Patents Examined by Thanh Y. Tran
  • Patent number: 11653491
    Abstract: A method of manufacturing contacts is provided in the present invention, which include the steps of forming a plurality of mask bars on a substrate, forming a circular mask surrounding each mask bar, wherein the circular masks connect each other and define a plurality of opening patterns collectively with the mask bars, using the mask bars and the circular masks as etch masks to perform an etch process and to transfer the opening patterns and form a plurality recesses in the substrate, and filling up the recesses with metal to form contacts.
    Type: Grant
    Filed: April 21, 2021
    Date of Patent: May 16, 2023
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Feng-Yi Chang, Fu-Che Lee
  • Patent number: 11652059
    Abstract: Techniques and mechanisms for high interconnect density communication with an interposer. In some embodiments, an interposer comprises a substrate and portions disposed thereon, wherein respective inorganic dielectrics of said portions adjoin each other at a material interface, which extends to each of the substrate and a first side of the interposer. A first hardware interface of the interposer spans the material interface at the first side, wherein a first one of said portions comprises first interconnects which couple the first hardware interface to a second hardware interface at the first side. A second one of said portions includes second interconnects which couple one of first hardware interface or the second hardware interface to a third hardware interface at another side of the interposer. In another embodiment, a metallization pitch feature of the first hardware interface is smaller than a corresponding metallization pitch feature of the second hardware interface.
    Type: Grant
    Filed: November 29, 2021
    Date of Patent: May 16, 2023
    Assignee: Intel Corporation
    Inventors: Adel Elsherbini, Shawna Lift, Johanna Swan, Gerald Pasdast
  • Patent number: 11646261
    Abstract: An integrated circuit includes a plurality of layers stacked in a first direction, a plurality of unit circuits at least partially overlapping each other in a second direction that is perpendicular to the first direction and configured to operate in parallel with one another, control circuitry configured to generate a control signal to control the plurality of unit circuits, and a multi-layer conducting line configured to transfer the control signal from the control circuitry to the plurality of unit circuits. The multi-layer conducting line may be integrally formed in a wiring layer and a via layer and extends in the second direction. The wiring layer and the via layer may be adjacent to each other.
    Type: Grant
    Filed: March 10, 2021
    Date of Patent: May 9, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Tae-hyung Kim, Chan-Ho Lee
  • Patent number: 11646234
    Abstract: A semiconductor device includes a semiconductor substrate, a semiconductor fin protruding from the semiconductor substrate, and an isolation layer disposed above the semiconductor substrate. The isolation layer includes a first portion disposed on a first sidewall of the semiconductor fin and a second portion disposed on a second sidewall of the semiconductor fin. Top surfaces of the first and second portions of the isolation layer are leveled. The first portion of the isolation layer includes an air pocket. The semiconductor device also includes a dielectric fin with a bottom portion embedded in the second portion of the isolation layer.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: May 9, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Han-Yu Lin, Yi-Ruei Jhan, Fang-Wei Lee, Tze-Chung Lin, Chao-Hsien Huang, Li-Te Lin, Pinyen Lin, Akira Mineji
  • Patent number: 11646275
    Abstract: A semiconductor package includes a substrate having a first surface and a second surface opposing the first surface; a plurality of first pads disposed on the first surface of the substrate and a plurality of second pads disposed on the second surface of the substrate and electrically connected to the plurality of first pads; a semiconductor chip disposed on the first surface of the substrate and connected to the plurality of first pads; a dummy chip having a side surface facing one side surface of the semiconductor chip, disposed on the first surface of the substrate spaced apart from the semiconductor chip in a direction parallel to the first surface of the substrate, the dummy chip having an upper surface positioned lower than an upper surface of the semiconductor chip in a direction perpendicular to the first surface of the substrate; an underfill disposed between the semiconductor chip and the first surface of the substrate, and having an extension portion extended along the facing side surfaces of the s
    Type: Grant
    Filed: July 14, 2021
    Date of Patent: May 9, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Su Chang Lee
  • Patent number: 11646256
    Abstract: A semiconductor device and method of manufacture are provided whereby an interposer and a first semiconductor device are placed onto a carrier substrate and encapsulated. The interposer comprises a first portion and conductive pillars extending away from the first portion. A redistribution layer located on a first side of the encapsulant electrically connects the conductive pillars to the first semiconductor device.
