Patents by Inventor Akira MITSUIKl

Akira MITSUIKl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170068051
    Abstract: When an optical waveguide is formed, an area of an opening of a resist mask is equal to an area of a semiconductor layer for a dummy pattern exposed from the resist mask, and the semiconductor layer for the dummy pattern exposed from the resist mask has a uniform thickness in a region in which the dummy pattern is formed. As a result, an effective pattern density does not change in etching the semiconductor layer for the dummy pattern, and accordingly, it is possible to form a rib-shaped optical waveguide having desired dimensions and a desired shape.
    Type: Application
    Filed: August 22, 2016
    Publication date: March 9, 2017
    Inventors: Shinichi WATANUKI, Akira MITSUIKl, Atsuro INADA, Tohru MOGAMI, Tsuyoshi HORIKAWA, Keizo KINOSHITA