Patents by Inventor Aaron T. Radomski

Aaron T. Radomski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10396601
    Abstract: A radio frequency power system is provided that includes bias modules, a switch, a matching network, and a control module. The bias modules are configured to generate respectively DC bias voltages. The switch is configured to (i) receive current from the bias modules, and (ii) control flow of the current from the bias modules to generate a radio frequency bias voltage signal. The matching network is configured to (i) receive the radio frequency bias voltage signal, and (ii) based on the radio frequency bias voltage signal, supply at least a portion of a radio frequency output voltage signal to an electrode of a substrate support in a processing chamber. The control module is connected to the switch and configured to control a state of the switch based on the radio frequency output voltage signal to shape a waveform of the radio frequency bias voltage signal.
    Type: Grant
    Filed: May 25, 2017
    Date of Patent: August 27, 2019
    Assignee: MKS Instruments, Inc.
    Inventors: Ky Luu, Aaron T. Radomski
  • Publication number: 20190214231
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Application
    Filed: February 12, 2019
    Publication date: July 11, 2019
    Inventors: Larry J. FISK, II, Aaron T. RADOMSKI, Jonathan W. SMYKA
  • Publication number: 20190104609
    Abstract: A clamp configured to be coupled to a printed circuit board to cool and compress one or more electrical connections subject to repeated power and thermal cycling. A first conductive column of the clamp is configured to compress a first electrical connection between a first power device lead and a first printed circuit board trace of the printed circuit board, and draw thermal energy away from the first power device lead. The first conductive column extends from a load spreading plate. The load spreading plate is an insulator that electrically isolates a fastener extending therefrom from the first conductive column. The fastener is configured to cooperate with the circuit board to connect the clamp to the circuit board, compress the load spreading plate against the first conductive column to compress the first electrical connection, and connect the clamp to ground.
    Type: Application
    Filed: August 29, 2018
    Publication date: April 4, 2019
    Inventors: Ky LUU, Aaron T. RADOMSKI, Dave COFFTA
  • Patent number: 10229816
    Abstract: An eVC including coarse and fine tuning networks. The coarse tuning network includes a circuit: receiving a RF input signal from a RF generator; outputting a RF output signal to a reference terminal or load; and receiving a DC bias voltage. The circuit is switched between first and second states. A capacitance of the circuit is based on the DC bias voltage while in the first state and is not based on the DC bias voltage while in the second state. The fine tuning network is connected in parallel with the coarse tuning network and includes a varactor. The varactor includes: a first diode receiving the RF input signal; and a second diode connected in a back-to-back configuration with the first diode and outputting a RF output signal to the reference terminal or load. A capacitance of the varactor is based on a second received DC bias voltage.
    Type: Grant
    Filed: May 24, 2016
    Date of Patent: March 12, 2019
    Assignee: MKS Instruments, Inc.
    Inventors: David J. Coumou, Dennis M Brown, Aaron T. Radomski, Mariusz Oldziej, Yogendra K. Chawla, Daniel J. Lincoln
  • Patent number: 10217609
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: February 26, 2019
    Assignee: MKS Instruments, Inc.
    Inventors: Larry J. Fisk, II, Aaron T. Radomski, Jonathon W. Smyka
  • Publication number: 20180342903
    Abstract: A radio frequency power system is provided that includes bias modules, a switch, a matching network, and a control module. The bias modules are configured to generate respectively DC bias voltages. The switch is configured to (i) receive current from the bias modules, and (ii) control flow of the current from the bias modules to generate a radio frequency bias voltage signal. The matching network is configured to (i) receive the radio frequency bias voltage signal, and (ii) based on the radio frequency bias voltage signal, supply at least a portion of a radio frequency output voltage signal to an electrode of a substrate support in a processing chamber. The control module is connected to the switch and configured to control a state of the switch based on the radio frequency output voltage signal to shape a waveform of the radio frequency bias voltage signal.
    Type: Application
    Filed: May 25, 2017
    Publication date: November 29, 2018
    Inventors: Ky LUU, Aaron T. RADOMSKI
  • Publication number: 20180330921
    Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.
