Patents Examined by Thomas R Artman
  • Patent number: 11703465
    Abstract: An apparatus for inspecting a semiconductor device according to an embodiment includes an X-ray irradiation unit configured to make monochromatic X-rays obliquely incident on the semiconductor device, which is an object at a predetermined angle of incidence, a detection unit configured to detect observed X-rays observed from the object using a plurality of two-dimensionally disposed photodetection elements, an analysis apparatus configured to generate X-ray diffraction images obtained by photoelectrically converting the observed X-rays, and a control unit configured to change an angle of incidence and a detection angle of the X-rays, in which the analysis apparatus acquires an X-ray diffraction image every time the angle of incidence is changed, extracts a peak X-ray diffraction image, X-ray intensity of which becomes maximum for each of pixels and compares the peak X-ray diffraction image among the pixels to thereby estimate a stress distribution of the object.
    Type: Grant
    Filed: February 5, 2021
    Date of Patent: July 18, 2023
    Assignee: Kioxia Corporation
    Inventors: Nobuhito Kuge, Toshihisa Fujiwara, Yui Fujiwara, Chisaki Usui
  • Patent number: 11697030
    Abstract: A radiation delivery system and method of operation are described. The method includes modulating a sub-beam intensity of a radiation beam generated by a radiation source across a plurality of sub-beams that subdivide a fluence field into a two-dimensional (2D) grid, and delivering a plurality of independent two-dimensional (2D) sub-beam intensity patterns from a plurality of angles while the radiation source is moved continuously.
    Type: Grant
    Filed: July 17, 2020
    Date of Patent: July 11, 2023
    Assignee: Accuray Incorporated
    Inventors: Eric Schnarr, Robert O'Connell, Richard Nash, Matthew Orton, Jacob Shea
  • Patent number: 11698354
    Abstract: Provided is a portable XRF data screening method for heavy metal contaminated soil, relating to the technical field of heavy metal contamination test. The method includes the following steps: (1) laboratory test; (2) XRF test; and (3) calculation of a recheck interval: dividing test data into four areas by a contaminant screening value Xc as a horizontal line and a correlation-derived site screening value as a vertical line to calculate the recheck interval. The method is simple and efficient, and is beneficial to saving investigation costs and shortening a project cycle.
    Type: Grant
    Filed: December 21, 2022
    Date of Patent: July 11, 2023
    Assignee: BEIJING MUNICIPAL RESEARCH INSTITUTE OF ENVIRONMENTAL PROTECTION
    Inventors: Lina Zhang, Lin Jiang, Tianxiang Xia, Xiaoying Zhu
  • Patent number: 11691031
    Abstract: Systems and methods for determining beam asymmetry in a radiation treatment system using electronic portal imaging devices (EPIDs) without implementation of elaborate and complex EPID calibration procedures. The beam asymmetry is determined based on radiation scattered from different points in the radiation beam and measured with the same region of interest ROI of the EPID.
    Type: Grant
    Filed: November 10, 2021
    Date of Patent: July 4, 2023
    Assignee: SIEMENS HEALTHINEERS INTERNATIONAL AG
    Inventors: Reto Ansorge, Mathias Lehmann, Stefan J. Thieme-Marti
  • Patent number: 11691029
    Abstract: A method of operating imaging and tracking. The method includes determining, for each angle of a plurality of angles from which tracking images can be generated by an imaging device, a value of a tracking quality metric for tracking a target based on an analysis of a projection generated at that angle. The method also includes selecting, by a processing device, a subset of the plurality of angles that have a tracking quality metric value that satisfies a tracking quality metric criterion, one or more angles of the subset to be used to generate a tracking image of the target during a treatment stage, wherein the subset comprises at least a first angle and a second angle that is at least separated by a minimum threshold from the first angle.
