Patents Examined by Phat X. Cao
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Patent number: 11737278Abstract: A method used in forming a memory array comprises forming a substrate comprising a conductor tier comprising an upper conductor material and a lower conductor material, and a stack comprising vertically-alternating first tiers and second tiers above the conductor tier. Horizontally-elongated trenches are formed through the stack to the upper conductor material and the lower conductor material. At least one of the upper and lower conductor materials have an exposed catalytic surface in the trenches. Metal material is electrolessly deposited onto the catalytic surface to cover the upper conductor material and the lower conductor material within the trenches. Channel-material strings of memory cells are formed and extend through the second tiers and the first tiers. Other embodiments, including structure independent of method, are disclosed.Type: GrantFiled: April 6, 2022Date of Patent: August 22, 2023Assignee: Micron Technology, Inc.Inventors: Collin Howder, Chet E. Carter
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Patent number: 11715688Abstract: A package substrate has a dielectric layer and a redistribution metal layer. The dielectric layer has a first dielectric material and a second dielectric material. The first dielectric material is different than the second dielectric material. The second dielectric material may have a dielectric constant that is either greater than or less than the dielectric constant of the first dielectric material. The second dielectric may be selected based on a specific target application such as single-ended signal routing or serializer/deserializer (SERDES) routing.Type: GrantFiled: May 26, 2020Date of Patent: August 1, 2023Assignee: QUALCOMM INCORPORATEDInventors: Aniket Patil, Hong Bok We
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Patent number: 11705503Abstract: A semiconductor device includes a substrate, a gate electrode on the substrate, a gate spacer on a sidewall of the gate electrode, an active pattern penetrating the gate electrode and the gate spacer, and an epitaxial pattern contacting the active pattern and the gate spacer. The gate electrode extends in a first direction. The gate spacer includes a semiconductor material layer. The active pattern extends in a second direction crossing the first direction.Type: GrantFiled: September 30, 2020Date of Patent: July 18, 2023Inventors: Jin Bum Kim, MunHyeon Kim, Hyoung Sub Kim, Tae Jin Park, Kwan Heum Lee, Chang Woo Noh, Maria Toledano Lu Que, Hong Bae Park, Si Hyung Lee, Sung Man Whang
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Patent number: 11699642Abstract: A semiconductor package is provided. The semiconductor package includes a redistribution layer, a semiconductor chip, solder balls, an interposer, an encapsulant layer, and an underfill layer. The semiconductor chip is electrically connected to the redistribution layer, and disposed on an upper surface of the redistribution layer. The solder balls are disposed on the upper surface of the redistribution layer spaced apart from the semiconductor chip and are electrically connected to the redistribution layer. The interposer is electrically connected to the solder balls, and is disposed on an upper surface of the solder balls. The encapsulant layer encapsulates the semiconductor chip and side surfaces of the redistribution layer under the interposer. The underfill layer fills a space between a lower surface of the interposer and an upper surface of the encapsulant layer. The encapsulant layer includes a side surface encapsulant region surrounding the side surfaces of the redistribution layer.Type: GrantFiled: January 10, 2020Date of Patent: July 11, 2023Assignee: SAMSUNG ELECTRONIC CO., LTD.Inventor: Dongho Kim
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Patent number: 11688729Abstract: An apparatus is provided which comprises: one or more first conductive contacts on a first substrate surface, one or more second conductive contacts on a second substrate surface opposite the first substrate surface, a core layer comprising glass between the first and the second substrate surfaces, and one or more thin film capacitors on the glass core conductively coupled with one of the first conductive contacts and one of the second conductive contacts, wherein the thin film capacitor comprises a first metal layer on a surface of the glass core, a thin film dielectric material on a surface of the first metal layer, and a second metal layer on a surface of the thin film dielectric material. Other embodiments are also disclosed and claimed.Type: GrantFiled: July 9, 2018Date of Patent: June 27, 2023Assignee: Intel CorporationInventors: Adel Elsherbini, Krishna Bharath, Mathew Manusharow
