date of Patent: September 18, 2018
    Inventor: Joshua Gordon
  • Patent number: 10076919
    Abstract: A printer that incorporates a spectrometry device includes a spectroscope, a distance measurer, and a spectrometry unit. The spectroscope includes a wavelength-selective interference filter on which light from a position of measurement in a medium is incident. The distance measurer measures the distance between the position of measurement and the spectroscope, and the spectrometry unit performs spectrometry at the position of measurement by using the spectroscope and correct a measured value obtained by the spectrometry based on the measured distance.
    Type: Grant
    Filed: March 25, 2016
    Date of Patent: September 18, 2018
    Assignee: Seiko Epson Corporation
    Inventor: Tsugio Gomi
  • Patent number: 10072984
    Abstract: Spectrometers and methods for determining the presence or absence of a material in proximity to and/or combined with another material are provided. In one particular example, a spectrometer is provided that includes a light source, a detector and an optical system. In this implementation, the light source is configured to provide an excitation incident beam. The detector is configured to detect a spectroscopy signal. The optical system is configured to direct the excitation incident beam toward a sample at a non-zero angle from a zero-angle reference. The optical system is further configured to receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector. The detector is configured to remove a spectral interference component of the spectroscopy signal.
    Type: Grant
    Filed: October 2, 2015
    Date of Patent: September 11, 2018
    Assignee: MKS Technology, Inc.
    Inventors: Keith T. Carron, Shane A. Buller, Mark A. Watson, Sean Patrick Woodward
  • Patent number: 10060732
    Abstract: A flexible apparatus is provided. The flexible apparatus includes a plurality of motion sensors mounted on different locations of the flexible apparatus, a storage configured to store operation information of the flexible apparatus corresponding to a bending shape, and a controller configured to determine a bending shape of the flexible apparatus based on a sensing value of each of the plurality of motion sensors, and to perform an operation corresponding to the determined bending shape based on the operation information stored in the storage.
    Type: Grant
    Filed: July 30, 2013
    Date of Patent: August 28, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Han-sung Lee, Geun-ho Lee
  • Patent number: 10054423
    Abstract: Method and system for measuring one or more parameters of a patterned structure, using light source producing an input beam of at least partially coherent light in spatial and temporal domains, a detection system comprising a position sensitive detector for receiving light and generating measured data indicative thereof, an optical system configured for focusing the input light beam onto a diffraction limited spot on a sample's surface, collecting an output light returned from the illuminated spot, and imaging the collected output light onto a light sensitive surface of the position sensitive detector, where an image being indicative of coherent summation of output light portions propagating from the structure in different directions.
    Type: Grant
    Filed: December 26, 2013
    Date of Patent: August 21, 2018
    Inventors: Dror Shafir, Gilad Barak, Shay Wolfling
  • Patent number: 10048453
    Abstract: In various embodiments, an optical alignment structure may be provided. The optical alignment structure may include a light carrying structure configured to receive an input optical light from an external light source. The optical alignment structure may further include a light redirection mechanism coupled to the light carrying structure. The light redirection mechanism may be configured to receive the input optical light from the light carrying structure. The light redirection mechanism may be further configured to redirect the input optical light back to the light carrying structure, the redirected input optical light configured to be detected by a detector for alignment of the optical alignment structure with the external optical source.
    Type: Grant
    Filed: January 15, 2014
    Date of Patent: August 14, 2018
    Assignee: Agency for Science, Technology and Research
    Inventors: Chao Li, Huijuan Zhang, Guo-Qiang Patrick Lo