Patents Examined by Richard A. Rosenberger
  • Patent number: 6829057
    Abstract: A method and apparatus are disclosed for evaluating relatively small periodic structures formed on semiconductor samples. In this approach, a light source generates a probe beam which is directed to the sample. In one preferred embodiment, an incoherent light source is used. A lens is used to focus the probe beam on the sample in a manner so that rays within the probe beam create a spread of angles of incidence. The size of the probe beam spot on the sample is larger than the spacing between the features of the periodic structure so some of the light is scattered from the structure. A detector is provided for monitoring the reflected and scattered light. The detector includes multiple detector elements arranged so that multiple output signals are generated simultaneously and correspond to multiple angles of incidence. The output signals are supplied to a processor which analyzes the signals according to a scattering model which permits evaluation of the geometry of the periodic structure.
    Type: Grant
    Filed: September 9, 2003
    Date of Patent: December 7, 2004
    Assignee: Therma-Wave, Inc.
    Inventors: Jon Opsal, Allan Rosencwaig
  • Patent number: 6829052
    Abstract: In a sensor: a thin film is formed on a face of the dielectric block and in contact with a specimen; a semiconductor laser unit as a light source emits a light beam; an optical system injects the light beam into the dielectric block so that the light beam is incident on a boundary between the dielectric block and the thin film at a plurality of incident angles which are greater than a critical angle for total reflection; and a light detecting unit detects a state of attenuated total reflection by measuring the intensity of the light beam totally reflected from the boundary. The semiconductor laser unit is driven with a driving current on which a high frequency component is superimposed.
    Type: Grant
    Filed: December 26, 2001
    Date of Patent: December 7, 2004
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Masayuki Naya
  • Patent number: 6825939
    Abstract: The present invention relates to a method and a measurement apparatus for detection of a specimen (1), a specimen (1) being illuminated with a light source (2) and imaged with the aid of an imaging optical system (3) onto a detector (4) preferably embodied as a CCD camera, and the specimen (1) being detected repeatedly with the detector (4). With the method and the measurement apparatus according to the present invention, fluctuations in the statistical analysis of detected signals or data can be minimized, the detected signals or data being subject to detection-related error sources. The method and the measurement apparatus according to the present invention are characterized in that the detection time of the detector (4) for the individual detections and/or the intensity of the light serving for specimen illumination are varied.
    Type: Grant
    Filed: July 2, 2002
    Date of Patent: November 30, 2004
    Assignee: Leica Microsystems Semiconductor GmbH
    Inventor: Klaus Rinn
  • Patent number: 6825938
    Abstract: A film thickness measuring method comprises projecting white light onto a wafer with a film to be measured and sensing a first reflected light intensity from the wafer, determining the first reflected light intensity in the form of a first light intensity profile with wavelength as the abscissa axis and light intensity as the ordinate axis, projecting the white light onto a reference sample having the same structure as that of the underlying layer below the film and sensing a second reflected light intensity from the sample, determining the second reflected light intensity in the form of a second light intensity profile similarly to the first light intensity profile, calculating a normalized light intensity profile by dividing the first light intensity profile by the second light intensity profile, and calculating the film thickness of the film to be measured from the normalized light intensity profile.
    Type: Grant
    Filed: March 13, 2002
    Date of Patent: November 30, 2004
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Toru Mikami, Toshihiko Kikuchi
  • Patent number: 6822734
    Abstract: Method and apparatus for manufacture and inspection of flat articles, such as flat planel display substrates, that are manufactured in a contamination-sensitive environment. In particular, a manufacturing step such as applying coatings to the article is performed in a self-contained micro-environment, typically characterized by an airborn particulate concentration which is substantially lower than its surroundings. Automated inspection apparatus is provided inside the self-contained micro-environment of the fabrication equipment to inspect the article after completion of the fabrication step and before transfer of the article to other fabrication equipment. The inspection apparatus includes an illumination subsystem illuminating the article with various configurations of dark field and bright field illumination, a staring array sensor capturing images of the article under various illumination configurations and a computer that analyzes the images to automatically detect defects.
    Type: Grant
    Filed: September 4, 2001
    Date of Patent: November 23, 2004
    Assignee: Orbotech Ltd.
    Inventors: Doron Eidelman, David Fisch, Amir Noy, Avi Gross
  • Patent number: 6822749
    Abstract: The invention relates to a method and an arrangement for determining the geometry of objects using a coordinate measuring device. An optical system (10) is used to form an image of at least one light or scanning spot whose position depends on the geometry of the object on at least one detector (30). The imaging scale, depth of field and distance from the object are adjusted by means of a zoom lens (18) whose lens groups (20, 22) are each power driven and are axially displaceable.
    Type: Grant
    Filed: October 11, 2000
    Date of Patent: November 23, 2004
    Assignee: Werth Messtechnik GmbH
    Inventor: Ralf Christoph
  • Patent number: 6819417
    Abstract: A new method is provided for monitoring silicon quality, the new method is applied at the time of pre-salicidation of the silicon substrate. The optical refractive index of the pre-salicide substrate is monitored, this monitoring provides insight into the quality of the silicon substrate at that time of a substrate processing cycle.
