Patents by Inventor Anton Mauder

Anton Mauder has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10971435
    Abstract: A semiconductor device includes a bonding pad that includes a base portion having a base layer. A bond wire or clip is bonded to a bonding region of a main surface of the bonding pad. A supplemental structure is in direct contact with the base portion next to the bonding region. A specific heat capacity of the supplemental structure is higher than a specific heat capacity of the base layer.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: April 6, 2021
    Assignee: Infineon Technologies AG
    Inventors: Anton Mauder, Hans-Joachim Schulze
  • Patent number: 10950718
    Abstract: A power semiconductor device has a semiconductor body coupled to first and second load terminal structures, the semiconductor body configured to conduct a load current during a conducting state of the device and having a drift region. The power semiconductor device includes a plurality of cells, each cell having: a first mesa in a first cell portion, the first mesa including: a first port region, and a first channel region, the first mesa exhibiting a total extension of less than 100 nm in a lateral direction, and a second mesa in a second cell portion including: a second port region, and a second channel region. A trench structure includes a control electrode structure configured to control the load current by inversion or accumulation. A guidance zone of the second conductivity type is below the second channel region and is displaced from the first and the second channel regions.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: March 16, 2021
    Assignee: Infineon Technologies Dresden GmbH & Co. KG
    Inventors: Anton Mauder, Thomas Kuenzig, Franz-Josef Niedernostheide, Christian Philipp Sandow
  • Publication number: 20210028119
    Abstract: A power semiconductor device is proposed. The power semiconductor device includes a semiconductor substrate. The power semiconductor device further includes an electrically conducting first layer. At least part of the electrically conducting first layer includes pores. The power semiconductor device further includes an electrically conducting second layer. The electrically conducting second layer is arranged between the semiconductor substrate and the electrically conducting first layer. The pores are at least partially filled with a phase change material.
    Type: Application
    Filed: July 24, 2020
    Publication date: January 28, 2021
    Inventors: Fabian Streb, Anton Mauder, Stephan Pindl, Hans-Joachim Schulze
  • Patent number: 10903322
    Abstract: Embodiments of SiC devices and corresponding methods of manufacture are provided. In some embodiments, the SiC device has shielding regions at the bottom of some gate trenches and non-linear junctions formed with the SiC material at the bottom of other gate trenches. In other embodiments, the SiC device has the shielding regions at the bottom of the gate trenches and arranged in rows which run in a direction transverse to a lengthwise extension of the trenches. In still other embodiments, the SiC device has the shielding regions and the non-linear junctions, and wherein the shielding regions are arranged in rows which run in a direction transverse to a lengthwise extension of the trenches.
    Type: Grant
    Filed: November 16, 2018
    Date of Patent: January 26, 2021
    Assignee: Infineon Technologies AG
    Inventors: Andreas Meiser, Caspar Leendertz, Anton Mauder
  • Patent number: 10903347
    Abstract: A power semiconductor device has a semiconductor body coupled to first and second load terminal structures, the semiconductor body configured to conduct a load current during a conducting state of the device and having a drift region. The power semiconductor device includes a plurality of cells, each cell having: a first mesa in a first cell portion, the first mesa including: a first port region, and a first channel region, the first mesa exhibiting a total extension of less than 100 nm in a lateral direction, and a second mesa in a second cell portion including: a second port region, and a second channel region. A trench structure includes a control electrode structure configured to control the load current by inversion or accumulation. A guidance zone of the second conductivity type is below the second channel region and is displaced from the first and the second channel regions.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: January 26, 2021
    Assignee: Infineon Technologies Dresden GmbH & Co. KG
    Inventors: Anton Mauder, Thomas Kuenzig, Franz-Josef Niedernostheide, Christian Philipp Sandow
  • Patent number: 10903353
    Abstract: In accordance with an embodiment, a method include switching on a transistor device by generating a first conducting channel in a body region by driving a first gate electrode and, before generating the first conducting channel, generating a second conducting channel in the body region by driving a second gate electrode. The first gate electrode is dielectrically insulated from a body region by a first gate dielectric, and the second gate electrode is dielectrically insulated from the body region by a second gate dielectric, arranged adjacent the first gate electrode, and separated from the first gate electrode by a separation layer. The body region is arranged between a source region and a drift region, and wherein the drift region is arranged between body region and a drain region.
    Type: Grant
    Filed: March 5, 2019
    Date of Patent: January 26, 2021
    Assignee: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Markus Bina, Anton Mauder, Jens Barrenscheen
  • Publication number: 20210013310
    Abstract: First dopants are implanted through a larger opening of a first process mask into a silicon carbide body, wherein the larger opening exposes a first surface section of the silicon carbide body. A trench is formed in the silicon carbide body in a second surface section exposed by a smaller opening in a second process mask. The second surface section is a sub-section of the first surface section. The larger opening and the smaller opening are formed self-aligned to each other. At least part of the implanted first dopants form at least one compensation layer portion extending parallel to a trench sidewall.
