Abstract: An ionizer is formed by coupling a fan unit provided with a discharge electrode and a fan and a control unit provided with an indicator and an adjuster to each other, and both units are changeable between a normal coupling condition, where both are directed in the same direction, and an opposite coupling condition, where they are directed in opposite directions to each other, and in addition, a power/signal arrangement of the connection terminals of the separate connector is bilaterally symmetrical such that same power and signals ale transmitted and received between the separate connectors of both units connected to each other in either coupling condition of aforementioned both units.

Abstract: A semiconductor manufacturing method and apparatus is provided that can improve uniformity of processing time of oxidation thickness. When starting a heat oxidation process, a time for optimum oxidation processing in the process management system is calculated based on atmospheric pressure data, a target thickness of that process, oxidization time, thickness data and atmospheric pressure data in the immediately preceding process under the same oxidization processing job. The optimum system comprises a process management system such as a host computer, a device having a barometer, a heat oxidation-processing device and a thickness-measuring device. The host computer, the barometer, the heat oxidation processing device and the thickness-measuring device are connected via a network so as to transmit data to and from each device.

Abstract: In an electric power clamping apparatus that locks a clamping arm when it is not driven by an electric motor attached with the a brake mechanism, manual operation of the clamping arm is facilitated. In an electric power clamping apparatus for transmitting an output of an electric motor via a reduction drive system to a clamping arm, an operation shaft including a small gear meshing with a gear that forms a part of the reduction drive system by pressing with an external tool is fit by insertion rotatably and movably back and forth into a body, and a linkage mechanism is provided in the operation shaft for operating a release lever in a brake mechanism to make the brake mechanism inoperative when the small gear meshes with the gear of the reduction drive system.

Abstract: A bent section, which is bent substantially perpendicularly toward a main cylinder body, is formed at one end of a slide table. Further, a pair of ball-rolling grooves, in which a plurality of ball bearings roll, are formed on side surfaces of the slide table opposed to a guide section. A relief groove, which has a width wider than a spacing distance between the ball-rolling grooves and which makes it possible to change the direction of a processing jig when the ball-rolling grooves are processed, is formed at ends of the ball-rolling grooves disposed on a side of the bent section.

Abstract: An optimum method for deposition time is provided that can improve uniformity of processing time of oxidation thickness. When starting a heat oxidation process, a time for optimum oxidation processing in the process management system is calculated based on atmospheric pressure data, a target thickness of that process, oxidization time, thickness data and atmospheric pressure data in the immediately preceding process under the same oxidization processing job. The optimum system comprises a process management system such as a host computer, a device having a barometer, a heat oxidation-processing device and a thickness-measuring device. The host computer, the barometer, the heat oxidation processing device and the thickness-measuring device are connected via a network so as to transmit data to and from each device.

Abstract: A supply control apparatus is provided and includes a memory for storing lot control data for controlling a plurality of lots, reticule control data for controlling a plurality of masks, and inline photo device control data; an update section for updating the data; a control information generating section generating lot supply control information for controlling lot supply based on the lot control data and the reticule control data, as well as mask supply control information for controlling mask supply; and a communications section for transmitting the lot supply control information to a lot supply device that supplies lots to the photo device, transmitting the mask supply control information to a mask supply device that supplies masks to the photo device, while receiving notification information on the current position of a lot or a mask from the lot supply device, the mask supply device or the photo device.

Abstract: A displacement amount-adjusting mechanism for adjusting the displacement amount of a slide table includes a stopper which faces a cutout formed at a bottom surface of the slide table and which is fixed to an upper surface of a main cylinder body, a first adjuster bolt which is provided movably back and forth on the slide table and which is screwed into a screw hole communicating with the cutout, an adjuster plate which is fixed to an end surface of the main cylinder body, and a second adjuster bolt which is screwed into a hole of the adjuster plate.

Abstract: A clamping device in which there is no need to carry out troublesome setting operation of a clamping position according to a size of a workpiece and wear of respective components and an operation efficiency can be further improved. A worm which is engaged with a worm wheel provided to a periphery of a rotating shaft of a clamping arm and which is connected to an electric motor can reciprocate in an axial direction. On the axis, a clamping force applying mechanism to be actuated in response to contact of the rotated clamping arm with the workpiece to apply an axial force in a direction of the axis to the worm is provided. The clamping arm is rotated by driving the worm for rotation by the electric motor and the clamping force applying mechanism applies a clamping force to the clamping arm which has come in contact with the workpiece.

Abstract: A bent section, which is bent substantially perpendicularly toward a main cylinder body, is formed at one end of a slide table. Further, a pair of ball-rolling grooves, in which a plurality of ball bearings roll, are formed on side surfaces of the slide table opposed to a guide section. A relief groove, which has a width wider than a spacing distance between the ball-rolling grooves and which makes it possible to change the direction of a processing jig when the ball-rolling grooves are processed, is formed at ends of the ball-rolling grooves disposed on a side of the bent section.

Abstract: A clamping device includes a first clamping arm and a second clamping arm, an arm driving portion for displacing the first clamping arm to a clamping position and a non-clamping position, and a clamping force applying portion for applying a required clamping force to the clamping arm. The arm driving portion has a first driving source for displacing the first clamping arm and a power transmission mechanism. The clamping force applying portion has a pressing member for applying the clamping force to the first clamping arm by applying a rotating force in a clamping direction to the rotary shaft and a second driving source for displacing the pressing member from a non-operating position to an operating position for applying the clamping force.

Abstract: A first clamping arm mounted to an arm rotary shaft is rotated by a driving mechanism formed of a worm wheel mounted to the arm rotary shaft, a worm supported on a junction frame, and a first driving source to clamp a workpiece between a second clamping arm and the first clamping arm. A rotating force in a direction opposite to a reaction force in clamping is applied by a clamping force applying mechanism to the junction frame which has been displaced through a certain angle by the reaction force to thereby generate a rotating force in a clamping direction in the arm rotary shaft through the worm and the worm wheel to thereby apply a clamping force to the first clamping arm.

Abstract: A displacement amount-adjusting mechanism for adjusting the displacement amount of a slide table includes a stopper which faces a cutout formed at a bottom surface of the slide table and which is fixed to an upper surface of a main cylinder body, a first adjuster bolt which is provided movably back and forth on the slide table and which is screwed into a screw hole communicating with the cutout, an adjuster plate which is fixed to an end surface of the main cylinder body, and a second adjuster bolt which is screwed into a hole of the adjuster plate.

Abstract: In an electric power clamping apparatus that locks a clamping arm when it is not driven by an electric motor attached with the a brake mechanism, manual operation of the clamping arm is facilitated. In an electric power clamping apparatus for transmitting an output of an electric motor via a reduction drive system to a clamping arm, an operation shaft including a small gear meshing with a gear that forms a part of the reduction drive system by pressing with an external tool is fit by insertion rotatably and movably back and forth into a body, and a linkage mechanism is provided in the operation shaft for operating a release lever in a brake mechanism to make the brake mechanism inoperative when the small gear meshes with the gear of the reduction drive system.