Patents Examined by Timothy H. Meeks
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Patent number: 7959984Abstract: In a plasma processing system, a method of reducing byproduct deposits on a set of plasma chamber surfaces of a plasma processing chamber is disclosed. The method includes providing a deposition barrier in the plasma processing chamber, the deposition barrier is configured to be disposed in a plasma generating region of the plasma processing chamber, thereby permitting at least some process byproducts produced when a plasma is struck within the plasma processing chamber to adhere to the deposition barrier and reducing the byproduct deposits on the set of plasma processing chamber surfaces.Type: GrantFiled: December 22, 2004Date of Patent: June 14, 2011Assignee: Lam Research CorporationInventors: Shrikant P. Lohokare, Andrew D. Bailey, III
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Patent number: 7959986Abstract: This invention relates to organometallic precursor compounds represented by the formula (Cp(R?)x)yM(H)z-y, a process for producing the organometallic precursor compounds, and a method for depositing a metal and/or metal carbide layer, e.g., Ta metal and/or TaC layer, on a substrate by the thermal or plasma enhanced disassociation of the organometallic precursor compounds, e.g., by CVD or ALD techniques. The metal and/or metal carbide layer is useful as a liner or barrier layer for conducting metals and high dielectric constant materials in integrated circuit manufacturing.Type: GrantFiled: February 2, 2009Date of Patent: June 14, 2011Assignee: Praxair Technology, Inc.Inventors: David Walter Peters, David M. Thompson
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Patent number: 7959985Abstract: A method for forming a modified TaC or TaCN film that may be utilized as a barrier film for Cu metallization. The method includes disposing a substrate in a process chamber of a plasma enhanced atomic layer deposition (PEALD) system configured to perform a PEALD process, depositing a TaC or TaCN film on the substrate using the PEALD process, and modifying the deposited TaC or TaCN film by exposing the deposited TaC or TaCN film to plasma excited hydrogen or atomic hydrogen or a combination thereof in order to remove carbon from at least the plasma exposed portion of the deposited TaCN film. The method further includes forming a metal film on the modified TaCN film, where the modified TaCN film provides stronger adhesion to the metal film than the deposited TaCN film. According to one embodiment, a TaCN film is deposited from alternating exposures of TAIMATA and plasma excited hydrogen.Type: GrantFiled: March 20, 2006Date of Patent: June 14, 2011Assignee: Tokyo Electron LimitedInventors: Tadahiro Ishizaka, Tsukasa Matsuda, Masamichi Hara, Jacques Faguet, Yasushi Mizusawa
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Patent number: 7955647Abstract: A simple method is provided for manufacturing a film such as a piezoelectric film wherein the adhesiveness of the film on a substrate can be improved. An aerosol containing particles is ejected onto a substrate so that the particles adhere thereto, wherein the ratio between the Vickers hardness Hv(b) of the adhesion surface to which the particles are attached in the substrate, and the Vickers hardness Hv(p) of the particles is within a range of 0.39?Hv(p)/Hv(b)?3.08. The adhesiveness between the particles and the substrate can thereby be improved to reliably form a film. The present invention can be satisfactorily applied to the formation of a piezoelectric film.Type: GrantFiled: March 28, 2005Date of Patent: June 7, 2011Assignees: Brother Kogyo Kabushiki Kaisha, National Institute of Advanced Industrial Science and TechnologyInventors: Motohiro Yasui, Jun Akedo, Sou Baba
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Patent number: 7955637Abstract: An electrosurgical device including a reinforcing underlayment having a non-stick, anti-microbial coating. In one embodiment, the coating includes a non-stick material having anti-microbial particles interspersed in the non-stick material. This coating is applied to the surfaces of the electrode to minimize the build-up of charred tissue on the surfaces of the electrode. Also, the coating tends to kill harmful organisms residing on the surfaces of the electrode. In another embodiment, a primer coating is initially applied to the surfaces of the electrode. A plurality of anti-microbial particles are then applied to the primer coating layer and engage and are embedded in the primer coating layer. A top coat including a non-stick material is applied to the anti-microbial particle layer. In either embodiment, the coating layers applied to the surfaces of the electrode are cured to harden and adhere the layers to the electrode.Type: GrantFiled: May 7, 2010Date of Patent: June 7, 2011Assignee: Innovatech LLCInventor: Bruce Nesbitt