    Type: Grant
    Filed: June 6, 2022
    Date of Patent: July 4, 2023
    Assignee: Accuray Incorporated
    Inventors: Petr Jordan, Andriy Myronenko, Calvin Maurer, Eric Schnarr, Rob O'Connell
  • Patent number: 11681068
    Abstract: An x-ray imaging apparatus includes an x-ray source module configured to output source x-rays, a pencil-beam-forming module having input and output ports, and a module engagement interface that enables a user to select aligned and non-aligned configurations of the source and pencil-beam-forming modules. In the aligned configuration, the pencil-beam-forming module is aligned with the source module to receive source x-rays at the input port and to output a scanning pencil beam through the output port toward a target. In the non-aligned configuration, the pencil-beam-forming module is not aligned with the x-ray source module to receive the source x-rays nor to output the pencil beam, but instead enables the source x-rays to form a stationary, wide-area beam directed toward the target. Example embodiments can be handheld, can enable both backscatter imaging and high-resolution transmission imaging using the same apparatus, and can be employed in finding and disarming explosive devices.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: June 20, 2023
    Assignee: Viken Detection Corporation
    Inventor: Peter J. Rothschild
  • Patent number: 11670053
    Abstract: The invention relates to non-destructive imaging of the internal structure for safe and intuitive operator work. In the context of the invented method, electronic scanning first creates a virtual image of the surface of the object (5) whose internal structure is the subject of research. Part of the surface of the object (5) and the angle of scanning are set by voice or by movement of the operator's body (9). The virtual image of the surface of the object (5) is subsequently projected in the stereoscopic glasses (7), followed by creation of the virtual image of the internal structure of the object (5) for the same angle of scanning. The virtual image of the internal structure is projected in the virtual image of the surface of the object (5), or replaces the virtual image of the object (5).
    Type: Grant
    Filed: December 4, 2018
    Date of Patent: June 6, 2023
    Assignee: RADALYTICA A.S.
    Inventors: Josef Uher, Jan Zahalka
  • Patent number: 11666296
    Abstract: Systems and methods for reducing X-ray scatter during breast imaging, and more specifically during tomosynthesis imaging. In one embodiment, an anti-scatter grid having a plurality of septa may be configured to be positioned relative to an X-ray imaging device such that each septum of the plurality of septa extends along a direction substantially parallel to a coronal plane of a subject during imaging of the subject using the X-ray imaging device. The X-ray imaging device may be operable in a tomosynthesis mode for imaging of a breast of the subject and may include the anti-scatter grid disposed between a breast platform and the X-ray detector. The anti-scatter grid may be configured to move in a direction substantially parallel to a sagittal plane of the subject during tomosynthesis imaging.
    Type: Grant
    Filed: February 2, 2022
    Date of Patent: June 6, 2023
    Assignee: Hologic, Inc.
    Inventors: Thomas Farbizio, Kenneth F. Defreitas, Ian Shaw
  • Patent number: 11665806
    Abstract: The present disclosure relates to a downhole tool that includes a first photon flux detector disposed at a first radial position about a longitudinal axis of the downhole tool that measures a first signal indicative of an x-ray flux of the x-ray photons. The downhole tool also includes a second photon flux detector disposed at a second radial position about the longitudinal axis of the downhole tool that measures a second signal indicative of the x-ray flux of the x-ray photons. Further, the downhole tool includes a controller communicatively coupled to the first photon flux detector and the second photon flux detector that determines a condition associated with the electron beam based at least in part on a relative x-ray flux from the first photon flux detector and the second photon flux detector.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: May 30, 2023
    Assignee: SCHLUMBERGER TECHNOLOGY CORPORATION
    Inventors: Jani Reijonen, Vincent Ernst
  • Patent number: 11660359
    Abstract: Technology is described to uniformly apply doses of radiation to a target material. An irradiation device may comprise an enclosure configured to receive a target material and a source configured to emit primary radiation within the enclosure. The primary radiation may be configured to irradiate at least a first portion of the target material. The irradiation device may further comprise a scattering medium disposed within the enclosure. The scattering medium may be configured to produce secondary radiation through scatter interactions in response to the primary radiation, the secondary radiation configured to irradiate at least a second portion of the target material. A thickness of the scattering medium relative to the primary radiation may have a thickness of at least 3 millimeters).
