Patents by Inventor Alexander A. Yatskar

Alexander A. Yatskar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8534303
    Abstract: A carrier for supporting a substrate during processing by a meniscus fowled by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening. Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided.
    Type: Grant
    Filed: December 13, 2011
    Date of Patent: September 17, 2013
    Assignee: Lam Research Corporation
    Inventors: Robert O'Donnell, Eric Lenz, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar
  • Publication number: 20120079698
    Abstract: A carrier for supporting a substrate during processing by a meniscus fowled by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided.
    Type: Application
    Filed: December 13, 2011
    Publication date: April 5, 2012
    Applicant: Lam Research Corporation
    Inventors: Robert O'Donnell, Eric Lenz, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar
  • Patent number: 8105441
    Abstract: A carrier for supporting a substrate during processing by a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening. Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided.
    Type: Grant
    Filed: April 26, 2011
    Date of Patent: January 31, 2012
    Assignee: Lam Research Corporation
    Inventors: Robert O'Donnell, Eric Lenz, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar
  • Publication number: 20110197928
    Abstract: A carrier for supporting a substrate during processing by a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening. Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided.
    Type: Application
    Filed: April 26, 2011
    Publication date: August 18, 2011
    Applicant: Lam Research Corporation
    Inventors: Robert O'Donnell, Eric Lenz, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar
  • Patent number: 7946303
    Abstract: A carrier for supporting a substrate during processing by a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening. Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided.
    Type: Grant
    Filed: September 29, 2006
    Date of Patent: May 24, 2011
    Assignee: Lam Research Corporation
    Inventors: Robert O'Donnell, Eric Lenz, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar
  • Publication number: 20080081775
    Abstract: A carrier for supporting a substrate during processing by a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening. Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided.
    Type: Application
    Filed: September 29, 2006
    Publication date: April 3, 2008
    Inventors: Robert O'Donnell, Eric Lenz, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar
  • Patent number: 6650668
    Abstract: A cylindrical two-dimensional diode-laser assembly includes fractionally-cylindrical dielectric segments bonded in a circular aperture in a metal heat-sink. Diode laser bars are located in gaps between the segments with light from the diode-lasers directed inwardly. The segments are made by cutting slots in one end of a tube of the dielectric material with the width of the slots corresponding to the width of the gaps and the part of the tube between slots providing the segments. The slotted tube is metallized and the slotted end of the tube is inserted into the heat-sink aperture with an unslotted part of the tube outside the aperture. The slotted part of the tube is bonded in the aperture and the unslotted part of the tube separated from the slotted part leaving the segments bonded in the aperture.
    Type: Grant
    Filed: October 2, 2001
    Date of Patent: November 18, 2003
    Assignee: Coherent, Inc.
    Inventors: Alexander A. Yatskar, Serrena Marie Carter, R. Russel Austin
  • Publication number: 20030063639
    Abstract: A cylindrical two-dimensional diode-laser assembly includes fractionally-cylindrical dielectric segments bonded in a circular aperture in a metal heat-sink. Diode laser bars are located in gaps between the segments with light from the diode-lasers directed inwardly. The segments are made by cutting slots in one end of a tube of the dielectric material with the width of the slots corresponding to the width of the gaps and the part of the tube between slots providing the segments. The slotted tube is metallized and the slotted end of the tube is inserted into the heat-sink aperture with an unslotted part of the tube outside the aperture. The slotted part of the tube is bonded in the aperture and the unslotted part of the tube separated from the slotted part leaving the segments bonded in the aperture.
    Type: Application
    Filed: October 2, 2001
    Publication date: April 3, 2003
    Inventors: Alexander A. Yatskar, Serrena Marie Carter, R. Russel Austin