Abstract: A MEMS device, a printer and a method of printing is presented including providing a light source producing a modulated beam of light, positioning a mirror with a reflective surface to intercept the modulated beam of light. Allowing the mirror to rotate on a single-axis hinge structure such that the resultant reflected beam is swept in a scan plane and creating an image at an intersection of the scan plane and an image plane. Causing the mirror to rotate about the single-axis hinge structure and to oscillate at a tilt about the single-axis hinge structure, wherein the resultant reflected beam of light forms a lemniscate pattern along the image plane, and wherein the lemniscate pattern has an inner angle between a left sweep segment and a right sweep segment of the image.

Abstract: The present invention provides methods and apparatus for adjusting the resonant frequency, scan velocity or other parameters of a pivotally functional surface such as an oscillating mirror used as the scanning engine of a laser printer or projection display. The selected parameter is adjusted by the application of tensional or compression stress to the torsional hinges of the mirror. According to one embodiment, the appropriate stress is generated by a slice of piezoelectric material bonded to the mirror device itself or to other portions of the support structure of the scanning engine.

Abstract: A mirror device and a method for audio feedback of a MEMS mirror device are presented. The mirror device includes a mirror with a reflective surface located to intercept a modulated beam of light produced by a laser. The mirror oscillates on a hinge axis structure A microphone detects the mirror oscillation information. The mirror device further includes a mirror driver system and a video controller system. The mirror driver system causes the mirror to rotate about the hinge axis structure. The video controller system uses the information received from the microphone, and the information received from the mirror-driver controller, to control the output of the laser.

Abstract: A mirror device and a method for audio feedback of a MEMS mirror device are presented. The mirror device includes a mirror with a reflective surface located to intercept a modulated beam of light produced by a laser. The mirror oscillates on a hinge axis structure. A microphone detects the mirror oscillation information. The mirror device further includes a mirror driver system and a video controller system. The mirror driver system causes the mirror to rotate about the hinge axis structure. The video controller system uses the information received from the microphone, and the information received from the mirror-driver controller, to control the output of the laser.

Abstract: A multilevel mirror plate suitable for use with a torsional hinged mirror assembly is laser milled to provide a more effective truss structure in less time and at a reduced cost.

Abstract: A MEMS device, a printer and a method of printing is presented including providing a light source producing a modulated beam of light, positioning a mirror with a reflective surface to intercept the modulated beam of light. Allowing the mirror to rotate on a single-axis hinge structure such that the resultant reflected beam is swept in a scan plane and creating an image at an intersection of the scan plane and an image plane. Causing the mirror to rotate about the single-axis hinge structure and to oscillate at a tilt about the single-axis hinge structure, wherein the resultant reflected beam of light forms a lemniscate pattern along the image plane, and wherein the lemniscate pattern has an inner angle between a left sweep segment and a right sweep segment of the image.

Abstract: A torsional hinged resonant device having an improved anchor support for providing inertia drive. The area by the anchors connecting the torsional hinges to the support member are thinned to have a reduced cross section. The reduced or thinned area increases flexibility such that less force is required to generate a desired angular rotation.

Abstract: Method and structure for mounting a torsional hinged device, such as a mirror, having a first TCE (thermal coefficient of expansion) on a substrate having a second TCE different than said first TCE. The structure comprising a plurality of compliant support posts between the substrate and the torsional hinged device that deform when the contraction and/or expansion of the torsional hinged device is different than the corresponding contraction and expansion of the substrate.

Abstract: Apparatus and methods for removing jitter and stabilizing the feed back system of a torsional hinged device with minimal changes to the system. The stabilization is accomplished by spatially isolating the pivoting mirror structure from all drive, support and packaging structures to reduce air drag. The mirror structures may be further stabilized by tailoring the drive mechanism and the position of the mechanism to produce substantially pure rotational drive torque on the mirror.

Abstract: System and method for operating four resonant torsional hinged mirrors such as torsional hinged MEMS devices at the same oscillating frequency suitable for use in a color printer requiring four serially arranged line printers.

Abstract: System and method for generating lines of data on a photosensitive medium for use with a display or a printing apparatus. The lines of data are generated by two or more modulated and parallel laser light beams onto a resonant pivoting torsional hinged mirror. The pivoting mirror sweeps the two modulated light beams back and forth across the photosensitive medium to provide bi-directional printing. Relative motion between the photosensitive medium and the plane of the sweeping light beam is provided by moving the photosensitive medium when used with a printing apparatus or by also orthogonally moving the sweeping plane of the light beams when used with a display device.

