Patents Examined by Shih Tsun A Chou
-
Patent number: 11690304Abstract: A method of fabricating a synaptic device is provided. The method includes forming a channel layer between a first terminal and a second terminal. The channel layer varies in resistance based on a magnesium concentration in the channel layer. The method further includes forming an electrolyte layer. The electrolyte layer includes a magnesium ion conductive material. A third terminal is formed over the electrolyte layer and applies a signal to the electrolyte layer and the channel layer.Type: GrantFiled: October 7, 2021Date of Patent: June 27, 2023Assignee: International Business Machines CorporationInventors: Douglas M. Bishop, Martin Michael Frank, Teodor Krassimirov Todorov
-
Patent number: 11683992Abstract: A magnetic memory device may include an interlayer insulating layer on a substrate, a bottom electrode contact disposed in the interlayer insulating layer, and a magnetic tunnel junction pattern on the bottom electrode contact. The bottom electrode contact may include a second region and a first region, which are sequentially disposed in a first direction perpendicular to a top surface of the substrate so that the second region is between the first region and the top surface of the substrate. A first width of the first region may be smaller than a second width of the second region, when measured in a second direction parallel to the top surface of the substrate.Type: GrantFiled: December 27, 2020Date of Patent: June 20, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyungjong Jeong, Ki Woong Kim, Younghyun Kim, Junghwan Park, Byoungjae Bae, Se Chung Oh, Jungmin Lee, Kyungil Hong
-
Patent number: 11678587Abstract: A ferroelectric device includes a substrate, a first electrode on the substrate, and a hexagonal ferroelectric material on the first electrode. The first electrode comprises a single crystal epitaxial material. By using a single crystal epitaxial material for an electrode to a hexagonal ferroelectric material, a high-quality material interface may be provided between these layers, thereby improving the performance of the ferroelectric device by allowing for a reduced coercive field.Type: GrantFiled: October 21, 2020Date of Patent: June 13, 2023Assignee: Cornell UniversityInventors: Darrell Schlom, Rachel Steinhardt, Megan Holtz
-
Patent number: 11677003Abstract: A nanowire device of the present description may be produced with the incorporation of at least one hardmask during the fabrication of at least one nanowire transistor in order to assist in protecting an uppermost channel nanowire from damage that may result from fabrication processes, such as those used in a replacement metal gate process and/or the nanowire release process. The use of at least one hardmask may result in a substantially damage free uppermost channel nanowire in a multi-stacked nanowire transistor, which may improve the uniformity of the channel nanowires and the reliability of the overall multi-stacked nanowire transistor.Type: GrantFiled: April 12, 2021Date of Patent: June 13, 2023Assignee: Sony Group CorporationInventors: Seung Hoon Sung, Seiyon Kim, Kelin J. Kuhn, Willy Rachmady, Jack T. Kavalieros
-
Patent number: 11672180Abstract: Semiconductor devices and methods of manufacturing the semiconductor devices are provided in which spacers are utilized in order to help protect bottom electrode vias. In embodiments, an opening is formed through dielectric layers, and spacers are formed along sidewalls of the dielectric layers. A bottom electrode via is formed adjacent to the spacers, a bottom, electrode is formed, a magnetic tunnel junction (MTJ) structure is formed over the bottom electrode, and a top electrode is formed over the MTJ structure. The structure is patterned, and the spacers help to protect the bottom electrode via from undesired damage during the patterning process.Type: GrantFiled: November 20, 2020Date of Patent: June 6, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Tsung-Hsueh Yang
-
Patent number: 11665977Abstract: In an embodiment, a device includes: a magnetoresistive random access memory (MRAM) array including MRAM cells arranged in rows and columns, where a first column of the columns includes: first bottom electrodes arranged along the first column; first magnetic tunnel junction (MTJ) stacks over the first bottom electrodes; a first shared electrode over each of the first MTJ stacks; second bottom electrodes arranged along the first column; second MTJ stacks over the second bottom electrodes; a second shared electrode over each of the second MTJ stacks; and a bit line electrically connected to the first shared electrode and the second shared electrode.Type: GrantFiled: May 29, 2020Date of Patent: May 30, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tai-Yen Peng, Yu-Feng Yin, An-Shen Chang, Han-Ting Tsai, Qiang Fu
-
Patent number: 11659771Abstract: A method includes providing a structure having a memory region and a logic region; a first metal layer and a dielectric barrier layer over the first metal layer in both the memory region and the logic region; a first dielectric layer over the dielectric barrier layer; multiple magnetic tunneling junction (MTJ) devices over the first metal layer, the dielectric barrier layer, and the first dielectric layer; and a second dielectric layer over the first dielectric layer and the MTJ devices. The first dielectric layer, the MTJ devices, and the second dielectric layer are in the memory device region and not in the logic device region. The method further includes depositing an extreme low-k (ELK) dielectric layer using FCVD over the memory region and the logic region; and buffing the ELK dielectric layer to planarize a top surface of the ELK dielectric layer.Type: GrantFiled: November 25, 2020Date of Patent: May 23, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hsiang-Ku Shen, Dian-Hau Chen