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Patent number: 11682654Abstract: A semiconductor structure includes a semiconductor structure includes a semiconductor die, an insulating encapsulation, a passivation layer and conductive elements. The semiconductor die includes a sensor device and a semiconductor substrate with a first region and a second region adjacent to the first region, and the sensor device is embedded in the semiconductor substrate within the first region. The insulating encapsulation laterally encapsulates the semiconductor die and covers a sidewall of the semiconductor die. The passivation layer is located on the semiconductor die, wherein a recess penetrates through the passivation layer over the first region and is overlapped with the sensor device. The conductive elements are located on the passivation layer over the second region and are electrically connected to the semiconductor die, wherein the passivation layer is between the insulating encapsulation and the conductive elements.Type: GrantFiled: December 17, 2019Date of Patent: June 20, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Der-Chyang Yeh, Li-Hsien Huang, Ta-Hsuan Lin, Ming-Shih Yeh
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Patent number: 11676955Abstract: A method for separating semiconductor die stacks of a chip-on-wafer assembly is disclosed herein. In one example, divider walls are arranged in a pattern on a first surface of a device wafer such that regions between the divider walls define mounting sites. Die stacks are mounted to the device wafer, wherein individual die stacks are located at a corresponding mounting site between the divider walls. The device wafer is cut through from a second surface that is opposite the first surface of the device wafer, and the divider walls are removed from between the die stacks to form a vacant lane between adjacent die stacks.Type: GrantFiled: June 10, 2020Date of Patent: June 13, 2023Assignee: Micron Technology, Inc.Inventors: Andrew M. Bayless, Bradley R. Bitz
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Patent number: 11670722Abstract: Embodiments described herein provide thin film transistors (TFTs) and processes to reduce plasma induced damage in TFTs. In one embodiment, a buffer layer is disposed over a substrate and a semiconductor layer is disposed over the buffer layer. A gate dielectric layer is disposed over the semiconductor layer. The gate dielectric layer contacts the semiconductor layer at an interface. The gate electrode 204 is disposed over the gate dielectric layer. The gate dielectric layer has a Dit of about 5e10 cm?2eV?1 to about 5e11 cm?2eV?1 and a hysteresis of about 0.10 V to about 0.30 V improve performance capability of the TFT while having a breakdown field between about 6 MV/cm and about 10 MV/cm.Type: GrantFiled: June 2, 2022Date of Patent: June 6, 2023Assignee: Applied Materials, Inc.Inventors: Jianheng Li, Lai Zhao, Yujia Zhai, Soo Young Choi
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Patent number: 11670592Abstract: Embodiments of 3D memory devices having staircase structures and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory array structure and a staircase structure in an intermediate of the memory array structure and laterally dividing the memory array structure into first and second memory array structures. The staircase structure includes a first staircase zone and a bridge structure connecting the first and second memory array structures. The first staircase zone includes a first pair of staircases facing each other in a first lateral direction and at different depths. Each staircase includes a plurality of stairs. Each staircase includes divisions in a second lateral direction perpendicular to the first lateral direction at different depths. At least one stair in the first pair of staircases is electrically connected to at least one of the first and second memory array structures through the bridge structure.Type: GrantFiled: May 22, 2020Date of Patent: June 6, 2023Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Zhong Zhang, Zhongwang Sun, Wenxi Zhou
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Patent number: 11670746Abstract: A light emitting device including a mounting board, one or more light emitting elements, a light transmissive member, and a light reflective member. The light emitting element(s) are mounted on the mounting board, and each include an upper surface. The light transmissive member is bonded to the upper surface of each of the light emitting element(s). The light transmissive member has an upper surface and a lower surface, and allows light from the light emitting element(s) to be incident on the lower surface of the light transmissive member and to be output from the upper surface of the light transmissive member. The light reflective member covers surfaces of the light transmissive member and lateral surfaces of the light emitting element(s) and exposes the upper surface of the light transmissive member. At least a first portion of the mounting board is exposed from the light reflective member in a plan view.Type: GrantFiled: January 28, 2021Date of Patent: June 6, 2023Assignee: NICHIA CORPORATIONInventors: Masakatsu Tomonari, Masahiko Sano
