Patents by Inventor Akihiro Horibe
Akihiro Horibe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11908723Abstract: Handler wafers and methods of handling a wafer include positioning a handler, which is attached to a wafer by a bonding layer that comprises a debonding layer, an optical enhancement layer, and an anti-reflection layer. The handler is debonded from the wafer using a laser that emits laser energy at a wavelength that is absorbed by the debonding layer and that is confined to the debonding layer by the optical enhancement layer, such that the material of the debonding layer ablates when exposed to the laser energy to release the wafer.Type: GrantFiled: December 3, 2021Date of Patent: February 20, 2024Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Akihiro Horibe, Qianwen Chen, Risa Miyazawa, Michael P. Belyansky, John Knickerbocker, Takashi Hisada
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Patent number: 11848272Abstract: A method of fabricating a bridged multi-chip assembly structure includes providing a carrier substrate. The method further includes arranging a plurality of chips on the carrier substrate in a predetermined layout. Each chip has a front surface including a set of terminals formed thereon. The method further includes depositing a molding material between the plurality of chips and on the carrier substrate. The method further includes removing the carrier substrate from the plurality of chips fixed by the molding material. The method further includes bonding a bridge chip to corresponding sets of terminals of at least two chips of the plurality of chips fixed by the molding material.Type: GrantFiled: August 16, 2021Date of Patent: December 19, 2023Assignee: International Business Machines CorporationInventors: Akihiro Horibe, Toyohiro Aoki, Takashi Hisada
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Publication number: 20230343713Abstract: A method of fabricating a bridged multi-chip assembly structure includes providing a carrier substrate. The method further includes arranging a plurality of chips on the carrier substrate in a predetermined layout. Each chip has a front surface including a set of terminals formed thereon. The method further includes depositing a molding material between the plurality of chips and on the carrier substrate. The method further includes removing the carrier substrate from the plurality of chips fixed by the molding material. The method further includes bonding a bridge chip to corresponding sets of terminals of at least two chips of the plurality of chips fixed by the molding material.Type: ApplicationFiled: June 29, 2023Publication date: October 26, 2023Inventors: Akihiro Horibe, Toyohiro Aoki, Takashi Hisada
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Publication number: 20230307307Abstract: An interconnected semiconductor subassembly structure includes an interconnect structure; a first semiconductor die bonded to a first portion of a top surface of the interconnect structure; a second semiconductor die bonded to a second portion of the top surface of the interconnect structure; and a resin layer located within at least a first portion of a gap between the first semiconductor die and the second semiconductor die, wherein at least one of a top surface and a bottom surface of the resin layer located within the at least first portion of the gap has a concave meniscus shape.Type: ApplicationFiled: September 11, 2022Publication date: September 28, 2023Inventors: Akihiro Horibe, Toyohiro Aoki, CHINAMI MARUSHIMA, Takahito Watanabe, Takashi Hisada
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Publication number: 20230307372Abstract: An interconnected semicondcutor subassembly structure and formation thereof. The interconnected semicondcutor subassembly structure includes an interconnect structure, and first and second semicondcutor dies bonded to respective portions of a top surface of the interconnect structure. The interconnected semicondcutor subassembly structure further includes an underfill layer formed within a first gap located between a bottom surface of the first semiconductor die and the first portion the top surface of the interconnect structure, formed within a second gap located between the bottom surface of the second semiconductor die and the second portion of the top surface of the interconnect structure, and formed within a first portion of a third gap located between the first semicondcutor die and the second semicondcutor die. A top surface of the underfill layer formed within the first portion of the third gap located between the first and second semicondcutor dies has a concave meniscus shape.Type: ApplicationFiled: March 25, 2022Publication date: September 28, 2023Inventors: Akihiro Horibe, Chinami Marushima, Takahito Watanabe, Takashi Hisada
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Publication number: 20230299067Abstract: Interconnecting a first chip and a second chip includes mounting the first and second chips to a chip handler having an opening and at least one support surface. Each of the first chip and the second chip has a first surface including a first set of terminals and a second surface opposite to the first surface. The first surface of the first chip and the first surface of the second chip mounted to the chip handler are supported by the at least one support surface of the chip handler. The first and second chips are placed on a chip support member with the chip handler from the second surfaces. A bridge member is inserted by a bridge handler through the opening of the chip handler to place the bridge member onto the first sets of terminals of the first and second chips that are exposed from the opening.Type: ApplicationFiled: May 26, 2023Publication date: September 21, 2023Inventors: Akihiro Horibe, Takahito Watanabe, Toyohiro Aoki, Takashi Hisada, Hiroyuki Mori
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Patent number: 11735575Abstract: Interconnecting a first chip and a second chip by a bridge member includes a chip handler for handling the first chip and the second chip. Each of the first chip and the second chip has a first surface including a first set of terminals and a second surface opposite to the first surface. The chip handler has an opening and at least one support surface for supporting the first surfaces of the first chip and the second chip when the first chip and the second chip are mounted to the chip handler. A chip support member supports the first chip and the second chip from the second surfaces, and a bridge handler is provided for inserting the bridge member through the opening of the chip handler and for placing the bridge member onto the first sets of terminals of the first chip and the second chip.Type: GrantFiled: May 27, 2021Date of Patent: August 22, 2023Assignee: International Business Machines CorporationInventors: Akihiro Horibe, Takahito Watanabe, Toyohiro Aoki, Takashi Hisada, Hiroyuki Mori
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Publication number: 20230178445Abstract: An electronic device is formed by dispensing an underfill material around a perimeter of an integrated circuit (IC) chip bonded to a supporting substrate. A void in present in the underfill material that is present between the IC chip and the supporting substrate. An opening is present through at least one of the IC chip and the supporting substrate into communication with the void. A vacuum may be applied to the void through the opening that is present through the IC chip to reduce a size of the void to a first volume. The opening that is present through the IC chip is sealed with a sealing plate. The underfill material is cured after the sealing of the opening to reduce of the void to at least a second volume that is less than the first volume.Type: ApplicationFiled: December 6, 2021Publication date: June 8, 2023Inventors: Toyohiro Aoki, CHINAMI MARUSHIMA, RISA MIYAZAWA, Akihiro Horibe, Takashi Hisada
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Publication number: 20230178404Abstract: Handler wafers and methods of handling a wafer include positioning a handler, which is attached to a wafer by a bonding layer that comprises a debonding layer, an optical enhancement layer, and an anti-reflection layer. The handler is debonded from the wafer using a laser that emits laser energy at a wavelength that is absorbed by the debonding layer and that is confined to the debonding layer by the optical enhancement layer, such that the material of the debonding layer ablates when exposed to the laser energy to release the wafer.Type: ApplicationFiled: December 3, 2021Publication date: June 8, 2023Inventors: Akihiro Horibe, Qianwen Chen, RISA MIYAZAWA, Michael P. Belyansky, John Knickerbocker, Takashi Hisada
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Publication number: 20230180630Abstract: A vertical transmon qubit structure, includes a substrate having a first surface and a second surface. A through-silicon-via (TSV) is located in the substrate. A first electrode of a Josephson junction (JJ) is located on a portion of the first surface of the substrate and adjacent to the TSV. A second electrode of the JJ is in contact with the TSV and on a second portion of the first surface of the substrate. The first electrode is separated from the second electrode by an insulator.Type: ApplicationFiled: December 8, 2021Publication date: June 8, 2023Inventors: Masao Tokunari, Naoki Kanazawa, Akihiro Horibe, Kuniaki Sueoka
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Publication number: 20230170532Abstract: A technique relating to a battery structure is disclosed. Abase substrate and a battery layer having a support substrate are prepared. The battery layer includes a protection layer formed on the support substrate, a film battery element formed on the protection layer and an insulator covering the film battery element. The battery layer is placed onto the base substrate with the bottom of the support substrate facing up. The support substrate is then removed from the battery layer at least in part by etching while protecting the film battery element by the protection layer. A stacked battery structure including the base substrate and the two or more battery layers is also disclosed.Type: ApplicationFiled: January 26, 2023Publication date: June 1, 2023Inventors: Akihiro Horibe, Kuniaki Sueoka, Takahito Watanabe
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Patent number: 11637325Abstract: A technique relating to a battery structure is disclosed. A base substrate and a battery layer having a support substrate are prepared. The battery layer includes a protection layer formed on the support substrate, a film battery element formed on the protection layer and an insulator covering the film battery element. The battery layer is placed onto the base substrate with the bottom of the support substrate facing up. The support substrate is then removed from the battery layer at least in part by etching while protecting the film battery element by the protection layer. A stacked battery structure including the base substrate and the two or more battery layers is also disclosed.Type: GrantFiled: August 10, 2017Date of Patent: April 25, 2023Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Akihiro Horibe, Kuniaki Sueoka, Takahito Watanabe
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Publication number: 20230087366Abstract: A carrier wafer, a structure, and a method are disclosed. The carrier wafer includes a wafer layer having a first surface and a second surface opposite the first surface, a first antireflective coating (ARC) layer positioned on the first surface of the wafer layer, a second ARC layer positioned on a surface of the first ARC layer opposite the wafer layer, and a thin release layer positioned on a surface of the second ARC layer opposite the first ARC layer. The structure includes the carrier wafer and a semiconductor device substrate positioned over the thin release layer of the carrier wafer. The method includes obtaining a wafer layer, forming an ARC layer on a surface of the wafer layer, forming a second ARC layer on a surface of the first ARC layer opposite the wafer layer, and forming a thin release layer on the second ARC layer.Type: ApplicationFiled: September 17, 2021Publication date: March 23, 2023Inventors: Qianwen Chen, Michael P. Belyansky, John Knickerbocker, Akihiro Horibe
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Publication number: 20230051337Abstract: A method of fabricating a bridged multi-chip assembly structure includes providing a carrier substrate. The method further includes arranging a plurality of chips on the carrier substrate in a predetermined layout. Each chip has a front surface including a set of terminals formed thereon. The method further includes depositing a molding material between the plurality of chips and on the carrier substrate. The method further includes removing the carrier substrate from the plurality of chips fixed by the molding material. The method further includes bonding a bridge chip to corresponding sets of terminals of at least two chips of the plurality of chips fixed by the molding material.Type: ApplicationFiled: August 16, 2021Publication date: February 16, 2023Inventors: Akihiro Horibe, Toyohiro Aoki, Takashi Hisada
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Patent number: 11574848Abstract: A device for applying underfill material into a space between a substrate and a semiconductor chip is provided. The device includes a frame housing configured to cover at least an outer edge area of the semiconductor chip that is bonded to the substrate. The device also includes a sealant attached to the frame housing and configured to contact the outer edge area of the semiconductor chip. The device also includes an outlet made on the frame housing for evacuating the space; and an inlet made on the frame housing for injecting the underfill material to the space.Type: GrantFiled: January 26, 2021Date of Patent: February 7, 2023Assignee: International Business Machines CorporationInventors: Akihiro Horibe, Kuniaki Sueoka
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Publication number: 20220384412Abstract: Interconnecting a first chip and a second chip by a bridge member includes a chip handler for handling the first chip and the second chip. Each of the first chip and the second chip has a first surface including a first set of terminals and a second surface opposite to the first surface. The chip handler has an opening and at least one support surface for supporting the first surfaces of the first chip and the second chip when the first chip and the second chip are mounted to the chip handler. A chip support member supports the first chip and the second chip from the second surfaces, and a bridge handler is provided for inserting the bridge member through the opening of the chip handler and for placing the bridge member onto the first sets of terminals of the first chip and the second chip.Type: ApplicationFiled: May 27, 2021Publication date: December 1, 2022Inventors: Akihiro Horibe, Takahito Watanabe, Toyohiro Aoki, Takashi Hisada, Hiroyuki Mori
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Publication number: 20220238403Abstract: A device for applying underfill material into a space between a substrate and a semiconductor chip is provided. The device includes a frame housing configured to cover at least an outer edge area of the semiconductor chip that is bonded to the substrate. The device also includes a sealant attached to the frame housing and configured to contact the outer edge area of the semiconductor chip. The device also includes an outlet made on the frame housing for evacuating the space; and an inlet made on the frame housing for injecting the underfill material to the space.Type: ApplicationFiled: January 26, 2021Publication date: July 28, 2022Inventors: AKIHIRO HORIBE, Kuniaki Sueoka
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Patent number: 11320419Abstract: A method for sampling breath gas, includes collecting a first breath sample in a first bag. The first breath sample is an initial part of expired gas expired after inspiration. Additionally, the method includes collecting a second breath sample in a second bag. The second breath sample is a latter part of the expired gas. The method includes subtracting first mass spectral data obtained by mass spectroscopy of the first breath sample collected in the first bag from second mass spectral data obtained by mass spectroscopy of the second breath sample collected in the second bag.Type: GrantFiled: January 30, 2020Date of Patent: May 3, 2022Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Akihiro Horibe, Kuniaki Sueoka, Toru Aihara
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Patent number: 11316143Abstract: A method for fabricating a stacked device structure includes preparing plural device layers each having a glass layer, a metal layer, and a resin layer. The metal layer corresponds to one of plural metal layers. The method further includes stacking the plural device layers to compose stacked device layers; and drilling vertically a hole into the stacked device layers by laser such that the plural metal layers are exposed to the hole and filling conductive material into the hole to connect the plural metal layers.Type: GrantFiled: May 7, 2019Date of Patent: April 26, 2022Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Akihiro Horibe, Kuniaki Sueoka
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Patent number: 11211638Abstract: A technique relating to a battery structure is disclosed. A base substrate and a battery layer having a support substrate are prepared. The battery layer includes a protection layer formed on the support substrate, a film battery element formed on the protection layer and an insulator covering the film battery element. The battery layer is placed onto the base substrate with the bottom of the support substrate facing up. The support substrate is then removed from the battery layer at least in part by etching while protecting the film battery element by the protection layer. A stacked battery structure including the base substrate and the two or more battery layers is also disclosed.Type: GrantFiled: November 13, 2017Date of Patent: December 28, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Akihiro Horibe, Kuniaki Sueoka, Takahito Watanabe