Abstract: A method is provided for estimating durability of an optical member against pulsed excimer laser beam irradiation. The method includes the steps of (a) irradiating a test sample for the optical member with a pulsed excimer laser beam to induce changes in transparency of the test sample with respect to the pulsed excimer laser beam, the irradiation being performed for such a time period as to cover not only a linear region and a saturation region and (b) measuring changes in the transparency of the test sample with respect to the pulsed excimer laser beam as a function of the cumulative number of the excimer laser pulses that have irradiated the test sample in step (a).

Abstract: A field emission display ("FED") is disclosed having a gray scale range. Input into the FED, initially, is an analog signal input. The FED, by employing an analog to pulse width converter, subsequently converts the analog input to a pulse width output, the width of which directly correlates to the amplitude of the analog input signal. To achieve this design, the analog to pulse width converter comprises a sampler for sampling the analog signal at a predetermined frequency, thereby creating a plurality of samples corresponding to the input voltage. Further, the converter comprises means for holding each of the samples. The output of the holding means is subsequently coupled with a load responsive to the output of the holding means. In one embodiment of the present invention, this load comprises a voltage controlled resistance. The voltage controlled resistance can comprise a convertor for converting each of the samples to a current source and a load for creating a voltage ramp.

Abstract: The present invention includes an apparatus configured for identification of a material, and methods of identifying a material. One embodiment of the invention provides an apparatus including a first region configured to receive a first sample, the first region being configured to output a first spectrum corresponding to the first sample and responsive to exposure of the first sample to radiation; a modulator configured to modulate the first spectrum according to a first frequency; a second region configured to receive a second sample, the second region being configured to output a second spectrum corresponding to the second sample and responsive to exposure of the second sample to the modulated first spectrum; and a detector configured to detect the second spectrum having a second frequency greater than the first frequency.

Abstract: A high-speed pattern defect inspecting apparatus with a high sensitivity and less erroneous detection. In the pattern defect inspecting apparatus, a wafer is scanned by an electron beam, secondary electron signal generated by the scanning is stored in an image memory, and the stored image is used to cause a display unit to be subjected to a brightness modulation. A reference pattern image previously stored in the image memory is compared with a detected wafer pattern image to find a difference between the both images, and the difference is detected as a defect in a wafer pattern. The wafer scanning of the electron beam is carried out only for an arbitrary specified part thereon.

Abstract: On-board ILS sensors for detecting illegal drugs and based on intracavity laser spectroscopy (ILS) are provided for detecting the presence of drugs and their metabolized by-product vapors in an enclosed space, such as a vehicle. The sensor comprises: (a) a laser comprising a gain medium having two opposed facets within a laser resonator and functioning as an intracavity spectroscopic device having a first end and a second end, the first end operatively associated with a partially reflecting (i.e., partially transmitting) surface; (b) a reflective or dispersive optical element (e.g.

Abstract: A pattern inspection method includes the steps of: obtaining first image data by optically picking up an actually formed pattern such as a reticle; aligning a position of the first image data with second image data of a pattern at a different layer from that of the first image data; and performing a first pattern inspection using the first and second image data. Defect inspection can be executed in a short time with a practically sufficient precision.

Abstract: Solid particles combined with a water contaminated oil sample are counted by an optical particle counter. The contaminated oil sample is mixed at a substantially 1:1 ratio with a water masking solvent comprising about one part isopropanol and about three parts toluene. The oil and solvent mixture is passed through a transparent viewing volume between a light source and a light detector for detection and counting of oil suspended solid particles.

Abstract: A detecting system for a surface form of an object is disclosed. The system comprises a light source section emitting a plurality of slit-like probe rays incidenting on a predetermined inspected area of an inspected object at predetermined pitches, an image pick-up section imaging reflected lights of the probe rays from the inspected area, the image pick-up section imaging the reflected lights from a direction different from a transmission axis of the light source section, the image pick-up section disposed so as to image the reflected light from the inspected area in a batch, and a computation section converting image data from the image pick-up section into data of surface height of the inspected object using a trigonometrical survey method.

Abstract: A container inspection system wherein diffused light and collimated light provide backlighting to image a container (10) by a color camera (18). Light strobed through a ring light (36) and parabolic reflector (39) is diffused at a diffusion laminate (46). Light strobed through a ring light (60) and parabolic reflector (64) is collimated at lens (68) and aligned with the diffused light by reflector laminate (48). Diffused light is filtered by a blue band-pass filter (42) and collimated light is filtered by a red band-pass filter (66) and camera (18) segregates the container image according to blue and red color planes.

Abstract: A method of in-situ endpoint detection for membrane formation including directing light from a light source onto one side of a membrane structure having at least one etchable component for the formation of a membrane and etching the membrane structure so as to form the membrane while sensing the light from the light source on an opposite side of the membrane structure in-situ during the etching to detect a thickness of the membrane. Generally, the etching step includes fountain cup etching with the light source being a fiber optic mounted in the fountain cup and a detector mounted in the cap.

Abstract: An optical-to-tactile translator provides an aid for the visually impaired by translating a near-field scene to a tactile signal corresponding to said near-field scene. An optical sensor using a plurality of active pixel sensors (APS) converts the optical image within the near-field scene to a digital signal. The digital signal is then processed by a microprocessor and a simple shape signal is generated based on the digital signal. The shape signal is then communicated to a tactile transmitter where the shape signal is converted into a tactile signal using a series of contacts. The shape signal may be an outline of the significant shapes determined in the near-field scene, or the shape signal may comprise a simple symbolic representation of common items encountered repeatedly. The user is thus made aware of the unseen near-field scene, including potential obstacles and dangers, through a series of tactile contacts.

