Abstract: A processing system and processing method for blocked microreactor. The processing system comprises an gas intake device, a flushing device, a microreactor to be processed and a plasma processing device. One end of the microreactor to be processed is connected with the gas intake device and the flushing device through a pipeline; the other end of the microreactor to be processed is connected with a waste liquid bottle through the pipeline; and the microreactor to be processed is arranged between electrodes of the plasma processing device. The present invention uses the effective reactivity of plasma and active free radicals in an excitation atmosphere to crack micro blockage in a micro channel in a short time. The method of the present invention has high flexibility and strong controllability, and can select plasma electrodes according to blocked regions to crack the blockage in a specific region.

Abstract: Systems and methods to remediate, degrade, and/or remove pollutants within various contaminated environmental solid media that includes contaminated soils and sediments, biosolids and slurries by subjecting a mixture of the contaminated solids and a liquid to acoustic cavitation generated by more than one type of ultrasonic device. One of the ultrasonic devices operates at a low frequency and the other ultrasonic device operates at a high frequency. The system advantageously provide an efficient, sustainable, and easy to handle approach to degrade contaminant, requiring only electrical energy.

Abstract: There is provided a focus ring that is capable of preventing deposits from adhering to a member having a lower temperature in a gap between two members having different temperatures. A focus ring 25 is disposed to surround a peripheral portion of a wafer W in a chamber 11 of a substrate processing apparatus 10. The focus ring 25 includes an inner focus ring 25a and an outer focus ring 25b. Here, the inner focus ring 25a is placed adjacent to the wafer W and configured to be cooled; and the outer focus ring 25b is placed so as to surround the inner focus ring 25a and configured not to be cooled. Further, a block member 25c is provided in a gap between the inner focus ring 25a and the outer focus ring 25b.

Abstract: A method for monitoring a nozzle mouthpiece for placing on a nozzle for spraying materials, in particular dispersions, emulsions or suspensions.

Abstract: Edge trimming is performed on a wafer while a cleaning liquid is supplied to the center of a face side of the wafer and the wafer is rotated to form a film of the cleaning liquid that covers the face side of the wafer. The film of the cleaning liquid prevents the face side of the wafer from being dried, lowering the probability that swarf will be introduced into devices on the face side of the wafer. In addition, the consumption of the cleaning liquid can be reduced compared with a step of performing edge trimming on the wafer while supplying a curtain of cleaning liquid to the entire face side of the wafer.

Abstract: The present invention relates to a method of cleaning an optical film-thickness measuring system used for measuring a film thickness of a substrate, such as a wafer, while polishing the substrate. The method includes: cleaning an optical sensor head (7) by supplying a rinsing liquid into a through-hole (51) formed in a polishing pad (2) on a polishing table (3) before or after polishing of a substrate (W) with use of slurry, the optical sensor head (7) being located below the through-hole (51); and discharging the rinsing liquid from the through-hole (51) through a drain line (54).

Abstract: The present application discloses a preventive maintenance method for a chamber of a metal etching machine. An optimized burning cleaning recipe is added before the chamber is opened, and metal substances remaining on the surface of an electrostatic chuck are removed by adopting a cleaning/pumping down multi-step alternate method. Before the chamber is opened for preventive maintenance, the phenomenon of metal particles remaining on the surface of the electrostatic chuck can be significantly improved, thus solving the downtime problem caused by abnormal backside helium and ensuring the stability of mass production.

Abstract: Proposed is ultrasonic spoon washing apparatus and method, which use ultrasonic waves generated by one or more ultrasonic oscillators provided on a vertical side wall of polygonal surfaces of a wash tub, so that spoons contained in a spoon support part rotating forward/in reverse may very efficiently and conveniently be washed while the number of revolutions changes for each washing stage, the apparatus including: a frame body; the wash tub mounted inside the frame body; one or more ultrasonic oscillators provided on an outer side of the vertical side wall; a forward/reverse rotation support part including a support shaft and a rotation support pipe; a spoon support part including a holder and a spoon accommodation container; a rinsing water supply part configured to spray the rinsing water together with a rinsing aid; and a wastewater and foreign material discharge part configured to discharge, to the outside, wastewater and foreign materials.

Abstract: A method for cleaning a substrate includes the following: exposing the substrate to a cleaning agent to remove impurities on a surface of the substrate; exposing the substrate to a dewetting chemical agent in a liquid phase to remove the cleaning agent on the surface of the substrate; solidifying the dewetting chemical agent in the liquid phase remaining on the surface of the substrate to obtain the dewetting chemical agent in a solid phase; and sublimating and removing the dewetting chemical agent in the solid phase.

Abstract: A coating composition for imparting a hydrophobic film on a target surface is provided that includes a quaternary ammonium silane salt, a solvent, and a solid lubricant. The composition is stable and able to impart a hydrophobic film even after storage for several weeks at elevated temperature. The composition is non-absorbable or non-penetrative into an elastomeric applicator onto which the water repellant (WR) coating is applied, preserving the capability of transferring the WR ingredients of the coating from the wiper blade insert to a windshield on which the wiper blade insert is operated, even after the coated wiper blade insert has been aged for an extended period of time in storage. A wiper blade insert is also provided having the above composition applied and instructions for the securement of the wiper blade to a vehicle to impart the hydrophobic film to a vehicle windshield contacted by the wiper blade insert.

Abstract: A defouling device for mechanically disrupting fouling material for removal from a pipe or other a tubular member. The defouling device has inflatable portions capable of expanding to mechanically disrupt fouling material within a pipe. The defouling device may be attached to an inner luminal surface of the pipe or formed with the pipe. The defouling device expands circumferentially and radially to mechanically disrupt fouling material. The defouling device may also controllably expand longitudinally to mechanically disrupt fouling material and peristaltically pump fouling material through and out of the pipe.