    Type: Grant
    Filed: May 7, 2002
    Date of Patent: November 16, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Yun-Hung Shen, Bih-Huey Lee
  • Patent number: 6819438
    Abstract: To determine the uniformity of an optical component, a light beam is directed to impinge on a surface of an optical component at each of multiple points. A characteristic of the light beam impinging on the optical component surface at each of the multiple points is modified so as to have multiple different values. Light from the impinging light beam that passes through the optical component at each of the multiple points, with the light beam characteristic at each of the multiple different values, is detected. The non-uniformity of the optical component is determined based on the detected passing light.
    Type: Grant
    Filed: May 3, 2002
    Date of Patent: November 16, 2004
    Assignee: GSI Lumonics Corporation
    Inventors: Richard A. Neily, William McCreath, David Parker
  • Patent number: 6814503
    Abstract: A method and apparatus are disclosed for aligning an array of light transmitting elements to an array of photosensitive detectors. The array is adjusted along three axes. Any element (a coupled transmitting and detecting unit of the array) can be selected as the center of rotation. Small angular correction is made about the selected element by differentially moving the array in two axes, using adjustment tools. Alignment is accomplished by performing translational movement in the horizontal X and Y axes until a signal is detected. A rotational correction about the selected element is performed by moving one of a pair of adjustment devices until maximum light intensity is achieved for the end elements. Next, the array is scanned for the weakest performing element in the array. The alignment procedure is repeated until the performance of all of the elements in the array fall within a pre-established specification range.
    Type: Grant
    Filed: August 7, 2002
    Date of Patent: November 9, 2004
    Assignee: International Business Machines Corporation
    Inventors: Richard R. Hall, How Tzu Lin, Candido C. Tiberia
  • Patent number: 6816250
    Abstract: A method for measuring irregularities on the outer surface of an article employs an apparatus to obtain qualitative information regarding a first portion of the outer surface of the article, which can be used to generate a visual representation of a first portion of the outer surface of the article. Then, the article is moved by a predetermined amount, and the apparatus is again used to generate a visual representation of a second portion of the surface of the article. This process is repeated to obtain a plurality of visual representations that together span across a predetermined amount of the surface of the article. Then, the plurality of visual representations are processed to generate a single comprehensive enlarged visual representation of a relatively large surface area of the article, which is preferably shaded, colored, or otherwise highlighted to illustrate the irregularities that are formed therein.
    Type: Grant
    Filed: June 12, 2001
    Date of Patent: November 9, 2004
    Assignee: Dana Corporation
    Inventors: Mark Shuster, Dana M. Combs, Donald K. Cohen
  • Patent number: 6813010
    Abstract: A personal identification system, which uses a vein pattern of a finger, optimizes the amount of light of a light source based on a captured finger image and emphasizes the vein pattern during image processing for identification.
    Type: Grant
    Filed: September 18, 2001
    Date of Patent: November 2, 2004
    Assignee: Hitachi, LTD
    Inventors: Miyuki Kono, Shin-ichiro Umemura, Takafumi Miyatake, Kunio Harada, Yoshitoshi Ito, Hironori Ueki
  • Patent number: 6813026
    Abstract: A purge system for an optical metrology tool is disclosed. The metrology tool includes an optics plate for supporting the measurement optics. A movable stage supports a wafer below the optics plate. Inert purge gas is injected between the lower surface of the optics plate and the upper surface of the wafer. The gas flow functions to stabilize and homogenize the ambient in the measurement region. The gas flow also serves to clear the measurement area of absorbing species which is particular useful for measurements using vacuum ultraviolet light.
    Type: Grant
    Filed: December 21, 2001
    Date of Patent: November 2, 2004
    Assignee: Therma-Wave, Inc.
    Inventor: Jeffrey E. McAninch
  • Patent number: 6809826
    Abstract: Method and apparatus of spectroscopy or the like on extremely small samples in which a drop is held between two opposing surfaces by surface tension and one surface is controllably toward and away from the other. To provide and transmit exciting energy through the drop for measurement, optical fibers go through a surface and finish flush with the surface. One of the surfaces can be swung clear of the other for easy cleaning between tests. Means for determining wetted surface are provided.