Abstract: A method for monitoring the presence of particles in a plasma etch chamber. It includes the steps of: (a) selecting at least one laser light source whose wavelength is at such an energy which will cause the particles to be monitored inside the plasma etch chamber to emit Raman, Stoke, and anti-Stoke spectra lines when the laser light is scattered by the particle; (b) emitting the laser light into an internal space of the plasma etch chamber; and (c) using a set of fiber optics to intercept light that may be scattered by the particle, if the particle is present in the plasma etch chamber; and (d) measuring amplitude and spectra of the scattered light. Because the intensity of the scattered light is proportional to the dielectric constant to the fourth power, the method is most advantageous for detect the presence of metal-containing particles, which have a very high dielectric constant. The spectral analysis also provides information relating to the chemical composition of the particles.

Abstract: This invention relates to a head mounted image display apparatus to be mounted on a head portion of an observer.The apparatus is constructed by image generation means for displaying an image by radiating light and an optical system which has a plurality of optical elements for guiding light from said image generation means to a pupil of the observer, wherein, of said plurality of optical elements, a first decentered curved surface mirror based on an ellipsoidal surface and a second decentered curved surface mirror based on a hyperboloidal surface are arranged in turn from the pupil side of the observer, said first decentered curved surface mirror has a first focal point at a predetermined pupil position of the observer, and a second focal point at a focal point position of said second decentered curved surface mirror.

Abstract: A system for three-dimensional measurement of inaccessible hollow spaces g. sewage canal pipes) by means of a light source and a camera, which are disposed on an inspection head or carrier. A structured light source is used, and the camera and the structured light source have a common entry and exit aperture and have before the aperture at least partially one common optical axis or parallel axes, the distance between which is substantially smaller than the distance between the source point of the pattern and the object-side principle plane of the camera lens.

Abstract: The invention uses a resonance Raman spectrometer 1 for achieving the identification and quantitation of analytes including biomolecules, organic and inorganic molecules. According to the present invention, a) a sample 2 is deuterated 3 with D20 for facilitating identification and quantitation of analytes 4 of said sample, b) a monochromatic light 6 illuminates sample 2 of analytes 4 for producing Raman sample light 12 and rejecting Rayleigh light 14, c) the Raman sample light 12 is passed through a depolarizer 19 for producing randomized polarization components 20, d) a Raman sample spectrum 22 is generated, calibrated with respect to an absolute differential Raman cross-section standard in response to said randomized polarization components 22, e) the Raman sample spectrum 22 is provided to a spectral analyzer 24 for identification 26 and/or quantitation 28 of the analytes 4.

Abstract: A substrate inspecting system 60 observes and inspect a semiconductor wafer pattern by irradiating the surface of the semiconductor wafer 11 with electron beams 31, and making a projection unit project in enlargement secondary electrons, reflected electrons and backward scattered electrons generated therefrom in the form of secondary electron beams 32 on an undersurface of an electron beam detecting unit 61, and form an image thereon. The substrate inspecting system 60 includes a parallel-plate type energy filter 33 in a projection system. The present invention discloses a substrate inspecting apparatus capable of detecting a voltage contrast defect on a sample with a high accuracy by separating the secondary electron beams and fetching a secondary electron beam having an energy over a predetermined value, and of quantitatively measuring this defect, a substrate inspecting system having this apparatus, and a substrate inspecting method.

Abstract: A method for characterizing a sample comprising the steps of depositing the sample on a substrate, measuring a first change in optical response of the sample, changing the lateral strain of the sample, measuring a second change in optical response of the sample, comparing the second change in optical response of with the first change in optical response and associating a difference between the second change and the first change in optical response with a property of interest in the sample. The measurement of the first change in optical response is made with the sample having an initial lateral strain. The measurement of the second change in optical response is made after the lateral strain in the sample is changed from the initial lateral strain to a different lateral strain. The second change in optical response is compared to the first change in optical response to find the difference between the second change and the first change.

Abstract: An apparatus and method for measuring and analyzing light transmittance through containers is provided. A system is disclosed in which a light probe is insertable into a container in order to measure light transmittance through portions of the container wall. The light probe is connected to a spectrophotometer which analyzes the light transmitted through the container wall. Light transmittance is measured over a series of light wavelengths in order to accurately predict the ability of the container to protect its contents from the detrimental effects of light. In addition, the container may be tested for light transmittance at several locations. The measured light transmittance of each location may be weighted differently in order to compensate for the anticipated exposure to light of the particular location.

Abstract: A system for detecting defects in an interlayer dielectric (ILD) interposed between two conductive lines is provided. The system includes a processor for controlling general operations of the system. The system also includes a voltage source adapted to apply a bias voltage between the two conductive lines and induce a leakage current across the ILD. The system employs a light source to illuminate at least a portion of the ILD and enhance the leakage current. A current source is used to measure the induced leakage current, the current source being operatively coupled to the processor. The processor determines the existence of a defect in the ILD based on the measured leakage current.

Abstract: A system that automatically aligns and stabilizes off-gimbal electro-optical passive and active sensors of an electro-optical system. The alignment and stabilization system dynamically boresights and aligns one or more sensor input beams and an output beam of a laser using automatic closed loop feedback, a reference detector and stabilization mirror disposed on a gimbal, off-gimbal optical-reference sources and two alignment mirrors. Aligning the one or more sensors and laser to the on-gimbal reference detector is equivalent to having the sensors and laser mounted on the stabilized gimbal with the stabilization mirror providing a common optical path for enhanced stabilization of both the sensor and laser lines of sight.