    Type: Grant
    Filed: May 14, 2021
    Date of Patent: May 9, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Hao Tsai, Po-Yao Chuang, Shin-Puu Jeng, Techi Wong
  • Patent number: 11640943
    Abstract: A semiconductor wafer includes a wafer body including an active layer having a first crystal orientation and having first and second surfaces opposing each other, and a support layer having a second crystal orientation different from the first crystal orientation and having third and fourth surfaces opposing each other, a bevel portion that extends along an outer periphery of the wafer body to connect the first surface to the fourth surface, and a notch portion formed at a predetermined depth in a direction from the outer periphery of the wafer body toward a center portion of the wafer body. The bevel portion includes a first beveled surface connected to the first surface and a second beveled surface connected to the fourth surface. The first beveled surface has a width in a radial direction of the wafer body that is 300 ?m or less.
    Type: Grant
    Filed: September 1, 2021
    Date of Patent: May 2, 2023
    Inventors: Jung-A Lee, Yeon Sook Kim, Han Byul Jang
  • Patent number: 11640948
    Abstract: A connector structure and a manufacturing method thereof are provided. The connector structure includes a semiconductor substrate, a metal layer, a passivation layer, and a conductive structure. The metal layer is over the semiconductor substrate. The passivation layer is over the metal layer and includes an opening. The conductive structure is in contact with the metal layer in a patterned surface structure of the conductive structure through the opening of the passivation layer.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: May 2, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shing-Yih Shih, Tieh-Chiang Wu
  • Patent number: 11637150
    Abstract: The present disclosure provides an organic light-emitting diode display substrate, a method of preparing the same, and a display device. The organic light-emitting diode display substrate includes: a light-emitting layer, a light modulation layer, and a color conversion layer, in which the light-emitting layer is configured to emit first color light, the light modulation layer and the color conversion layer are arranged on different light-exiting paths of the light-emitting layer, the color conversion layer is configured to convert first color light into second color light and third color light, and the light modulation layer is configured to modulate an emergent direction of first color light.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: April 25, 2023
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Guang Yan, Changyen Wu, Juanjuan You, Linlin Wang
  • Patent number: 11637130
    Abstract: An object is to provide a display device which operates stably with use of a transistor having stable electric characteristics. In manufacture of a display device using transistors in which an oxide semiconductor layer is used for a channel formation region, a gate electrode is further provided over at least a transistor which is applied to a driver circuit. In manufacture of a transistor in which an oxide semiconductor layer is used for a channel formation region, the oxide semiconductor layer is subjected to heat treatment so as to be dehydrated or dehydrogenated; thus, impurities such as moisture existing in an interface between the oxide semiconductor layer and the gate insulating layer provided below and in contact with the oxide semiconductor layer and an interface between the oxide semiconductor layer and a protective insulating layer provided on and in contact with the oxide semiconductor layer can be reduced.
    Type: Grant
    Filed: January 12, 2022
    Date of Patent: April 25, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junichiro Sakata, Toshinari Sasaki, Miyuki Hosoba
  • Patent number: 11631767
    Abstract: A semiconductor structure and a method for forming a semiconductor structure are disclosed. One form a semiconductor structure includes: a substrate, comprising a first region used to form a well region and a second region used to form a drift region, wherein the first region is adjacent to the second region; and a fin, protruding out of the substrate, wherein the fins comprise first fins located at a junction of the first region and the second region and second fins located on the second region, and a quantity of the second fins is greater than a quantity of the first fins.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: April 18, 2023
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventor: Fei Zhou
  • Patent number: 11631738
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a first semiconductor stack having a first threshold voltage and comprising a first insulating stack positioned on the substrate, a second semiconductor stack having a second threshold voltage and comprising a second insulating stack positioned on the substrate, and a third semiconductor stack having a third threshold voltage and comprising a third insulating stack positioned on the substrate. The first threshold voltage, the second threshold voltage, and the third threshold voltage are different from each other, a thickness of the first insulating stack is different from a thickness of the second insulating stack and a thickness of the third insulating stack, and the thickness of the second insulating stack is different from the thickness of the third insulating stack.
    Type: Grant
    Filed: November 24, 2021
    Date of Patent: April 18, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Tse-Yao Huang
  • Patent number: 11626375
    Abstract: A semiconductor memory device includes: a stack above a peripheral circuit on a first substrate, in which first conductive layers and first insulation layers are alternately stacked in a first direction each; a first pillar through the stack, in which a semiconductor layer and each first conductive layer form a memory cell at their intersection; a second substrate including a first region above the stack and the first pillar, being connected to a semiconductor layer, and a second region juxtaposed with the first region in a second direction; a second insulation layer through the second substrate, insulating the regions from each other; and a second conductive layer including a first portion through the second substrate, and a second portion extending in the second direction above the second substrate and including a part defining a bonding pad. The second portion overlaps with the second insulation layer in the first direction.
