Akio Wakejima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
Abstract: There is formed, so as to cover the upper structure (a gold-containing, low-resistance metal layer) of a T- or Y-shaped gate, a thin film (e.g. a thin TiN film) which is not reactive to the low-resistance metal layer, which is resistant to an etching solution to be applied in a later wet etching step, and which has good adhesivity to a resist to be coated in a later step, to prevent the direct contact of the low-resistance metal layer with the resist. In this state, supports are formed.
August 24, 2001
February 28, 2002
Akio Wakejima, Norihiko Samoto, Walter Contrata