    Type: Application
    Filed: May 9, 2018
    Publication date: November 15, 2018
    Inventors: Aaron T. RADOMSKI, Ky LUU, Larry J. FISK, II, Ross REINHARDT, Matthew G. HARRINGTON, Amish RUGHOONUNDON, Jesse N. KLEIN, Aaron M. BURRY
  • Publication number: 20180294141
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Application
    Filed: June 12, 2018
    Publication date: October 11, 2018
    Inventors: Larry J. FISK, II, Aaron T. RADOMSKI, Jonathan W. SMYKA
  • Patent number: 10049857
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Grant
    Filed: November 30, 2015
    Date of Patent: August 14, 2018
    Assignee: MKS Instruments, Inc.
    Inventors: Larry J. Fisk, II, Aaron T. Radomski, Jonathan Smyka
  • Patent number: 9947514
    Abstract: An RF supply system in which a bias RF generator operates at a first frequency to provide a bias RF output signal and a source RF generator operates at a second frequency to provide a source RF output signal. The RF output power signals are applied to a load, such as a plasma chamber. The source RF generator detects a triggering event. In response to the triggering event, the source RF generator initiates adding frequency offsets to the source RF output signal in order to respond to impedance fluctuations in the plasma chamber that occur with respect to the triggering event. The triggering event detected by the source RF generator can be received from the bias RF generator in the form of a control signal that varies in accordance with the bias RF output signal.
    Type: Grant
    Filed: August 15, 2016
    Date of Patent: April 17, 2018
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron T. Radomski, Sang Won Lee, Larry J. Fisk, II, Jonathan W. Smyka
  • Publication number: 20170345620
    Abstract: An eVC including coarse and fine tuning networks. The coarse tuning network includes a circuit: receiving a RF input signal from a RF generator; outputting a RF output signal to a reference terminal or load; and receiving a DC bias voltage. The circuit is switched between first and second states. A capacitance of the circuit is based on the DC bias voltage while in the first state and is not based on the DC bias voltage while in the second state. The fine tuning network is connected in parallel with the coarse tuning network and includes a varactor. The varactor includes: a first diode receiving the RF input signal; and a second diode connected in a back-to-back configuration with the first diode and outputting a RF output signal to the reference terminal or load. A capacitance of the varactor is based on a second received DC bias voltage.
    Type: Application
    Filed: May 24, 2016
    Publication date: November 30, 2017
    Inventors: David J. Coumou, Dennis M. Brown, Aaron T. Radomski, Mariusz Oldziej, Yogendra K. Chawla, Daniel J. Lincoln
  • Publication number: 20170062187
    Abstract: An RF supply system in which a bias RF generator operates at a first frequency to provide a bias RF output signal and a source RF generator operates at a second frequency to provide a source RF output signal. The RF output power signals are applied to a load, such as a plasma chamber. The source RF generator detects a triggering event. In response to the triggering event, the source RF generator initiates adding frequency offsets to the source RF output signal in order to respond to impedance fluctuations in the plasma chamber that occur with respect to the triggering event. The triggering event detected by the source RF generator can be received from the bias RF generator in the form of a control signal that varies in accordance with the bias RF output signal.
    Type: Application
    Filed: August 15, 2016
    Publication date: March 2, 2017
    Applicant: MKS Instruments, Inc.
    Inventors: Aaron T. RADOMSKI, Sang Won LEE, Larry J. FISK, II, Jonathan W. SMYKA
  • Publication number: 20160163514
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Application
    Filed: November 30, 2015
    Publication date: June 9, 2016
    Inventors: Larry J. FISK, II, Aaron T. RADOMSKI, Jonathan SMYKA
  • Patent number: 9214909
    Abstract: A scalable radio frequency (RF) generator system including at least one power supply, at least one power amplifier receiving input from the power supply, and a power supply control module, and a system controller. Output from the at least one power supply can be combined and applied to each of the power amplifiers. Output form each of the at least one power amplifiers can be combined to generate a single RF signal. A compensator module controls operation of the at least one power supply. The compensator module, system control module, and power supply controller communicate in a daisy chain configuration.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: December 15, 2015
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron T. Radomski, Jonathan Smyka, Daniel J. Lincoln, Yogendra Chawla, David J. Coumou, Vadim Lubomirsky
  • Patent number: 9136093
    Abstract: A radio frequency (RF) system is disclosed. The RF system includes an RF sensor, an analog to digital converter (ADC) module, a processing module, and a synchronization module. The RF sensor measures a parameter of an RF output and generates an RF signal based on the parameter. The ADC module converts samples of the RF signal into digital values. The processing module generates processed values based on the digital values. The synchronization module outputs one of the processed values in response to a transition in the RF output.