-
Patent number: 11659779Abstract: Various embodiments may provide a memory cell. The memory cell may include an active electrode including an active electrode material. The memory cell may also include a first noble electrode contact with the active electrode, the first noble electrode being a patterned electrode including a noble electrode material. The memory cell may further include a resistive switching layer in contact with the active electrode and the first noble electrode. The memory cell may additionally include a second noble electrode including a noble electrode material, the second noble electrode in contact with the resistive switching layer.Type: GrantFiled: March 8, 2019Date of Patent: May 23, 2023Assignees: Agency for Science, Technology and Research, National University of SingaporeInventors: Wen Xiao, Wendong Song, Jun Ding, Ernult Franck Gerard
-
Patent number: 11652072Abstract: To improve reliability of a semiconductor device. There are provided the semiconductor device and a method of manufacturing the same, the semiconductor including a pad electrode that is formed over a semiconductor substrate and includes a first conductive film and a second conductive film formed over the first conductive film, and a plating film that is formed over the second conductive film and used to be coupled to an external connection terminal (TR). The first conductive film and the second conductive film contains mainly aluminum. The crystal surface on the surface of the first conductive film is different from the crystal surface on the surface of the second conductive film.Type: GrantFiled: April 8, 2021Date of Patent: May 16, 2023Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Takashi Tonegawa, Hiroshi Inagawa
-
Patent number: 11653573Abstract: A magnetic domain wall movement element includes a wiring layer containing a ferromagnetic material, a non-magnetic layer in contact with the first surface of the wiring layer, a first conductive layer connected to the first surface of the wiring layer and containing a ferromagnetic material; and a second conductive layer connected to the wiring layer at a distance from the first conductive layer. A first part of the connection face of the first conductive layer is directly connected to the wiring layer, and a second part of the connection face other than the first part is connected to the wiring layer via the non-magnetic layer.Type: GrantFiled: September 30, 2020Date of Patent: May 16, 2023Assignee: TDK CORPORATIONInventors: Takuya Ashida, Tatsuo Shibata
-
Patent number: 11647680Abstract: Provided are embodiments for a semiconductor device. The semiconductor device includes a bottom electrode, wherein the bottom electrode is formed on a metal interconnect electrode, and a dielectric layer on a surface of the bottom electrode. The semiconductor device also includes a top electrode formed on a surface of the dielectric layer, wherein at least one of the top electrode or the bottom electrode is a plasma treated top electrode or plasma treated bottom electrode. Also provided are embodiments for a method of fabricating a resistive switching device where at least one of the plurality of layers of the memory stack is processed with a charge particle treatment.Type: GrantFiled: June 11, 2020Date of Patent: May 9, 2023Assignee: International Business Machines CorporationInventors: Takashi Ando, Hiroyuki Miyazoe, Eduard Albert Cartier, Babar Khan, Youngseok Kim, Dexin Kong, Soon-Cheon Seo, Joel P. De Souza
-
Patent number: 11641787Abstract: The present disclosure provides a self-rectifying resistive memory, including: a lower electrode; a resistive material layer formed on the lower electrode and used as a storage medium; a barrier layer formed on the resistive material layer and using a semiconductor material or an insulating material; and an upper electrode formed on the barrier layer to achieve Schottky contact with the material of the barrier layer; wherein, the Schottky contact between the upper electrode and the material of the barrier layer is used to realize self-rectification of the self-rectifying resistive memory. Thus, no additional gate transistor or diode is required as the gate unit. In addition, because the device has self-rectifying characteristics, it is capable of suppressing read crosstalk in the cross-array.Type: GrantFiled: March 28, 2018Date of Patent: May 2, 2023Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Qing Luo, Hangbing Lv, Ming Liu
-
Patent number: 11637182Abstract: A silicon carbide semiconductor device includes a semiconductor substrate, a first semiconductor layer, a second semiconductor layer, a first semiconductor region, and a gate electrode. Protons are implanted in a first region spanning a predetermined distance from a surface of the semiconductor substrate facing toward the first semiconductor layer, in a second region spanning a predetermined distance from a surface of the first semiconductor layer on the second side of the first semiconductor layer facing toward the semiconductor substrate, in a third region spanning a predetermined distance from a surface of the first semiconductor layer on the first side of the first semiconductor layer facing toward the second semiconductor layer, and in a fourth region spanning a predetermined distance from a surface of the second semiconductor layer on the second side of the second semiconductor layer facing toward the first semiconductor layer.Type: GrantFiled: May 4, 2021Date of Patent: April 25, 2023Assignee: FUJI ELECTRIC CO., LTD.Inventor: Takumi Fujimoto
-
