Patents Examined by Richard A. Rosenberger
  • Patent number: 7382471
    Abstract: Embodiments of the invention provide a non-contact method for measuring the surface profile of an object that can include generating a point-type optical signal and projecting it on a rotatable precision optical grating, generating a rotating pattern of light and dark lines onto the object, recording a series of images of the rotating pattern moving across the object with an image receiving device and calculating the surface profile of the object. Other embodiments can include a method to calibrate the system and a non-contact apparatus that generally includes a point-type light source, a rotatably mounted optical grating being configured to project a moving grating image on the object, a processor in communication with the image capturing device and configured to receive image input from the image capturing device and generate a surface profile representation of the object therefrom.
    Type: Grant
    Filed: December 22, 2005
    Date of Patent: June 3, 2008
    Assignee: Southwest Research Institute
    Inventors: Ernest A. Franke, Michael J. Magee, Michael P. Rigney, Joseph N. Mitchell, Robert J. Beeson
  • Patent number: 7379175
    Abstract: Methods and systems for inspecting a reticle are provided. In an embodiment, a system may include an inspection subsystem configured to form a first aerial image of the reticle. The first aerial image may be used to detect defects on the reticle. The system may also include a review subsystem coupled to the inspection subsystem. For example, the inspection and review subsystems may have common optics, separate optics and a common stage, or separate stages and a common handler. The review subsystem may be configured to form a second aerial image of the reticle. The second aerial image may be used to analyze the defects. In another embodiment, the system may include an image computer configured to receive image data from the inspection and review subsystems representing the first and second aerial images. The image computer may also be configured to perform one or more functions on the image data.
    Type: Grant
    Filed: October 6, 2003
    Date of Patent: May 27, 2008
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: Stan Stokowski, David Alles
  • Patent number: 7362422
    Abstract: The present invention provides an apparatus and method for high resolution spectroscopy (approximately 10 picometer wavelength resolution) using a tunable optical filter (TOF) for analyzing a formation fluid sample downhole and at the surface to determine formation fluid parameters. The analysis comprises determination of gas oil ratio, API gravity and various other fluid parameters which can be estimated after developing correlations to a training set of samples using a neural network or a chemometric equation.
    Type: Grant
    Filed: November 10, 2004
    Date of Patent: April 22, 2008
    Assignee: Baker Hughes Incorporated
    Inventors: Rocco DiFoggio, Paul Bergren
  • Patent number: 7359056
    Abstract: Methods of, and systems for, detecting an airborne material. In a first preferred embodiment, a method is provided that includes deploying a cloud of optical sensors, illuminating at least a portion of the cloud with a flare, and detecting the cloud using the illumination provided by the flare. Preferably, the illumination is in the infrared, near infrared, or visible spectral range. Also, the sensors can be porous silicon sensors for measuring the concentration of either a chemical or biological agent. Moreover, the method may include deploying the flare while remaining concealed. Preferably, the spectrum of the flare is compared with the spectrum from the cloud of sensors.
    Type: Grant
    Filed: May 17, 2005
    Date of Patent: April 15, 2008
    Assignee: The Boeing Company
    Inventor: Dennis G. Koshinz
  • Patent number: 7304731
    Abstract: Systems and methods for providing illumination of a specimen for inspection are provided. One system includes one or more first optical elements configured to illuminate a diffuser with a predetermined pattern of coherent light. The system also includes one or more second optical elements configured to image light exiting the diffuser onto an illumination pupil of the system such that the predetermined pattern is reproduced in the illumination pupil. In addition, the system includes an objective lens configured to focus light from the predetermined pattern in the illumination pupil onto a specimen plane. In one embodiment, the light focused onto the specimen plane is not substantially coherent. In another embodiment, the predetermined pattern is selected based on an illumination mode selected for the inspection of the specimen.
    Type: Grant
    Filed: September 2, 2005
    Date of Patent: December 4, 2007
    Assignee: KLA-Tencor Technologies Corp.
    Inventor: Andrew V. Hill
  • Patent number: 7301640
    Abstract: A non-dispersive infra-red gas detector includes a condensation eliminating heater. The heater can be intermittently energized in response to a signal received from an environmental sensor. Signals from a gas sensor in the detector can be processed to determine when to energize the heater.
    Type: Grant
    Filed: December 21, 2004
    Date of Patent: November 27, 2007
    Assignee: Honeywell International, Inc.
    Inventor: Lee D. Tice
  • Patent number: 7295294
    Abstract: A first core layer and a second core layer, serving as optical waveguides, whose refractive indexes are greater than that of a substrate are placed on the surface of the substrate that functions as a cladding layer. An interval between the first core layer and the second core layer is partially narrowed so that lightwaves progressing through these core layers may develop an optical mode coupling. Disposed in this optical mode coupling area is a detector, which comes in contact with liquid or gas and interacts with a substance to be detected, such as chemical or biological substance. A receptor material which selectively captures the substance to be detected is fixed on a surface of the detector. Antibody, enzyme, cell, ionophore, single-strand DNA and the like are examples of the receptor material.
