Patents by Inventor Angelika Koprowski

Angelika Koprowski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11804415
    Abstract: A semiconductor device includes: a semiconductor body having an active region and an edge termination region between the active region and a side surface of the semiconductor body; a first portion including silicon and nitrogen; a second portion including silicon and nitrogen, the second portion being in direct contact with the first portion; and a front side metallization in contact with the semiconductor body in the active region. The first portion separates the second portion from the semiconductor body. An average silicon content in the first portion is higher than in the second portion. The front side metallization is interposed between the first portion and the semiconductor body in the active region but not in the edge termination region, and/or the first portion and the second portion are both present in the edge termination region but not in the active region.
    Type: Grant
    Filed: May 28, 2021
    Date of Patent: October 31, 2023
    Assignee: Infineon Technologies AG
    Inventors: Markus Kahn, Oliver Humbel, Philipp Sebastian Koch, Angelika Koprowski, Christian Maier, Gerhard Schmidt, Juergen Steinbrenner
  • Publication number: 20230343726
    Abstract: A high voltage semiconductor device includes a semiconductor substrate including an upper surface, a high voltage electrically conductive structure disposed on the semiconductor substrate, a first step topography at an edge of the high voltage electrically conductive structure, a varying lateral doping zone disposed within the semiconductor substrate, and a layer stack including an electrically insulating buffer layer, a SiC layer over the electrically insulating buffer layer, and a silicon nitride layer over the SiC layer or a nitrided surface region of the SiC layer, wherein the layer stack conforms to the first step topography and extends over the varying lateral doping zone.
    Type: Application
    Filed: June 28, 2023
    Publication date: October 26, 2023
    Inventors: Angelika Koprowski, Oliver Humbel, Markus Kahn, Carsten Schaeffer
  • Publication number: 20230154978
    Abstract: A semiconductor device and a method of forming a semiconductor device are provided. In an embodiment, the semiconductor device comprises a device region, an edge termination region surrounding the device region, a first metal feature in the edge termination region, a first conformal ion diffusion barrier layer over the first metal feature, and a first conformal chemical protection layer over the first conformal ion diffusion barrier layer.
    Type: Application
    Filed: November 15, 2021
    Publication date: May 18, 2023
    Inventors: Carsten SCHAEFFER, Patrick HANEKAMP, Oliver HUMBEL, Angelika KOPROWSKI, Wolfgang LEHNERT, Francisco Javier SANTOS RODRIGUEZ
  • Patent number: 11387359
    Abstract: A power semiconductor device having a power semiconductor transistor configuration includes: a semiconductor body having a front side coupled to a first load terminal structure, a backside coupled to a second load terminal structure, and a lateral chip edge; an active region for conducting a load current in a conducting state; and an edge termination region separating the active region and lateral chip edge. At the front-side, the edge termination region includes a protection region devoid of any metallic structure, unless the metallic structure is electrically shielded from below by a polysilicon layer that extends further towards the lateral chip edge than the metallic structure by a lateral distance of at least 20 ?m. In a blocking state, the protection region accommodates a voltage change of at least 90% of a blocking voltage inside the semiconductor body in a lateral direction from the active region towards the lateral chip edge.
    Type: Grant
    Filed: December 13, 2019
    Date of Patent: July 12, 2022
    Assignee: Infineon Technologies AG
    Inventors: Oliver Humbel, Josef-Georg Bauer, Jens Brandenburg, Diana Car, Philipp Sebastian Koch, Angelika Koprowski, Sebastian Kremp, Thomas Kurzmann, Erwin Lercher, Holger Ruething
  • Publication number: 20210287954
    Abstract: A semiconductor device includes: a semiconductor body having an active region and an edge termination region between the active region and a side surface of the semiconductor body; a first portion including silicon and nitrogen; a second portion including silicon and nitrogen, the second portion being in direct contact with the first portion; and a front side metallization in contact with the semiconductor body in the active region. The first portion separates the second portion from the semiconductor body. An average silicon content in the first portion is higher than in the second portion. The front side metallization is interposed between the first portion and the semiconductor body in the active region but not in the edge termination region, and/or the first portion and the second portion are both present in the edge termination region but not in the active region.