    Type: Grant
    Filed: June 14, 2021
    Date of Patent: April 11, 2023
    Assignee: Kioxia Corporation
    Inventor: Hideo Wada
  • Patent number: 11616035
    Abstract: A semiconductor structure, including a substrate and multiple chips, is provided. The chips are stacked on the substrate. Each of the chips has a first side and a second side opposite to each other. Each of the chips includes a transistor adjacent to the first side and a storage node adjacent to the second side. Two adjacent chips are bonded to each other. The transistor of one of the two adjacent chips is electrically connected to the storage node of the other one of the two adjacent chips to form a memory cell.
    Type: Grant
    Filed: August 9, 2021
    Date of Patent: March 28, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Teng-Chuan Hu, Chun-Hung Chen, Chu-Fu Lin
  • Patent number: 11610878
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The method includes providing a bottom substrate; bonding a first stacking chip and a second stacking chip onto the bottom substrate; conformally forming a first isolation layer to cover the first and second stacking chips and to at least partially fill a gap between the first and second stacking chips; performing a thinning process to expose back surfaces of the first and second stacking chips; performing a removal process to expose through substrate vias of the first and second stacking chips; forming a first capping layer to cover the through substrate vias of the first and second stacking chips; and performing a planarization process to expose the through substrate vias of the first and second stacking chips and provide a substantially flat surface.
    Type: Grant
    Filed: September 2, 2021
    Date of Patent: March 21, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yi-Jen Lo
  • Patent number: 11609330
    Abstract: A silicon phased array based LiDAR device that measures a distance using a quasi-frequency modulation is disclosed.
    Type: Grant
    Filed: April 3, 2020
    Date of Patent: March 21, 2023
    Assignee: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
    Inventors: Hyo-Hoon Park, Hyeonho Yoon, Nam-Hyun Kwon, Kyeongjin Han, Hyun-Woo Rhee, Geum-Bong Kang
  • Patent number: 11610997
    Abstract: A semiconductor material is an oxide including a metal element and nitrogen, in which the metal element is indium (In), an element M (M is aluminum (Al), gallium (Ga), yttrium (Y), or tin (Sn)), and zinc (Zn) and nitrogen is taken into an oxygen vacancy or bonded to an atom of the metal element.
    Type: Grant
    Filed: November 15, 2018
    Date of Patent: March 21, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Shota Sambonsuge, Yasumasa Yamane, Yuta Endo, Naoki Okuno
  • Patent number: 11605594
    Abstract: A package comprising a substrate, an integrated device, and an interconnect integrated device. The substrate includes a first surface and a second surface. The substrate further includes a plurality of interconnects. The integrated device is coupled to the substrate. The interconnect integrated device is coupled to a surface of the substrate. The integrated device, the interconnect integrated device and the substrate are configured to provide an electrical path for an electrical signal of the integrated device, that travels through at least the substrate, then through the interconnect integrated device and back through the substrate.
    Type: Grant
    Filed: September 10, 2020
    Date of Patent: March 14, 2023
    Assignee: QUALCOMM INCORPORATED
    Inventors: Ryan Lane, Li-Sheng Weng, Charles David Paynter, Eric David Foronda
  • Patent number: 11594650
    Abstract: Example embodiments relate to controlling detection time in photodetectors. An example embodiment includes a device. The device includes a substrate. The device also includes a photodetector coupled to the substrate. The photodetector is arranged to detect light emitted from a light source that irradiates a top surface of the device. A depth of the substrate is at most 100 times a diffusion length of a minority carrier within the substrate so as to mitigate dark current arising from minority carriers photoexcited in the substrate based on the light emitted from the light source.
    Type: Grant
    Filed: March 3, 2021
    Date of Patent: February 28, 2023
    Assignee: Waymo LLC
    Inventors: Caner Onal, Simon Verghese, Pierre-Yves Droz
  • Patent number: 11587919
    Abstract: A microelectronic device comprises a first die comprising a memory array region comprising a stack structure comprising vertically alternating conductive structures and insulative structures, and vertically extending strings of memory cells within the stack structure. The first die further comprises first control logic region comprising a first control logic devices including at least a word line driver. The microelectronic device further comprise a second die attached to the first die, the second die comprising a second control logic region comprising second control logic devices including at least one page buffer device configured to effectuate a portion of control operations of the vertically extending string of memory cells. Related microelectronic devices, electronic systems, and methods are also described.
    Type: Grant
    Filed: July 17, 2020
    Date of Patent: February 21, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Aaron S. Yip, Kunal R. Parekh, Akira Goda