    Type: Grant
    Filed: February 7, 2013
    Date of Patent: September 15, 2015
    Assignee: MKS Instruments, Inc.
    Inventors: David J. Coumou, Larry J. Fisk, II, Aaron T. Radomski, Jaehyun Kim, Sang-Won Lee, Jonathan Smyka
  • Patent number: 9041480
    Abstract: A radio frequency (RF) generation system includes an impedance determination module that receives an RF voltage and an RF current. The impedance determination module further determines an RF generator impedance based on the RF voltage and the RF current. The RF generation system also includes a control module that determines a plurality of electrical values based on the RF generator impedance. The matching module further matches an impedance of a load based on the RF generator impedance and the plurality of electrical components. The matching module also determines a 2 port transfer function based on the plurality of electrical values. The RF generation system also includes a virtual sensor module that estimates a load voltage, a load current, and a load impedance based on the RF voltage, the RF generator, the RF generator impedance, and the 2 port transfer function.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: May 26, 2015
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron T. Radomski, Dennis M. Brown, Nicholas Nelson
  • Patent number: 8890537
    Abstract: An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.
    Type: Grant
    Filed: April 21, 2010
    Date of Patent: November 18, 2014
    Assignee: MKS Instruments, Inc.
    Inventors: John Valcore, Jr., Yufeng Han, Jonathan Smyka, Salvatore Polizzo, Aaron T. Radomski
  • Publication number: 20140266492
    Abstract: A radio frequency (RF) generation system includes an impedance determination module that receives an RF voltage and an RF current. The impedance determination module further determines an RF generator impedance based on the RF voltage and the RF current. The RF generation system also includes a control module that determines a plurality of electrical values based on the RF generator impedance. The matching module further matches an impedance of a load based on the RF generator impedance and the plurality of electrical components. The matching module also determines a 2 port transfer function based on the plurality of electrical values. The RF generation system also includes a virtual sensor module that estimates a load voltage, a load current, and a load impedance based on the RF voltage, the RF generator, the RF generator impedance, and the 2 port transfer function.
    Type: Application
    Filed: March 15, 2013
    Publication date: September 18, 2014
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: Aaron T. RADOMSKI, Dennis M. BROWN, Nicholas NELSON
  • Publication number: 20140218076
    Abstract: A radio frequency (RF) system is disclosed. The RF system includes an RF sensor, an analog to digital converter (ADC) module, a processing module, and a synchronization module. The RF sensor measures a parameter of an RF output and generates an RF signal based on the parameter. The ADC module converts samples of the RF signal into digital values. The processing module generates processed values based on the digital values. The synchronization module outputs one of the processed values in response to a transition in the RF output.
    Type: Application
    Filed: February 7, 2013
    Publication date: August 7, 2014
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: David J. COUMOU, Larry J. FISK, II, Aaron T. RADOMSKI, Jaehyun KIM, Sang-Won LEE, Jonathan SMYKA
  • Patent number: 8736377
    Abstract: A radio frequency (RF) generation module includes a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state. A frequency control module receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints. A pulse shaping module receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and transitions the output of the RF generation module from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication.
    Type: Grant
    Filed: October 30, 2012
    Date of Patent: May 27, 2014
    Assignee: MKS Instruments, Inc.
    Inventors: Amish Rughoonundon, Larry J. Fisk, II, Aaron T. Radomski