Abstract: The present invention relates to an internal chamber processing method, and more particularly, to an internal chamber processing method for performing processing on a chamber and a component inside the chamber. Disclosed is an internal chamber processing method for processing the inside of a chamber in which substrate processing is performed, the method including a pressurizing operation (S100) of raising a pressure inside a chamber to a first pressure (P1) higher than the atmospheric pressure by using a pressurized gas and a depressurizing operation of lowering the pressure inside the chamber from the first pressure (P1) to a second pressure (P2) after the pressurizing operation (S100). The pressurizing operation (S100) and the depressurizing operation (S200) are performed in a state in which a substrate to be processed is removed from the inside of the chamber.

Abstract: Disclosed is a substrate processing method including: a pressurizing operation of raising a process pressure from a first pressure (P1) to a second pressure (P2) that is greater than the atmospheric pressure; a depressurizing operation of lowering the process pressure from a sixth pressure (P6), which is greater than the atmospheric pressure, to a seventh pressure (P7); and an annealing operation of changing the process pressure into a preset pressure change pattern between the pressurizing operation and the depressurizing operation, under a temperature atmosphere of a second temperature (T2) higher than the room temperature. A temperature raising operation of raising a temperature atmosphere from a first temperature (T1) to the second temperature (T2) is performed from a preset temperature raising start point (t1) to a preset temperature raising end point (t2) while the pressurizing operation is performed or after the pressurizing operation is performed.

Abstract: Embodiments of the present invention provide a responsive user interface engine for displaying data in a single format on a variety of display device types. Specifically, a responsive user interface engine receives data from a single source intended for display on a plurality of display devices. A common layout for the data is loaded for the display devices. For each display device, the layout is scaled based on the display device type. A first rendering of the data using the scaled layout is performed for each display device. The layout is modified for each display device based on the respective screen size of the display device for optimization. For each display device, the data is rendered a second time based on the modified layout. The respective second rendering may be displayed on each display device as a common user interface.

Abstract: Embodiments of the present invention provide an approach for displaying data in a single format on a variety of display device types. Specifically, data from a single source is received for a display device among multiple display devices. A layout for the data is loaded for the display device. The layout is scaled for the display device based on the display device type. A first rendering of the data using the scaled layout is performed. The layout is modified based on the screen size of the display device for optimization. The data is rendered a second time based on the modified layout. The rendering is displayed on the display device as a common user interface.