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Patent number: 11626367Abstract: A semiconductor package includes a redistribution substrate including a first redistribution layer; a semiconductor chip having a connection pad connected to the first redistribution layer; a vertical connection conductor electrically connected to the connection pad by the first redistribution layer; a core member having a first through-hole accommodating the semiconductor chip and a second through-hole accommodating the vertical connection conductor; an encapsulant filling the first and second through-holes; and a redistribution member including a second redistribution layer. The vertical connection conductor and the core member include a same material. A width of a lower surface of the vertical connection conductor is wider than that of an upper surface thereof, a width of a lower end of the first through-hole is narrower than that of an upper end thereof, and a width of a lower end of the second through-hole is narrower than that of an upper end thereof.Type: GrantFiled: August 10, 2020Date of Patent: April 11, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Myungsam Kang, Youngchan Ko, Kyungdon Mun
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Patent number: 11621269Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a multi-level ferroelectric memory cell and methods of manufacture. The structure includes: a first metallization feature; a tapered ferroelectric capacitor comprising a first electrode, a second electrode and ferroelectric material between the first electrode and the second electrode, the first electrode contacting the first metallization feature; and a second metallization feature contacting the second electrode.Type: GrantFiled: March 11, 2019Date of Patent: April 4, 2023Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: Julien Frougier, Ruilong Xie
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Patent number: 11616046Abstract: A multi-chip package comprising an interconnection substrate; a first semiconductor IC chip over the interconnection substrate, wherein the first semiconductor IC chip comprises a first silicon substrate, a plurality of first metal vias passing through the first silicon substrate, a plurality of first transistors on a top surface of the first silicon substrate and a first interconnection scheme over the first silicon substrate, wherein the first interconnection scheme comprises a first interconnection metal layer over the first silicon substrate, a second interconnection metal layer over the first interconnection layer and the first silicon substrate and a first insulating dielectric layer over the first silicon substrate and between the first and second interconnection metal layers; a second semiconductor IC chip over and bonded to the first semiconductor IC chip; and a plurality of second metal vias over and coupling to the interconnection substrate, wherein the plurality of second metal vias are in a spaceType: GrantFiled: October 31, 2019Date of Patent: March 28, 2023Assignee: iCometrue Company Ltd.Inventors: Mou-Shiung Lin, Jin-Yuan Lee
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Patent number: 11610837Abstract: A semiconductor device is provided, which includes a dielectric layer and a via structure. The dielectric layer is arranged over a substrate. The via structure is arranged in the dielectric layer, the via structure having a peripheral portion and a central portion. The peripheral portion of the via structure has a height that is greater than that of the central portion.Type: GrantFiled: September 21, 2020Date of Patent: March 21, 2023Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Xuesong Rao, Benfu Lin, Bo Li, Chengang Feng, Yudi Setiawan, Yun Ling Tan
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Patent number: 11610959Abstract: An organic light-emitting display device comprises a display panel having a transmission area through which external light passes, and a non-transmission area having transmittance lower than that of the transmission area; a data driver supplying a data signal to the display panel; a gate driver supplying a gate signal to the display panel; a timing controller controlling the data driver and the gate driver; and a sensor package module disposed on a rear surface of the display panel and disposed to correspond to the transmission area, wherein the number of conductive films stacked in the transmission area is smaller than that of conductive films stacked in the non-transmission area.Type: GrantFiled: December 11, 2019Date of Patent: March 21, 2023Assignee: LG DISPLAY CO., LTD.Inventors: JongHee Hwang, BuYeol Lee, EunJung Kim