    Type: Application
    Filed: May 28, 2021
    Publication date: September 16, 2021
    Inventors: Markus Kahn, Oliver Humbel, Philipp Sebastian Koch, Angelika Koprowski, Christian Maier, Gerhard Schmidt, Juergen Steinbrenner
  • Patent number: 11075134
    Abstract: A semiconductor device includes a semiconductor body and a first portion including silicon and nitrogen. The first portion is in direct contact with the semiconductor body. A second portion including silicon and nitrogen is in direct contact with the first portion. The first portion is between the semiconductor body and the second portion. An average silicon content in the first portion is higher than in the second portion.
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: July 27, 2021
    Assignee: Infineon Technologies AG
    Inventors: Markus Kahn, Oliver Humbel, Philipp Sebastian Koch, Angelika Koprowski, Christian Maier, Gerhard Schmidt, Juergen Steinbrenner
  • Publication number: 20210151391
    Abstract: A high voltage semiconductor device includes a high voltage electrically conductive structure and a step topography at or in the vicinity of the high voltage electrically conductive structure. A layer stack covers the step topography. The layer stack includes an electrically insulating buffer layer, a SiC layer over the electrically insulating buffer layer and a silicon nitride layer over the SiC layer or a nitrided surface region of the SiC layer.
    Type: Application
    Filed: November 2, 2020
    Publication date: May 20, 2021
    Inventors: Angelika Koprowski, Oliver Humbel, Markus Kahn, Carsten Schaeffer
  • Publication number: 20200194585
    Abstract: A power semiconductor device having a power semiconductor transistor configuration includes: a semiconductor body having a front side coupled to a first load terminal structure, a backside coupled to a second load terminal structure, and a lateral chip edge; an active region for conducting a load current in a conducting state; and an edge termination region separating the active region and lateral chip edge. At the front-side, the edge termination region includes a protection region devoid of any metallic structure, unless the metallic structure is electrically shielded from below by a polysilicon layer that extends further towards the lateral chip edge than the metallic structure by a lateral distance of at least 20 ?m. In a blocking state, the protection region accommodates a voltage change of at least 90% of a blocking voltage inside the semiconductor body in a lateral direction from the active region towards the lateral chip edge.
    Type: Application
    Filed: December 13, 2019
    Publication date: June 18, 2020
    Inventors: Oliver Humbel, Josef-Georg Bauer, Jens Brandenburg, Diana Car, Philipp Sebastian Koch, Angelika Koprowski, Sebastian Kremp, Thomas Kurzmann, Erwin Lercher, Holger Ruething
  • Publication number: 20200083133
    Abstract: A semiconductor device includes a semiconductor body and a first portion including silicon and nitrogen. The first portion is in direct contact with the semiconductor body. A second portion including silicon and nitrogen is in direct contact with the first portion. The first portion is between the semiconductor body and the second portion. An average silicon content in the first portion is higher than in the second portion.
    Type: Application
    Filed: August 30, 2019
    Publication date: March 12, 2020
    Inventors: Markus Kahn, Oliver Humbel, Philipp Sebastian Koch, Angelika Koprowski, Christian Maier, Gerhard Schmidt, Juergen Steinbrenner
  • Publication number: 20190333765
    Abstract: A method for manufacturing a high-voltage semiconductor device includes exposing a semiconductor substrate to a plasma to form a protective substance layer on the semiconductor substrate. A semiconductor device includes a semiconductor substrate and a protective substance layer on the semiconductor substrate.
    Type: Application
    Filed: April 26, 2019
    Publication date: October 31, 2019
    Inventors: Markus Kahn, Oliver Humbel, Ravi Keshav Joshi, Philipp Sebastian Koch, Angelika Koprowski, Bernhard Leitl, Christian Maier, Gerhard Schmidt, Juergen Steinbrenner
  • Patent number: 10199291
    Abstract: A semiconductor arrangement is presented.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: February 5, 2019
    Assignee: Infineon Technologies AG
    Inventors: Andreas Riegler, Angelika Koprowski, Mathias Plappert, Frank Wolter
  • Patent number: 9859395
    Abstract: A semiconductor device includes a semiconductor body with a first surface, a contact electrode arranged on the first surface, and a passivation layer on the first surface adjacent the contact electrode. The passivation layer includes a layer stack with an amorphous semi-insulating layer on the first surface, a first nitride layer on the amorphous semi-insulating layer, and a second nitride layer on the first nitride layer.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: January 2, 2018
    Assignee: Infineon Technologies AG
    Inventors: Gerhard Schmidt, Josef-Georg Bauer, Carsten Schaeffer, Oliver Humbel, Angelika Koprowski, Sirinpa Monayakul
  • Publication number: 20170352602
    Abstract: A semiconductor arrangement is presented.