Abstract: Apparatus and methods for removing jitter and stabilizing the feed back system of a torsional hinged device with minimal changes to the system. The stabilization is accomplished by introducing a selected amount of lateral motion (in addition to the rotational motion) by creating asymmetry in the oscillating device or the drive torque applied to the device.

Abstract: System and method for adjusting an operational parameter of a component that drifts with temperature changes. The system includes a torsional hinged device that oscillates at a resonant frequency, and the resonant frequency of the device drifts or varies with temperature. Differences of a selected parameter between a drive signal and the actual selected parameter are monitored to determine changes in the resonant frequency. An output signal representative of change in the resonant frequency is used to adjust another component that also has a parameter that varies with temperature changes. The adjustment compensates for the temperature drift.

Abstract: The present invention provides a single torsional hinge device, such as a mirror, adapted for use as a pivoting mirror and preferably a pivoting mirror oscillating at a resonant frequency about the single hinge. The single torsional hinge mirror reduces or substantially eliminates stresses on the torsional hinge mirrors caused by mismatched mounting levels of the support structure and/or differences of the coefficient and thermal expansion of materials in the mirror and support structures. The mirror may include a single layer of silicon having a reflective surface or may be a multilayered mirror wherein silicon is used for the torsional hinges and support and silicon or other materials may be used as the reflecting surface.

Abstract: A magnetic drive for providing pivotal motion to a functional surface, such as a mirror. The magnetic drive may be used to drive any torsional hinged device, but is particularly suitable for driving a torsional hinged mirror. According to a first embodiment, a dual axis functional surface uses a first pair of torsional hinges to provide primary movement to the functional surface and a second pair of torsional hinges provides movement orthogonal to the primary movement to allow positioning in two directions. The mass and movement of inertia of the functional surface is reduced by relocating permanent magnet sets to the axis of rotation. The reduced mass and movement of inertia results in a stiff robust hinge having a resonant frequency above about 120 Hz.

Abstract: A system and method for providing a resonant beam sweep about a first axis. A mirror or reflective surface supported by a first pair of torsional hinges is driven into resonant oscillations about the first axis by inertially coupling energy through the first pair of torsional hinges. A light source reflects a beam of light from the mirror such that the oscillating mirror produces a beam sweep across a target area. The resonant beam sweep is moved orthogonally on the target area by a gimbals portion of the mirror pivoting about a second axis according to one embodiment. A second independent mirror provides the orthogonal movement according to a second embodiment.

Abstract: A multilayered torsional hinged scanning mirror including a hinge layer with a mirror attaching member pivotally supported by torsional hinges. A mirror layer is bonded to the front side of the attaching member and a back layer is bonded to the back side of the attaching member. The mirror layer and the back layer are equal in mass and weight to balance the moment of inertia and stresses on the torsional hinges. The back layer may be a permanent magnet if the mirror oscillating drive is a magnetic drive. Alternately, the back layer may be another silicon slice.

Abstract: System and method for establishing and maintaining resonant oscillations of a torsional hinged device such as a pivotally hinged mirror. The system and methods comprise a permanent magnet mounted to the pivoting mirror that interacts with an electromagnetic coil. The magnetic coil is periodically connected and disconnected from a DC power supply in response to a series of drive pulses having a timing and duration such that the magnetic forces generated by the interaction of the permanent magnet and the electromagnetic coil maintains resonant oscillations of the device.

Abstract: A system and method for providing resonant movement about a first axis. A functional surface supported by a first pair of torsional hinges is driven into resonant oscillations about the first axis by inertially coupling energy through the first pair of torsional hinges. The resonant movement may be moved orthogonally on the target area by a gimbals portion of the functional surface pivoting about a second axis according to one embodiment. The resonant oscillation of the functional surface is monitored to detect changes in frequency due to mass changes of the functional surface.

Abstract: A laser printer using a single frequency resonant mirror for providing the beam sweep for printing at a multiplicity of printing speeds. According to a first embodiment, a pair of torsional hinges 54a and 54b provides the resonant beam sweep. The number of line images per unit of measurement is changed as a function of printer speeds to achieve the desired image proportions.