Patent number: 11637233Abstract: A method for fabricating a semiconductor device includes the steps of forming a magnetic tunneling junction (MTJ) on a MRAM region of a substrate, forming a first inter-metal dielectric (IMD) layer around the MTJ, forming a patterned mask on a logic region of the substrate, performing a nitridation process to transform part of the first IMD layer to a nitride layer, forming a first metal interconnection on the logic region, forming a stop layer on the first IMD layer, forming a second IMD layer on the stop layer, and forming a second metal intercom in the second IMD layer to connect to the MTJ.Type: GrantFiled: November 1, 2020Date of Patent: April 25, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hui-Lin Wang, Chen-Yi Weng, Si-Han Tsai, Che-Wei Chang, Po-Kai Hsu, Jing-Yin Jhang, Yu-Ping Wang, Ju-Chun Fan, Ching-Hua Hsu, Yi-Yu Lin, Hung-Yueh Chen
-
Patent number: 11631803Abstract: A semiconductor device for internet of things (IoT) device includes a substrate having an array region defined thereon and a ring of dummy pattern surrounding the array region. Preferably, the ring of dummy pattern includes a plurality of magnetic tunneling junctions (MTJs) and a ring of metal interconnect pattern overlapping the MTJs and surrounding the array region. The semiconductor device further includes a gap between the array region and the ring of dummy pattern.Type: GrantFiled: December 27, 2020Date of Patent: April 18, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hui-Lin Wang, Chun-Hsien Lin
-
Patent number: 11631805Abstract: A method for forming a semiconductor device includes the steps of providing a substrate having a memory region and a logic region, forming a memory stack structure on the memory region, forming a passivation layer covering a top surface and sidewalls of the memory stack structure, forming a first interlayer dielectric layer on the passivation layer, performing a post-polishing etching back process to remove a portion of the first interlayer dielectric layer and a portion of the passivation layer on the top surface of the memory stack structure, forming a second interlayer dielectric layer on the first interlayer dielectric layer and directly contacting the passivation layer, and forming an upper contact structure through the second interlayer dielectric layer and the passivation layer on the top surface of the memory stack structure to contact the memory stack structure.Type: GrantFiled: December 14, 2020Date of Patent: April 18, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventor: Chih-Wei Kuo
-
Patent number: 11621295Abstract: The disclosed technology relates to the field of memory devices including memory arrays, and more particularly, to magnetic memory devices. In one aspect, the disclosed technology provides a method of fabricating a memory device, and the memory device. The method comprises: processing a plurality of selector devices in a semiconductor layer of a first substrate, processing an interconnect layer on a front-side of the semiconductor layer, the interconnect layer comprising an interconnect structure electrically connected to the plurality of selector devices, processing a plurality of memory elements in an oxide layer of the first substrate arranged on a back-side of the semiconductor layer, each memory element being electrically connected to one of the selector devices, and processing one or more vias through the semiconductor layer to electrically connect the memory elements to the interconnect structure.Type: GrantFiled: November 6, 2020Date of Patent: April 4, 2023Assignee: IMEC vzwInventors: Gaspard Hiblot, Shamin Houshmand Sharifi, Geert Van der Plas
-
Patent number: 11616195Abstract: Exemplary semiconductor structures for neuromorphic applications may include a first layer overlying a substrate material. The first layer may be or include a first oxide material. The structures may include a second layer disposed adjacent the first layer. The second layer may be or include a second oxide material. The structures may also include an electrode material deposited overlying the second layer.Type: GrantFiled: May 26, 2020Date of Patent: March 28, 2023Assignee: Applied Materials, Inc.Inventors: Deepak Kamalanathan, Archana Kumar, Siddarth Krishnan
-
Patent number: 11616196Abstract: Switching oxide engineering technologies relating to low current RRAM-based crossbar array circuits are disclosed. An apparatus, in some implementations, includes: a substrate; a bottom electrode formed on the substrate; a switching oxide stack formed on the bottom electrode. The switching oxide stack includes one or more base oxide layers and one or more discontinuous oxide layers alternately stacked; An apparatus further includes a top electrode formed on the switching oxide stack. The base oxide layer includes TaOx, HfOx, TiOx, ZrOx, or a combination thereof. The discontinuous oxide layer includes Al2O3, SiO2, Si3N4, Y2O3, Gd2O3, Sm2O3, CeO2, Er2O3, or the combination thereof.Type: GrantFiled: July 7, 2020Date of Patent: March 28, 2023Assignee: TetraMem Inc.Inventors: Minxian Zhang, Ning Ge
-
Patent number: 11610876Abstract: A light conversion device includes a light-emitting unit, a photoelectric conversion unit, and an electroconductive bonding layer. Each of the light-emitting unit and the photoelectric conversion unit includes a first-type region and a second-type region opposite to the first-type region. The electroconductive bonding layer is disposed between the light-emitting unit and the photoelectric conversion unit for connecting the photoelectric conversion unit with the light-emitting unit. When the light conversion device is operated to receive a bias and an external light, the light-emitting unit generates a modulated light having a frequency different from that of the external light.Type: GrantFiled: September 23, 2021Date of Patent: March 21, 2023Assignees: EPISTAR CORPORATION, NATIONAL TSTNG HUA UNIVERSITYInventors: Meng-Chyi Wu, Jyun-Hao Liao, Hsiang-Hui Wang