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Patent number: 7955648Abstract: A method to form alignment layers on a substrate of an LCD is disclosed. The substrate is placed in a vacuum chamber and undergoes a purging process. The purging process heats the substrates and removes water vapor from the vacuum chamber. Specifically, The vacuum chamber is evacuated to a low pressure and refilled with a preheated inert gas. Evacuation of the vacuum chamber and refilling of the vacuum chamber is repeated several times. The alignment layer is then deposited using chemical vapor deposition.Type: GrantFiled: September 15, 2005Date of Patent: June 7, 2011Assignee: Hiap L. Ong and Kyoritsu Optronics, Co., LtdInventor: Hiap L. Ong
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Patent number: 7955642Abstract: A method for layering lenses includes: plasma treating a lens surface; applying a removable ink layer onto the lens surface; applying a base ink layer over the removable ink layer; applying at least one colored ink layer over the base ink layer; and removing the removable ink layer. Additional steps may include drying the lens, sealing the sides of the lens, and applying liquid to the lens before removing the removable ink layer.Type: GrantFiled: November 20, 2008Date of Patent: June 7, 2011Inventor: Roger Hsu
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Patent number: 7951413Abstract: A balloon for a catheter and a method of making the balloon, having a layer of a porous polymeric material with a modified outer surface and a lubricious coating bonded to the modified outer surface. In one embodiment, the modified outer surface is formed by a polymer impregnated in the porous polymeric material, and the subsequently applied lubricious coating bonds to the impregnating polymer. In another embodiment, the modified outer surface is formed by a functionality deposited on the porous polymeric material which bonds to the subsequently applied lubricious coating. The modified outer surface provides an improved strong bond between the lubricious coating and the balloon, for improved catheter performance.Type: GrantFiled: October 18, 2006Date of Patent: May 31, 2011Assignee: Abbott Cardiovascular Systems Inc.Inventors: Fozan El-Nounou, Timothy Owens, Florencia Lim, Edwin Wang
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Patent number: 7951415Abstract: A pole layer has an end located in a medium facing surface, the end having: a first side close to a substrate; a second side located opposite to the first side; a third side connecting an end of the first side to an end of the second side; and a fourth side connecting the other end of the first side to the other end of the second side. The second side defines a track width. The end of the pole layer located in the medium facing surface has a width that decreases toward the first side. The pole layer is disposed in a groove of a pole-layer-encasing layer made of a nonmagnetic insulating material, with a nonmagnetic conductive film provided between the encasing layer and the pole layer. The pole layer incorporates: a first layer located closer to the surface of the groove; and a second layer located farther from the surface of the groove.Type: GrantFiled: August 15, 2008Date of Patent: May 31, 2011Assignee: Headway Technologies, Inc.Inventors: Yoshitaka Sasaki, Dong-Hong Li, Shigeki Tanemura, Hiroyuki Itoh
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Patent number: 7951421Abstract: A method of depositing a layer onto a substrate, comprising heating an evaporator to a temperature capable of completely evaporating the evaporant to be deposited, dispensing into the evaporator one or more quantized units of the evaporant where the evaporant is completely vaporized, providing an area vapor dispenser having a plurality of apertures, and directing the vaporized evaporant from the evaporator to the area vapor dispenser so that the evaporant is dispensed through the apertures to deposit the layer on the substrate.Type: GrantFiled: April 20, 2006Date of Patent: May 31, 2011Assignee: Global OLED Technology LLCInventors: Yuan-Sheng Tyan, Michael Long, Giana M. Phelan, Thomas R. Cushman
