Patents by Inventor Alexandra Haag
Alexandra Haag has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11926918Abstract: The invention relates to a polyamine-based or polyhydric alcohol-based suppressing agent. The suppressing agent is modified by reaction with a compound that introduces a branching group into the suppressing agent before they are reacted with an alkylene oxide. The suppressing agent shows extraordinary superfilling properties, particularly when used to fill in features having extremely small aperture sizes and/or high aspect ratios.Type: GrantFiled: December 19, 2017Date of Patent: March 12, 2024Assignee: BASF SEInventors: Marcel Patrik Kienle, Dieter Mayer, Marco Arnold, Alexandra Haag, Charlotte Emnet, Alexander Fluegel
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Publication number: 20210317582Abstract: Described herein is a composition for filling submicrometer sized features having an aperture size of 30 nanometers or less including a source of copper ions, and at least one suppressing agent selected from compounds of formula I where the R1 radicals are each independently selected from a copolymer of ethylene oxide and at least one further C3 to C4 alkylene oxide, said copolymer being a random copolymer, the R2 radicals are each independently selected from R1 or alkyl, X and Y are spacer groups independently, and X for each repeating unit independently, selected from C1 to C6 alkylene and Z—(O—Z)m where the Z radicals are each independently selected from C2 to C6 alkylene, n is an integer equal to or greater than 0, and m is an integer equal to or greater than 1.Type: ApplicationFiled: May 25, 2021Publication date: October 14, 2021Inventors: Cornelia Röger-Göpfert, Roman Benedikt Raether, Charlotte Emnet, Alexandra Haag, Dieter Mayer
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Publication number: 20200173029Abstract: Composition comprising a source of metal ions and at least one suppressing agent obtainable by reacting a) an amine compound comprising at least three active amino functional groups with b) a mixture of ethylene oxide and at least one compound selected from C3 and C4 alkylene oxides.Type: ApplicationFiled: January 14, 2020Publication date: June 4, 2020Applicant: BASF SEInventors: Cornelia ROEGER-GOEPFERT, Roman Benedikt RAETHER, Charlotte EMNET, Alexandra HAAG, Dieter MAYER
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Publication number: 20190309429Abstract: The invention relates to a polyamine-based or polyhydric alcohol-based suppressing agent. The suppressing agent is modified by reaction with a compound that introduces a branching group into the suppressing agent before they are reacted with an alkylene oxide. The suppressing agent shows extraordinary superfilling properties, particularly when used to fill in features having extremely small aperture sizes and/or high aspect ratios.Type: ApplicationFiled: December 19, 2017Publication date: October 10, 2019Applicant: BASF SEInventors: Marcel Patrik KIENLE, Dieter MAYER, Marco ARNOLD, Alexandra HAAG, Charlotte EMNET, Alexander FLUEGEL
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Patent number: 9869029Abstract: According to the present invention a composition is provided comprising at least one source of metal ions and at least one additive obtainable by reacting a) a polyhydric alcohol condensate compound derived from at least one polyalcohol of formula (I) X(OH)n??(I) by condensation with b) at least one alkylene oxide to form a polyhydric alcohol condensate comprising polyoxyalkylene side chains, wherein n is an integer from 3 to 6 and X is an n-valent linear or branched aliphatic or cycloaliphatic radical having from 2 to 10 carbon atoms, which may be substituted or unsubstituted.Type: GrantFiled: July 16, 2010Date of Patent: January 16, 2018Assignee: BASF SEInventors: Cornelia Roeger-Goepfert, Roman Benedikt Raether, Alexandra Haag, Dieter Mayer, Charlotte Emnet
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Patent number: 9758885Abstract: A composition comprising a source of metal ions and at least one additive comprising at least one polyaminoamide, said polyaminoamide comprising the structural unit represented by formula I or derivatives of the polyaminoamide of formula I obtainable by complete or partial protonation, N-functionalization or N-quaternization with a non-aromatic reactant, wherein D6 is, for each repeating unit 1 to s independently, a divalent group selected from a saturated or unsaturated C1-C20 organic radical, D7 is, for each repeating unit 1 to s independently, a divalent group selected from straight chain or branched C2-C20 alkanediyl, which may optionally be interrupted by heteroatoms or divalent groups selected from O, S and NR10, R1 is, for each repeating unit 1 to s independently, selected from H, C1-C20 alkyl, and C1-C20 alkenyl, which may optionally be substituted by hydroxyl, alkoxy or alkoxycarbonyl, or, together with R2, may form a divalent group D8, and R2 is, for each repeating unit 1 to s independently, sType: GrantFiled: October 30, 2013Date of Patent: September 12, 2017Assignee: BASF SEInventors: Marcel Patrik Kienle, Dieter Mayer, Cornelia Roeger-Goepfert, Alexandra Haag, Charlotte Emnet, Alexander Fluegel, Marco Arnold
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Patent number: 9617647Abstract: A composition comprising at least one source of metal ions and at least one additive obtainable by reacting a polyhydric alcohol comprising at least 5 hydroxyl functional groups with at least a first alkylene oxide and a second alkylene oxide from a mixture of the first alkylene oxide and the second alkylene oxide or a third alkylene oxide, a second alkylene oxide, and a first alkylene oxide in aforesaid sequence, the third alkylene oxide having a longer alkyl chain than the second alkylene oxide and the second alkylene oxide having a longer alkyl chain than the first alkylene oxide.Type: GrantFiled: July 19, 2010Date of Patent: April 11, 2017Assignee: BASF SEInventors: Cornelia Roeger-Goepfert, Roman Benedikt Raether, Dieter Mayer, Alexandra Haag, Charlotte Emnet
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Publication number: 20150284865Abstract: A composition comprising a source of metal ions and at least one additive comprising at least one polyaminoamide, said polyaminoamide comprising the structural unit represented by formula I or derivatives of the polyaminoamide of formula I obtainable by complete or partial protonation, N-functionalization or N-quaternization with a non-aromatic reactant, wherein D6 is, for each repeating unit 1 to s independently, a divalent group selected from a saturated or unsaturated C1-C20 organic radical, D7 is, for each repeating unit 1 to s independently, a divalent group selected from straight chain or branched C2-C20 alkanediyl, which may optionally be interrupted by heteroatoms or divalent groups selected from O, S and NR10, R1 is, for each repeating unit 1 to s independently, selected from H, C1-C20 alkyl, and C1-C20 alkenyl, which may optionally be substituted by hydroxyl, alkoxy or alkoxycarbonyl, or, together with R2, may form a divalent group D8, and R2 is, for each repeating unit 1 to s independently, selType: ApplicationFiled: October 30, 2013Publication date: October 8, 2015Applicant: BASF SEInventors: Marcel Patrik Kienle, Dieter Mayer, Cornelia Roeger-Goepfert, Alexandra Haag, Charlotte Emnet, Alexander Fluegel, Marco Arnold
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Patent number: 9011666Abstract: A composition comprising a source of metal ions and at least one leveling agent obtainable by condensing at least one trialkanolamine of the general formula N(R1—OH)3 (Ia) and/or at least one dialkanolamine of the general formula R2—N(R1—OH)2 (Ib) to give a polyalkanolamine(II), wherein the R1 radicals are each independently selected from a divalent, linear or branched aliphatic hydrocarbon radical having from 2 to 6 carbon atoms, and the R2 radicals are each selected from hydrogen and linear or branched aliphatic, cycloaliphatic and aromatic hydrocarbon radicals having from 1 to 30 carbon atoms, or derivatives obtainable by alkoxylation, substitution or alkoxylation and substitution of said polyalkanolamine(II).Type: GrantFiled: December 8, 2009Date of Patent: April 21, 2015Assignee: BASF SEInventors: Cornelia Roeger-Goepfert, Roman Benedikt Raether, Sophia Ebert, Charlotte Emnet, Alexandra Haag, Dieter Mayer
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Publication number: 20120128888Abstract: According to the present invention a composition is provided comprising at least one source of metal ions and at least one additive obtainable by reacting a) a polyhydric alcohol condensate compound derived from at least one polyalcohol of formula (I) X(OH)n (I) by condensation with b) at least one alkylene oxide to form a polyhydric alcohol condensate comprising polyoxyalkylene side chains, wherein n is an integer from 3 to 6 and X is an n-valent linear or branched aliphatic or cycloaliphatic radical having from 2 to 10 carbon atoms, which may be substituted or unsubstituted.Type: ApplicationFiled: July 16, 2010Publication date: May 24, 2012Applicant: BASF SEInventors: Cornelia Roeger-Goepfert, Roman Benedikt Raether, Alexandra Haag, Dieter Mayer, Charlotte Emnet
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Publication number: 20120118750Abstract: A composition comprising at least one source of metal ions and at least one additive obtainable by reacting a poly-hydric alcohol comprising at least 5 hydroxyl functional groups with at least a first alkylene oxide and a second alkylene oxide from a mixture of the first alkylene oxide and the second alkylene oxide or a third alkylene oxide, a second alkylene oxide, and a first alkylene oxide in aforesaid sequence, the third alkylene oxide having a longer alkyl chain than the second alkylene oxide and the second alkylene oxide having a longer alkyl chain than the first alkylene oxide.Type: ApplicationFiled: July 19, 2010Publication date: May 17, 2012Applicant: BASF SEInventors: Cornelia Roeger-Goepfert, Roman Benedikt Raether, Dieter Mayer, Alexandra Haag, Charlotte Emnet
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Publication number: 20120024711Abstract: A composition for filling submicrometer sized features having an aperture size of 30 nanometers or less comprising a source of copper ions, and at least one suppressing agent selected from compounds of formula (I) wherein the R1 radicals are each independently selected from a copolymer of ethylene oxide and at least one further C3 to C4 alkylene oxide, said copolymer being a random copolymer. the R2 radicals are each independently selected from R1 or alkyl. X and Y are spacer groups independently, and X for each repeating unit independently, selected from C1 to C6 alkylen and Z—(O—Z)m wherein the Z radicals are each independently selected from C2 to C6 alkylen, n is an integer equal to or greater than 0. m is an integer equal to or greater than 1.Type: ApplicationFiled: March 25, 2010Publication date: February 2, 2012Applicant: BASF SEInventors: Cornelia Roeger-Goepfert, Roman Benedikt Raether, Charlotte Emnet, Alexandra Haag, Dieter Mayer
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Publication number: 20120027948Abstract: A composition comprising a source of metal ions and at least one suppressing agent obtainable by reacting a) an amine compound comprising active amino functional groups with b) a mixture of ethylene oxide and at least one compound selected from C3 and C4 alkylene oxides, said suppressing agent having a molecular weight Mw of 6000 g/mol or more.Type: ApplicationFiled: March 29, 2010Publication date: February 2, 2012Applicant: BASF SEInventors: Cornelia Roeger-Goepfert, Roman Benedikt Raether, Charlotte Emnet, Alexandra Haag, Dieter Mayer
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Publication number: 20120018310Abstract: Composition comprising a source of metal ions and at least one suppressing agent obtainable by reacting a) an amine compound comprising at least three active amino functional groups with b) a mixture of ethylene oxide and at least one compound selected from C3 and C4 alkylene oxides.Type: ApplicationFiled: March 31, 2010Publication date: January 26, 2012Applicant: BASF SEInventors: Cornelia Roeger-Goepfert, Roman Benedikt Raether, Charlotte Emnet, Alexandra Haag, Dieter Mayer
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Publication number: 20110290659Abstract: A composition comprising a source of metal ions and at least one leveling agent obtainable by condensing at least one trialkanolamine of the general formula N(R1—OH)3 (Ia) and/or at least one dialkanolamine of the general formula R2—N(R1—OH)2 (Ib) to give a polyalkanolamine(II), wherein the R1 radicals are each independently selected from a divalent, linear or branched aliphatic hydrocarbon radical having from 2 to 6 carbon atoms, and the R2 radicals are each selected from hydrogen and linear or branched aliphatic, cycloaliphatic and aromatic hydrocarbon radicals having from 1 to 30 carbon atoms, or derivatives obtainable by alkoxylation, substitution or alkoxylation and substitution of said polyalkanolamine(II).Type: ApplicationFiled: December 8, 2009Publication date: December 1, 2011Applicant: BASF SEInventors: Cornelia Roeger-Göpfert, Roman Benedikt Raether, Sopia Ebert, Charlotte Emnet, Alexandra Haag, Dieter Mayer