    Type: Grant
    Filed: October 27, 2004
    Date of Patent: November 13, 2007
    Assignee: Rohm Co., Ltd.
    Inventor: Takaaki Shimazaki
  • Patent number: 7289202
    Abstract: A method includes providing a polymerized optical film structure having a microstructured surface, forming a scratch having a length on the microstructured surface to form a scratched optical film, illuminating the scratched optical film to form an illuminated scratch, measuring a plurality of scratch contrast ratio values along the length of the illuminated scratch with a detector, and determining a maximum scratch contrast ratio from the plurality of scratch contrast ratio values along the length of the scratch.
    Type: Grant
    Filed: September 10, 2004
    Date of Patent: October 30, 2007
    Assignee: 3M Innovative Properties Company
    Inventors: Michael S. Groess, Stephan J. Pankratz
  • Patent number: 7286210
    Abstract: A passive optical sensor operates independently of light amplitude by using a semiconducting carbon nanotube material. The material has an optical property dependent on wavelength, e.g., wavelength of absorption, ratio of absorptions at two wavelengths, or fluorescence at one wavelength in response to light at another wavelength. The property is changed by compressing the material or exposing the material to a charge. Light is passed through the material so that the change in the property can be detected.
    Type: Grant
    Filed: December 30, 2004
    Date of Patent: October 23, 2007
    Inventor: John W. Pettit
  • Patent number: 7286235
    Abstract: A surface plasmon resonance device includes a transparent substrate, a porous dielectric layer formed on a top surface of the transparent substrate, a thin metal layer formed on the porous dielectric layer, and a prism attached on a bottom surface of the transparent layer.
    Type: Grant
    Filed: August 17, 2005
    Date of Patent: October 23, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Fu Wang, Jang-seok Ma, Gyeong-sik Ok
  • Patent number: 7280215
    Abstract: The ability of a Modulated Optical Reflectivity (MOR) or Thermal Wave (TW) system to measure characteristics of a sample based on the amplitude and phase of a probe beam reflected from the surface of the sample can be improved by providing a polychromatic pump and/or probe beam that can be scanned over a wide spectral range, such as a range of at least 100 nm. The information contained in the spectral dependencies of a TW response obtained from the sample can be compared and/or fitted to corresponding theoretical dependencies in order to obtain more precise and reliable information about the properties of the particular sample than is available for single-wavelength systems. This information can further be combined with measurements taken for varying spot separations or varying pump source modulation frequency, as well as with photo-thermal radiometry (PTR), spectroscopic reflectometry, and/or ellipsometry measurements.
    Type: Grant
    Filed: September 23, 2004
    Date of Patent: October 9, 2007
    Assignee: Therma-Wave, Inc.
    Inventors: Alex Salnik, Jon Opsal, Lena Nicolaides
  • Patent number: 7280197
    Abstract: A wafer edge inspection system utilizes a novel camera and mirror arrangement which conveys the images of the various near-edge wafer regions in piecewise fashion to a linear sensor array on a single line-scan sensor. This system is low-cost and compact, and may be integrated into various wafer handling or processing machines or systems.
    Type: Grant
    Filed: November 17, 2004
    Date of Patent: October 9, 2007
    Assignee: KLA-Tehcor Technologies Corporation
    Inventor: Eliezer Rosengaus
  • Patent number: 7277177
    Abstract: An apparatus and method for controlling a light source used in Cavity Ring-Down Spectroscopy. The apparatus comprises a controller that generates a control signal to activate and deactivate the light source based on a comparison of an energy signal from a resonant cavity and a threshold. The light source is activated for a time period based on the stabilization time of the light source and the time necessary to provide sufficient energy to the resonant cavity. Thereafter the controller deactivates the light source for a predetermined time period by interrupting its current source so that the light energy in the cavity rings down and so that the presence of analyte can be measured. The light energy from the light source is directly coupled to the resonant cavity from the light source.
    Type: Grant
    Filed: October 17, 2005
    Date of Patent: October 2, 2007
    Assignee: Tiger Optics, LLC
    Inventors: Robert Augustine, Calvin R. Krusen, Chuji Wang, Wen-Bin Yan
  • Patent number: 7277163
    Abstract: A personal identification system, which uses a vein pattern of a finger, optimizes the amount of light of a light source based on a captured finger image and emphasizes the vein pattern during image processing for identification.