Abstract: A system for cleaning solar panels (photo-electric and/or water heating etc.) is driven by fluid driven motor (water and/or air driven motor) such as a piston motor or a vane motor. Some or all of the outlet water/air from the motor is used for cleaning the panels. The motor preferably also operates a cleaning mechanism, such as a rotating and or linear brush arrangement. The motor, gear system and/or components may be made from plastic. Optionally, a cleaning device travels along the edges of panels, optionally without requiring an additional rail structure. The cleaning device optionally includes a trailing water/air supply hose. In some embodiments, electrical components of the cleaning device are powered by an internal power supply. Control is optionally via an electrically actuated valve, a timer (for example a real time clock), a wireless receiver and/or a controller.

Abstract: The present invention provides a cleaning method and equipment thereof for object FOUP, comprising the following steps: firstly separating the object FOUP into a container lid and a container body, then conducting individual processes of wet washing, liquid removing and vacuum drying for the container lid and container body, and in the end combining the container lid and container body to complete the cleaning procedure of the object FOUP; specifically, during the liquid removing process, multiple wind knives are used to carry out liquid removing for the container body, and during the vacuum drying process after liquid removing, multiple thermal components are used to carry out vacuum drying for the container body under a vacuum environment; moreover, the present invention also includes the cleaning equipment to execute the above method, for the purpose of overcoming the problem that the wet cleaning process in the conventional automatic chip FOUP cleaning technique cannot effectively clean object FOUPs with

Abstract: Cleaning, maintaining, refurbishing, and/or diagnosing engine components including fuel system components, e.g., such as fuel-injectors. In one embodiment, a method of cleaning a fuel system component is provided. The method includes supplying a cleaning solution through the fuel system component, discontinuing the supplying of the cleaning solution, repeating the supplying of the cleaning solution and the discontinuing of the supplying of the cleaning solution a plurality of times, decoupling the source of cleaning solution, and connecting a source of fuel to the fuel system component, and supplying fuel through the fuel system component to re-establish fuel-based operation. In additional embodiments, a method of processing a fuel system component while it remains connected to an engine assembly, and a method of diagnosing a defective fuel system component, are provided.

Abstract: An automatic tensioning apparatus is provided that includes a tensioning drive unit having: a longitudinally extending stationary base frame with a plurality of guides extending between a lower portion and an upper portion, and a plurality of rotatable feed wheels axially secured at the lower portion, as well as a translatable drive frame slidably coupled to the plurality of guides with a drive assembly coupled to the drive frame, the drive assembly including a drive motor and a tensile member interface for engaging and rotationally translating a tensile member. The tensioning drive unit further including a plurality of drive frame actuators actuatable to move the drive frame between a bottom frame position and a top frame position, as well as a sensor for at least indirectly sensing the position of the drive frame along a longitudinal base frame axis.

Abstract: The invention relates to a non-corrosive process for cleaning a recyclable material comprising the following steps: (a) providing a contaminated recyclable material; (b) treating the contaminated recyclable material at a temperature in the range of from 45-30° C. with a solution that contains one or more polyols to remove contaminants from the contaminated recyclable material, wherein the one or more polyols is (are) present in an amount of at least 15 wt. %, based on the total weight of the solution, thereby forming a liquid 10 mixture which comprises one or more polyols, contaminants removed from the recyclable material, and treated recyclable material; (c) separating at a temperature in the range 10-55° C.

Abstract: An embodiment provides a method for cleaning a surface, including: encapsulating a cleaning composition in a polymer material to form a compound, wherein the polymer material surrounds the cleaning composition; placing the compound in a location adjacent to the surface, wherein the location adjacent to the surface is a volume separated from an outer volume; dissolving the polymer material at a pH above a target value above the polymer material pH dissolution point, wherein the dissolving releases the cleaning composition; and cleaning the surface using the released cleaning composition. Other aspects are described and claimed.

Abstract: Method for the prevention and/or removal of biofilm and sediment formation in borehole tubes or distribution tubes, with the following steps: (i) mounting one or more ultrasonic transducers (9, 9?) on an aboveground part of the tube; (ii) sending the ultrasonic waves whereby both the power and the frequency of the ultrasonic waves are varied in time, with a frequency between 20 and 60 kHz and a power between 1 and 6 Watt for smaller tubes and between 6 and 40 Watt for larger tubes; (iii) sending the varying ultrasonic waves through the water that flows or is pumped through the tube; (iv) providing an automatic interruption of the effect of the ultrasonic waves when the flow of the water through the tube stops, either by shutting off the transducers, or by the automatic operation of a non-return valve which interrupts the water column between the transducer and the underlying mass of water.

Abstract: There is provided a technique that includes: removing a deposit adhering to an inside of a process container by supplying a cleaning gas into the process container after performing a process of forming a film on a substrate in the process container, wherein the act of removing the deposit includes sequentially and repeatedly performing: a first process of supplying the cleaning gas into the process container until a predetermined first pressure is reached in the process container; a second process of stopping the supply of the cleaning gas and exhausting the cleaning gas and a reaction product generated by the cleaning gas remaining in the process container; and a third process of cooling an exhaust pipe that connects the process container and a vacuum pump, while maintaining a pressure inside the process container at a second pressure, which is lower than the first pressure, or lower.

Abstract: A reusable apparatus, such as a medical instrument or tool, is decontaminated by applying pressure waves with direct contact of the pressure wave applicator to the reusable apparatus in an open bath in a sufficient dosage to remove contamination but without adversely affecting the ability to reuse the apparatus.