    Type: Application
    Filed: July 11, 2020
    Publication date: January 14, 2021
    Inventors: Caspar Leendertz, Romain Esteve, Moriz Jelinek, Anton Mauder, Hans-Joachim Schulze, Werner Schustereder
  • Patent number: 10854598
    Abstract: A semiconductor diode with integrated resistor has a semiconductor body with a front surface, a back surface and a diode structure with an anode electrode and a cathode electrode. A resistance layer arranged on the back surface of the semiconductor body provides the integrated resistor.
    Type: Grant
    Filed: February 12, 2015
    Date of Patent: December 1, 2020
    Assignee: Infineon Technologies Austria AG
    Inventors: Anton Mauder, Philipp Seng
  • Publication number: 20200363463
    Abstract: A package-integrated power semiconductor device is provided, which includes at least one power transistor coupled to a current path, a current measurement device and a package. The current measurement device is electrically insulated from and magnetically coupled to the current path. The current path and the current measurement device are arranged so as to enable the current measurement device to sense the magnetic field of a current flowing through the current path. The at least one power transistor, the current measurement device, and the current path are arranged inside the package. Further, a power module assembly including the package-integrated power semiconductor device as well as a method of operating the package-integrated power semiconductor device are provided.
    Type: Application
    Filed: May 11, 2020
    Publication date: November 19, 2020
    Applicant: Infineon Technologies Austria AG
    Inventors: Anton MAUDER, Thomas KIMMER, Wolfgang RABERG, Mitja REBEC
  • Patent number: 10818749
    Abstract: A semiconductor device includes a plurality of drift regions of a plurality of field effect transistor structures arranged in a semiconductor substrate. The plurality of drift regions has a first conductivity type. The semiconductor device further includes a plurality of compensation regions arranged in the semiconductor substrate. The plurality of compensation regions has a second conductivity type. Each drift region of the plurality of drift regions is arranged adjacent to at least one compensation region of the plurality of compensation regions. The semiconductor device further includes a Schottky diode structure or metal-insulation-semiconductor gated diode structure arranged at the semiconductor substrate.
    Type: Grant
    Filed: December 9, 2016
    Date of Patent: October 27, 2020
    Assignee: Infineon Technologies AG
    Inventors: Anton Mauder, Wolfgang Bergner, Jens Peter Konrath, Dethard Peters, Reinhold Schoerner
  • Publication number: 20200303528
    Abstract: An embodiment of a semiconductor device includes a semiconductor mesa in an active device area. The semiconductor mesa includes source regions arranged along a longitudinal direction of the semiconductor mesa and separated from one another along the longitudinal direction. The semiconductor device further includes an electrode trench structure including a dielectric and an electrode. The electrode trench structure adjoins a side of the semiconductor mesa. The semiconductor device further includes an isolation trench structure filled with one or more insulating materials. The isolation trench structure extends through the semiconductor mesa and into or through the electrode trench structure along a first lateral direction.
    Type: Application
    Filed: March 17, 2020
    Publication date: September 24, 2020
    Inventors: Hans-Juergen Thees, Anton Mauder
  • Publication number: 20200259007
    Abstract: A power semiconductor transistor includes: a semiconductor body coupled to a load terminal; a drift region in the semiconductor body and having dopants of a first conductivity type; a first trench extending into the semiconductor body along a vertical direction and including a control electrode electrically insulated from the semiconductor body by an insulator; a second trench extending into the semiconductor body along the vertical direction; a mesa region arranged between the trenches and including a source region electrically connected to the load terminal and a channel region separating the source and drift regions; and a portion of a contiguous plateau region of a second conductivity type arranged in the semiconductor drift region and extending below the trenches and below the channel and source regions, the contiguous plateau region having a plurality of openings aligned below the channel region in a widthwise direction of the channel region.
    Type: Application
    Filed: May 1, 2020
    Publication date: August 13, 2020
    Inventors: Anton Mauder, Franz-Josef Niedernostheide, Christian Philipp Sandow
  • Patent number: 10734484
    Abstract: A semiconductor device includes trench gate structures that extend from a first surface into a silicon carbide portion. A shielding region between a drift zone and the trench gate structures along a vertical direction orthogonal to the first surface forms an auxiliary pn junction with the drift zone. Channel regions and the trench gate structures are successively arranged along a first horizontal direction. The channel regions are arranged between a source region and a current spread region along a second horizontal direction orthogonal to the first horizontal direction. Portions of mesa sections between neighboring trench gate structures fully deplete at a gate voltage within an absolute maximum rating of the semiconductor device.
    Type: Grant
    Filed: March 20, 2019
    Date of Patent: August 4, 2020
    Assignee: Infineon Technologies AG
    Inventors: Andreas Meiser, Anton Mauder, Roland Rupp, Oana Julia Spulber
  • Publication number: 20200243340
    Abstract: Forming a semiconductor arrangement includes providing a first semiconductor layer having a first surface, forming a first plurality of trenches in the first surface of the first semiconductor layer, each of the trenches in the first plurality having first and second sidewalls that extend from the first surface to a bottom of the respective trench, implanting first type dopant atoms into the first and second sidewalls of each of the trenches in the first plurality, implanting second type dopant atoms into the first and second sidewalls of each of the trenches in the first plurality, and annealing the semiconductor arrangement to simultaneously activate the first type dopant atoms and the second type dopant atoms.