    Type: Grant
    Filed: April 13, 2005
    Date of Patent: October 2, 2007
    Assignee: Hitachi, Ltd.
    Inventors: Miyuki Kono, Shin-ichiro Umemura, Takafumi Miyatake, Kunio Harada, Yoshitoshi Ito, Hironori Ueki
  • Patent number: 7274470
    Abstract: An optical 3D digitizer with an enlarged non-ambiguity zone, comprising a structured light projector for projecting a fringe pattern over a target area, the fringe pattern having a shiftable position over the target area is disclosed. First and second cameras having overlapping measurement fields are directed toward the target area and positioned with respect to the projector to define distinct triangulation planes therewith. The second camera has a larger non-ambiguity depth than the first camera.
    Type: Grant
    Filed: July 23, 2004
    Date of Patent: September 25, 2007
    Assignee: Inspeck Inc.
    Inventors: Guylain Lemelin, Li Song, Dominique Beauchamp, David Jacques, Patryck Rouleau, Emmanuel Glasson, Patrick Dufour
  • Patent number: 7274471
    Abstract: A system and method of measuring a distance of semiconductor patterns is provided. The system includes a microscope and a control unit. The control unit calculates standard coordinates of standard points in view-fields that include spots, spot coordinates of spots with respect to standard points, real coordinates of spots from both of the standard coordinates and spot coordinates, and finally the distance between the two spots from the first and second real coordinates. Coordinates are determined using high magnification, in conjunction with pixel counting, allowing more precise distance measurements.
    Type: Grant
    Filed: December 13, 2004
    Date of Patent: September 25, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Koung-Su Shin, Kwang-Jun Yoon, Sun-Yong Choi, Chung-Sam Jun, Dong-Jin Park
  • Patent number: 7270442
    Abstract: System and method for monitoring status of a visual signal lamp. The system includes at least one optical fiber comprising a first end and a second end. The first end is positioned proximate to the signal lamp and is oriented to capture a portion of light signal emitted by the signal lamp when the signal lamp is illuminated. The system also includes a photodetector positioned proximate to the second end of the optical fiber and configured to receive the portion of light signal. The system further includes a threshold detection circuitry connected to the photodetector and configured to detect a lighting parameter in relation to the signal lamp according to a predetermined criterion.
    Type: Grant
    Filed: September 30, 2004
    Date of Patent: September 18, 2007
    Assignee: General Electric Company
    Inventors: David Michael Davenport, John Erik Hershey, Todd Ryan Tolliver
  • Patent number: 7271919
    Abstract: A confocal displacement sensor is created in which, through a graduated arrangement of optical outputs relative to an imaging optic in the object area of displacement sensor, real images of the optical outputs can be created at different heights. A surface to be measured, which is located in the area between the real images, at least partly scatters back illumination beams emitted by the optical outputs. As such, two measurement beams are created for which the intensities are each recorded by a light detector. This is done by interpolation between the measured light intensities. The height position of the scanned points of the surface can be calculated and the surface to be measured can be measured simultaneously at a number of scanning points. Two planar light sources are preferably used for light generation and two planar high-resolution cameras for light detection.
    Type: Grant
    Filed: September 12, 2003
    Date of Patent: September 18, 2007
    Assignee: Siemens Aktiengesellschaft
    Inventor: Anton Schick
  • Patent number: 7268866
    Abstract: The invention relates to an inspection method for inspecting the quality of a weld seam (15) during which a material, which is transparent to electromagnetic radiation (30) of a defined frequency, is used in a workpiece (10) consisting of two plastic parts (11, 12). In order to be able to reliably inspect the weld seam, the invention provides that an electromagnetic inspection radiation (30) is irradiated inside the workpiece (10). The resulting reflections between the boundary surfaces in the workpiece (10) and the portions of inspection radiation (30, 30?) exiting from the workpiece (10) are affected by the quality of the produced weld seam (15). (15). By measuring the exiting radiation (33, 33?), it can be clearly determined whether the workpiece (10) has a defective or a tolerable seam (15).
    Type: Grant
    Filed: April 5, 2002
    Date of Patent: September 11, 2007
    Assignee: Huf Tools GmbH
    Inventor: Andreas Messler
  • Patent number: 7265845
    Abstract: A method of enhancing the conversion of magnetic field intensity and spatial data to optical data utilizes surface plasmon resonance combined with corrugated optical gratings of several types. Appropriate materials and methods for producing and applying said corrugations and surface plasmon resonance-producing enhancements to Magneto-Optical Indicator Films (MOIF) are described. Methods of acquiring and interpreting magneto-optical data are also described.
    Type: Grant
    Filed: January 27, 2004
    Date of Patent: September 4, 2007
    Assignee: Lake Shore Cryotronics, Inc.
    Inventor: Vladimir Kochergin