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Patent number: 11588015Abstract: An epitaxial structure includes a substrate, a nucleation layer on the substrate, a buffer layer on the nucleation layer, and a nitride layer on the buffer layer. The nucleation layer consists of regions in a thickness direction, wherein a chemical composition of the regions is Al(1-x)InxN, where 0?x?1. A maximum value of the x value in the plurality of regions is the same, a minimum value of the x value in the plurality of regions is the same, and an absolute value of a gradient slope of each of the regions is 0.1%/nm to 50%/nm. A thickness of the nucleation layer is less than a thickness of the buffer layer. A roughness of a surface of the nucleation layer in contact with the buffer layer is greater than a roughness of a surface of the buffer layer in contact with the nitride layer.Type: GrantFiled: March 9, 2022Date of Patent: February 21, 2023Assignee: GlobalWafers Co., Ltd.Inventors: Jia-Zhe Liu, Yen-Lun Huang, Ying-Ru Shih
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Patent number: 11588014Abstract: An epitaxial structure includes a substrate, a nucleation layer on the substrate, a buffer layer on the nucleation layer, and a nitride layer on the buffer layer. The nucleation layer consists of regions in a thickness direction, wherein a chemical composition of the regions is Al(1?x)InxN, where 0?x?1. A maximum value of the x value in the regions decreases along the thickness direction, and the x value in the chemical composition of each two regions consists of a fixed region and a gradient region, wherein a gradient slope of the gradient regions is ?0.1%/nm to ?50%/nm, and a stepwise slope of the fixed regions is ?0.1%/loop to ?50%/loop. A thickness of the nucleation layer is less than that of the buffer layer. A surface roughness of the nucleation layer in contact with the buffer layer is greater than that of the buffer layer in contact with the nitride layer.Type: GrantFiled: March 9, 2022Date of Patent: February 21, 2023Assignee: GlobalWafers Co., Ltd.Inventors: Jia-Zhe Liu, Yen-Lun Huang, Ying-Ru Shih
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Patent number: 11557515Abstract: Disclosed are approaches for forming a semiconductor device. In some embodiments, a method may include providing a plurality of patterning structures over a device layer, each of the plurality of patterning structures including a first sidewall, a second sidewall, and an upper surface, and forming a mask by depositing a masking material at a non-zero angle of inclination relative to a perpendicular to a plane defined by a top surface of the device layer. The mask may be formed over the plurality of patterning structures without being formed along the second sidewall. The method may further include selectively forming a metal layer along the second sidewall of each of the plurality of patterning structures.Type: GrantFiled: August 10, 2020Date of Patent: January 17, 2023Assignee: Applied Materials, Inc.Inventor: Sony Varghese
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Patent number: 11552107Abstract: Provided is a display device with extremely high resolution, a display device with higher display quality, a display device with improved viewing angle characteristics, or a flexible display device. Same-color subpixels are arranged in a zigzag pattern in a predetermined direction. In other words, when attention is paid to a subpixel, another two subpixels exhibiting the same color as the subpixel are preferably located upper right and lower right or upper left and lower left. Each pixel includes three subpixels arranged in an L shape. In addition, two pixels are combined so that pixel units including subpixel are arranged in matrix of 3×2.Type: GrantFiled: February 18, 2020Date of Patent: January 10, 2023Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hisao Ikeda, Kouhei Toyotaka, Hideaki Shishido, Hiroyuki Miyake, Kohei Yokoyama, Yasuhiro Jinbo, Yoshitaka Dozen, Takaaki Nagata, Shinichi Hirasa
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Patent number: 11545573Abstract: A method includes depositing a semiconductor stack within a first region and a second region on a substrate, the semiconductor stack having alternating layers of a first type of semiconductor material and a second type of semiconductor material. The method further includes removing a portion of the semiconductor stack from the second region to form a trench and with an epitaxial growth process, filling the trench with the second type of semiconductor material. The method further includes patterning the semiconductor stack within the first region to form a nanostructure stack, patterning the second type of semiconductor material within the second region to form a fin structure, and forming a gate structure over both the nanostructure stack and the fin structure.Type: GrantFiled: September 10, 2019Date of Patent: January 3, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw