Patents by Inventor Akihiro Naganawa

Akihiro Naganawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Planar positioning device and inspection device provided with the same
    Patent number: 8495761
    Abstract: According to one embodiment, a planar positioning device includes a first actuator displaceable in a first axis direction, a second actuator displaceable in a second axis direction perpendicular to the first axis, a first displacement magnifying mechanism configured to magnify a displacement of the first actuator, a second displacement magnifying mechanism configured to magnify a displacement of the second actuator, a stage arranged in a plane, a first drive support mechanism including a parallel link connected between the first displacement magnifying mechanism and the stage to transmit the magnified displacement in the first-axis direction to the stage, a second drive support mechanism including a parallel link connected between the second displacement magnifying mechanism and the stage to transmit the magnified displacement in the second-axis direction to the stage, and a stabilizing support mechanism configured to apply tensions in the first-axis direction and the second-axis direction to the stage.
    Type: Grant
    Filed: August 10, 2011
    Date of Patent: July 23, 2013
    Assignee: Akita Prefecture
    Inventors: Yotsugi Shibuya, Shigeki Mori, Kazuto Miyawaki, Akihiro Naganawa
  • PLANAR POSITIONING DEVICE AND INSPECTION DEVICE PROVIDED WITH THE SAME
    Publication number: 20110321203
    Abstract: According to one embodiment, a planar positioning device includes a first actuator displaceable in a first axis direction, a second actuator displaceable in a second axis direction perpendicular to the first axis, a first displacement magnifying mechanism configured to magnify a displacement of the first actuator, a second displacement magnifying mechanism configured to magnify a displacement of the second actuator, a stage arranged in a plane, a first drive support mechanism including a parallel link connected between the first displacement magnifying mechanism and the stage to transmit the magnified displacement in the first-axis direction to the stage, a second drive support mechanism including a parallel link connected between the second displacement magnifying mechanism and the stage to transmit the magnified displacement in the second-axis direction to the stage, and a stabilizing support mechanism configured to apply tensions in the first-axis direction and the second-axis direction to the stage.
    Type: Application
    Filed: August 10, 2011
    Publication date: December 29, 2011
    Applicant: AKITA PREFECTURE, a government agency of Japan
    Inventors: Yotsugi Shibuya, Shigeki Mori, Kazuto Miyawaki, Akihiro Naganawa