    Type: Application
    Filed: August 22, 2017
    Publication date: December 7, 2017
    Inventors: Andreas Riegler, Angelika Koprowski, Mathias Plappert, Frank Wolter
  • Patent number: 9793184
    Abstract: A semiconductor arrangement is presented.
    Type: Grant
    Filed: March 7, 2016
    Date of Patent: October 17, 2017
    Assignee: Infineon Technologies AG
    Inventors: Andreas Riegler, Angelika Koprowski, Mathias Plappert, Frank Wolter
  • Publication number: 20160268177
    Abstract: A semiconductor arrangement is presented.
    Type: Application
    Filed: March 7, 2016
    Publication date: September 15, 2016
    Inventors: Andreas Riegler, Angelika Koprowski, Mathias Plappert, Frank Wolter
  • Patent number: 9355958
    Abstract: A semiconductor device includes a semiconductor substrate having a first side, a second side opposite the first side, an active area, an outer rim, and an edge termination area arranged between the outer rim and the active area. A metallization structure is arranged on the first side of the semiconductor substrate and comprising at least a first metal layer comprised of a first metallic material and a second metal layer comprised of a second metallic material, wherein the first metallic material is electrochemically more stable than the second metallic material. The first metal layer extends laterally further towards the outer rim than the second metal layer.
    Type: Grant
    Filed: October 31, 2013
    Date of Patent: May 31, 2016
    Assignee: Infineon Technologies AG
    Inventors: Carsten Schäffer, Oliver Humbel, Mathias Plappert, Angelika Koprowski
  • Publication number: 20150262814
    Abstract: A power semiconductor device in accordance with various embodiments may include: a semiconductor body; and a passivation layer disposed over at least a portion of the semiconductor body, wherein the passivation layer includes an organic dielectric material having a water uptake of less than or equal to 0.5 wt % in saturation.
    Type: Application
    Filed: March 13, 2014
    Publication date: September 17, 2015
    Applicant: Infineon Technologies AG
    Inventors: Mathias Plappert, Eric Graetz, Andreas Behrendt, Oliver Humbel, Carsten Schaeffer, Angelika Koprowski
  • Publication number: 20150115449
    Abstract: A semiconductor device includes a semiconductor substrate having a first side, a second side opposite the first side, an active area, an outer rim, and an edge termination area arranged between the outer rim and the active area. A metallization structure is arranged on the first side of the semiconductor substrate and comprising at least a first metal layer comprised of a first metallic material and a second metal layer comprised of a second metallic material, wherein the first metallic material is electrochemically more stable than the second metallic material. The first metal layer extends laterally further towards the outer rim than the second metal layer.
    Type: Application
    Filed: October 31, 2013
    Publication date: April 30, 2015
    Inventors: Carsten Schäffer, Oliver Humbel, Mathias Plappert, Angelika Koprowski
  • Publication number: 20150056788
    Abstract: A semiconductor device includes a semiconductor body with a first surface, a contact electrode arranged on the first surface, and a passivation layer on the first surface adjacent the contact electrode. The passivation layer includes a layer stack with an amorphous semi-insulating layer on the first surface, a first nitride layer on the amorphous semi-insulating layer, and a second nitride layer on the first nitride layer.
    Type: Application
    Filed: September 30, 2014
    Publication date: February 26, 2015
    Inventors: Gerhard Schmidt, Josef-Georg Bauer, Carsten Schaeffer, Oliver Humbel, Angelika Koprowski, Sirinpa Monayakul
  • Patent number: 8884342
    Abstract: A semiconductor device includes a semiconductor body with a first surface, a contact electrode arranged on the first surface, and a passivation layer on the first surface adjacent the contact electrode. The passivation layer includes a layer stack with an amorphous semi-insulating layer on the first surface, a first nitride layer on the amorphous semi-insulating layer, and a second nitride layer on the first nitride layer.
    Type: Grant
    Filed: August 29, 2012
    Date of Patent: November 11, 2014
    Assignee: Infineon Technologies AG
    Inventors: Gerhard Schmidt, Josef-Georg Bauer, Carsten Schaeffer, Oliver Humbel, Angelika Koprowski, Sirinpa Monayakul