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Patent number: 7951425Abstract: The present invention relates to a process for the metal coating of nano-fibers by electrospinning, to the metal coated nano-fibers obtained by this process and to the use of said metal coated nano-fibers. The process is characterized in that a polymer nano-fiber with functional groups providing the binding ability to a reducing reagent is prepared by electrospinning at ambient conditions. Then this is contacted with a reducing agent, thereby opening the epoxy ring on the surface of polymer nano-fiber and replacing with the reducing agent and the reducing agent modified film is reacted with metal solution in alkaline media. Finally the electrospun mat is treated with water to open the epoxy rings in the structure and crosslinking the chains to provide integrity.Type: GrantFiled: August 28, 2003Date of Patent: May 31, 2011Assignee: Sabanci UniversitesiInventors: Mustafa Muammer Demir, Mehmet Ali Gulgun, Yusuf Ziya Menceloglu
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Patent number: 7951412Abstract: A method is provided for depositing a hard wear resistant surface onto a porous or non-porous base material of a medical implant. The wear resistant surface of the medical implant device may be formed by a Laser Based Metal Deposition (LBMD) method such as Laser Engineered Net Shaping (LENS). The wear resistant surface may include a blend of multiple different biocompatible materials. Further, functionally graded layers of biocompatible materials may be used to form the wear resistant surface. Usage of a porous material for the base may promote bone ingrowth to allow the implant to fuse strongly with the bone of a host patient. The hard wear resistant surface provides device longevity, particularly when applied to bearing surfaces such as artificial joint bearing surfaces or a dental implant bearing surfaces. An antimicrobial material such as silver may be deposited in combination with a metal to form an antimicrobial surface deposit.Type: GrantFiled: January 17, 2007Date of Patent: May 31, 2011Assignee: MedicineLodge Inc.Inventors: Daniel F. Justin, Brent E. Stucker, Durga Janaki Ram Gabbita, David William Britt
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Patent number: 7951422Abstract: The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors, as well as us of patterned substrates to grow oriented nanowires. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.Type: GrantFiled: December 20, 2006Date of Patent: May 31, 2011Assignee: Nanosys, Inc.Inventors: Yaoling Pan, Xiangfeng Duan, Robert S. Dubrow, Jay Goldman, Shahriar Mostarshed, Chunming Niu, Linda T. Romano, David P. Stumbo, Alice Fischer-Colbrie, Vijendra Sahi, Virginia Robbins
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Patent number: 7947331Abstract: A method for making a thermal interface material includes the steps of: (a) providing an array of carbon nanotubes formed on a substrate, the carbon nanotubes having interfaces defined therebetween; (b) providing a transferring device and disposing at least one low melting point metallic material above the array of carbon nanotubes, using the transferring device; and (c) heating the low melting point metallic material and the array of carbon nanotube to a certain temperature to make the at least one low melting point metallic material melt, then flow into the interspaces between the carbon nanotubes, and combine (e.g., mechanically) with the array of carbon nanotubes to acquire a carbon-nanotube-based thermal interface material.Type: GrantFiled: April 28, 2008Date of Patent: May 24, 2011Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.Inventors: Yun-Hsin Kevin Liao, Yuan Yao, Chang-Shen Chang, Hsien-Sheng Pei, Kai-Li Jiang, Chang-Hong Liu
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Patent number: 7947339Abstract: A process for producing an electrophotographic roller member comprising a roller base member having a conductive mandrel and an elastic layer, and a film on the elastic layer. The process comprises the step of forming the film by plasma CVD. The step comprises the steps of: placing the roller base member in a chamber in such a way that the distance between the surface of the elastic layer and flat-plate electrodes is 20 mm or more to 100 mm or less; feeding a source gas into the chamber so as to have a pressure of from 13.3 Pa or more to 666.6 Pa or less; and applying to an electrode an electric power of from 0.3 W/cm2 or more to 2.0 W/cm2 or less while rotating the roller base member so that the peripheral speed of from 6 mm/s or more to 170 mm/s or less.Type: GrantFiled: October 29, 2008Date of Patent: May 24, 2011Assignee: Canon Kabushiki KaishaInventors: Kenichi Yamauchi, Hidenori Satoh, Genya Anan