    Type: Grant
    Filed: April 19, 2021
    Date of Patent: May 30, 2023
    Assignee: Varex Imaging Corporation
    Inventors: Daniel Shedlock, David Nisius, Gregory Andrews, Jeff Adams
  • Patent number: 11639904
    Abstract: An inspection device includes a ray source that irradiates an object to be inspected with energy rays, a detection unit that detects energy rays that have passed through the object to be inspected, a displacement mechanism that sets a relative position of the object to be inspected and the ray source by displacing at least one of the object to be inspected and the ray source in relation to the other, an internal image generation unit that generates an internal image of the object to be inspected based on a detection amount distribution of the energy rays detected by the detection unit, and a control unit that controls the displacement mechanism based on the detection amount distribution of the energy rays detected by the detection unit.
    Type: Grant
    Filed: April 26, 2017
    Date of Patent: May 2, 2023
    Assignee: Nikon Corporation
    Inventors: Takeshi Ohbayashi, Masayuki Zaike, Takahiro Michimoto
  • Patent number: 11630095
    Abstract: A cabinet x-ray device for imaging seeds includes an x-ray source configured to transmit an x-ray beam along a beam path. A seed holder is configured to hold seeds and be selectively positioned in the x-ray device such that the beam path crosses the seed holder and the x-ray beam passes through at least some of the seeds. An x-ray detector is configured to detect the x-ray beam after passing through the seeds such that one or more x-ray images of the seeds can be formed. Self-supporting x-ray shielding can extend circumferentially around the x-ray beam to mitigate x-ray transmission outside the device. A drive mechanism can automatically move the seed holder so that discrete x-ray images of subsets of seeds are taken in an automatic seed imaging operation. Various seed evaluations and seed process evaluations can be made using the device.
    Type: Grant
    Filed: November 12, 2020
    Date of Patent: April 18, 2023
    Assignee: MONSANTO TECHNOLOGY LLC
    Inventors: Eric Borrowman, Donald J. Essner, Alfred B. Garson, III, Govind Chaudhary, Johnny J. Kotyk
  • Patent number: 11609189
    Abstract: CT scanner comprising a scanning conveyor (9) mounted on a supporting structure and configured to move an object (3) for CT examination forward through a scanning area (8), an input conveyor (10) configured to convey the object until the scanning chamber (2), and an output conveyor (11) configured to convey an object (3) out of the scanning chamber (2), wherein the input conveyor (10), the scanning conveyor (9) and the output conveyor (11) are configured to move forward the object (3) placed on a supporting unit (19) mechanically detached therefore, and wherein the scanning conveyor (9) is configured to rotate the supporting unit (19) and the object (3) on themselves as they travel through the scanning area (8). The input conveyor (10) and the output conveyor (11) are fitted with shields configured in such a way as to intercept all x-rays emitted from the scanning area (8) which escape from the scanning chamber (2) towards the conveyors.
    Type: Grant
    Filed: June 3, 2021
    Date of Patent: March 21, 2023
    Assignee: BIOMETIC S.R.L.
    Inventors: Thomas Prenn, Enrico Ursella
  • Patent number: 11592406
    Abstract: A detection scheme for x-ray small angle scattering is described. An x-ray small angle scattering apparatus may include a first grating and a complementary second grating. The first grating includes a plurality of first grating cells. The complementary second grating includes a plurality of second grating cells. The second grating is positioned relative to the first grating. A configuration of the first grating, a configuration of the second grating and the relative positioning of the gratings are configured to pass one or more small angle scattered photons and to block one or more Compton scattered photons and one or more main x-ray photons.
    Type: Grant
    Filed: April 1, 2022
    Date of Patent: February 28, 2023
    Assignee: Rensselaer Polytechnic Institute
    Inventors: Ge Wang, Guang Li, Wenxiang Cong
  • Patent number: 11583703
    Abstract: According to one embodiment, a particle beam therapy system comprising: a circular accelerator configured to accelerate charged particles; a beam transportation line configured to lead the charged particles accelerated by the circular accelerator to an irradiation room; a shielding wall that is disposed around a radiation controlled area and shields radiation to be generated from the circular accelerator and the beam transportation line, the radiation controlled area being an area where the circular accelerator and the beam transportation line are disposed; a specific portion that is provided at a position that separates the radiation controlled area from outside of the shielding wall and can form an additional opening portion of the irradiation room; and a blocking portion configured to close the specific portion and shield radiation passing through the specific portion.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: February 21, 2023
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORPORATION
    Inventors: Yoshifumi Nagamoto, Yoshiharu Kanai, Takashi Yazawa
  • Patent number: 11577320
    Abstract: An embodiment of a shutter assembly is described that comprises a support structure with a number of stations and operatively coupled to a motor configured to translate each of the stations to a position in front of a detector, wherein a first station comprises a first aperture, a first charged particle filter, and a first window; and a second station comprises a second aperture larger than the first aperture, a second charged particle filter, and a second window thinner than the first window.
