Abstract: There is set forth herein in one embodiment, a structure including a metallic grating having a grating pattern, the metallic grating including a critical dimension. The metallic grating can output a spectral profile when exposed to electromagnetic radiation, the spectral profile having a feature. The grating pattern can be configured so that a change of the critical dimension produces a shift in a value of the feature of the spectral profile. A method can include propagating input electromagnetic radiation onto a metallic grating having a two dimensional periodic grating pattern and measuring a critical dimension of the metallic grating using output electromagnetic radiation from the metallic grating.
Type:
Grant
Filed:
September 8, 2015
Date of Patent:
January 5, 2021
Assignee:
THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK
Inventors:
Sam O' Mullane, Alain C. Diebold, Brennan Peterson, Nicholas Keller