    Type: Grant
    Filed: February 19, 2002
    Date of Patent: October 26, 2004
    Inventor: Charles William Robertson
  • Patent number: 6809825
    Abstract: A gas permeable probe for use in an optical analyzer for an exhaust gas stream flowing through a duct or chimney has: an elongate hollow structure having first and second ends and a side wall, with an optical cavity defined between the first and second ends within the side wall, a mounting structure at the first end and adapted for mounting the elongate hollow structure within the duct or chimney, a support member at the second end, a connecting structure connecting the mounting structure at the first end to the support member at the second end, an optical window at the first end permitting a beam of light originating from an optical analyzer to enter into the optical cavity to travel from the first end to the second end, a filter forming a part of the side wall, and a retroreflector provided at the second end for returning the light beam to the first end of the hollow structure, the optical window being releasably mounted at the first end of the elongate hollow structure and/or the retroreflector bei
    Type: Grant
    Filed: November 13, 2001
    Date of Patent: October 26, 2004
    Assignee: Sick AG
    Inventor: Jürgen Kaufmann
  • Patent number: 6806952
    Abstract: An inspection and retrieval device for vehicle fuel tanks comprising an elongated insertion tube having an end illumination source. A fuel pump in communication with the insertion tube defining a fuel path there through. An extensible gripping element extending from the insertion tube at its inlet and an illuminating source. A power source for the fluid pump and illumination source with interconnected control switches. The insertion tube is placed within a vehicle fuel filled tank and the illumination source is activated. The inspection tube can be maneuvered within the tank for visual inspection. Foreign objects can be engaged by the gripping element and removed while foreign liquid in the tank can be pumped out by activation of the fluid pump.
    Type: Grant
    Filed: June 28, 2002
    Date of Patent: October 19, 2004
    Inventor: Bernard A. Kois
  • Patent number: 6804012
    Abstract: An optoelectronic arrangement for the detection of relative movements or relative positions of two objects, with the arrangement comprising at least four optoelectronic elements, characterized in that the optoelectronic elements are arranged in at least one first plane and in a second plane different from the first one in such a manner that at least three optoelectronic elements are arranged in the first plane and at least one optoelectronic element is arranged in the second plane. Further, a force and/or moment sensor provided with this arrangement with a first board and a second board, with the first board and the second board being elastically connected with each other and movable relative to one another. Finally, a personal computer keyboard which is provided with such a force and/or moment sensor.
    Type: Grant
    Filed: March 12, 2002
    Date of Patent: October 12, 2004
    Assignee: 3D Connection GmbH
    Inventor: Bernd Gombert
  • Patent number: 6801316
    Abstract: A non-invasive detection method for glucose and other constituents of interest in a sample is described. The apparatus and methods of the invention provide an analog of color perception of human vision, preferably in the near infrared region, replacing the spectrophotometers used in other non-invasive near infrared detection methods. A plurality of detection units are used, each covering a broad region of the detected spectrum, paralleling color perception and colorimetry. In some circumstances, a neural net is used for analysis, allowing the system to learn. Analyte concentrations in scattering mediums can be obtained by calibrating the results with in vitro measurements.
    Type: Grant
    Filed: July 19, 2002
    Date of Patent: October 5, 2004
    Assignee: Optix LP
    Inventor: Howard E. Guthermann
  • Patent number: 6798498
    Abstract: A polysilicon film evaluation apparatus is provided which enables objective automatic evaluation of the status of a polysilicon film, as formed to a high accuracy in a contact-free fashion.
    Type: Grant
    Filed: January 18, 2002
    Date of Patent: September 28, 2004
    Assignees: Sony Corporation, Sony Precision Technology Inc.
    Inventors: Hiroyuki Wada, Koichi Tatsuki, Nobuhiko Umezu, Eiji Isomura, Tetsuo Abe, Tadashi Hattori, Akifumi Ooshima, Makoto Uragaki, Yoshiyuki Noguchi, Hiroyuki Tamaki, Masataka Ebe, Tomohiro Ishiguro, Yasuyuki Kato
  • Patent number: 6798502
    Abstract: The nonlinear system includes a fixed visible input and tunable visible input that are directed to a location on a surface to be interrogated. The fixed visible input and the tunable visible inputs are aligned so that their surface locations of optical illumination overlap on the interrogated location. An output wavelength discriminator receives the reflected difference-frequency generated on the interrogated location. The output wavelength discriminator is substantially non-transmissive at frequencies higher than the difference-frequency, but substantially transmissive at the difference-frequency of the fixed visible input and the tunable visible input. The output of the output wavelength is a microwave output. Signal collection optics receives an output of the output wavelength discriminator and directs the propagation of the output thereof so that a collected microwave light signal is formed after propagation through the signal collection optics.
    Type: Grant
    Filed: June 20, 2002
    Date of Patent: September 28, 2004
    Assignee: The Boeing Company
    Inventor: Jeffrey H. Hunt
  • Patent number: 6798504
    Abstract: Light beam is irradiated onto a surface of a substrate to be inspected and scattered lights from the surface of the substrate are received at different light reception angles, so that first and second light detection signals corresponding to the different light reception angles are generated. Reference function defining a correlation in level value between the first and second light detection signals is set, a comparison is made between respective level values of the first and second light detection signals using the reference function as a comparison reference, and it is determined, on the basis of a result of the comparison, which of a plurality of different types of defects, such as a foreign substance and crystal-originated pit, a possible defect present on the surface of the substrate, which is represented by the light detection signals, corresponds to.
    Type: Grant
    Filed: September 24, 2001
    Date of Patent: September 28, 2004
    Assignee: Hitachi High-Tech Electronics Engineering Co., Ltd.
    Inventors: Tatsuya Sato, Yuichiro Kato, Kenji Mitomo