    Type: Grant
    Filed: June 9, 2021
    Date of Patent: February 14, 2023
    Assignee: THERMO ELECTRON SCIENTIFIC INSTRUMENTS LLC
    Inventors: Justin Morrow, Steven J. Foote
  • Patent number: 11579099
    Abstract: This disclosure relates to an apparatus and methods for applying X-ray reflectometry (XRR) in characterizing three dimensional nanostructures supported on a flat substrate with a miniscule sampling area and a thickness in nanometers. In particular, this disclosure is targeted for addressing the difficulties encountered when XRR is applied to samples with intricate nanostructures along all three directions, e.g. arrays of nanostructured poles or shafts. Convergent X-ray with long wavelength, greater than that from a copper anode of 0.154 nm and less than twice of the characteristic dimensions along the film thickness direction, is preferably used with appropriate collimations on both incident and detection arms to enable the XRR for measurements of samples with limited sample area and scattering volumes.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: February 14, 2023
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Chun-Ting Liu, Wen-Li Wu, Bo-Ching He, Guo-Dung Chen, Sheng-Hsun Wu, Wei-En Fu
  • Patent number: 11579327
    Abstract: The present specification provides a detector for an X-ray imaging system. The detector includes at least one high resolution layer having high resolution wavelength-shifting optical fibers, each fiber occupying a distinct region of the detector, at least one low resolution layer with low resolution regions, and a single segmented multi-channel photo-multiplier tube for coupling signals obtained from the high resolution fibers and the low resolution regions.
    Type: Grant
    Filed: December 16, 2020
    Date of Patent: February 14, 2023
    Assignee: American Science and Engineering, Inc.
    Inventors: Aaron J. Couture, Jeffrey M. Denker
  • Patent number: 11549895
    Abstract: A system and method for analyzing a three-dimensional structure of a sample includes generating a first x-ray beam having a first energy bandwidth less than 20 eV at full-width-at-half maximum and a first mean x-ray energy that is in a range of 1 eV to 1 keV higher than an absorption edge energy of a first atomic element of interest, and that is collimated to have a collimation angular range less than 7 mrad in at least one direction perpendicular to a propagation direction of the first x-ray beam; irradiating the sample with the first x-ray beam at a plurality of incidence angles relative to a substantially flat surface of the sample, the incidence angles of the plurality of incidence angles in a range of 3 mrad to 400 mrad; and simultaneously detecting a reflected portion of the first x-ray beam from the sample and detecting x-ray fluorescence x-rays and/or photoelectrons from the sample.
    Type: Grant
    Filed: September 15, 2021
    Date of Patent: January 10, 2023
    Assignee: Sigray, Inc.
    Inventors: Wenbing Yun, Benjamin Donald Stripe, Janos Kirz, Sylvia Jia Yun Lewis
  • Patent number: 11543545
    Abstract: A method and apparatus are provided for nonlinear energy correction of a gamma-ray detector using a calibration spectrum acquired from the background radiation of lutetium isotope 176 (Lu-176) present in scintillators in the gamma-ray detector. Further, by periodically acquiring Lu-176 spectra using the background radiation from the scintillators, the nonlinear energy correction can be monitored to detect when changes in the gamma-ray detector cause the detector to go out of calibration, and then use a newly acquired Lu-176 spectrum to update the calibration of the nonlinear energy correction as needed. The detector calibration is performed by comparing a reference histogram to a calibration histogram generated using the nonlinear energy correction, and adjusting the parameters of the nonlinear energy correction until the two histograms match.
    Type: Grant
    Filed: February 12, 2020
    Date of Patent: January 3, 2023
    Assignee: CANON MEDICAL SYSTEMS CORPORATION
    Inventors: Xiaoli Li, Yi Qiang, Kent C. Burr