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Patent number: 7943192Abstract: A piezoelectric/electrostrictive film type device including a thin substrate made of ceramic and a piezoelectric/electrostrictive operating portion disposed on the substrate and constituted by successively laminating a lower electrode film, a piezoelectric/electrostrictive film containing a large number of crystal particles constituted of a piezoelectric/electrostrictive composition, and an upper electrode film. The piezoelectric/electrostrictive composition contains one or more alkali metal elements selected from the group consisting of lithium, potassium, and sodium, and one or more metal elements selected from the group consisting of niobium, tantalum, antimony, and silver. Circle equivalent diameters of 90% or more of the large number of crystal particles are in a range of 0.3 to 50 ?m.Type: GrantFiled: December 13, 2007Date of Patent: May 17, 2011Assignee: NGK Insulators, Ltd.Inventors: Tsutomu Nanataki, Hirofumi Yamaguchi, Toshikatsu Kashiwaya, Takaaki Koizumi
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Patent number: 7943196Abstract: Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. A method includes depositing a catalyst particle on a surface of a substrate to define a deterministically located position; growing an aligned elongated nanostructure on the substrate, an end of the aligned elongated nanostructure coupled to the substrate at the deterministically located position; coating the aligned elongated nanostructure with a conduit material; removing a portion of the conduit material to expose the catalyst particle; removing the catalyst particle; and removing the elongated nanostructure to define a nanoconduit.Type: GrantFiled: November 14, 2005Date of Patent: May 17, 2011Assignee: UT-Battelle, LLCInventors: Anatoli V. Melechko, Timothy E. McKnight, Michael A. Guillorn, Bojan Ilic, Vladimir I. Merkulov, Mitchel J. Doktycz, Douglas H. Lowndes, Michael L. Simpson
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Patent number: 7943200Abstract: To provide an apparatus and method of curtain coating for applying onto a running web a coating solution from a lip top in the form of curtain to form a coating thereon, wherein a fluid is blown to remove excessive deposits of the coating solution that are formed at the edges in the width direction of the coating, and the deposits blown away by the fluid are ejected.Type: GrantFiled: March 11, 2008Date of Patent: May 17, 2011Assignee: Ricoh Company, Ltd.Inventors: Tomohito Shimizu, Shuji Hanai, Hideyuki Kobori, Yasuhide Takashita
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Patent number: 7939141Abstract: A method for the production of fluorinated carbon nanostructures such as carbon black is disclosed, wherein a plasma is generated in a plasma chamber and a fluorocarbon, or a fluorocarbon containing mixture, is supplied to the plasma to convert at least some of the fluorocarbon into a fluorinated carbon material. Direct pyrolysis of a fluorocarbon, or a mixture containing this, provides a one-step method for producing fluorinated carbon nanostructures with a formula CFx, where 0.06<x<0.15, the particles having a relatively narrow spread of diameters, and exhibiting excellent hydrophobicity.Type: GrantFiled: March 2, 2010Date of Patent: May 10, 2011Assignee: C-Tech Innovation LimitedInventors: Edward Stephen Matthews, Xiaoming Duan, Richard Llewellyn Powell
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Patent number: 7939139Abstract: Provided are methods for processing a substrate using a proximity system defined by one or more meniscus windows on one or more proximity heads. One method includes applying a first fluid meniscus to a surface of the substrate to apply a chemical precursor to the surface of the substrate. The first fluid meniscus is applied to first proximity meniscus window. Then, applying a second fluid meniscus to the surface of the substrate to leave an atomic layer of the chemical precursor on the surface of the substrate, through a second proximity meniscus window. A third fluid meniscus is applied to the surface of the substrate to apply a chemical reactant configured to react with the atomic layer of the chemical precursor to generate a layer of a material, through a third proximity meniscus window.Type: GrantFiled: November 23, 2009Date of Patent: May 10, 2011Assignee: Lam Research CorporationInventors: Mike Ravkin, Mikhail Korolik, Mark Wilcoxson