    Type: Application
    Filed: April 16, 2020
    Publication date: July 30, 2020
    Inventors: Anton Mauder, Hans Weber, Franz Hirler, Johannes Georg Laven, Hans-Joachim Schulze, Werner Schustereder, Maximilian Treiber, Daniel Tutuc, Andreas Voerckel
  • Patent number: 10707865
    Abstract: Devices and methods are provided where a control terminal resistance of a transistor device is set depending on operating conditions within a specified range of operating conditions.
    Type: Grant
    Filed: November 5, 2018
    Date of Patent: July 7, 2020
    Assignee: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Anton Mauder, Martina Seider-Schmidt, Hans-Joachim Schulze, Oliver Hellmund, Sebastian Schmidt, Peter Irsigler
  • Patent number: 10693456
    Abstract: A method and an electronic circuit are disclosed. The method includes driving a transistor device in an on-state by applying a drive voltage higher than a threshold voltage of the transistor device to a drive input, and adjusting a voltage level of the drive voltage based on a load signal that represents a current level of a load current through the transistor device, wherein the current level is an actual current level or an expected current level of the load current.
    Type: Grant
    Filed: November 16, 2018
    Date of Patent: June 23, 2020
    Assignee: Infineon Technologies AG
    Inventors: Werner Roessler, Anton Mauder
  • Patent number: 10679855
    Abstract: Disclosed is a method that includes forming a plurality of semiconductor arrangements one above the other. In this method, forming each of the plurality of semiconductor arrangements includes: forming a semiconductor layer; forming a plurality of trenches in a first surface of the semiconductor layer; and implanting dopant atoms of at least one of a first type and a second type into at least one of a first sidewall and a second sidewall of each of the plurality of trenches of the semiconductor layer.
    Type: Grant
    Filed: October 12, 2018
    Date of Patent: June 9, 2020
    Assignee: Infineon Technologies Austria AG
    Inventors: Anton Mauder, Hans Weber, Franz Hirler, Johannes Georg Laven, Hans-Joachim Schulze, Werner Schustereder, Maximilian Treiber, Daniel Tutuc, Andreas Voerckel
  • Patent number: 10679857
    Abstract: A semiconductor device and method is disclosed. In one example, the method for forming a semiconductor device includes forming a trench extending from a front side surface of a semiconductor substrate into the semiconductor substrate. The method includes forming of material to be structured inside the trench. Material to be structured is irradiated with a tilted reactive ion beam at a non-orthogonal angle with respect to the front side surface such that an undesired portion of the material to be structured is removed due to the irradiation with the tilted reactive ion beam while an irradiation of another portion of the material to be structured is masked by an edge of the trench.
    Type: Grant
    Filed: June 14, 2019
    Date of Patent: June 9, 2020
    Assignee: Infineon Technologies AG
    Inventors: Johannes Georg Laven, Anton Mauder, Hans-Joachim Schulze, Werner Schustereder
  • Publication number: 20200176568
    Abstract: A semiconductor device includes a silicon carbide semiconductor body including a source region of a first conductivity type, a body region of a second conductivity type, shielding regions of the second conductivity type and compensation regions of the second conductivity type. Trench structures extend from a first surface into the silicon carbide semiconductor body along a vertical direction. Each of the trench structures includes an auxiliary electrode at a bottom of the trench structure and a gate electrode between the auxiliary electrode and the first surface. The auxiliary electrode is electrically insulated from the gate electrode. The auxiliary electrode of each of the trench structures is adjoined by at least one of the shielding regions at the bottom of the trench structure. Each of the shielding regions is adjoined by at least one of the compensation regions at the bottom of the shielding region.
    Type: Application
    Filed: December 2, 2019
    Publication date: June 4, 2020
    Inventors: Andreas Meiser, Caspar Leendertz, Anton Mauder, Roland Rupp
  • Patent number: 10672767
    Abstract: A power semiconductor device includes a semiconductor body coupled to first and second load terminal structures, and first and second cells each configured for controlling a load current and electrically connected to the first load terminal structure and to a drift region. A first mesa in the first cell includes a port region electrically connected to the first load terminal structure, and a first channel region coupled to the drift region. A second mesa included in the second cell includes a port region electrically connected to the first load terminal structure, and a second channel region coupled to the drift region. The mesas are spatially confined in a direction perpendicular to a direction of the load current by an insulation structure, and have a total extension of less than 100 nm in that direction. The first channel region includes an inversion channel. The second channel region includes an accumulation channel.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: June 2, 2020
    Assignee: Infineon Technologies AG
    Inventors: Anton Mauder, Franz-Josef Niedernostheide, Christian Philipp Sandow